Self-healing kinetics in monolayer graphene following very low energy ion irradiation

P. Vinchon, S. Hamaguchi, S. Roorda, F. Schiettekatte, L. Stafford

Carbon　Vol. 233　p. 119852-119852　2025/02　Research paper (scientific journal)

Ion and Plasma Interaction with Materials

Satoshi Hamaguchi

Springer Series on Atomic, Optical, and Plasma Physics　p. 119-133　2025　Part of collection (book)

Etching and fluorination of yttrium oxide (Y2O3) irradiated with fluorine ions or radicals

Hojun Kang, Tomoko Ito, Junghwan Um, Hikaru Kokura, Sungil Cho, Hyunjung Park, Kazuhiro Karahashi, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　2025/01/01　Research paper (scientific journal)

3D track extraction from a fluorescent nuclear track detector via machine learning and an application to diagnostics of laser-driven ions

F. Nikaido, Y. Abe, T. Minami, K. Kuramoto, T. Yasui, K. Sakai, M. Kanasaki, Y. Fukuda, H. Kiriyama, C. S. Jao, C. M. Chu, K. T. Wu, W. Y. Woon, Y. L. Liu, T. Pikuz, S. Hamaguchi, N. Saura, S. Benkadda, T. Kusumoto, S. Kodaira, Y. Kuramitsu

Review of Scientific Instruments　Vol. 95　No. 10　2024/10/01　Research paper (scientific journal)

Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model

Zoltán Donkó, Tsanko V Tsankov, Peter Hartmann, Fatima Jenina Arellano, Uwe Czarnetzki, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　2024/09/20　Research paper (scientific journal)

Etch-stop mechanisms in plasma-enhanced atomic layer etching of silicon nitride: A molecular dynamics study

Jomar U. Tercero, Michiro Isobe, Kazuhiro Karahashi, Magdaleno R. Vasquez, Jr., Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　2024/09/01　Research paper (scientific journal)

Amine plasma polymers deposited on porous hydroxyapatite artificial bone with bipolar pulsed discharges

Anjar Anggraini Harumningtyas, Tomoko Ito, Hidekazu Kita, Joe Kodama, Takashi Kaito, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　Vol. 42　No. 5　2024/07/24　Research paper (scientific journal)

Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Fatima Jenina Arellano, Minoru Kusaba, Stephen Wu, Ryo Yoshida, Zoltán Donkó, Peter Hartmann, Tsanko V. Tsankov, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　Vol. 42　No. 5　2024/07/11　Research paper (scientific journal)

Molecular dynamics simulations of silicon nitride atomic layer etching with Ar, Kr, and Xe ion irradiations

Jomar U. Tercero, Michiro Isobe, Kazuhiro Karahashi, Satoshi Hamaguchi

Japanese Journal of Applied Physics　2024/07/01　Research paper (scientific journal)

Future of plasma etching for microelectronics: Challenges and opportunities

Gottlieb S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce, Jane P. Chang, Jessica C. DeMott, Vincent M. Donnelly, Rémi Dussart, Andreas Fischer, Richard A. Gottscho, Satoshi Hamaguchi, Masanobu Honda, Masaru Hori, Kenji Ishikawa, Steven G. Jaloviar, Keren J. Kanarik, Kazuhiro Karahashi, Akiteru Ko, Hiten Kothari, Nobuyuki Kuboi, Mark J. Kushner, Thorsten Lill, Pingshan Luan, Ali Mesbah, Eric Miller, Shoubhanik Nath, Yoshinobu Ohya, Mitsuhiro Omura, Chanhoon Park, John Poulose, Shahid Rauf, Makoto Sekine, Taylor G. Smith, Nathan Stafford, Theo Standaert, Peter L. G. Ventzek

Journal of Vacuum Science & Technology B　2024/07/01　Research paper (scientific journal)

Optimization of laser-driven quantum beam generation and the applications with artificial intelligence

Y. Kuramitsu, T. Taguchi, F. Nikaido, T. Minami, T. Hihara, S. Suzuki, K. Oda, K. Kuramoto, T. Yasui, Y. Abe, K. Ibano, H. Takabe, C. M. Chu, K. T. Wu, W. Y. Woon, S. H. Chen, C. S. Jao, Y. C. Chen, Y. L. Liu, A. Morace, A. Yogo, Y. Arikawa, H. Kohri, A. Tokiyasu, S. Kodaira, T. Kusumoto, M. Kanasaki, T. Asai, Y. Fukuda, K. Kondo, H. Kiriyama, T. Hayakawa, S. J. Tanaka, S. Isayama, N. Watamura, H. Suzuki, H. S. Kumar, N. Ohnishi, T. Pikuz, E. Filippov, K. Sakai, R. Yasuhara, M. Nakata, R. Ishikawa, T. Hoshi, A. Mizuta, N. Bolouki, N. Saura, S. Benkadda, M. Koenig, S. Hamaguchi

Physics of Plasmas　Vol. 31　No. 5　2024/05/01　Research paper (scientific journal)

Special Issue: Papers by Plenary and Invited Lecturers at the 25th International Symposium on Plasma Chemistry (ISPC 25), 21–26 May 2023, Kyoto, Japan

Tomohiro Nozaki, Takayuki Watanabe, Satoshi Hamaguchi

Plasma Chemistry and Plasma Processing　Vol. 44　No. 3　p. 1105-1107　2024/03/25　Research paper (scientific journal)

Surface chemical reactions of etch stop prevention in plasma-enhanced atomic layer etching of silicon nitride

Jomar U. Tercero, Akiko Hirata, Michiro Isobe, Kazuhiro Karahashi, Masanaga Fukasawa, Satoshi Hamaguchi

Surface and Coatings Technology　Vol. 477　p. 130365-130365　2024/02　Research paper (scientific journal)

First-principles simulation of optical emission spectra for low-pressure argon plasmas and its experimental validation

Fatima Jenina Arellano, Márton Gyulai, Zoltán Donkó, Peter Hartmann, Tsanko V Tsankov, Uwe Czarnetzki, Satoshi Hamaguchi

Plasma Sources Science and Technology　2023/12/01　Research paper (scientific journal)

Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals

Anjar Anggraini Harumningtyas, Tomoko Ito, Michiro Isobe, Lenka Zajíčková, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　2023/12/01　Research paper (scientific journal)

マグネトロンスパッタリングを用いたPEEK表面チタン酸ストロンチウム修飾の骨形成効果

生田 雅人, Harumningtyas Anjar Anggraini, 伊藤 智子, 北原 貴之, 古市 拓也, 文 勝徹, 平井 宏昌, 蟹江 祐哉, 古家 雅之, 藤森 孝人, 岡田 誠司, 浜口 智志, 海渡 貴司

日本バイオマテリアル学会大会予稿集　Vol. 45回　p. 397-397　2023/10

Spectroscopic analysis improvement using convolutional neural networks

N Saura, D Garrido, S Benkadda, K Ibano, Y Ueda, S Hamaguchi

Journal of Physics D: Applied Physics　Vol. 56　No. 35　2023/08/31　Research paper (scientific journal)

High-throughput SiN ALE: surface reaction and ion-induced damage generation mechanisms

Akiko Hirata, Masanaga Fukasawa, Jomar, Unico Tercero, Katsuhisa Kugimiya, Yoshiya Hagimoto, Kazuhiro Karahashi, Satoshi Hamaguchi, Hayato Iwamoto

Japanese Journal of Applied Physics　2023/07/01　Research paper (scientific journal)

Inert-gas ion scattering at grazing incidence on smooth and rough Si and SiO2 surfaces

Charisse Marie D. Cagomoc, Michiro Isobe, Eric A. Hudson, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　2023/03　Research paper (scientific journal)

Molecular dynamics study of SiO2 nanohole etching by fluorocarbon ions

Charisse Marie D Cagomoc, Michiro Isobe, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films　2023/03　Research paper (scientific journal)

Foundations of machine learning for low-temperature plasmas: methods and case studies

Angelo D Bonzanini, Ketong Shao, David B Graves, Satoshi Hamaguchi, Ali Mesbah

Plasma Sources Science and Technology　2023/02/01　Research paper (scientific journal)

Polyetheretherketone (PEEK) Implant Functionalization with Magnetron-Sputtered SrTiO3 for Regenerative Medicine

Anjar Anggraini Harumningtyas, Tomoko Ito, Masato Ikuta, Takashi Kaito, Satoshi Hamaguchi

Plasma Medicine　Vol. 13　No. 3　p. 53-67　2023　Research paper (scientific journal)

2022 Review of Data-Driven Plasma Science

Rushil Anirudh, Rick Archibald, M. Salman Asif, Markus M. Becker, Sadruddin Benkadda, Peer-Timo Bremer, Rick H. S. Budé, C. S. Chang, Lei Chen, R. M. Churchill, Jonathan Citrin, Jim A. Gaffney, Ana Gainaru, Walter Gekelman, Tom Gibbs, Satoshi Hamaguchi, Christian Hill, Kelli Humbird, Sören Jalas, Satoru Kawaguchi, Gon-Ho Kim, Manuel Kirchen, Scott Klasky, John L. Kline, Karl Krushelnick, Bogdan Kustowski, Giovanni Lapenta, Wenting Li, Tammy Ma, Nigel J. Mason, Ali Mesbah, Craig Michoski, Todd Munson, Izumi Murakami, Habib N. Najm, K. Erik J. Olofsson, Seolhye Park, J. Luc Peterson, Michael Probst, David Pugmire, Brian Sammuli, Kapil Sawlani, Alexander Scheinker, David P. Schissel, Rob J. Shalloo, Jun Shinagawa, Jaegu Seong, Brian K. Spears, Jonathan Tennyson, Jayaraman Thiagarajan, Catalin M. Ticoş, Jan Trieschmann, Jan van Dijk, Brian Van Essen, Peter Ventzek, Haimin Wang, Jason T. L. Wang, Zhehui Wang, Kristian Wende, Xueqiao Xu, Hiroshi Yamada, Tatsuya Yokoyama, Xinhua Zhang

IEEE Transactions on Plasma Science　p. 1-89　2023　Research paper (scientific journal)

Molecular dynamics simulation of oxide-nitride bilayer etching with energetic fluorocarbon ions

Charisse Marie D. Cagomoc, Michiro Isobe, Eric A. Hudson, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　Vol. 40　No. 6　2022/11/03　Research paper (scientific journal)

Foundations of atomic-level plasma processing in nanoelectronics

Karsten Arts, Satoshi Hamaguchi, Tomoko Ito, Kazuhiro Karahashi, Harm C M Knoops, Adriaan J M Mackus, Wilhelmus M M (Erwin) Kessels

Plasma Sources Science and Technology　Vol. 31　No. 10　p. 103002-103002　2022/10/01　Research paper (scientific journal)

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Makoto Kambara, Satoru Kawaguchi, Hae June Lee, Kazumasa Ikuse, Satoshi Hamaguchi, Takeshi Ohmori, Kenji Ishikawa

Japanese Journal of Applied Physics　2022/09/13　Research paper (scientific journal)

Molecular dynamics simulation of Si trench etching with SiO2 hard masks

Nicolas A. Mauchamp, Satoshi Hamaguchi

Journal of Vacuum Science & Technology A　Vol. 40　No. 5　2022/08/10　Research paper (scientific journal)

Improving penalized semi supervised nonnegative matrix factorization result’s confidence using deep residual learning approach in spectrum analysis

Nathaniel Saura, Koh Mastumoto, Sadruddin Benkadda, Kenzo Ibano, Heun Tae Lee, Yoshio Ueda, Satoshi Hamaguchi

2022 International Conference on Electrical, Computer and Energy Technologies (ICECET)　2022/07/20　Research paper (international conference proceedings)

Roles of the reaction boundary layer and long diffusion of stable reactive nitrogen species (RNS) in plasma-irradiated water as an oxidizing media — numerical simulation study

Kazumasa Ikuse, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 61　No. 7　p. 076002-076002　2022/06/24　Research paper (scientific journal)

Low-energy ion irradiation effects on chlorine desorption in plasma-enhanced atomic layer deposition (PEALD) for silicon nitride

Tomoko Ito, Hidekazu Kita, Kazuhiro Karahashi, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 61　No. SI　p. SI1011-SI1011　2022/06/13　Research paper (scientific journal)

Five-step plasma-enhanced atomic layer etching of silicon nitride with a stable etched amount per cycle

Akiko Hirata, Masanaga Fukasawa, Jomar U. Tercero, Katsuhisa Kugimiya, Yoshiya Hagimoto, Kazuhiro Karahashi, Satoshi Hamaguchi, Hayato Iwamoto

Japanese Journal of Applied Physics　Vol. 61　No. 6　p. 066002-066002　2022/05/23　Research paper (scientific journal)

Self-Sputtering of the Lennard-Jones Crystal

Satoshi Hamaguchi

ArXiv　2022/02　Research paper (scientific journal)

Structural and electrical characteristics of ion-induced Si damage during atomic layer etching

Satoshi Hamaguchi

Japanese Journal of Applied Physics　2022　Research paper (scientific journal)

The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions

Satoshi Hamaguchi

Plasma Sources Science and Technology　2022　Research paper (scientific journal)

The 2022 Plasma Roadmap: low temperature plasma science and technology

Satoshi Hamaguchi

Journal of Physics D: Applied Physics　2022　Research paper (scientific journal)

Self-sputtering of the Lennard-Jones crystal

Satoshi Hamaguchi

Physics of Plasmas　2022　Research paper (scientific journal)

Low energy ion reactions of SiN plasma-enhanced atomic layer deposition

伊藤智子, 北英和, 鈴木歩太, 加賀谷宗仁, 松隈正明, 松崎和愛, 唐橋一浩, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 69th　2022

Construction of a surrogate model for low-temperature plasma simulation using machine learning

市川将和, 幾世和将, CHEN Kuan-Lin, WU Jong-Shinn, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 69th　2022

Surface Reaction Mechanisms to Realize High-throughput SiN ALE

平田瑛子, 深沢正永, TERCERO J. U., 釘宮克尚, 萩本賢哉, 唐橋一浩, 浜口智志, 岩元勇人

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 83rd　2022

Amine modification of calcium phosphate by low-pressure plasma for bone regeneration

