顔写真

PHOTO

Tokou Susumu
都甲　将
Tokou Susumu
都甲　将
Institutional repository
Joining and Welding Research Institute, Assistant Professor

keyword plasma

Institutional repository

Research Areas 1

  1. Energy / Basic plasma science /

Awards 1

  1. 第20回(2022年秋季) 応用物理学会 Poster Award

    竹中 弘祐, 都甲 将, 節原 裕一　応用物理学会　2022/11

Papers 31

  1. Influence of pre-treatment with non-thermal atmospheric pressure plasma on bond strength of TP340 titanium-PEEK direct bonding

    Kosuke Takenaka, Soutaro Nakamoto, Ryosuke Koyari, Akiya Jinda, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    The International Journal of Advanced Manufacturing Technology　Vol. 134　p. 1637-1644　2024/08　Research paper (scientific journal)

  2. Hydrogen-included plasma-assisted reactive sputtering for conductivity control of ultra-wide bandgap amorphous gallium oxide

    Kosuke Takenaka, Hibiki Komatsu, Taichi Sagano, Keisuke Ide, Susumu Toko, Takayoshi Katase, Toshio Kamiya, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 63　No. 4　p. 04SP65/1-04SP65/5　2024/04　Research paper (scientific journal)

  3. Stability and gap states of a-IGZO TFTs fabricated with plasma-assisted reactive process: Impact of sputtering configuration and post-deposition annealing

    Kosuke Takenaka, Shota Nunomura, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Hitoshi Tampo, Yuichi Setsuhara

    Thin Solid Films　Vol. 790　p. 140203/1-140203/8　2024/02　Research paper (scientific journal)

  4. Improving bonding strength by non-thermal atmospheric pressure plasma-assisted technology for A5052/PEEK direct joining

    Kosuke Takenaka, Akiya Jinda, Soutaro Nakamoto, Ryosuke Koyari, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    The International Journal of Advanced Manufacturing Technology　Vol. 130　p. 903-913　2024/01　Research paper (scientific journal)

  5. Influence of pre-treatment using non-thermal atmospheric pressure plasma jet on aluminum alloy A1050 to PEEK direct joining with hot-pressing process

    Kosuke Takenaka, Akiya Jinda, Soutaro Nakamoto, Ryosuke Koyari, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    The International Journal of Advanced Manufacturing Technology　Vol. 130　p. 1925-1933　2024/01　Research paper (scientific journal)

  6. Improving the efficiency of CO2 methanation using a combination of plasma and molecular sieves

    Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Results in Surfaces and Interfaces　Vol. In Press　2024/01　Research paper (scientific journal)

  7. Direct bonding of stainless steel and PEEK using non-thermal atmospheric pressure plasma-assisted joining technology

    Kosuke Takenaka, Akiya Jinda, Soutaro Nakamoto, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    Journal of Manufacturing Processes　Vol. 105　p. 276-281　2023/11　Research paper (scientific journal)

    Publisher: Elsevier BV

  8. Fundamental Study of Carbon Dioxide Re duction Reaction with Plasma Catalysis

    Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Journal of Smart Processing　Vol. 13　No. 1　p. 31-36　2023/10　Research paper (scientific journal)

  9. Analysis of residual oxygen during a-IGZO thin film formation by plasma-assisted reactive sputtering using a stable isotope

    Kosuke Takenaka, Masashi Endo, Hiroyuki Hirayama, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Vacuum　Vol. 215　p. 112227-112227　2023/09　Research paper (scientific journal)

    Publisher: Elsevier BV

  10. Improving the efficiency of Sabatier reaction through H2O removal with low-pressure plasma catalysis

    Taiki Hasegawa, Susumu Toko, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

    Japanese Journal of Applied Physics　Vol. 62　No. SL　p. SL1028-SL1028　2023/08/16　Research paper (scientific journal)

    Publisher: IOP Publishing

  11. Contribution of active species generated in plasma to CO2 methanation

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　No. SL　p. SL1023-SL1023　2023/07/03　Research paper (scientific journal)

    Publisher: IOP Publishing

  12. Analysis of oxygen-based species introduced during plasma assisted reactive processing of a-IGZO films

    Kosuke Takenaka, Hiroyuki Hirayama, Masashi Endo, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　No. SL　p. SL1018-SL1018　2023/06/26　Research paper (scientific journal)

    Publisher: IOP Publishing

  13. Optical emission spectroscopy study in CO2 methanation with plasma

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　No. SI　p. SI1008-SI1008　2023/04/19　Research paper (scientific journal)