Joe Kodama, Anjar Anggraini Harumningtyas, Tomoko Ito, Miroslav Michlíček, Satoshi Sugimoto, Hidekazu Kita, Ryota Chijimatsu, Yuichiro Ukon, Junichi Kushioka, Rintaro Okada, Takashi Kamatani, Kunihiko Hashimoto, Daisuke Tateiwa, Hiroyuki Tsukazaki, Shinichi Nakagawa, Shota Takenaka, Takahiro Makino, Yusuke Sakai, David Nečas, Lenka Zajíčková, Satoshi Hamaguchi, Takashi Kaito

Scientific Reports　Vol. 11　No. 1　p. 17870-17870　2021/12　Research paper (scientific journal)

Molecular dynamics simulation for reactive ion etching of Si and SiO₂ by SF 5 + ions

Erin Joy Capdos Tinacba, Tomoko Ito, Kazuhiro Karahashi, Michiro Isobe, Satoshi Hamaguchi

Journal of Vacuum Science & Technology B　Vol. 39　No. 4　p. 043203-043203　2021/07　Research paper (scientific journal)

Surface damage formation during atomic layer etching of silicon with chlorine adsorption

Erin Joy Capdos Tinacba, Michiro Isobe, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 39　No. 4　2021/07/01　Research paper (scientific journal)

Evaluation of nickel self-sputtering yields by molecular-dynamics simulation

Nicolas A. Mauchamp, Michiro Isobe, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 39　No. 4　2021/07/01　Research paper (scientific journal)

Preface to Special Topic: Invited Papers from the 2nd International Conference on Data-Driven Plasma Science

Sadruddin Benkadda, Satoshi Hamaguchi, Magali Muraglia, Deborah O'Connell

Physics of Plasmas　Vol. 28　No. 3　p. 030401-1-030401-2　2021/03/01　Research paper (scientific journal)

Surface reactions induced by low-energy ion irradiation in atomic layer processes

伊藤智子, 唐橋一浩, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 82nd　2021

Effect of Atomic Layer Etching Adsorption Layer on Substrate Damage Generation

平田瑛子, 平田瑛子, 深沢正永, 釘宮克尚, 萩本賢哉, 岩元勇人, TERCERO J. U., 礒部倫郎, 伊藤智子, 唐橋一浩, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 82nd　2021

Monitoring of nonthermal plasma degradation of phthalates by ion mobility spectrometry

Ladislav Moravský, Bartosz Michalczuk, Jana Hrdá, Satoshi Hamaguchi, Štefan Matejčík

Plasma Processes and Polymers　2021　Research paper (scientific journal)

Development of a Massively Parallelized Fluid-Based Plasma Simulation Code with a Finite-Volume Method on an Unstructured Grid

Kuan Lin Chen, Meng Fan Tseng, Ming Chung Lo, Satoshi Hamaguchi, Meng Hua Hu, Yun Ming Lee, Jong Shinn Wu

IEEE Transactions on Plasma Science　Vol. 49　No. 1　p. 104-119　2021/01　Research paper (scientific journal)

Characterization of descriptors in machine learning for data-based sputtering yield prediction

Hiori Kino, Kazumasa Ikuse, Hieu Chi Dam, Satoshi Hamaguchi

Physics of Plasmas　Vol. 28　No. 1　2021/01/01　Research paper (scientific journal)

Mechanism of SiN etching rate fluctuation in atomic layer etching

Akiko Hirata, Masanaga Fukasawa, Katsuhisa Kugimiya, Kojiro Nagaoka, Kazuhiro Karahashi, Satoshi Hamaguchi, Hayato Iwamoto

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 38　No. 6　2020/12/01　Research paper (scientific journal)

生体親和性材料の最新知見 プラズマ技術を用いた骨形成を有するアミン人工骨の開発

海渡 貴司, 小玉 城, 浜口 智志

臨床神経生理学　Vol. 48　No. 5　p. 447-447　2020/10

Molecular dynamics simulation of amine groups formation during plasma processing of polystyrene surfaces

Miroslav Michlíček, Satoshi Hamaguchi, Lenka Zajíčková

Plasma Sources Science and Technology　Vol. 29　No. 10　2020/10　Research paper (scientific journal)

Modeling characterisation of a bipolar pulsed discharge

Zoltán Donkó, Lenka Zajičková, Satoshi Sugimoto, Anjar Anggraini Harumningtyas, Satoshi Hamaguchi

Plasma Sources Science and Technology　Vol. 29　No. 10　2020/10　Research paper (scientific journal)

Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac)<inf>2</inf>on a nickel oxide surface in atomic layer etching processes

Abdulrahman H. Basher, Marjan Krstić, Karin Fink, Tomoko Ito, Kazuhiro Karahashi, Wolfgang Wenzel, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 38　No. 5　2020/09/01　Research paper (scientific journal)

Self-limiting processes in thermal atomic layer etching of nickel by hexafluoroacetylacetone

Abdulrahman H. Basher, Ikutaro Hamada, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 59　No. 9　2020/09/01　Research paper (scientific journal)

On-wafer monitoring and control of ion energy distribution for damage minimization in atomic layer etching processes

A. Hirata, M. Fukasawa, K. Kugimiya, K. Nagaoka, K. Karahashi, S. Hamaguchi, H. Iwamoto

Japanese Journal of Applied Physics　Vol. 59　No. SJ　2020/06/01　Research paper (scientific journal)

Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO<inf>2</inf>) plasma enhanced atomic layer deposition (PEALD) processes

Hu Li, Tomoko Ito, Kazuhiro Karahashi, Munehito Kagaya, Tsuyoshi Moriya, Masaaki Matsukuma, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 59　No. SJ　p. SJJA01-SJJA01　2020/06/01　Research paper (scientific journal)

Stability of hexafluoroacetylacetone molecules on metallic and oxidized nickel surfaces in atomic-layer-etching processes

Abdulrahman H. Basher, Marjan Krstić, Takae Takeuchi, Michiro Isobe, Tomoko Ito, Masato Kiuchi, Kazuhiro Karahashi, Wolfgang Wenzel, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 38　No. 2　2020/03/01　Research paper (scientific journal)

プラズマ技術を用いたアミン修飾による骨形成を有する人工骨の開発

海渡貴司, 小玉城, 浜口智志

中部日本整形外科災害外科学会雑誌　Vol. 63　No. 秋季学会　p. 23-23　2020

プラズマ技術を用いた骨形成を有するアミン人工骨の開発

海渡貴司, 小玉城, 浜口智志

臨床神経生理学(Web)　Vol. 48　No. 5　2020

Molecular dynamics simulation of Si and SiO<inf>2</inf> reactive ion etching by fluorine-rich ion species

Erin Joy Capdos Tinacba, Michiro Isobe, Kazuhiro Karahashi, Satoshi Hamaguchi

Surface and Coatings Technology　Vol. 380　2019/12/25　Research paper (scientific journal)

Special issue: Plasmas for microfabrication

Satoshi Hamaguchi, Sumit Agarwal, Lenka Zajickova, Michael R. Wertheimer

Plasma Processes and Polymers　Vol. 16　No. 9　2019/09　Research paper (scientific journal)

Damage recovery and low-damage etching of ITO in H<inf>2</inf>/CO plasma: Effects of hydrogen or oxygen

Akiko Hirata, Masanaga Fukasawa, Katsuhisa Kugimiya, Kazuhiro Karahashi, Satoshi Hamaguchi, Kojiro Nagaoka

Plasma Processes and Polymers　Vol. 16　No. 9　2019/09/01　Research paper (scientific journal)

Effects of excitation voltage pulse shape on the characteristics of atmospheric-pressure nanosecond discharges

Zoltán Donkó, Satoshi Hamaguchi, Timo Gans

Plasma Sources Science and Technology　Vol. 28　No. 7　2019/07/24　Research paper (scientific journal)

Analyses of Hexafluoroacetylacetone (Hfac) Adsorbed on Transition Metal Surfaces

Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi

2019/07

Complex-formation reaction analysis for atomic-layer etching of metal surfaces

Ito Tomoko, Karahashi Kazuhiro, Hamaguchi Satoshi

JSAP Annual Meetings Extended Abstracts　Vol. 2018.2　p. 262-262　2019/06

Transition Metal (Ni, Co) Thermal Etching by Hexafluoroacetylacetone (hfac)

Ito Tomoko, Kazuhiro Karahashi, Hamaguchi Satoshi

JSAP Annual Meetings Extended Abstracts　Vol. 2019.1　p. 1627-1627　2019/03

プラズマ原子層プロセシングにおけるアセチルアセトン-酸化ニッケル表面反応のab initio DFT計算

中村花菜, 伊藤智子, 唐橋一浩, 浜口智志, 竹内孝江, 竹内孝江

日本化学会春季年会講演予稿集(CD-ROM)　Vol. 99th　2019

SiN Atomic Layer Etching表面状態の変動解析

平田瑛子, 深沢正永, 釘宮克尚, 長岡弘二郎, 唐橋一浩, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 80th　2019

F⁺イオン照射によるY₂O₃表面層の変化

KANG Hojun, 伊藤智子, UM Junghwan, KOKURA Hikaru, KANG Taekyun, CHO Sungil, PARK Hyunjung, 磯部倫郎, 唐橋一浩, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 80th　2019

プラズマ技術を用いた骨分化促進能を有する人工骨の開発

小玉城, 杉本敏司, 伊藤智子, ANJAR Anggraini Harumningtyas, 吉川秀樹, 浜口智志, 海渡貴司

日本整形外科学会雑誌　Vol. 93　No. 8　p. S1858-S1858　2019

Molybdenum capping layer effect on electromigration failure of plasma etched copper lines

Jia Quan Su, Mingqian Li, Yue Kuo, Satoshi Hamaguchi

ECS Transactions　Vol. 92　No. 5　p. 39-46　2019　Research paper (international conference proceedings)

The future for plasma science and technology

Klaus-Dieter Weltmann, Juergen F. Kolb, Marcin Holub, Dirk Uhrlandt, Milan Simek, Kostya (Ken) Ostrikov, Satoshi Hamaguchi, Uros Cvelbar, Mirko Cernak, Bruce Locke, Alexander Fridman, Pietro Favia, Kurt Becker

PLASMA PROCESSES AND POLYMERS　Vol. 16　No. 1　2019/01　Research paper (scientific journal)

Etching reactions by polyatomic molecular ions containing fluorine atoms

Tomoko Ito, Kazuhiro Karahashi, Takuya Hirohashi, Junichi Hashimoto, Mitsuhiro Omura, Hisataka Hayashi, Satoshi Hamaguchi

2018/11　Research paper (international conference proceedings)

Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms

Zoltan Donko, Aranka Derzsi, Mate Vass, Julian Schulze, Edmund Schuengel, Satoshi Hamaguchi

Plasma Sources Science and Technology　Vol. 27　No. 10　2018/09/18　Research paper (scientific journal)

Enhanced etching of tin-doped indium oxide due to surface modification by hydrogen ion injection

Hu Li, Kazuhiro Karahashi, Pascal Friederich, Karin Fink, Masanaga Fukasawa, Akiko Hirata, Kazunori Nagahata, Tetsuya Tatsumi, Wolfgang Wenzel, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 57　No. 6　2018/06　Research paper (scientific journal)

Cyclic etching of tin-doped indium oxide using hydrogen-induced modified layer

Akiko Hirata, Masanaga Fukasawa, Kazunori Nagahata, Hu Li, Kazuhiro Karahashi, Satoshi Hamaguchi, Tetsuya Tatsumi

Japanese Journal of Applied Physics　Vol. 57　No. 6　p. 1832-1832　2018/06

The effect of photoemission on nanosecond helium microdischarges at atmospheric pressure

Zoltan Donko, Satoshi Hamaguchi, Timo Gans

Plasma Sources Science and Technology　Vol. 27　No. 5　2018/05　Research paper (scientific journal)

SiO₂ and Si etching reactions by CxFy ⁺ ion bombardment

Karahashi Kazuhiro, Li Hu, Ito Tomoko, Hamaguchi Satoshi

JSAP Annual Meetings Extended Abstracts　Vol. 2018.1　p. 1853-1853　2018/03

Effects of Low Energy Ar⁺ Ion Irradiation on Hexafluoroacetylacetone (hfac) Adsorbed Ni and Cu Surfaces

Ito Tomoko, Karahashi Kazuhiro, Hamaguchi Satoshi

JSAP Annual Meetings Extended Abstracts　Vol. 2018.1　p. 1849-1849　2018/03

Plasma Surface Functionalization of Biocompatible Materials

Tomoko Ito, Anjar Anggraini Harumningtyas, Satoshi Sugimoto, Satoshi Hamaguchi

2018/03

Foundations of low-temperature plasma enhanced materials synthesis and etching

Gottlieb S. Oehrlein, Satoshi Hamaguchi

Plasma Sources Science and Technology　Vol. 27　No. 2　2018/02　Research paper (scientific journal)

低エネルギーイオンによるフッ化物層のエッチング反応

唐橋一浩, 伊藤智子, 浜口智志

プラズマ・核融合学会年会(Web)　Vol. 35th　2018

遷移金属に対するβ-ジケトンによる吸着表面反応の解明

伊藤智子, 唐橋一浩, 浜口智志

プラズマ・核融合学会年会(Web)　Vol. 35th　2018

金属原子層エッチングプロセスにおける錯体形成表面反応解析

伊藤智子, 唐橋一浩, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 79th　2018

Preface: plasma sources for biological and biomaterial applications

Farzaneh Arefi-Khonsari, Satoshi Hamaguchi, Eric Robert

Plasma Medicine　Vol. 8　No. 1　2018　Research paper (scientific journal)

Impact of non-thermal plasma surface modification on porous calcium hydroxyapatite ceramics for bone regeneration.