    Publisher: IOP Publishing

  14. Plasma processing technique by combination of plasma-assisted reactive sputtering and plasma annealing for uniform electrical characteristics of InGaZnO thin film transistors formed on large-area substrates

    Kosuke Takenaka, Tomoki Yoshitani, Masashi Endo, Hiroyuki Hirayama, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　p. SI1005/1-SI1005/9　2023/03　Research paper (scientific journal)

  15. Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis

    Susumu Toko, Masashi Ideguchi, Taiki Haseagawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 61　p. SI1002/1-SI1002/6　2022/04　Research paper (scientific journal)

  16. Development of a non-thermal atmospheric pressure plasma-assisted technology for the direct joining of metals with dissimilar materials

    Kosuke Takenaka, Rikuro Machida, Tetsuya Bono, Akiya Jinda, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    Journal of Manufacturing Processes　Vol. 75　p. 664-669　2022/01　Research paper (scientific journal)

  17. Spatiotemporal optical emission spectroscopy to estimate electron density and temperature of plasmas in solution

    Kenichi Inoue, Shion Takahashi, Noritaka Sakakibara, Susumu Toko, Tsuyohito Ito, Kazuo Terashima

    Journal of Physics D: Applied Physics　Vol. 53　No. 23　p. 235202-235202　2020/04/03　Research paper (scientific journal)

    Publisher: IOP Publishing

  18. Growing low-temperature, high-quality silicon-dioxide films by neutral-beam enhanced atomic-layer deposition

    Hua-Hsuan Chen, Susumu Toko, Daisuke Ohori, Takuya Ozaki, Mitsuya Utsuno, Tomohiro Kubota, Toshihisa Nozawa, Seiji Samukawa

    Journal of Physics D: Applied Physics　Vol. 53　No. 1　p. 015204-015204　2020/01/02　Research paper (scientific journal)

    Publisher: {IOP} Publishing

  19. Low-Pressure Methanation of CO2 Using a Plasma–Catalyst System

    Susumu Toko, Satoshi Tanida, Kazunori Koga, Masaharu Shiratani

    Science of Advanced Materials　Vol. 10　No. 8　p. 1087-1090　2018/08/01　Research paper (scientific journal)

    Publisher: American Scientific Publishers

  20. Dependence of CO2 Conversion to CH4 on the CO2 Flow Rate in a Helicon Discharge Plasma

    Science of Advanced Materials　2018/05/01　Research paper (scientific journal)

  21. Effects of gas velocity on deposition rate and amount of cluster incorporation into a-Si:H films fabricated by SiH<inf>4</inf> plasma chemical vapor deposition

    Takashi Kojima, Susumu Toko, Kazuma Tanaka, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    Plasma and Fusion Research　Vol. 13　2018　Research paper (scientific journal)

  22. Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH 4 plasma chemical vapor deposition

    Surface and Coatings Technology　2017/10　Research paper (scientific journal)

  23. Optical Bandgap Energy of Si Nanoparticle Composite Films Deposited by a Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method

    Susumu Toko, Yoshinori Kanemitsu, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY　Vol. 16　No. 10　p. 10753-10757　2016/10　Research paper (scientific journal)

  24. Correlation between SiH2/SiH and light-induced degradation of p-i-n hydrogenated amorphous silicon solar cells

    Kimitaka Keya, Takashi Kojima, Yoshihiro Torigoe, Susumu Toko, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 55　No. 7　2016/07　Research paper (scientific journal)

  25. Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas

    S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

    Proc. 68th GEC/9th ICRP/33rd SPP609　2015/09/01

  26. Raman spectroscopy of PIN hydrogenated amorphous silicon solar cells

    K. Keya, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

    Proc. 68th GEC/9th ICRP/33rd SPP609　2015/09/01

  27. Effects of electrode structure on characteristics of multi-hollow discharges

    Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    Proc. 68th GEC/9th ICRP/33rd SPP609　2015/09/01

  28. Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD with amplitude modulation

    S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Proc. 8th Int. Conf. Reactive Plasmas　2014/01/01

  29. Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a cluster-eliminating filter

    Y. Hashimoto, S. Toko, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Proc. 8th Int. Conf. Reactive Plasmas　2014/01/01

  30. Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films using multi-Hollow discharge plasma CVD method

    Y. Torigoe, Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    Proc. 8th Int. Conf. Reactive Plasmas　2014/01/01

  31. Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    JPS Conf. Proc　Vol. 1　2014/01/01

Misc. 77

  1. プラズマ/触媒/ゼオライト混合系を利用したCO2メタネーションの促進

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2025年第72回応用物理学会春季学術講演会, 東京理科大学 野田キャンパス＆オンライン　2025/03/14　Research paper, summary (national, other academic conference)

  2. 金属と有機材料の接着接合における大気圧非平衡プラズマジェット処理の効果

    竹中 弘祐, 小鑓 亮輔, 重森 俊祥, 都甲 将, 内田 儀一郎, 節原 裕一

    2025年第72回応用物理学会春季学術講演会, 東京理科大学 野田キャンパス＆オンライン　2025/03/14　Research paper, summary (national, other academic conference)

  3. Adhesive Bonding of SPFC980Y and Polypropylene/Polyethylene via Pre-Treatment by Atmospheric Pressure Non-Equilibrium Plasma Jet

    Kosuke Takenaka, Ryosuke Kyari, Shunsho Shigemori, Giichiro Uchida, Yuichi Setsuhara

    17th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2025) / 18th International Conference on Plasma Nano Technology & Science(IC-PLANTS2025), Chubu University, Aichi, Japan　2025/03/03　Research paper, summary (international conference)

  4. プラズマ触媒作用による低温下でのCO2還元反応促進技術の創生

    Yuichi Setsuhara, Kosuke Takenaka, Susumu Toko, Masakuni Ozawa

    DEJIMA 令和6年度公開討論会, 東京都 東京科学大学すずかけ台キャンパス　2025/03/02　Research paper, summary (national, other academic conference)

  5. 金属-ポリマー直接接合における大気圧プラズマジェットによる表面処理の効果

    竹中 弘祐, 小鑓 亮輔, 重森 俊祥, 陣田 尭哉, 都甲 将, 内田 儀一郎, 節原 裕一

    第42回プラズマプロセシング研究会, J:COMホルトホール大分　2025/01/28　Research paper, summary (national, other academic conference)

  6. Plasma-catalyst-zeolite system for high-efficiency methanation

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    第25回微粒子プラズマ研究会 (WFPP25), 岐阜県 核融合科学研究所　2025/01/16　Research paper, summary (national, other academic conference)

  7. Effect of Molecular Sieve Type on Methanation Reaction

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    第34回 日本MRS年次大会, 横浜市開港記念会館 他　2024/12/16　Research paper, summary (national, other academic conference)

  8. amorphous In-Ga-Zn-Ox (a-IGZO) gap states and TFT stability

    S. Nunomura, K. Takenaka, Y. Hayashi, H. Komatsu, S. Toko, H. Tampo, Y. Setsuhara

    第34回 日本MRS年次大会, 横浜市開港記念会館 他　2024/12/16　Research paper, summary (national, other academic conference)

  9. Evaluation of Stability and Electronic Gap States of Amorphous In-Ga-Zn-Ox Thin Film Transistors

    K. Takenaka, S. Nunomura, Y. Hayashi, H. Komatsu, S. Toko, H. Tampo, Y. Setsuhara

    The 45th International Symposium on Dry Process (DPS2024), Chitose Civic Culture Center, Hokkaido, Japan　2024/11/14　Research paper, summary (international conference)

  10. プラズマとモレキュラーシーブの併用による低温下高効率メタネーションの実現

    都甲 将, 奥村 賢直, 鎌滝 邦弘, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第40回九州・山口プラズマ研究会, 長崎県 五島コンカナ王国　2024/11/02　Research paper, summary (national, other academic conference)

  11. Plasma-assisted methanation with molecular sieves

    Susumu Toko Kosuke Takenaka, Yuichi Setsuhara, and Masakuni Ozawa

    The 4th International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-4), Kokukaikan Business Forum, Tokyo, Japan　2024/10/03　Research paper, summary (international conference)

  12. Low-temperature Formation of High-Quality Amorphous Oxide Films via Plasma-assisted Reactive Sputtering

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara, Keisuke Ide, Toshio Kamiya

    The 4th International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-4), Kokukaikan Business Forum, Tokyo, Japan　2024/10/03　Research paper, summary (international conference)

  13. プラズマ支援メタネーションにおけるモレキュラーシーブの役割

    都甲 将、奥村 賢直、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2024年第85回応用物理学会秋季学術講演会, 朱鷺メッセ他2会場＆ハイブリッド開催　2024/09　Research paper, summary (national, other academic conference)