Yu Moriguchi, Dae-Sung Lee, Ryota Chijimatsu, Khair Thamina, Kazuto Masuda, Dai Itsuki, Hideki Yoshikawa, Satoshi Hamaguchi, Akira Myoui

PloS one　Vol. 13　No. 3　2018　Research paper (scientific journal)

XPS Analysis of Adsorbed Organic Compounds on Magnetic Materials Surfaces

Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi

2017/12

Amino Group Surface Modification of Cell Culture Polystyrene Dishes by an Inverter Plasma Process

Satoshi Sugimoto, Tomoko Ito, Kai Kubota, Kazuma Nishiyama, Satoshi Hamaguchi

2017/12

Editorial for achieving atomistic control in plasma–material interactions

Gottlieb S. Oehrlein, Satoshi Hamaguchi, Achim Von Keudell

Journal of Physics D: Applied Physics　Vol. 50　No. 49　2017/12　Research paper (scientific journal)

Molecular dynamics simulations of atomic-layer etching (ALE) of SiO2

Yuki Okada, Michiro Isobe, Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi

2017/11　Research paper (international conference proceedings)

Surface reactions of metal surfaces with adsorbed organic compounds by Ar+ ion irradiation

Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi

2017/11　Research paper (international conference proceedings)

Etching reactions of fluorinated layers on metal surfaces exposed to XeF₂

Karahashi Kazuhiro, Ito Tomoko, Hamaguchi Satoshi

JSAP Annual Meetings Extended Abstracts　Vol. 2017.2　p. 1752-1752　2017/09

XPS Analyses for Adsorption Reactions of Hexafluoroacetylacetone (hfac) with Ni Surfaces

Ito Tomoko, Kazuhiro Karahashi, Satoshi Hamaguchi

JSAP Annual Meetings Extended Abstracts　Vol. 2017.2　p. 1750-1750　2017/09

Effects of hydrogen-damaged layer on tin-doped indium oxide etching by H<inf>2</inf>/Ar plasma

Akiko Hirata, Masanaga Fukasawa, Takushi Shigetoshi, Masaki Okamoto, Kazunori Nagahata, Hu Li, Kazuhiro Karahashi, Satoshi Hamaguchi, Tetsuya Tatsumi

Japanese Journal of Applied Physics　Vol. 56　No. 6　2017/06　Research paper (scientific journal)

Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation

Kazuhiro Karahashi, Hu Li, Kentaro Yamada, Tomoko Ito, Satoshi Numazawa, Ken Machida, Kiyoshi Ishikawa, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 56　No. 6　2017/05　Research paper (scientific journal)

Effects of Hydrogen Ion Irradiation on Zinc Oxide Etch

Hu Li, Kazuhiro Karahashi, Pascal Friederich, Karin Fink, Masanaga Fukasawa, Akiko Hirata, Kazunori Nagahata, Tetsuya Tatsumi, Wolfgang Wenzel, Satoshi Hamaguchi

J. Vac. Sci. Tech. A　Vol. 35　No. 5　2017/05　Research paper (scientific journal)

Formation of amino groups on polystyrene cell culture dish surfaces by plasma irradiation

Ito Tomoko, Kazuma Nishiyama, Satoshi Sugimoto, Satoshi Hamaguchi

JSAP Annual Meetings Extended Abstracts　Vol. 2017.1　p. 1795-1795　2017/03

電解水による室内臭低減に関する研究

村上栄造, 伊藤智子, 浜口智志, 須山喜美

空気清浄とコンタミネーションコントロール研究大会予稿集　Vol. 34th　2017

電解水の消臭効果に関する研究

村上栄造, 伊藤智子, 浜口智志, 須山喜美

におい・かおり環境学会講演要旨集　Vol. 30th　p. 66-69　2017

Preface: Sixth International Conference on Plasma Medicine (ICPM-6)

Zdenko Machala, Satoshi Hamaguchi, Gregory Fridman

Plasma Medicine　Vol. 7　No. 2　p. v-vi　2017　Research paper (scientific journal)

Atmospheric-pressure plasma-irradiation inhibits mouse embryonic stem cell differentiation to mesoderm and endoderm but promotes ectoderm differentiation

Taichi Miura, Satoshi Hamaguchi, Shoko Nishihara

J. Phys. D: Appl. Phys. 49 (2016) 165401 (12pp).　Vol. 49　No. 16　2016/12　Research paper (scientific journal)

Surface reactions of amorphous carbon layers by argon and fluorocarbon ion beams

Kazuhiro Karahashi, Hu Li, Tomoko Ito, Satoshi Hamaguchi

2016/11　Research paper (international conference proceedings)

Molecular dynamics study on fluorine radical multilayer adsorption mechanism during Si, SiO2, and Si3N4 etching processes

Satoshi Numazawa, Ken Machida, Michiro Isobe, Satoshi Hamaguchi

Jpn. J. Appl. Phys. 55 (2016) 116204 (pp6).　Vol. 55　No. 11　2016/11　Research paper (scientific journal)

GENERATION AND TRANSPORT OF LIQUID-PHASE REACTIVE SPECIES DUE TO PLASMA-LIQUID INTERACTION

Kazumasa Ikuse, Tomoko Ito, Satoshi Hamaguchi

2016 43RD IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS)　2016/04　Research paper (scientific journal)

Mass-selected ion beam study on etching characteristics of ZnO by methane-based plasma

Hu Li, Kazuhiro Karahashi, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 55　No. 2　2016/02　Research paper (scientific journal)

多能性幹細胞から分化誘導した骨芽細胞系細胞の特性

宮本諭, 濱本秀一, 吉田清志, 岡本美奈, 奥崎大介, 後藤直久, 浜口智志, 吉川秀樹, 名井陽

再生医療　Vol. 15　2016

Mass spectrometry analyses of ions generated by atmospheric-pressure plasma jets in ambient air

Tomoko Ito, Kensaku Gotou, Kanako Sekimoto, Satoshi Hamaguchi

Plasma Medicine　Vol. 5　No. 2-4　p. 283-298　2015/12　Research paper (scientific journal)

Sputtering yields and surface chemical modification of tin-doped indium oxide in hydrocarbon-based plasma etching

Hu Li, Kazuhiro Karahashi, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 33　No. 6　2015/11　Research paper (scientific journal)

Correlation between dry etching resistance of Ta masks and the oxidation states of the surface oxide layers

Makoto Satake, Masaki Yamada, Hu Li, Kazuhiro Karahashi, Satoshi Hamaguchi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　Vol. 33　No. 5　2015/09　Research paper (scientific journal)

Numerical Simulation of Atomic Layer Oxidation of Silicon by Oxygen Gas Cluster Beams

MIZOTANI Kohei, ISOBE Michiro, KARAHASHI Kazuhiro, HAMAGUCHI Satoshi

Plasma and Fusion Research　Vol. 10　p. 1406079-1406079　2015/09　Research paper (scientific journal)

Correlation between dry etching resistance of Ta masks and the oxidation states of the surface oxide layers

Makoto Satake, Masaki Yamada, Hu Li, Kazuhiro Karahashi, Satoshi Hamaguchi

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics　Vol. 33　No. 5　2015/09/01　Research paper (scientific journal)

In Focus: Plasma Medicine.

David Graves, Satoshi Hamaguchi, Deborah O'Connell

Biointerphases　Vol. 10　No. 2　p. 029301-029301　2015/06/25　Research paper (scientific journal)

Suboxide/subnitride formation on Ta masks during magnetic material etching by reactive plasmas

Hu Li, Yu Muraki, Kazuhiro Karahashi, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 33　No. 4　2015/04　Research paper (scientific journal)

Molecular dynamics simulation of silicon oxidation enhanced by energetic hydrogen ion irradiation

Kohei Mizotani, Michiro Isobe, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 48　No. 15　2015/04　Research paper (scientific journal)

Molecular dynamic simulation of damage formation at Si vertical walls by grazing incidence of energetic ions in gate etching processes

Kohei Mizotani, Michiro Isobe, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 33　No. 2　2015/03　Research paper (scientific journal)

大気圧プラズマジェットの質の可視化とCVDへの応用

木内正人, 木内正人, 本城国明, 伊藤智子, 浜口智志

表面技術協会講演大会講演要旨集　Vol. 131st　2015

iPS細胞等の安定供給と臨床利用のための基盤整備に関する研究 iPS細胞からの骨・軟骨系細胞への培養技術を最適化するための基盤整備

吉川秀樹, 名井陽, 宮本諭, 浜口智志

「iPS細胞等の安定供給と臨床利用のための基盤整備」に関する研究 平成26年度 総括・分担研究報告書　2015

計算と実験の融合によるプラズマ表面反応解析

浜口智志, 寒川誠二, 唐橋一浩, 溝谷浩平, 久保田智広

東北大学流体科学研究所共同利用・共同研究拠点流体科学研究拠点活動報告書　Vol. 2014　2015

Turnover of sex chromosomes in Celebensis Group medaka fishes

Taijun Myosho, Yusuke Takehana, Satoshi Hamaguchi, Mitsuru Sakaizumi

G3: Genes, Genomes, Genetics　Vol. 5　No. 12　p. 2685-2691　2015　Research paper (scientific journal)

Ion beam experiments for the study of plasma-surface interactions

Kazuhiro Karahashi, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 47　No. 22　2014/06　Research paper (scientific journal)

Special issue: 5th international conference on plasma medicine (ICPM5), Nara, Japan, 18-23 May 2014

Satoshi Hamaguchi

Plasma Medicine　Vol. 4　No. 1-4　2014/04　Research paper (scientific journal)

Low energy indium or gallium ion implantations to SiO2 thin films for development of novel catalysts

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

e-Journal of Surface Science and Nanotechnology　Vol. 12　p. 197-202　2014/04　Research paper (scientific journal)

Proliferation assay of mouse embryonic stem (ES) cells exposed to atmospheric-pressure plasmas at room temperature

Taichi Miura, Ayumi Ando, Kazumi Hirano, Chika Ogura, Tatsuya Kanazawa, Masamichi Ikeguchi, Atsushi Seki, Shoko Nishihara, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 47　No. 44　2014/04　Research paper (scientific journal)

Characterization of polymer layer formation during SiO<inf>2</inf>/SiN etching by fluoro/hydrofluorocarbon plasmas

Keita Miyake, Tomoko Ito, Michiro Isobe, Kazuhiro Karahashi, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 53　No. 3　2014/03　Research paper (scientific journal)

Low energy gallium ion injections to silicon dioxide thin films for development of novel catalysts

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

International Symposium on Non-equilibrium Plasma and Complex-System Sciences (IS-NPCS), 26-28 February, 2014, Icho Kaikan, Osaka University, Osaka, Japan (P-04).　2014/02

大気圧プラズマジェット照射による真鍮表面における硝酸化合物および亜硝酸化合物の生成

伊藤智子, 関本奏子, 浜口智志

質量分析総合討論会講演要旨集　Vol. 62nd　2014

プラズマエッチングプロセスにおけるナノスケール表面ダメージ解析

浜口智志, 寒川誠二, 唐橋一浩, 溝谷浩平, 久保田智広

東北大学流体科学研究所共同利用・共同研究拠点流体科学研究拠点活動報告書　Vol. 2013　2014

iPS細胞等の安定供給と臨床利用のための基盤整備 iPS細胞からの骨・軟骨系細胞への培養技術を最適化するための基盤整備

吉川秀樹, 名井陽, 宮本諭, 浜口智志

「iPS細胞等の安定供給と臨床利用のための基盤整備」に関する研究 平成25年度 総括・分担研究報告書　2014

ゼオライトへの低エネルギーインジウムイオン照射と触媒効果

吉村智, 木内正人, 木内正人, 西本能弘, 安田誠, 馬場章夫, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 55th　2014

Low energy indium or gallium iom beam injection to SiO2 thin films for development of novel catalysts

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12) & 21st International Colloquium on Scanning Probe Microscopy (ICSPM21)　2013/11

Dependence of catalytic properties of indium implanted SiO2 thin films on the film-substrate temperature during indium ion implantation

S. Yoshimura, K. Ikuse, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

Nuclear Instruments and Methods in Physics Research B　Vol. 315　p. 222-226　2013/11　Research paper (scientific journal)

Surface Modification of Poly(methyl methacrylate) by Hydrogen-Plasma Exposure and Its Sputtering Characteristics by Ultraviolet Light Irradiation

Satoru Yoshimura, Kazumasa Ikuse, Satoshi Sugimoto, Kensuke Murai, Kuniaki Honjo, Masato Kiuchi, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 52　No. 9　p. 090201-1--4　2013/09　Research paper (scientific journal)

Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication

Ayumi Ando, Hidetaka Uno, Tsuneo Urisu, Satoshi Hamaguchi

Applied Surface Science　Vol. 276　p. 1-6　2013/07　Research paper (scientific journal)

Quantum cascade laser absorption spectroscopy with the amplitude-to-time conversion technique for atmospheric-pressure plasmas

Takayoshi Yumi, Noriaki Kimura, Satoshi Hamaguchi

JOURNAL OF APPLIED PHYSICS　Vol. 113　No. 21　2013/06　Research paper (scientific journal)

Characteristics of silicon etching by silicon chloride ions

Tomoko Ito, Kazuhiro Karahashi, Song Yun Kang, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 31　No. 3　2013/05　Research paper (scientific journal)

Oxidation of nitric oxide by atmospheric pressure plasma in a resonant plasma reactor

Takayoshi Yumii, Takashi Yoshida, Kyoji Doi, Noriaki Kimura, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 46　No. 13　2013/04　Research paper (scientific journal)

プラズマ・ラジカルの物理とその医療応用

浜口智志

日本物理学会講演概要集　Vol. 68　No. 1　2013

プラズマエッチングプロセスにおけるナノスケール表面ダメージ解析

浜口智志, 寒川誠二

東北大学流体科学研究所共同利用・共同研究拠点流体科学研究拠点活動報告書　Vol. 2012　2013

低エネルギーインジウム照射SiO₂の触媒効果の基板温度依存性

吉村智, 幾世和将, 木内正人, 木内正人, 西本能弘, 安田誠, 馬場章夫, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 60th　2013

Taマスクの形状制御のための斜め入射イオンによるスパッタリング解析

LI Hu, 唐橋一浩, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 60th　2013

磁性体エッチングプロセスにおけるN⁺イオン照射効果

村木裕, LI Hu, 唐橋一浩, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 60th　2013

ハイドロフルオロカーボン(HFC)プラズマによるSiNエッチングにおける表面ポリマー形成過程の解析

三宅啓太, 礒部倫郎, 深沢正永, 辰巳哲也, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 60th　2013

酸素ガスクラスタービーム照射によるシリコン表面酸化プロセスの分子動力学シミュレーション

溝谷浩平, 礒部倫郎, 浜口智志

応用物理学会春季学術講演会講演予稿集(CD-ROM)　Vol. 60th　2013

高エネルギー水素イオン入射によるSi表面の増殖酸化

伊藤智子, 溝谷浩平, 礒部倫郎, 唐橋一浩, 深沢正永, 長畑和典, 辰巳哲也, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 74th　2013

HBrプラズマにおける斜め入射イオンおよび反応生成物(SiBr_x)イオンによる反応

村木裕, LI Hu, 伊藤智子, 唐橋一浩, 松隈正明, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 74th　2013