  14. プラズマを用いたCO2のメタン化におけるモレキュラーシーブの活用

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2024年第71回応用物理学会春季学術講演会, 東京都市大学世田谷キャンパス＆オンライン　2024/03　Research paper, summary (national, other academic conference)

  15. プラズマ支援反応性パルスDCスパッタリングを用いたa-IGZO薄膜の特性制御

    竹中 弘祐、上田 拓海、都甲 将、江部 明憲、節原 裕一

    2024年第71回応用物理学会春季学術講演会, 東京都市大学世田谷キャンパス＆オンライン　2024/03　Research paper, summary (national, other academic conference)

  16. Formation of amorphous gallium oxide thin film transistors using plasma-assisted reactive processes

    Kosuke Takenaka, Hibiki Komatsu, Kazuya Ota, Susumu Toko, Keisuke Ide, Toshio Kamiya, Yuichi Setsuhara

    16th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2024) / 17th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2024), 13th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-13), Nagoya University, Nagoya, Japan　2024/03　Research paper, summary (international conference)

  17. Plasma-assisted mist chemical vapor deposition for formation of 3D nanostructured oxide thin films

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara

    16th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2024) / 17th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2024), 13th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-13), Nagoya University, Nagoya, Japan　2024/03　Research paper, summary (international conference)

  18. 酸素原子の除去によるプラズマ触媒作用を用いたCO2還元反応の効率化

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第41回プラズマプロセシング研究会, 東京工業大学大岡山キャンパス　2024/01　Research paper, summary (national, other academic conference)

  19. 大気圧非平衡プラズマジェットを用いた表面処理による金属-ポリマー直接接合

    竹中 弘祐, 小鑓 亮輔, 重森 俊祥, 陣田 尭哉, 中本 壮太郞, 都甲 将, 内田 儀一郎, 節原 裕一

    第41回プラズマプロセシング研究会, 東京工業大学大岡山キャンパス　2024/01　Research paper, summary (national, other academic conference)

  20. Improved efficiency of CO2 reduction reaction using plasma catalysis by removal of oxygen atoms

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    41th Symposium on Plasma Processing, Tokyo Institute of Technology　2024/01　Research paper, summary (international conference)

  21. Catalytic ability of Cu and Ni in methanation with plasma catalysis

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    MRM2023/IUMRS-ICA2023, Kyoto International Conference Center, Kyoto, Japan　2023/12　Research paper, summary (international conference)

  22. Non-thermal atmospheric pressure plasma technology for advanced dissimilar-materials joining: enhancing metal joining with organic materials

    K. Takenaka, R. Machida, T. Bono, A. Jinda, S. Nakamoto, R. Koyari, S. Toko, G. Uchida, Y. Setsuhara

    MRM2023/IUMRS-ICA2023, Kyoto International Conference Center, Kyoto, Japan　2023/12　Research paper, summary (international conference)

  23. Experimental study on the effect of plasma-catalyst interaction on methanation reaction

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    97th IUVSTA Workshop on plasma-assisted conversion of gases for a sustainable future, Cerklje na Gorenjskem, Slovenia　2023/12　Research paper, summary (international conference)

  24. Catalytic ability of Cu and Ni in methanation with plasma catalysis

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    MRM2023/IUMRS-ICA2023, Kyoto International Conference Center　2023/12　Research paper, summary (international conference)

  25. Fabrication of amorphous gallium oxide thin film transistors by plasma-assisted reactive processes

    K. Takenaka, T. Komatsu, S. Toko, Y. Setsuhara

    The 44th International Symposium on Dry Process (DPS2023), Winc Aichi, Nagoya, Japan　2023/11　Research paper, summary (international conference)

  26. Synergistic Effects of Molecular Sieves and Plasma for CO2 Methanation

    Yuichi Setsuhara, Susumu Toko, Kosuke Takenaka, Masatomo Hattori

    The 3rd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-3), International Conference Center, Waseda University, Tokyo, Japan　2023/10　Research paper, summary (international conference)

  27. Development of Plasma Processing Technology for Low-temperature Formation of High Quality Functional Thin Films

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara, Keisuke Ide, Toshio Kamiya

    The 3rd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-3), International Conference Center, Waseda University, Tokyo, Japan　2023/10　Research paper, summary (international conference)

  28. プラズマを用いたCO2の水素還元における選択性の制御

    都甲 将、奥村 賢直、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2023年第84回応用物理学会秋季学術講演会, 熊本城ホール他3会場＆ハイブリッド開催　2023/09　Research paper, summary (national, other academic conference)

  29. 大気圧非平衡RFプラズマジェット照射が金属-有機材料異材直接接合に与える影響

    竹中 弘祐、中本 壮太郞、小鑓 亮輔、都甲 将、内田 儀一郎、節原 裕一

    2023年第84回応用物理学会秋季学術講演会, 熊本城ホール他3会場＆ハイブリッド開催　2023/09　Research paper, summary (national, other academic conference)

  30. プラズマを用いた CO2 の水素還元における選択性の制御

    都甲 将, 奥村 賢直, 鎌滝 邦弘, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2023年度第84回応用物理学会秋季学術講演会, オンライン　2023/09　Research paper, summary (national, other academic conference)

  31. Formation of Ga-based amorphous oxide thin film transistors using plasma-assisted reactive processes

    Kosuke Takenaka, Hibiki Komatsu, Susumu, Toko, Akinori Ebe, Yuichi Setsuhara

    25th International Symposium on Plasma Chemistry（ISPC25）, Miyako Messe、Kyoto, Japan　2023/05　Research paper, summary (international conference)

  32. 大気圧非平衡プラズマジェットを用いた有機材料－金属異材接合技術の開発

    竹中 弘祐, 中本 壮太郞, 小鑓 亮輔, 都甲 将, 内田 儀一郎, 節原 裕一

    2023年第70回応用物理学会春季学術講演会, 上智大学四谷キャンパス＋オンライン　2023/03　Research paper, summary (national, other academic conference)

  33. プラズマ支援反応性スパッタリングによるアモルファス酸化ガリウム薄膜形成

    竹中 弘祐, 小松 響, 藤村 知輝, 都甲 将, 井手 啓介, 江部 明憲, 神谷 利夫, 節原 裕一

    2023年第70回応用物理学会春季学術講演会, 上智大学四谷キャンパス＋オンライン　2023/03　Research paper, summary (national, other academic conference)

  34. Droplet-Vaporization Behavior Analysis in Plasma for Fabrication of 3D Nanostructured Zinc Oxide Thin Films by Plasma-assisted Mist CVD

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara

    15th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2023) / 16th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2023), Gifu University, Gifu, Japan　2023/03　Research paper, summary (international conference)

  35. Development of Plasma Assisted Reactive Process for Uniform Formation of High Mobility Oxide Semiconductor Thin Film Transistors over Large Areas

    Kosuke Takenaka, Tomoki Yoshitani, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    7th International Conference on Advances in Functional Materials (AFM2022), Centennial Hall of Kyushu University. Kyushu, Japan　2023/01　Research paper, summary (international conference)

  36. The effect of plasma off time on CO2 methanation using pulsed discharge plasma

    T. Hasegawa, D. Yamashita, S. Toko, K. Kamataki, K. Koga, M. Shiratani

    AFM2023, 福岡県福岡市 九大医学部 百年記念講堂　2023/01　Research paper, summary (international conference)

  37. Estimation of the excited CO density in plasma contributing to CO2 methanation by optical emission spectroscopy

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    AFM2023, 福岡県福岡市 九大医学部 百年記念講堂　2023/01　Research paper, summary (international conference)

  38. Improvement of energy efficiency for CO2 decomposition using molecular capture catalysts

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    第32回日本MRS年次大会 (MRS-J2021), 産業貿易センター（横浜）　2022/12　Research paper, summary (national, other academic conference)

  39. Effects of water absorbent materials on CO2 methanation using plasma catalyst

    T. Hasegawa, D. Yamashita, S. Toko, K. Kamataki, K. Koga, M. Shiratani

    MRS-J 2022, 相模原　2022/12　Research paper, summary (international conference)

  40. Relationship between vibrational temperature and CO2 methanation with plasma catalysis

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    MRS-J 2022, 神奈川県横浜市 産業貿易センタービル　2022/12　Research paper, summary (international conference)

  41. プラズマ支援反応性プロセスを用いた機能性薄膜の低温形成

    竹中 弘祐, 都甲 将, 内田 儀一郎, 江部 明徳、節原 裕一

    第38回九州・山口プラズマ研究会, 指宿白水館　2022/11　Research paper, summary (national, other academic conference)

  42. Effect of H2O capture in methanation with plasma catalysis

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    DPS2022, オンライン　2022/11　Research paper, summary (international conference)