酸素ガスクラスタービーム照射によるシリコン表面酸化プロセスの分子動力学シミュレーション II

溝谷浩平, 礒部倫郎, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 74th　2013

Taマスクの形状制御の観点から見たTaNおよびTaO_xに対するエッチング反応解析

LI Hu, 村木裕, 唐橋一浩, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 74th　2013

フルオロカーボン(FC)・ハイドロフルオロカーボン(HFC)プラズマエッチングにおけるSiN/SiO₂選択性の解析

三宅啓太, 礒部倫郎, 深沢正永, 長畑和典, 辰巳哲也, 浜口智志

応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 74th　2013

プラズマの医療応用

浜口智志

パリティ　Vol. 1月号　No. 1　p. 16-17　2013/01　Research paper (scientific journal)

Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine

Satoshi Hamaguchi

AIP Conference Proceedings　Vol. 1545　p. 214-222　2013　Research paper (scientific journal)

Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation

Satoru Yoshimura, Yasuhiro Tsukazaki, Masato Kiuchi, Satoshi Sugimoto, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 45　No. 50　p. 505201-1--10　2012/12　Research paper (scientific journal)

Sputtering yields of magnesium hydroxide [Mg(OH)2] by noble-gas ion bombardment

K. Ikuse, S. Yoshimura, M. Kiuchi, M. Terauchi, M. Mishitani, S. Hamaguchi

Journal of Physics D: Applied Physics　Vol. 45　No. 43　p. 432001-1--5　2012/10　Research paper (scientific journal)

Efficient modification of the surface properties of interconnected porous hydroxyapatite by low-pressure low-frequency plasma treatment to promote its biological performance

Dae Sung Lee, Yu Moriguchi, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 45　No. 37　2012/09　Research paper (scientific journal)

Si damage due to oblique-angle ion impact relevant for vertical gate etching processes

Tomoko Ito, Kazuhiro Karahashi, Kohei Mizotani, Michiro Isobe, Song Yun Kang, Masanobu Honda, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 51　No. 8　2012/08　Research paper (scientific journal)

Sputtering Yields of CaO, SrO, and BaO by Monochromatic Noble Gas Ion Bombardment

Satoru Yoshimura, Kiyohiro Hine, Masato Kiuchi, Jun Hashimoto, Masaharu Terauchi, Yosuke Honda, Mikihiko Nishitani, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 51　No. 8　p. 08HB02-1--4　2012/08　Research paper (scientific journal)

Microcavity array plasma system for remote chemical processing at atmospheric pressure

Dae Sung Lee, Satoshi Hamaguchi, Osamu Sakai, Sung Jin Park, J. Gary Eden

Journal of Physics D: Applied Physics　Vol. 45　No. 22　2012/06　Research paper (scientific journal)

Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

e-Journal of Surface Science and Nanotechnology　Vol. 10　p. 139-144　2012/04　Research paper (scientific journal)

Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

Thin Solid Films　Vol. 520　No. 15　p. 4894-4897　2012/04　Research paper (scientific journal)

Extracellular matrix patterning for cell alignment by atmospheric pressure plasma jets

Ayumi Ando, Toshifumi Asano, Md Abu Sayed, Ryugo Tero, Katsuhisa Kitano, Tsuneo Urisu, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 51　No. 3 PART 1　2012/03　Research paper (scientific journal)

ヘテロエピタキシャルダイヤモンド成長のためのIr(100)/MgOへの低エネルギー炭素イオン照射

井谷司, 井谷司, 山崎一寿, 伊藤智子, 唐橋一浩, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 59th　2012

フロロカーボンイオン照射におけるSiN_x:H膜中の水素の含有率の違いによるエッチング反応への影響

伊藤智子, 唐橋一浩, 深沢正永, 辰巳哲也, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 59th　2012

水素イオン入射によるシリコン中の増速酸化プロセスの入射エネルギー依存性

溝谷浩平, 礒部倫郎, 深沢正永, 辰巳哲也, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 59th　2012

メタノールプラズマ中のイオン照射によるFeCoBエッチング反応

唐橋一浩, 伊藤智子, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 59th　2012

大気圧放電に接した水中における活性酸素・活性窒素種の化学反応シミュレーション

金澤龍也, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 59th　2012

大気圧プラズマにより水中に誘起される化学種の反応シミュレーション

金澤龍也, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 73rd　2012

プラズマエッチングプロセスにおけるナノスケール表面ダメージ解析

浜口智志, 寒川誠二

東北大学流体科学研究所共同利用・共同研究拠点流体科学研究拠点活動報告書　Vol. 2011　2012

ビーム表面相互作用分子動力学(MD)シミュレーションにおける基板熱緩和過程の解析

三宅啓太, 溝谷浩平, 礒部倫郎, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 73rd　2012

プラズマエッチングにおけるゲートダメージ層形成機構の数値解析

溝谷浩平, 礒部倫郎, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 73rd　2012

メタノールプラズマ中のイオン照射によるCoFeBエッチング反応(2)

唐橋一浩, 伊藤智子, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 73rd　2012

SiF_x⁺イオン照射によるSi,Si₃N₄およびSiO₂エッチング反応解析

伊藤智子, 唐橋一浩, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 73rd　2012

低エネルギーイオンビーム照射によるPMMAエッチングイールドへの紫外線照射および水素プラズマ暴露の影響

幾世和将, 吉村智, 杉本敏司, 木内正人, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 53rd　2012

低エネルギーイオンビーム照射によるPMMAエッチングイールドの測定と水素プラズマ暴露のエッチングイールドへの影響

吉村智, 塚崎泰裕, 杉本敏司, 木内正人, 木内正人, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 59th　2012

量子カスケードレーザーを用いた大気圧RFプラズマリアクター内の赤外吸収分光計測

弓井孝佳, 弓井孝佳, 木村憲明, 木村憲明, 浜口智志

プラズマ・核融合学会年会(Web)　Vol. 29th　2012

Low energy mass-selected metal ion beam production with a modified Freeman-type ion source

S. Yoshimura, M. Kiuchi, S. Hamaguchi

The 8th EU-Japan Joint Symposium on Plasma Processing (JSPP2012), 16-18 January, 2012, Todaiji Culture Center, Nara, Japan, P-21　2012/01

Micro-pattern formation of extracellular matrix (ECM) layers by atmospheric-pressure plasmas and cell culture on the patterned ECMs

Ayumi Ando, Toshifumi Asano, Tsuneo Urisu, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 44　No. 48　2011/12　Research paper (scientific journal)

Measurement of MgO, CaO, SrO, and BaO sputtering yields by noble gas ions for plasma display panel cells

S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M. Nishitani, S. Hamaguchi

Proceedings of International Symposium on Dry Process　2011/11　Research paper (international conference proceedings)

Plasma microchannel and jet enhanced by an array of ellipsoidal microcavities

D. S. Lee, O. Sakai, S. J. Park, J. G. Eden, S. Hamaguchi

IEEE Transactions on Plasma Science　Vol. 39　No. 11　p. 2690-2691　2011/11　Research paper (scientific journal)

Improvement of hydrophilicity of interconnected porous hydroxyapatite by dielectric barrier discharge plasma treatment

Dae Sung Lee, Yu Moriguchi, Kiyoshi Okada, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi

IEEE Transactions on Plasma Science　Vol. 39　No. 11　p. 2166-2167　2011/11　Research paper (scientific journal)

Dynamics of near-atmospheric-pressure hydrogen plasmas driven by pulsed high voltages

Chieh Wen Lo, Satoshi Hamaguchi

IEEE Transactions on Plasma Science　Vol. 39　No. 11　p. 2100-2101　2011/11　Research paper (scientific journal)

ハイドロキシアパタイト人工骨に対する低温プラズマ処理

名井 陽, 森口 悠, 李 大成, 増田 一仁, 浜口 智志, 吉川 秀樹

人工臓器　Vol. 40　No. 2　p. S140-S140　2011/10

Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi

Journal of Applied Physics　Vol. 110　No. 7　2011/10/01　Research paper (scientific journal)

Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride: Beam study with CF⁺, CF<inf>2</inf>⁺, CHF<inf>2</inf>⁺, and CH<inf>2</inf>F⁺ ions

Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 29　No. 5　2011/09　Research paper (scientific journal)

Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure

Chieh Wen Lo, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 44　No. 37　2011/09　Research paper (scientific journal)

Rapid breakdown mechanisms of open air nanosecond dielectric barrier discharges.

Tsuyohito Ito, Tatsuya Kanazawa, Satoshi Hamaguchi

Physical review letters　Vol. 107　No. 6　p. 065002-065002　2011/08/05　Research paper (scientific journal)

Si recess of polycrystalline silicon gate etching: Damage enhanced by ion assisted oxygen diffusion

Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 50　No. 8　2011/08　Research paper (scientific journal)

Experimental evaluation of CaO, SrO and BaO sputtering yields by Ne+ or Xe+ ions

Satoru Yoshimura, Kiyohiro Hine, Masato Kiuchi, Jun Hashimoto, Masaharu Terauchi, Yosuke Honda, Mikihiko Nishitani, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 44　No. 25　2011/06　Research paper (scientific journal)

国際宇宙ステーションにおける微粒子プラズマ実験の次期計画

林康明, 佐藤徳芳, 高橋和生, 東辻浩夫, 渡辺征夫, 石原修, 三重野哲, 上村鉄雄, 飯塚哲, 浜口智志, 足立聡, 高柳昌弘

宇宙利用シンポジウム　Vol. 27th　2011

大気圧プラズマ照射による細胞増殖促進プロセス

増田一仁, 森口悠, 岡田潔, 名井陽, 吉川秀樹, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

分子動力学法を用いたシリコン窒化膜のエッチングシミュレーション

重川遼太, 礒部倫郎, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

CO⁺イオンによるCo,NiおよびTaエッチング反応

唐橋一浩, 伊藤智子, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

水素希釈炭化水素プラズマによるDLC薄膜堆積プロセスの分子動力学シミュレーション解析

村上泰夫, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

創傷治癒に対する低温プラズマの効果

金子恵子, 森口悠, 椚座康夫, 浜口智志, 吉川秀樹, 冨田哲也, 冨田哲也

日本抗加齢医学会総会プログラム・抄録集　Vol. 11th　p. 279-279　2011

インジウム照射SiO₂基板の触媒効果の入射エネルギー依存性

吉村智, 木内正人, 木内正人, 西本能弘, 安田誠, 馬場章夫, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

大気開放誘電体バリア放電中での電界測定

伊藤剛仁, 金澤龍也, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

大気圧プラズマによる培養液中の長寿命ラジカル生成と細胞増殖効果

増田一仁, 森口悠, 岡田潔, 名井陽, 吉川秀樹, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

メタノールプラズマエッチングプロセス中のイオン照射によるNi薄膜酸化過程の解析

唐橋一浩, 伊藤智子, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

水素イオン入射によるシリコン中の増速酸化プロセスの数値解析

溝谷浩平, 礒部倫郎, 深沢正永, 辰巳哲也, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

SiClx⁺イオン照射によるSiエッチング反応解析

伊藤智子, 唐橋一浩, KAN Song-Yun, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

SiNエッチングにおける水素反応:分子動力学シミュレーション解析

重川遼太, 礒部倫郎, 深沢正永, 辰巳哲也, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 72nd　2011

カーボン堆積膜の密着性解析

松隈正明, 礒部倫朗, 浜口智志

分子動力学シンポジウム講演論文集(CD-ROM)　Vol. 16th　2011

フロロカーボンプラズマからのイオン照射によるPMMAのエッチングイールド

塚崎泰裕, 吉村智, 木内正人, 木内正人, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

PMMA(ポリメチルメタクリレート)のビームエッチング分子動力学シミュレーション

森田泰光, 礒部倫郎, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

骨粗鬆症のない腰椎圧迫骨折の保存的治療成績

漆谷信治, 浜口建紀, 鄭明和, 島田道明, 小川将司, 林智志

骨折　Vol. 33　No. 3　p. 757-760　2011

Si酸化反応における水素イオン照射効果

伊藤智子, 唐橋一浩, 深沢正永, 辰巳哲也, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 58th　2011

Novel catalysts: Indium implanted SiO2 thin films

S. Yoshimura, K. Hine, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

Applied Surface Science　Vol. 257　No. 1　p. 192-196　2010/10　Research paper (scientific journal)

Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO2 film by CF3 ion beam injections

S. Yoshimura, Y. Tsukazaki, K. Ikuse, M. Kiuchi, S. Hamaguchi

Journal of Physics: Conference Series　Vol. 232　No. 1　2010/04　Research paper (scientific journal)

Electric field measurements at near-atmospheric pressure by coherent Raman scattering of laser beams

Tsuyohito Ito, Kazunobu Kobayashi, Sarah Mueller, Uwe Czarnetzki, Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 227　2010/04　Research paper (scientific journal)

Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamondlike carbon deposition processes.