  43. プラズマ触媒作用によるメタネーションにおけるH2O吸着の効果

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    第38回九州山口プラズマ研究会, 鹿児島県指宿市 指宿白水館　2022/11　Research paper, summary (national, other academic conference)

  44. Development Plasma Processing Technology for Low-temperature Formation of High Quality Functional Thin Films

    Yuichi Setsuhara, Kosuke Takenaka, Susumu Toko, Keisuke Ide, Toshio Kamiya

    The 6th International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2022) & The 2nd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-2), Senri Life Science Center, Osaka, Japan　2022/10　Research paper, summary (international conference)

  45. Development of Virus Inactivation Technology with Integration of Atmospheric Pressure and Low Temperature Plasma Generation Control and Environmental Catalyst Technology

    Yuichi Setsuhara, Kosuke Takenaka, Susumu Toko, and Masatomo Hattori

    The 6th International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2022) & The 2nd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-2), Senri Life Science Center, Osaka, Japan　2022/10　Research paper, summary (international conference)

  46. Relationship between vibrational temperature and CO2 methanation with plasma catalysis

    S. Toko, T. Haseagawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    11th International Conference on Reactive Plasmas (ICRP-11)/2022 Gaseous Electronics Conference (GEC 2022)/40th Symposium on Plasma Processing (SPP-40)/35th Symposium on Plasma Science for Materials (SPSM35), Sendai International Center, Sendai, Japan　2022/10　Research paper, summary (international conference)

  47. Low-Temperature Formation of High-Mobility IGZO Thin Films Transistors Fabricated with Plasma-Assisted Reactive Processes

    Yuichi Setsuhara, Hibiki Komatsu, Susumu Toko, Kosuke Takenaka, Akinori Ebe

    11th International Conference on Reactive Plasmas (ICRP-11)/2022 Gaseous Electronics Conference (GEC 2022)/40th Symposium on Plasma Processing (SPP-40)/35th Symposium on Plasma Science for Materials (SPSM35), Sendai International Center, Sendai, Japan　2022/10　Research paper, summary (international conference)

  48. Relationship between vibrational temperature and CO2 methanation with plasma catalysis

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    11th International Conference on Reactive Plasmas/ 2022 Gaseous Electronics Conference/ 40 th Symposium on Plasma Processing/ 35th Symposium on Plasma Science for Materials, オンライン　2022/10　Research paper, summary (international conference)

  49. プラズマ触媒作用を用いたCO2メタネーションのためのゼロ次元シミュレーション

    都甲 将, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2022年第83回応用物理学会秋季学術講演会, 東北大学川内キャンパス＆ハイブリッド開催　2022/09　Research paper, summary (national, other academic conference)

  50. 反応性プラズマプロセスを用いた高性能IGZO薄膜トランジスタの低温形成

    竹中 弘祐, 林 祐仁, 都甲 将, 江部 明憲, 節原 裕一

    2022年第83回応用物理学会秋季学術講演会, 東北大学川内キャンパス＆ハイブリッド開催　2022/09　Research paper, summary (national, other academic conference)

  51. プラズマ支援ミストCVDによる３次元ナノ構造酸化亜鉛薄膜形成に向けたプラズマ中の液滴蒸発挙動の解析

    竹中 弘祐, 都甲 将, 節原 裕一

    2022年第83回応用物理学会秋季学術講演会, 東北大学川内キャンパス＆ハイブリッド開催　2022/09　Research paper, summary (national, other academic conference)

  52. プラズマ触媒作用を用いたCO2メタネーションのためのゼロ次元シミュレーション

    都甲 将, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第83回秋季応用物理学会, オンライン　2022/09　Research paper, summary (national, other academic conference)

  53. プラズマ触媒作用を用いた低温下メタネーションプロセスの開発

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2022年度 放電学会シンポジウム 「カーボンニュートラルの研究動向」, オンライン　2022/08　Research paper, summary (national, other academic conference)

  54. プラズマ触媒作用を用いたCO2メタネーションにおける振動回転励起CO分子の役割

    都甲 将, 出口 雅志, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第69回春季応用物理学会, オンライン　2022/03　Research paper, summary (national, other academic conference)

  55. パルス放電プラズマを用いたCO2メタン化に対する放電休止時間の効果

    長谷川 大樹, 出口 雅史, 山下 大輔, 都甲 将, 鎌滝 晋礼, 古閑 一憲, 白谷 正治

    2022年第69回応用物理学会春季学術講演会, 相模原　2022/03　Research paper, summary (national, other academic conference)

  56. プラズマ触媒作用を用いたCO2メタネーションにおける振動回転励起CO分子の役割

    都甲 将、出口 雅志、長谷川 大樹、奥村 賢直、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2022年第69回応用物理学会春季学術講演会, ハイブリッド開催(青山学院大学相模原キャンパス＋オンライン)　2022/03　Research paper, summary (national, other academic conference)

  57. 高移動度IGZO薄膜トランジスタの大面積均一形成に向けたプラズマ支援反応性プロセスの開発

    竹中 弘祐、吉谷 友希、都甲 将、内田 儀一郎、江部 明憲、節原 裕一

    2022年第69回応用物理学会春季学術講演会, ハイブリッド開催(青山学院大学相模原キャンパス＋オンライン)　2022/03　Research paper, summary (national, other academic conference)

  58. 反応性プラズマプロセスによる酸化物半導体薄膜形成

    竹中 弘祐, 都甲 将, 節原 裕一

    2021 (令和3)年度第3回表面改質技術研究委員会, Web会議　2022/02　Research paper, summary (national, other academic conference)

  59. プラズマ触媒を用いたCO2メタン化のためのプラズマシミュレーション

    都甲 将, 出口 雅志, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    The 39-th Symposium on Plasma Processing/ The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), オンライン　2022/01　Research paper, summary (international conference)

  60. 大気圧RFプラズマジェットを用いた異材接合プロセスの開発

    陣田 尭哉, 中本 壮太郞, 都甲 将, 竹中 弘祐, 内田 儀一郎, 節原 裕一

    The 39-th Symposium on Plasma Processing/The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), Web会議　2022/01　Research paper, summary (international conference)

  61. プラズマ支援反応プロセスで作成されたIGZO薄膜トランジスタの特性評価

    林 祐仁, 小松 響, 都甲 将, 竹中 弘祐, 江部 明憲, 節原 裕一

    The 39-th Symposium on Plasma Processing/The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), Web会議　2022/01　Research paper, summary (international conference)

  62. プラズマ触媒を用いたCO2メタン化のためのプラズマシミュレーション

    都甲 将、出口 雅志、長谷川 大樹、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    The 39-th Symposium on Plasma Processing/The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), Web会議　2022/01　Research paper, summary (international conference)

  63. Effects of pulse rf discharge on carbon dioxide methanation in plasma catalytic method

    Masashi Ideguchi, Taiki Hasegawa, Daisuke Yamashita, Susumu Toko, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    Materials Research Meeting 2021 (MRM2021), Web会議　2021/12　Research paper, summary (international conference)

  64. Kinetic study of effects of discharge power on CO2 methanation using a plasma catalyst

    Taiki Hasegawa, Masashi Ideguchi, Daisuke Yamashita, Susumu Toko, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

    Materials Research Meeting 2021 (MRM2021), Web会議　2021/12　Research paper, summary (international conference)

  65. Improvement of energy cost in methanation of CO2 with plasma catalysis

    S. Toko, M. Ideguchi, T. Haseagawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    Materials Research Meeting 2021 (MRM2021), Web会議　2021/12　Research paper, summary (international conference)

  66. Energy utilization efficiency in CO2 methanation with plasma catalysis

    S. Toko, M. Ideguchi, T. Hasegawa, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    The 42nd International Symposium on Dry Process (DPS2021), Web会議　2021/11　Research paper, summary (international conference)

  67. Effect of process conditions on characteristics of InGaZnO thin-film transistors fabricated with plasma-assisted reactive process

    K. Takenaka, H. Hirayama, Y. Hayashi, H. Komatsu, G. Uchida, A. Ebe, Y. Setsuhara

    The 42nd International Symposium on Dry Process (DPS2021), Web会議　2021/11　Research paper, summary (international conference)

  68. Plasma-assisted reactive processes for low-temperature formation of functional materials

    Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    5th Asia Pacific Conference on Plasma Physics (AAPPS-DPP2021), Web会議　2021/10　Research paper, summary (international conference)

  69. プラズマ触媒反応において触媒が二酸化炭素リサイクリングのエネルギーコストに与える影響

    都甲 将, 出口 雅志, 長谷川 大樹, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第82回秋季応用物理学会, オンライン　2021/09　Research paper, summary (national, other academic conference)