Yasuo Murakami, Seishi Horiguchi, Satoshi Hamaguchi

Physical review. E, Statistical, nonlinear, and soft matter physics　Vol. 81　No. 4 Pt 1　p. 041602-041602　2010/04　Research paper (scientific journal)

Electric field measurements in near-atmospheric pressure nitrogen and air based on a four-wave mixing scheme

Sarah Müller, Tsuyohito Ito, Kazunobu Kobayashi, Dirk Luggenhölscher, Uwe Czarnetzki, Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 227　2010/04　Research paper (scientific journal)

Plasma-surface interactions in material processing

Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 257　No. 1　2010/04　Research paper (scientific journal)

Evaluation of Si etching yields by Cl⁺ Br⁺ and HBr⁺ ion irradiation

Tomoko Ito, Kazuhiro Karahashi, Song Yun Kang, Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 232　No. 1　2010/04　Research paper (scientific journal)

Reverse propagation of atmospheric pressure plasma jets

Tsuyohito Ito, Aurélien Raddenzati, Artabaze Shams, Satoshi Hamaguchi

Japanese Journal of Applied Physics　Vol. 49　No. 10　p. 1002091-1002093　2010/04　Research paper (scientific journal)

Facile creation of biointerface on commodity plastic surface by combination of atmospheric plasma and reactive polymer coating

Naoki Kanayama, Swapan Kumar Saha, Naoki Nakayama, Jun Nakanishi, Katsuhisa Kitano, Satoshi Hamaguchi, Yukio Nagasaki

Journal of Photopolymer Science and Technology　Vol. 23　No. 4　p. 579-583　2010/04　Research paper (scientific journal)

Particle-in-cell simulations of high-pressure hydrogen plasmas driven by nano-second pulsed high-voltages

Chieh Wen Lo, Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 232　No. 1　2010/04　Research paper (scientific journal)

Effects of hydrogen incorporation in the formation of hydrogenated diamond-like carbon films

Yasuo Murakami, Koji Hosaka, Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 232　No. 1　2010/04　Research paper (scientific journal)

Molecular dynamics simulation of the formation of sp(3) hybridized bonds in hydrogenated diamondlike carbon deposition processes

Yasuo Murakami, Seishi Horiguchi, Satoshi Hamaguchi

PHYSICAL REVIEW E　Vol. 81　No. 4　p. 041602-041602　2010/04　Research paper (scientific journal)

Rapid formation of electric field profiles in repetitively pulsed high-voltage high-pressure nanosecond discharges

Tsuyohito Ito, Kazunobu Kobayashi, Uwe Czarnetzki, Satoshi Hamaguchi

Journal of Physics D: Applied Physics　Vol. 43　No. 6　2010/02　Research paper (scientific journal)

CHxFy⁺イオン照射によるエッチング反応の評価

伊藤智子, 唐橋一浩, 深沢正永, 辰巳哲也, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 57th　2010

反応性イオンによるPt,CoおよびPtCoエッチング反応

唐橋一浩, 伊藤智子, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 57th　2010

大気圧プラズマジェットにおける発光部伝搬速度

伊藤剛仁, RADDENZATI Aurelien, SHAMS Artabaze, 浜口智志

応用物理学関係連合講演会講演予稿集(CD-ROM)　Vol. 57th　2010

CO⁺イオンによるPt,CoおよびPtCoエッチング反応

唐橋一浩, 伊藤智子, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 71st　2010

フロロカーボンおよび水素イオン入射によるPMMA(ポリメチルメタクリレート)表面の改質に関する分子動力学シミュレーション

森田泰光, 礒部倫郎, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 71st　2010

CHxFy⁺イオンエッチングにおける水素の効果

伊藤智子, 唐橋一浩, 深沢正永, 辰巳哲也, 浜口智志

応用物理学会学術講演会講演予稿集(CD-ROM)　Vol. 71st　2010

小児上腕骨外顆骨折・内側上顆骨折に対する吸収糸を用いたtension band法

林智志, 鄭明和, 小川将司, 島田道明, 浜口建紀

骨折　Vol. 32　No. 1　p. 43-45　2010

高圧力液中プラズマ反応空間の創成

伊藤剛仁, 浜口智志

村田学術振興財団年報　No. 24　2010

Electron density measurement for plasmas by terahertz time-domain spectroscopy

A. Ando, H. Kitahara, T. Kurose, K. Kitano, K. Takano, M. Tani, M. Hangyo, S. Hamaguchi

Journal of Physics: Conference Series　Vol. 227　2010　Research paper (international conference proceedings)

Protein patterning by atmospheric-pressure plasmas

A. Ando, M. A. Sayed, T. Asano, R. Tero, K. Kitano, T. Urisu, S. Hamaguchi

Journal of Physics: Conference Series　Vol. 232　No. 1　2010　Research paper (international conference proceedings)

Effects of pH on Bacterial Inactivation in Aqueous Solutions due to Low-Temperature Atmospheric Pressure Plasma Application

S. Ikawa, K. Kitano, S. Hamaguchi

Plasma Process. Polym. 7(1), 33-42 (2010)　Vol. 7　No. 1　p. 33-42　2010/01　Research paper (scientific journal)

Diagnosis of atmospheric pressure plasmas by using terahertz time-domain spectroscopy

Hideaki Kitahara, Ayumi Ando, Katsuhisa Kitano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi

IRMMW-THz 2010 - 35th International Conference on Infrared, Millimeter, and Terahertz Waves, Conference Guide　2010　Research paper (international conference proceedings)

Effect of ultraviolet light irradiation on etching process of polymethylmethacrylate by ion beam injection

S. Yoshimura, K. Ikuse, Y. Tsukazaki, M. Kiuchi, S. Hamaguchi

Journal of Physics : Conference Series　Vol. 191　2009/12　Research paper (scientific journal)

Structure of laboratory ball lightning.

Tsuyohito Ito, Tomoya Tamura, Mark A Cappelli, Satoshi Hamaguchi

Physical review. E, Statistical, nonlinear, and soft matter physics　Vol. 80　No. 6 Pt 2　p. 067401-067401　2009/12　Research paper (scientific journal)

Measurement of sputtering/etching yields by CF3 ion beam injection with UV light irradiation

Y. Tsukazaki, K. IKuse, S.Yoshimura, M. Kiuchi, S. Hamaguchi

4th International Symposium on Atomic Technologies, 18-19 November, 2009, Seaside Hotek MAIKO VILLA, Kobe　2009/11

Preparation of Stable Water-Dispersible PEGylated Gold Nanoparticles Assisted by Nonequilibrium Atmospheric-Pressure Plasma Jets

Hitoshi Furusho, Katsuhisa Kitano, Satoshi Hamaguchi, Yukio Nagasaki

Chemistry of Materials　Vol. 21　No. 15　p. 3526-3535　2009/08　Research paper (scientific journal)

Sputtering yields of Au by low-energy noble gas ion bombardment

K. Ikuse, S. Yoshimura, K. Hine, M. Kiuchi, S. Hamaguchi

Journal of Physics D: Applied Physics　Vol. 42　No. 13　2009/07　Research paper (scientific journal)

Co Si<inf>x</inf> contact resistance after etching and ashing plasma exposure

Ken Katahira, Masanaga Fukasawa, Shoji Kobayashi, Toshifumi Takizawa, Michio Isobe, Satoshi Hamaguchi, Kazunori Nagahata, Tetsuya Tatsumi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 27　No. 4　p. 844-848　2009/07　Research paper (scientific journal)

Discharge mechanisms of atmospheric-pressure LF (Low Frequency) microplasma jets

KITANO Katsuhisa, HAMAGUCHI Satoshi

電気学会プラズマ研究会資料　Vol. 2009　No. 1　p. 49-54　2009/06/12

Creation of biointerface by atmospheric plasma treatment of plasma sensitive polymeric materials

Swapan Kumar Saha, Jun Nakanishi, Katsuhisa Kitano, Satoshi Hamaguchi, Yukio Nagasaki

Journal of Photopolymer Science and Technology　Vol. 22　No. 4　p. 481-484　2009/04　Research paper (scientific journal)

Nonequilibrium atmospheric plasma jets assisted stabilization of drug delivery carriers: Preparation and characterization of biodegradable polymeric nano-micelles with enhanced stability

Shogo Sumitani, Hiroki Murotani, Motoi Oishi, Katsuhisa Kitano, Satoshi Hamaguchi, Yukio Nagasaki

Journal of Photopolymer Science and Technology　Vol. 22　No. 4　p. 467-471　2009/04　Research paper (scientific journal)

Effect of UV light irradiation on sputtering by CF3 ion beams

S.Yoshimura, K. IKuse, Y. Tsukazaki, M. Kiuchi, S. Hamaguchi

3rd International Symposium on Atomic Technology and 3rd Polyscale Technology Workshop, 5-6 March, 2009, Tokyo International Exchange Center　2009/03　Research paper (international conference proceedings)

Electric field measurement in an atmospheric or higher pressure gas by coherent Raman scattering of nitrogen

T. Ito, K. Kobayashi, S. Mueller, D. Luggenhölscher, U. Czarnetzki, S. Hamaguchi

J. Phys. D　Vol. 42　No. 9　2009/02　Research paper (scientific journal)

コヒーレントラマン散乱による高圧力水素・窒素・大気雰囲気での電界測定

伊藤剛仁, 小林和伸, MUELLER S., LUGGENHOELSCHER D., CZARNETZKI U., 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 56th　No. 1　2009

Cl⁺,Br⁺イオン照射によるSiエッチング反応の評価

伊藤智子, 松本祥志, 唐橋一浩, KANG Song-Yun, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 56th　No. 1　2009

イボキサゴ浮遊幼生に対するモノクローナル抗体の作成

浜口昌巳, 佐々木美穂, 大橋智志, 玉置昭夫, 上村了美

日本水産学会大会講演要旨集　Vol. 2009　2009

大気解放雰囲気における大容積低温放電の発生

伊藤剛仁, 小林和伸, 増田一仁, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 70th　No. 1　2009

SiO₂基板への低エネルギーインジウムイオンビームの照射と触媒効果

吉村智, 日根清裕, 木内正人, 木内正人, 西本能弘, 安田誠, 馬場章夫, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 70th　No. 1　2009

Cl⁺.Br⁺イオン照射によるSiエッチング反応における水素の影響

伊藤智子, 唐橋一浩, KANG Song-Yun, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 70th　No. 1　2009

低エネルギーイオンビーム照射装置を用いたシリカ基板へのインジウムおよびガリウムの注入

吉村智, 塚崎泰裕, 木内正人, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 50th　2009

Plasma Medicineの国際ネットワーク

浜口智志

プラズマ・核融合学会年会(Web)　Vol. 26th　2009

Estimation of electron densities of plasmas by terahertz time-domain spectroscopy

Hideaki Kitahara, Ayumi Ando, Tomoko Kurose, Katsuhisa Kitano, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi

34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009　p. 205-+　2009　Research paper (international conference proceedings)

MgO sputtering yields by noble gas ions at relatively low injection energies

S. Yoshimura, K. Hine, M. Matsukuma, K. Ikuse, M. Kiuchi, T. Nakao, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi

Proceedings of the 15th International Display Workshops, December 3-5, 2008, Toki Messe Niigata Convention Center　Vol. 3　p. 1865-1868　2008/12　Research paper (international conference proceedings)

Experimental evaluation of MgO sputtering yields by monochromatic Ne, Kr, or Xe ion beams

K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi

Thin Solid Films　Vol. 517　No. 2　p. 835-840　2008/11　Research paper (scientific journal)

“Generation of Dust Seeds by Sputtering of Carbon-based Plasma Facing Materials under Low-energy H/D/T Ion Bombardment

Masashi Yamashiro, Satoshi Hamaguchi

Proceedings of the 22nd IAEA Fusion Energy Conference (13-18 Oct., 2008, Geneva, Switzerland)　2008/10　Research paper (scientific journal)

Electromagnetic Self-Organization and Transport Barrier Relaxations in Fusion Plasmas

G. Fuhr, S. Benkadda, P. Beyer, M. Leconte, X. Garbet, I. Sandberg, H. Isliker, D. Reiser, I. Caldas, Z.O. Guimarães-Filho, S. Hamaguchi

Proceedings of the 22nd IAEA Fusion Energy Conference (13-18 Oct., 2008, Geneva, Switzerland)　2008/10　Research paper (scientific journal)

Development of Diverse Lateral Line Patterns on the Teleost Caudal Fin

Hironori Wada, Satoshi Hamaguchi, Mitsuru Sakaizumi

DEVELOPMENTAL DYNAMICS　Vol. 237　No. 10　p. 2889-2902　2008/10　Research paper (scientific journal)

Reducing damage to Si substrates during gate etching processes

Tomokazu Ohchi, Shoji Kobayashi, Masanaga Fukasawa, Katsuhisa Kugimiya, Takashi Kinoshita, Toshifumi Takizawa, Satoshi Hamaguchi, Yukihiro Kamide, Tetsuya Tatsumi

Japanese Journal of Applied Physics　Vol. 47　No. 7　p. 5324-5326　2008/07　Research paper (scientific journal)

Measurement of Au sputtering yields by Ar and He with a low-energy mass selected ion beam system

K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi

Journal of Physics: Conference Series　Vol. 106　No. 1　2008/04　Research paper (scientific journal)

Measurement of sticking probability and sputtering yield of Au by low-energy mass selected ion beams with a quartz crystal microbalance

K. Ikuse, S. Yoshimura, M. Kiuchi, K. Hine, S. Hamaguchi

Journal of Physics: Conference Series　Vol. 106　No. 1　2008/04　Research paper (scientific journal)

Anomalous scaling of impurity transport in drift wave turbulence,

S. Futatani, S. Benkadda, Y. Nakamura, K. Kondo, S. Hamaguchi

Contrib. Plasma Phys.　Vol. 48　No. 1-3　p. 111-115　2008/04　Research paper (scientific journal)

Electromagnetic Effects on Transport Barrier Relaxations,

G. Fuhr, S. Benkadda, P. Beyer, X. Garbet, S. Hamaguchi

Contrib. Plasma Phys.　Vol. 48　No. 1-3　p. 23-26　2008/04　Research paper (scientific journal)

Plasma generation inside externally supplied Ar bubbles in water

H. Aoki, K. Kitano, S. Hamaguchi

Plasma Sources Sci. Technol.　Vol. 17　No. 2　2008/04　Research paper (scientific journal)

Nonlinear evolution of pressure gradient driven modes and anomalous transport in plasmas

Satoshi Hamaguchi

TURBULENT TRANSPORT IN FUSION PLASMA　Vol. 1013　p. 46-58　2008/04　Research paper (scientific journal)

Magnetized Microdischarge Plasma Generation at Low Pressure

T. Ito, K. Kobayashi, S. Hamaguchi, M. A. Cappelli

Thin Solid Films　Vol. 516　No. 19　p. 6668-6672　2008/04　Research paper (scientific journal)

Magnetized microdischarge plasmas in low pressure argon and helium

K. Kobayashi, T. Ito, M. A. Cappelli, S. Hamaguchi

J. Phys.: Conf. Series　Vol. 106　2008/04　Research paper (scientific journal)

Molecular dynamics simulation of microcrystalline Si deposition processes by silane plasmas

M. Matsukuma, S. Hamaguchi

Thin Solid Films　Vol. 516　No. 11　p. 3443-3448　2008/04　Research paper (scientific journal)

“Design of Biointerface by Nonequilibrium Atmospheric Plasma Jets -Approach from Plasma Susceptible Polymers-

Y. Nagasaki, M. Umeyama, M. Iijima, K. Kitano, S. Hamaguchi

J. Photopolym. Sci. Technol.　Vol. 21　No. 2　p. 267-270　2008/04　Research paper (scientific journal)

Magnetic neutral loop discharge (NLD) plasmas for surface processing

Taijiro Uchida, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 41　No. 8　2008/04　Research paper (scientific journal)

Molecular dynamics simulations for nitridation of organic polymer surfaces due to hydrogen-nitrogen ion beam injections

Masashi Yamashiro, Hideaki Yamada, Satoshi Hamaguchi

THIN SOLID FILMS　Vol. 516　No. 11　p. 3449-3453　2008/04　Research paper (scientific journal)

低周波大気圧マイクロプラズマジェット

北野勝久, 浜口智志

応用物理学会誌、　Vol. 2009　No. 1　p. 49-54　2008/04

The novel mutant scl of the medaka fish, Oryzias latipes, shows no secondary sex characters

Tadashi Sato, Aya Suzuki, Naoki Shibata, Mitsuru Sakaizumi, Satoshi Hamaguchi

Zoological Science　Vol. 25　No. 3　p. 299-306　2008/03　Research paper (scientific journal)

Development of NIR bioimaging systems

Kohei Soga, Takashi Tsuji, Fumio Tashiro, Joe Chiba, Motoi Oishi, Keitaro Yoshimoto, Yukio Nagasaki, Katsuhisa Kitano, Satoshi Hamaguchi

Journal of Physics: Conference Series　Vol. 106　No. 1　2008/03/01　Research paper (scientific journal)

CF₃イオンビームと光の重畳照射によるSiO₂エッチングイールドの測定

幾世和将, 吉村智, 唐橋一浩, 滝澤敏史, 木内正人, 木内正人, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 55th　No. 1　2008

反応性イオンによるFe-Co合金エッチング反応の検討

松本祥志, 唐橋一浩, 犬飼和明, 上原裕二, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 55th　No. 1　2008

ハルマンスナモグリ (十脚甲殻類) およびイボキサゴ (腹足類) 幼生の輸送

玉置昭夫, 万田敦昌, 大橋智志, 浜口昌巳, MANDAL Sumit, 中野善

日本海洋学会大会講演要旨集　Vol. 2008　2008

フロロカーボンビームによる低誘電率SiOCHエッチングの分子動力学シミュレーション

鈴木歩太, 滝澤敏史, 磯部倫朗, 小林正治, 深沢正永, 辰巳哲也, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 55th　No. 1　2008

分光学的手法によるAr直流グロー放電の電子温度,密度測定

田村知也, 伊藤剛仁, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 69th　No. 1　2008

コヒーレントラマン散乱による高圧力水素放電雰囲気での電界測定

伊藤剛仁, 小林和伸, CZARNETZKI Uwe, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 69th　No. 1　2008

大気圧・高気圧プラズマ研究の新しい展開

浜口智志

日本物理学会講演概要集　Vol. 63　No. 2　2008

反応性イオンを用いたFe-Co合金のエッチング

唐橋一浩, 松本祥志, 高須庸一, 犬飼和明, 上原裕二, 浜口智志

日本磁気学会学術講演概要集　Vol. 32nd　2008

CH_xF_yプラズマ処理とコンタクト抵抗の変動

片平研, 辰巳哲也, 小林正治, 深沢正永, 滝澤敏史, 礒部倫郎, 浜口智志, 長畑和典

応用物理学関係連合講演会講演予稿集　Vol. 55th　No. 1　2008

CF₃⁺イオンビームを用いたPMMAエッチングにおける光照射重畳効果

幾世和将, 吉村智, 塚崎泰裕, 木内正人, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 49th　2008

Measurement of magnesium oxide sputtering yields by He and Ar ions with a low-energy mass-selected ion beam system

K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi

Japanese Journal of Applied Physics　Vol. 46　No. 46　p. L1132-L1134　2007/11　Research paper (scientific journal)

Sputtering yields by noble gas injections measured with a low-energy mass analyzed ion beam system

K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi

2nd International Symposium on Atomic Technologies (ISAT-2), 1-2 October, 2007, Awaji Yumebutai International Conference Center, Yumebutai, Awaji City, Hyogo, Japan, P-27　2007/10

Radicals and non-equilibrium processes in low-temperature plasmas

Zoran Petrović, Nigel Mason, Satoshi Hamaguchi, Marija Radmilović-Radjenović

Journal of Physics: Conference Series　Vol. 86　No. 1　2007/06/01　Research paper (international conference proceedings)

High-m multiple tearing modes in tokamaks: MHD turbulence generation, interaction with the internal kink and sheared flows

A. Bierwage, S. Benkadda, M. Wakatani, S. Hamaguchi, Q. Yu

2007/04　Research paper (scientific journal)

Incident-energy dependence of crystalline structures of ion beam deposited Au thin films

T. Takizawa, T. Maeda, M. Kiuchi, S. Yoshimura, S. Hamaguchi

Philosophical Magazine　Vol. 87　No. 10　p. 1487-1495　2007/04　Research paper (scientific journal)

Control of atomic layer degradation on Si substrate

Y. Nakamura, T. Tatsumi, S. Kobayashi, K. Kugimiya, T. Harano, A. Ando, T. Kawase, S. Hamaguchi, S. Iseda

J.Vac.Sci.Tech.A　Vol. 25　No. 4　p. 1062-1067　2007/04　Research paper (scientific journal)

Dynamics of resistive double tearing modes with broad linear spectra

A. Bierwage, S. Benkadda, S. Hamaguchi, M. Wakatani

Phys. Plasmas　Vol. 14　No. 2　2007/04　Research paper (scientific journal)

Synthesis of Uniformly Dispersed Metal Nanoparticles with Dispersion Stability by Nonequilibrium Atmospheric Plasma Jets

H. Furusho, D. Miyamoto, Y. Nagasaki, K. Kitano, S. Hamaguchi

J. Photopolymer Sci. Tech.　Vol. 20　No. 2　p. 229-233　2007/04　Research paper (scientific journal)

Modelling of plasma surface interaction

S. Hamaguchi, M. Yamashiro, M. Matsukuma, H. Yamada

J. Phys. :Conf. Series　Vol. 86　No. 1　2007/04　Research paper (scientific journal)

Molecular dynamics simulations of organic polymer dry etching at high substrate temperatures

Masashi Yamashiro, Hideaki Yamada, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　Vol. 46　No. 4A　p. 1692-1699　2007/04　Research paper (scientific journal)

Temporal evolution of ion fragment production from dimethylsilane by a hot tungsten wire and compounds deposited on the tungsten surface

Satoru Yoshimura, Akinori Toh, Masato Kiuchi, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　Vol. 46　No. 4A　p. 1707-1709　2007/04　Research paper (scientific journal)

Molecular dynamics simulation study on substrate temperature dependence of sputtering yields for an organic polymer under ion bombardment

Masashi Yamashiro, Hideaki Yamada, Satoshi Hamaguchi

JOURNAL OF APPLIED PHYSICS　Vol. 101　No. 4　2007/02　Research paper (scientific journal)

光照射を重畳したCF₃イオンビームによるスパッタ率の測定

幾世和将, 吉村智, 木内正人, 木内正人, 滝澤敏史, 豊島隆寛, 唐橋一浩, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 54th　No. 1　2007

有機高分子膜エッチングにおけるCN膜形成のMDシミュレーション III

山城昌志, 山田英明, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 54th　No. 1　2007

ドライエッチング表面反応シミュレーション

浜口智志

真空　Vol. 50　No. 6　2007

分子運動論に基づくエッチング/デポジション表面のシミュレーション

浜口智志

応用物理学会学術講演会講演予稿集　Vol. 68th　2007

水素イオン照射によるシリコン酸化膜基板損傷の分子動力学シミュレーション

滝澤敏史, 小林正治, 辰巳哲也, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 54th　No. 1　2007

CF₃⁺イオン照射によるSi,SiO₂エッチング反応生成物の脱離角度分布

唐橋一浩, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 54th　No. 1　2007

低気圧直流マイクロ放電プラズマの発生

小林和伸, 伊藤剛仁, CAPPELLI Mark A., 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 68th　No. 1　2007

低エネルギーイオンビーム照射装置を用いたシリカ基板へのインジウム注入

日根清裕, 吉村智, 木内正人, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 48th　2007

CF₃⁺照射によるSiO₂エッチング反応生成物のイオン入射角およびエネルギー依存性

唐橋一浩, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 68th　No. 1　2007

水素終端されたSi結晶面上の吸着Si原子表面拡散に関する分子動力学シミュレーション

松隈正明, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 54th　No. 1　2007

生態系保全型増養殖システム確立のための種苗生産・放流技術の開発事業(暖流系アワビ類の遺伝的,形態的および生態的差異の特定と類縁関係の解明)

大橋智志, 岩永俊介, 藤井明彦, 桐山隆哉, 堀井豊充, 清本節夫, 浜口昌巳

長崎県総合水産試験場事業報告　Vol. 2006　2007

国内に生息する大型アワビ類の浮遊幼生期の卵黄タンパク質の消費状況の比較

浜口昌巳, 堀井豊充, 清本節夫, 高見秀輝, 大橋智志, 藤井明彦

日本水産学会大会講演要旨集　Vol. 2007　2007

Atomic-scale analyses of non-equilibrium surface reactions during plasma processing

Satoshi Hamaguchi, Masashi Yamashiro, Hideaki Yamada

ECS Transactions　Vol. 8　No. 1　p. 185-190　2007　Research paper (international conference proceedings)

Expression profiles of DMRT1 in closely related species of medaka indicate DMY has acquired a new expression pattern after duplication event

Hiroyuki Otake, Ai Shinomiya, Masaru Matsuda, Satoshi Hamaguchi, Mitsuru Sakaizumi

ZOOLOGICAL SCIENCE　Vol. 23　No. 12　p. 1223-1223　2006/12

Molecular dynamics study on Ar ion bombardment effects in amorphous SiO2 deposition processes

M. Taguchi, S. Hamaguchi

Japanese Journal of Applied Physics　Vol. 100　No. 12　2006/12　Research paper (scientific journal)

Temporal evolution of ion fragment production from methylsilane by a hot tungsten wire

Satoru Yoshimura, Akinori Toh, Takahiro Toyoshima, Masato Kiuchi, Satoshi Hamaguchi

JOURNAL OF APPLIED PHYSICS　Vol. 100　No. 9　2006/11　Research paper (scientific journal)

Substrate temperature dependence of sputtering yields in organic polymer plasma etching processes; short-time effects by ion bombardment

M. Yamashiro, H. Yamada, S. Hamaguchi

2006/09　Research paper (scientific journal)

Radio-Frequency (RF)-driven atmospheric-pressure plasmas in contact with liquid

K. Kitano, H. Aoki, S. Hamaguchi

Japanese Journal of Applied Physics　Vol. 45　No. 10 B　p. 8294-8297　2006/09　Research paper (scientific journal)

Numerical analysis of incident angle effects in reactive sputtering deposition of amorphous SiO2

M. Taguchi, S. Hamaguchi

Japanese Journal of Applied Physics　Vol. 45　No. 10　p. 8163-8167　2006/09　Research paper (scientific journal)

プラズマの素過程とモデリング

浜口智志

第１３回プラズマエレクトロニクス サマースクールテキスト　2006/08

High-m multiple tearing modes in tokamaks: MHD turbulence generation, interaction with the internal kink and sheared flows

A. Bierwage, S. Benkadda, M. Wakatani, S. Hamaguchi, Q. Yu

2006/08

Wild-derived XY sex-reversal mutants in the medaka, Oryzias latipes

Hiroyuki Otake, Ai Shinomiya, Masaru Matsuda, Satoshi Hamaguchi, Mitsuru Sakaizumi

GENETICS　Vol. 173　No. 4　p. 2083-2090　2006/08　Research paper (scientific journal)

Atomic-level simulation of non-equilibrium surface chemical reactions under plasma-wall interaction

S. Hamaguchi

Computer Physics Communications　Vol. 177　No. 1-2 SPEC. ISS.　p. 108-109　2006/08　Research paper (scientific journal)

Color reversion of the albino medaka fish associated with spontaneous somatic excision of the Tol-1 transposable element from the tyrosinase gene

Makiko Tsutsumi, Shuichiro Imai, Yoriko Kyono-Hamaguchi, Satoshi Hamaguchi, Akihiko Koga, Hiroshi Hori

PIGMENT CELL RESEARCH　Vol. 19　No. 3　p. 243-247　2006/06　Research paper (scientific journal)

Patterns Intermittent Transport and Universality in Convective Turbulence in Fusion Plasmas

S. Benkadda, P. Beyer, K. Takeda, X. Garbet, S. Hamaguchi, N. Bian

No. 23　p. 170-170　2006/06

Theory of breakdown phenomena in supercritical fluids

S. Hamaguchi

2006/05

RF barrier discharges on the liquid water surface

K. Kitano, H. Aoki, S. Hamaguchi

Proceedings of the 3rd International Workshop on Microplasmas (IWM2006) (ed. by G. Babucke, May 9-11, 2006, Greifswald, Germany)p.67　2006/05　Research paper (other academic)

Fragment ions of methylsilane produced by hot tungsten wires

Satoru Yoshimura, Akinori Toh, Takuya Maeda, Satoshi Sugimoto, Masato Kiuchi, Satoshi Hamaguchi

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers　Vol. 45　No. 3 A　p. 1813-1815　2006/03/08　Research paper (scientific journal)

Numerical analyses of subsurface reaction layers for reactive ion etching and sputtering deposition processes

S. Hamaguchi

2006/03

Fragment ions of methylsilane produced by hot tungsten wires

S. Yoshimura, A. Toh, T. Maeda, S. Sugimoto, M. Kiuchi, S. Hamaguchi

Japanese Journal of Applied Physics　Vol. 45　No. 3A　p. 1813-1815　2006/03　Research paper (scientific journal)

クロアワビとマダカアワビの類縁関係-I-遺伝学的アプローチ-

浜口昌巳, 佐々木美穂, 大橋智志, 堀井豊充

日本水産学会大会講演要旨集　Vol. 2006　2006

クロアワビとマダカアワビの類縁関係-II-形態学的アプローチ-

堀井豊充, 大橋智志, 浜口昌巳

日本水産学会大会講演要旨集　Vol. 2006　2006

生態系保全型増養殖システム確立のための種苗生産・放流技術の開発事業(暖流系アワビ類の遺伝的,形態的および生態的差異の特定と類縁関係の解明)