  70. Relation between CH? yield and CO emission intensity gradient in plasma assisted CO? methanation

    Masashi Ideguchi, Taiki Hasegawa, Daisuke Yamashita, Susumu Toko, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    Plasma Thin Film International Union Meeting 2021 (PLATHIUM2021), Web会議　2021/09　Research paper, summary (international conference)

  71. Plasma-Enhanced Reactive Processes for Low-Temperature Fabrication of High-Mobility Oxide Thin Film Transistors

    Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    INTERFINISH2020 20th World Congress, Web会議　2021/09　Research paper, summary (international conference)

  72. プラズマ触媒反応において触媒が二酸化炭素リサイクリングのエネルギーコストに与える影響

    都甲 将、出口 雅志、長谷川 大樹、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2021年第82回応用物理学会秋季学術講演会, Web会議　2021/09　Research paper, summary (national, other academic conference)

  73. プラズマ中の反応種生成がCO2のメタン化へ与える影響

    都甲 将

    第68回春季応用物理学会, オンライン　2021/03　Research paper, summary (national, other academic conference)

  74. Effects of gas flow rate on deposition rate and number of Si clusters incorporated into a-Si:H films

    Susumu Toko, Yoshihiro Torigoe, Kimitaka Keya, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 55　No. 1　2016/01

  75. Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability

    Susumu Toko, Yoshihiro Torigoe, Weiting Chen, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    THIN SOLID FILMS　Vol. 587　p. 126-131　2015/07

  76. Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD

    S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    26TH SYMPOSIUM ON PLASMA SCIENCES FOR MATERIALS (SPSM26)　Vol. 518　2014

  77. Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

    Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    26TH SYMPOSIUM ON PLASMA SCIENCES FOR MATERIALS (SPSM26)　Vol. 518　2014

Presentations 10

  1. Plasma-catalyst-zeolite system for high efficiency methanation

    Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    25th Workshop on Fine Particle Plasmas (WFPP25) and 45th Workshop on Plasma Frontiers　2025/01/16

  2. プラズマ支援ミストCVDを用いた機能性薄膜形成

    竹中 弘祐、都甲 将、節原 裕一

    2024年度 第 2 回表面改質技術研究委員会　2024/10/31

  3. Experimental study on the effect of plasma-catalyst interaction on methanation reaction

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    97th IUVSTA Workshop on plasma-assisted conversion of gases for a sustainable future　2023/12

  4. Plasma-assisted Mist CVD for Formation of 3D Nanostructured Zinc Oxide Thin Films

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara

    Joint Conference of Global Plasma Forum and 24th Workshop on Fine Particle Plasmas (WFPP24)　2023/12

  5. プラズマ触媒作用を用いたCO2メタネーション

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2022年度第3回表面改質技術研究委員会　2023/02

  6. Low-temperature formation of functional oxide materials with plasma-assisted reactive processes

    K. Takenaka, S. Toko, Y. Setsuhara

    第32回日本MRS年次大会 (MRS-J2021)　2022/12

  7. 大気圧非平衡高周波プラズマジェットの開発と有機ー金属異種材料接合への応用

    節原 裕一、町田 陸朗、坊野 哲也、陣田 尭哉、都甲 将、竹中 弘祐、内田 儀一郎

    一般社団法人 溶接学会 第１３９回マイクロ接合研究委員会　2022/09

  8. 反応性プラズマプロセスによる酸化物半導体薄膜形成

    竹中 弘祐, 都甲 将, 節原 裕一

    2021 (令和3)年度第3回表面改質技術研究委員会　2022/02

  9. The role of plasma and catalyst in methanation of CO2 with plasma catalysis

    S. Toko, M. Ideguchi, T. Haseagawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    5th Asia Pacific Conf. on Plasma Physics (AAPPS-DPP2021)　2021/09

  10. Plasma-assisted reactive processes for low-temperature formation of functional materials

    Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    5th Asia Pacific Conference on Plasma Physics (AAPPS-DPP2021)　2021/09

Institutional Repository 1

Content Published in the University of Osaka Institutional Repository (OUKA)

  1. Influence of pre-treatment with non-thermal atmospheric pressure plasma on bond strength of TP340 titanium-PEEK direct bonding

    Takenaka Kosuke, Nakamoto Soutaro, Koyari Ryosuke, Jinda Akiya, Toko Susumu, Uchida Giichiro, Setsuhara Yuichi

    International Journal of Advanced Manufacturing Technology　Vol. 134　No. 3-4　p. 1637-1644　2024/09/01