大橋智志, 岩永俊介, 藤井明彦, 桐山隆哉, 堀井豊充, 清本節夫, 浜口昌巳

長崎県総合水産試験場事業報告　Vol. 2005　2006

有機高分子膜エッチングにおけるCN膜形成のMDシミュレーション II

山城昌志, 山田英明, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 67th　No. 1　2006

有機ケイ素化合物の表面電離フラグメントイオンとタングステンワイヤの表面状態

豊島隆寛, 藤章至, 吉村智, 木内正人, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 53rd　No. 1　2006

エッチング・プラズマ曝露試料の真空搬送電子スピン共鳴(in-vacuo ESR)法による観察 5

石川健治, 山崎雄一, 山崎聡, 森本幸裕, 陣内仏りん, 石川寧, 浜口智志, 寒川誠二

応用物理学関係連合講演会講演予稿集　Vol. 53rd　No. 1　2006

Siトレンチ加工時の残さ発生のメカニズム解析

中村雄吾, 釘宮克久, 片平研, 牧田和明, 川瀬智人, 浜口智志, 上出幸洋, 辰巳哲也, 森田靖

応用物理学関係連合講演会講演予稿集　Vol. 53rd　No. 1　2006

微結晶SiGe薄膜プラズマCVDおよび水素引き抜き反応の分子動力学シミュレーション

松隈正明, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 67th　No. 1　2006

低エネルギーイオンビーム照射装置を用いた希ガスイオンによる金のスパッタ率の精密測定

日根清裕, 吉村智, 木内正人, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 47th　2006

有機高分子膜エッチングにおけるCN膜形成のMDシミュレーション

山城昌志, 山田英明, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 53rd　No. 1　2006

イオンビーム蒸着法を用いたAu薄膜形成における結晶配向性のエネルギー依存性

滝沢敏史, 前田拓也, 木内正人, 木内正人, 吉村智, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 53rd　No. 2　2006

低エネルギーCF₃イオンビームによるSiO₂のエッチング機構

滝澤敏史, 豊島隆寛, 木内正人, 木内正人, 吉村智, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 47th　2006

アワビ類初期生態解明のための種判別技術の開発

浜口昌巳, 佐々木美穂, 堀井豊充, 清本節夫, 大橋智志, 藤井明彦, 滝口直之, 橋本加奈子, 竹内泰介

水産総合研究センター研究報告　2006

Atomistic scale analyses of reactive ion etching and sputtering deposition processes by numerical simulations

S. Hamaguchi

2006/01

Electrode voltage distribution analyses for large-area capacitively coupled plasmas based on transmission line models

M. Matsukuma, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and the 23rd Symposium on Plasma Processing (January 24-27,2006, Matsushima/Sendai, Japan) 275-276 (2006).　2006/01

MD and MC simulations of amorphous SiO2 thin film formed by reactive sputtering deposition processes

M. Taguchi, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and the 23rd Symposium on Plasma Processing (January 24-27,2006, Matsushima/Sendai, Japan) 103-104 (2006).　2006/01

Molecular dynamics simulation analyses of surface damages during SiO2 selective etching processes,

T. Kawase, A. Ando, T. Tatsumi, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and the 23rd Symposium on Plasma Processing (January 24-27,2006, Matsushima/Sendai, Japan) 89-90 (2006).　2006/01

Investigation of RF-driven atmospheric-pressure plasmasin contact with liquid water

Katsuhisa Kitano, Hironori Aoki, Satoshi Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and 23th Symposium on Plasma Processing　2006/01

Crystalline structure control of Au thin films in ion beam deposition processes

T. Takizawa, T. Maeda, S. Yoshimura, M. Kiuchi, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and 23th Symposium on Plasma Processing　2006/01　Research paper (international conference proceedings)

Fragment ions of methylsilane and dimethylsilane generated in tungsten-based catalytic chemical vapor deposition (Cat-CVD) processes

S. Yoshimura, A. Toh, T. Maeda, S. Sugimoto, M. Kiuchi, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and 23th Symposium on Plasma Processing　2006/01　Research paper (international conference proceedings)

Topography evolution of dielectric thin films on grating surfaces in Oblique Deposition by Multiple Sources (ODMS)

M. Taguchi, T. Kunisada, S. Kusaka, S. Hamaguchi

IEEE Trans. Plasma Sci　Vol. 34　No. 4 I　p. 1084-1093　2006/01　Research paper (scientific journal)

Gonadal development in XY sex-reversal mutants derived from wild populations of the medaka, Oryzias latipes

Hiroyuki Otake, Ai Shinomiya, Masaru Matsuda, Satoshi Hamaguchi, Mitsuru Sakaizumi

ZOOLOGICAL SCIENCE　Vol. 22　No. 12　p. 1510-1510　2005/12

Molecular dynamics simulation analyses on injection angle dependence of SiO2 sputtering yields by fluorocarbon beams

T. Kawase, S. Hamaguchi

Proceedings of the 5th International Symposium on Dry Process (November28-30, 2005, Jeju, Korea) 245-246 (2005).　Vol. 515　No. 12　p. 4883-4886　2005/11　Research paper (scientific journal)

Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas

M. Matsukuma, S. Hamaguchi

Proceedings of the 5th International Symposium on Dry Process (November28-30, 2005, Jeju, Korea) 349-350 (2005).　Vol. 515　No. 12　p. 5188-5192　2005/11　Research paper (scientific journal)

MD simulation of amorphous SiO2 thin film formation in reactive sputter deposition processes,

M. Taguchi, S. Hamaguchi

Proceedings of the 5th International Symposium on Dry Process (November28-30,2005, Jeju, Korea) 243-244 (2005).　Vol. 515　No. 12　p. 4879-4882　2005/11　Research paper (scientific journal)

Molecular dynamics simulation of plasma-surface interactions during dry etching processes

S. Hamaguchi, H. Yamada, M. Yamashiro

Proceedings of the 2005 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)　Vol. 2005　p. 67-70　2005/09　Research paper (international conference proceedings)

Atomistic modeling of etching and deposition processes via molecular dynamics simulations

S. Hamaguchi, H. Yamada, M. Yamashiro

Proceedings of the 2005 International Meeting for Future of Electron Devices, Kansai (2005IMFEDK: April 11-13, 2005, Kyoto University Clock Tower Centennial Hall, Kyoto, Japan), 31-32 (2005).　2005/04

Atomisitic modeling of etching and deposition processes via molecular dynamics simulations

S. Hamaguchi, H. Yamada, M. Yamashiro

Proceedings of the 2005 International Meeting for Future of Electron Devices,Kanasai (2005IMFEDK)　2005/04

Visualization of Interactions between Organic Polymer Surfaces and Ion beams obtained from Molecular Dynamics Simulations

H. Yamada, S. Hamaguchi

IEEE Trans. Plasma Sci. 33 (2) 246-247　Vol. 33　No. 2 I　p. 246-247　2005/04　Research paper (scientific journal)

Nusselt number scaling in tokamak plasma turbulence

K. Takeda, S. Benkadda, S. Hamaguchi, M. Wakatani

Phys. Plasmas 12 (4) 052309-1 ~0523980-8　Vol. 12　No. 5　p. 1-8　2005/04　Research paper (scientific journal)

スパッタ成膜による薄膜の形状および非晶質膜質の数値解析予測

田口雅文, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 52nd　No. 1　2005

低エネルギーイオンビーム照射装置を用いた金の堆積率の精密測定

日根清裕, 吉村智, 前田拓也, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 46th　2005

第2期魚介類種苗量産技術開発研究事業

大橋智志, 岩永俊介, 藤井明彦, 桐山隆哉, 堀井豊充, 清本節夫, 浜口昌巳

長崎県総合水産試験場事業報告　Vol. 2004　2005

メチルシランおよびジメチルシランの表面解離フラグメントイオンの測定

藤章至, 吉村智, 杉本敏司, 木内正人, 浜口智志

真空に関する連合講演会講演予稿集　Vol. 46th　2005

CF_xビームによるSiO₂スパッタリングイールド角度依存性に関するMDシミュレーション解析

川瀬智人, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 66th　No. 1　2005

有機ケイ素化合物の表面電離フラグメントイオンの測定

藤章至, 前田拓也, 吉村智, 杉本敏司, 木内正人, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 66th　No. 1　2005

暖流系アワビ類3種における着底基盤の設置方向および水深による浮遊幼生着底率の差異

大橋智志, 清本節夫, 堀井豊充, 浜口昌巳

日本水産学会大会講演要旨集　Vol. 2005　2005

反応性スパッタ法による非晶質SiO₂薄膜堆積プロセスのMDシミュレーション解析

田口雅文, 田口雅文, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 66th　No. 1　2005

異なる温度の有機高分子基板-CH₄ビーム間相互作用のMDシミュレーション

山城昌志, 山田英明, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 66th　No. 1　2005

Study on Transport Regimes of Ion Temperature Gradient Driven Turbulence

K. Takeda, S. Benkadda, S. Hamaguchi, M. Wakatani

J. Plasma and Fusion Research SERIES 6, 570-572　2005/01　Research paper (scientific journal)

Effects of Van der Waals interactions on SiO2 etching by CFx plasmas

H. Ohta, S. Hamaguchi

J. Plasma and Fusion Research SERIES 6, 399-401　2005/01　Research paper (scientific journal)

Plasma Beam Irradiation into Organic Polymer Surfaces

H. Yamada, S. Hamaguchi

J. Plasma and Fusion Research SERIES 6, 402-405　2005/01　Research paper (scientific journal)

Molecular dynamics simulatin of low energy Au ion-beam deposition using the glue model

T. Takizawa, S. Hamaguchi, T. Fukuda, M. Kiuchi, K. Ito, H. Yamada

Proc. 22nd Symposium on Plasma Processing, Nagoya, Japan, 26-28 January, p.587-588 (2005)　2005/01

Numerical analyses of surface interactions between radical beams and organic polymer surfaces

H. Yamada, S. Hamaguchi

Plasma Phys. Control. Fusion 47 A11-A18　Vol. 47　No. 5 A　2005/01　Research paper (scientific journal)

Plasma discharge in supercritical fluids

Satoshi Hamaguchi, Suresh C. Sharma

32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts　Vol. 3　p. 2298-2301　2005　Research paper (international conference proceedings)

Nonlinear evolution of q=1 triple tearing modes in a tokamak plasma

A. Bierwage, S. Hamaguchi, M. Wakatani, S. Benkadda, X. Leoncini

Phy. Rev. Lett. 94(6), 065001-1~065001-4　Vol. 94　No. 6　p. 065001-065001　2005/01　Research paper (scientific journal)

On Interatomic Potential Functions for Molecular Dynamics (MD) Simulations of Plasma-Wall Interactions

S. Hamaguchi, H. Ohta, H. Yamada

J. Plasma and Fusion Research　2004/12　Research paper (scientific journal)

Mutations of the sex-determining gene DMY from wild populations of the medaka. Oryzias latipes

Hiroyuki Ohtake, Ai Shinomiya, Masaru Matsuda, Satoshi Hamaguchi, Mitsuru Sakaizumi

ZOOLOGICAL SCIENCE　Vol. 21　No. 12　p. 1345-1345　2004/12

Investigation of Interactions between Plasmas and Organic Polymer Surfaces using Molecular Dynamics Simulation

H. Yamada, S. Hamaguchi

Proceedings of the 21st Symposium on Plasma Processing(SPP-21)}, ed. by K. Ono, (Organizing Committee of SPP-21, Sapporo, 2004) p.214-215　2004/12　Research paper (other academic)

Nonlinear Behavior of Resistive Pressure Driven Modes in Stellarator/Heliotron Plasmas with Vacuum Magnetic Islands

T. Unemura, S. Hamaguchi, M. Wakatani

Phys. Plasmas 11, 1545-1551　Vol. 11　No. 4　p. 1545-1551　2004/12　Research paper (scientific journal)

Molecular-dynamics simulations of organic polymer etching by hydrocarbon beams

Hideaki Yamada, Satoshi Hamaguchi

Journal of Applied Physics　Vol. 96　No. 11　p. 6147-6152　2004/12/01　Research paper (scientific journal)

Onset of intermittent thermal transport by ion-temperature gradient (ITG)-driven turbulence based on a low-degree-of-freedom model

K. Takeda, S. Benkadda, S. Hamaguchi, M. Wakatani

Phys. Plasmas 11(7), 3561-3571　Vol. 11　No. 7　p. 3561-3571　2004/12　Research paper (scientific journal)

Molecular dynamics simulations of organic polymer etching by hydrocarbon beams

H. Yamada, S. Hamaguchi

J. Appl. Phys. vol. 96, 6147 (2004).　2004/12　Research paper (scientific journal)

Onset of intermittent thermal transport by ion-temperature-gradient-driven turbulence based on a low-degree-of-freedom model

K. Takeda, S. Benkadda, S. Hamaguchi, M. Wakatani

Physics of Plasmas　Vol. 11　No. 7　p. 3561-3571　2004/07　Research paper (scientific journal)

Nonlinear behavior of resistive pressure driven modes in stellarator/heliotron plasmas with vacuum magnetic islands

T. Unemura, S. Hamaguchi, M. Wakatani

Physics of Plasmas　Vol. 11　No. 4　p. 1545-1551　2004/04　Research paper (scientific journal)

(H,C,N)系原子間ポテンシアルを用いた有機ポリマーエッチングの分子動力学シミュレーション

山田英明, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 51st　No. 1　2004

有機ポリマーエッチングおよび金属スパッタリングにおけるビーム表面相互作用

浜口智志, 山田英明, 伊藤憲司

応用物理学会学術講演会講演予稿集　Vol. 65th　No. 1　2004

Large-scale Numerical Simulations of Plasmas

浜口智志

日本原子力研究所JAERI-Conf　2004

遺伝子解析識別技術を用いたクロアワビ,マダカアワビの資源特性に関する研究

大橋智志, 藤井明彦, 桐山隆哉, 堀井豊充, 浜口昌巳, 清本節夫

長崎県総合水産試験場事業報告　Vol. 2003　2004

CF_xビームによるSiO₂エッチングの数値計算による研究

太田裕朗, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 51st　No. 1　2004

Introduction: Simulation Reseach in Plasma Application Technolgies

Satoshi Hamaguchi

Vol. 80　No. 2　2004/01

シミュレーションによるプラズマ・システム構築

浜口智志

第14回プラズマエレクトロニクス講習会テキスト　2003/12

Molecular Dynamics Simulation of Organic Polymer Etching

H. Yamada, S. Hamaguchi

Proceedings of International Symposium on Dry Process (DPS2003), Tokyo 2003 (The Institute of Electrical Engineers of Japan, Tokyo, 2003), 49-54　2003/12　Research paper (other academic)

Relaxation time of strongly coupled Yukawa systems

T. Saigo, S. Hamaguchi

Proceedings of the 26th International Conference on Phenomena in Ionized Gases (XXVI ICPIG) (ed. by J. Meichner, D. Loffhagen, and H. E. Wagner: XXVI ICPIG Committee, Greifswald, 2003) vol.1 pp.217-218　2003/12　Research paper (other academic)

Molecular Dynamics simulation of polymer etching by H2 and N2 plasmas

H. Yamada, S. Hamaguchi

Proceedings of the 16th International Symposium on Plasma Chemistry (ISPC) (ed. by R. d'Agostino, P. Favia, F. Fracassi, F. Palumbo: Department of Chemistry, University of Bari, Institute of Inorganic Methodologies and Plasmas (IMIP), CNR Bari, 2003) pp. 209　2003/12　Research paper (other academic)

Simulations of flattening processes on ion--bombarded silicon surfaces

T. Tani, S. Hamaguchi

Proceedings of the 20th Symposium on Plasma Processing (SPP-20)} (ed. by K. Ono: Organizing Committee of SPP-20, Kyoto, 2003) p.201-202　2003/12　Research paper (other academic)

MD simulations of (H,C,N) systems for investigation of plasma-polymer surface reaction mechanisms

H. Yamada, S. Hamaguchi

Proceedings of the 20th Symposium on Plasma Processing (SPP-20)} (ed. by K. Ono: Organizing Committee of SPP-20, Kyoto, 2003) p.191-192　2003/12　Research paper (other academic)

Destabilization of nonlinear resistive wall mode due to suppression of poloidal rotation in a cylindrical tokamak

M. Sato, S. Hamaguchi, M. Wakatani

Phys. Plasmas 10, 187-194　Vol. 10　No. 1　p. 187-194　2003/12　Research paper (scientific journal)

Shear flow generation due to electromagnetic instabilities

M. Wakatani, M. Sato, N. Miyato, S. Hamaguchi

Nuclear Fusion 43(1), 63-67　Vol. 43　No. 1　p. 63-67　2003/12　Research paper (scientific journal)

Masahiro Wakatani - Obituary

Hamaguchi S, Hasegawa A, Van Dam J

PHYSICS TODAY　Vol. 56　No. 11　p. 91-92　2003/11　Research paper (scientific journal)

Oxidation of cobalt(III)-sulfur-rich dithiolate complexes and spectroscopic and electrical properties of the oxidized species

Kazuya Kubo, Motohiro Nakano, Satoshi Hamaguchi, Gen Etsu Matsubayashi

Inorganica Chimica Acta　Vol. 346　p. 43-48　2003/03/25　Research paper (scientific journal)

中性気体圧力分布がアルゴンプラズマ分布に与える影響について

石渡寛隆, 浜口智志, 若谷誠宏

応用物理学関係連合講演会講演予稿集　Vol. 50th　No. 1　2003

Si/SiO₂へのCFビーム照射に対する表面緩和過程を含む分子動力学シミュレーション

太田裕朗, 浜口智志, 若谷誠宏, 山田英明

応用物理学関係連合講演会講演予稿集　Vol. 50th　No. 1　2003

SiO₂のCF_xビームによるエッチング・堆積過程の分子間力を含んだMDシミュレーション

太田裕朗, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 64th　No. 1　2003

H₂/N₂プラズマによるポリマーエッチングの分子動力学シミュレーション

山田英明, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 50th　No. 1　2003

有機ポリマーエッチングの分子動力学シミュレーション

山田英明, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 64th　No. 1　2003

ナノスケール表面反応モデリング

浜口智志

シリコンテクノロジー　2002/12

Strongly Coupled Dusty Plasmas

HAMAGUCHI Satoshi

Journal of Plasma and Fusion Research　Vol. 78　No. 4　p. 313-319　2002/12

Interatomic potentials for MD simulation of polymer etching by N2/H2 and NH3 plasmas

H. Yamada, S. Hamaguchi

Proceedings of International Symposium on Dry Process (DPS2002), Tokyo 2002 : The Institute of Electrical Engineers of Japan, Tokyo, 2002), 189-194　2002/12　Research paper (other academic)

Molecular Dynamics Simulation of Si and SiO2 Etching

S. Hamaguch

Proceedings of Joint Conference of ESCAMPIG16 and ICRP5, (ed. by N. Sadeghi and H. Sugai, European Physical Society and Japan Society of Applied Physics, Grenoble, 2002), Vol.II, pp.5-6　2002/12　Research paper (other academic)

Shear viscosity of strongly coupled Yukawa systems

T. Saigo, S. Hamaguchi

Phys. Plasmas 9(4), 1210-1216　Vol. 9　No. 4　p. 1210-1216　2002/12　Research paper (scientific journal)

Surface molecular dynamics of Si/SiO2 reactive ion etching

S. Hamaguchi, H. Ohta

Vacuum 66(3-4), 189-195　Vol. 66　No. 3-4　p. 189-195　2002/12　Research paper (scientific journal)

Nonlinear behaviour of resistive drift-Alfven instabilities in a magnetized cylindrical plasma

N. Miyato, S. Hamaguchi, M. Wakatani

Plasma Phys. Control. Fusion 44(8), 1689-1705　Vol. 44　No. 8　p. 1689-1705　2002/12　Research paper (scientific journal)

Effect of poloidal shear flow on local flattening of density profile due to nonlinear resistive interchange mode

T. Unemura, S. Hamaguchi, M. Wakatani

Plasma Phys. Control. Fusion 44(5A), A507-515　Vol. 44　No. 5 A　p. 137-137　2002/12

ELM-like behaviour generated by nonlinear ion-temperature-gradient-driven mode

K. Takeda, S. Hamaguchi, M. Wakatani

Plasma Phys. Control. Fusion 44(5A), A487-494　Vol. 44　No. 5 A　2002/12　Research paper (scientific journal)

Resistive drift-Alfv&eacute;n instability in tokamak edge plasmas

N. Miyato, S. Hamaguchi, M. Wakatani

Plasma Phys. Control. Fusion 44 No 5A A293-A298　Vol. 44　No. 5 A　2002/05　Research paper (scientific journal)

CF_xによるSiO₂エッチングにおける表面反応の分子動力学シミュレーション

太田裕朗, 浜口智志, 若谷誠宏

分子動力学シンポジウム講演論文集　Vol. 7th　2002

プラズマエッチングにおける表面反応シミュレーションのための原子間ポテンシャルモデル

太田裕朗, 浜口智志, 若谷誠宏

応用物理学会学術講演会講演予稿集　Vol. 63rd　No. 1　2002

プロセスシミュレーション

浜口智志

第12回プラズマエレクトロニクス講習会テキスト — プラズマCVDによる新材料プロセスとプラズマモニタリング・モデリングの最前線　2001/12

IT革命とエネルギー問題

浜口智志

公開講座テキストNo. 6, 「21世紀のエネルギー科学 -新エネルギー・材料の創成-」　2001/12

Fluid simulation of two-dimensional axially symmetric RF plasmas

H. Ishiwata, S. Hamaguchi

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p. 207-208　2001/12

Simulations of plasma-surface interaction in reactive plasmas

HAMAGUCHI Satoshi

OYOBUTURI　Vol. 70　No. 9　p. 1099-1103　2001/12

Molecular Dynamics Simulation of Surface Reactions during Plasma Etching Processes

HAMAGUCHI Satoshi

Journal of plasma and fusion research　Vol. 77　No. 12　p. 1221-1229　2001/12

Waves in strongly-coupled classical one-component plasmas and Yukawa fluids

S. Hamaguchi, H. Ohta

Physica Scripta, T89, 127-129　Vol. 89　p. 127-129　2001/12　Research paper (scientific journal)

Atomic-scale surface analysis of silicon etching by Cl/O plasmas

H. Ohta, S. Hamaguchi

Proceedings of International Symposium on Dry Process (DPS2001), Tokyo 2001 (The Institute of Electrical Engineers of Japan, Tokyo, 2001), 129-133　2001/12　Research paper (other academic)

Modeling of Surface Reactions for Silicon and Silicon Dioxide Etching Processes

S. Hamaguchi, H. Ohta

Proceedings of the First International Symposium on Advanced Fluid Information (Institute of Fluid Science, Tohoku University, Sendai, 2001) p206-207　2001/12　Research paper (other academic)

Numerical simulation of surface reaction dynamics for Si/SiO2 selective etching

S. Hamaguchi, H. Ohta

Extended Abstracts of International Symposium on Material Processing for Nanostructure Devices (MPND2001 Committee, Kyoto, 2001) p75-76　2001/12　Research paper (other academic)

Three dimensional model for plasma-induced charging in asymmetric microstructure

S. S. Kim, S. Hamaguchi

Proceedings of the 25th International Conference on Phenomena in Ionized Gases (XXVICPIG) (ed. by T.~Goto: XXVICPIG Committee, Nagoya, 2001) pp.225-226　2001/12　Research paper (other academic)

Screening effects on shear viscosity in strongly coupled Yukawa systems

T. Saigo, S. Hamaguchi

Proceedings of the 25th International Conference on Phenomena in Ionized Gases (XXVICPIG) (ed. by T.~Goto: XXVICPIG Committee, Nagoya, 2001) pp.53-54　2001/12　Research paper (other academic)

Finite--element drift--diffusion simulation of two-dimensional axisymmetric parallel plate Ar discharges

H. Ishiwata, S. Hamaguchi

Proceedings of the 25th International Conference on Phenomena in Ionized Gases (XXVICPIG) (ed. by T.~Goto: XXVICPIG Committee, Nagoya, 2001) pp.209-210　2001/12　Research paper (other academic)

Surface reaction dynamics of Si/SiO2 selective etching for halogens

H. Ohta, S. Hamaguchi

Proceedings of the 25th International Conference on Phenomena in Ionized Gases (XXVICPIG) (ed. by T.~Goto: XXVICPIG Committee, Nagoya, 2001) pp.159-160　2001/12　Research paper (other academic)

Molecular dynamics simulation of Si/SiO2 selective etching

S. Hamaguchi, H. Ohta

Proceedings of the 6th International Symposium on Sputtering and Plasma Processes (ISSP2001) (ed. by E. Kusano: ISSP2001 Committee, Kanazawa, 2001) pp.85-89　2001/12　Research paper (other academic)

Molecular dynamics simulation of Si and SiO2 selective etching

S. Hamaguchi, H. Ohta

Proceedings of the 15th International Symposium on Plasma Chemistry (ed. by A. Bouchoule, J. M. Pouvesle, A. L. Thomann, J. M. Bauchire, and E. Robert:The Organization Committee of the 15th International Symposium on Plasma Chemistry, Orleans, 2001) Vol. V, 1701-1704　2001/12　Research paper (other academic)

Molecular dynamics simulations of Si and SiO2 reactive ion etching by halogens, in Semiconductor Technology

S. Hamaguchi, H. Ohta

by M. Yang: Proceeding of the 1st International Conference on Semiconductor Technology, The Electrochemical Society, Inc., New Jersey, 2001), vol. 2, 388-393　2001/12　Research paper (other academic)

MD Simulation of Silicon and Silicon Dioxide Etching by Halogens: The Effect of Neutral Halogens on Etch Selectivities

H.Ohta, S. Hamaguchi

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p.~469-470　2001/12　Research paper (other academic)

PIC/MCC simulation of a 2d axially symmetric dual-frequency RF plasma processing systems

S. Sunohara, S. Hamaguchi

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p. 209-210　2001/12　Research paper (other academic)

Shear Viscosity of Yukawa Systems: Influence of Coupling and Screening Effects in Fluid States

T. Saigo, S. Hamaguchi

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p.52-53　2001/12　Research paper (other academic)

Effect of Current on Resistive Drift-Alfven Instability in a Cylindrical Plasma

N. Miyato, S. Hamaguchi, M. Wakatani

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p. 47-48　2001/12　Research paper (other academic)

The finite--element spectral method for three-dimensional reduced MHD equations

M. Yamamoto, S. Hamaguchi, M. Wakatani

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p.43-44　2001/12　Research paper (other academic)

Non-linear Saturation of Resistive Interchange Mode due to Flattening of Density Profile

T. Unemura, S. Hamaguchi, M. Wakatani

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p.41-42　2001/12　Research paper (other academic)

Low Order Dynamical Models for Ion Temperature Gradient (ITG) Mode

K. Takeda, S. Hamaguchi, M. Wakatani

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p. 39-40　Vol. 55　No. 0　p. 159-159　2001/12

Nonlinear double tearing modes in negative shear tokamaks

M. Sato, S. Hamaguchi, W. Wakatani

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p. 15-16　Vol. 55　No. 0　p. 161-161　2001/12

Reduction of growth rates of high-n ballooning modes due to sheared toroidal flows in tokamaks

M. Furukawa, Y. Nakamura, S. Hamaguchi, M. Wakatani

Proceedings of Plasma Science Symposium 2001 and the 18th Symposium on Plasma Processing (PSS-2001/SPP-18)} (ed. by N. Sato and H. Fujiyama: Organization Committee of PSS2001/SPP-18, Kyoto, 2001) p. 13-14　2001/12　Research paper (other academic)

Numerical investigation on plasma and poly-Si etching uniformity control over large area in a resonant inductively coupled plasma source

S. S. Kim, S. Hamaguchi, N. S. Yoon, C. S. Chang, Y. D. Lee, S. H. Ku

Phys. Plasmas 8, 1384-1394　Vol. 8　No. 4　p. 1384-1394　2001/12　Research paper (scientific journal)

Classical interatomic potential functions for Si-O-F and Si-O-Cl systems

H. Ohta, S. Hamaguchi

J. Chem. Phys., 115, 6679-6690　Vol. 115　No. 14　p. 6679-6690　2001/12　Research paper (scientific journal)

Molecular Dynamics Simulation of Silicon and Silicon Dioxide Etching by Energetic Halogen Beams

H. Ohta, S. Hamaguchi

J. Vac. Sci. Tech., A, 19(5), 2373-2381　Vol. 19　No. 5　p. 2373-2381　2001/12　Research paper (scientific journal)

Nonlinear Double Tearing Mode in Negative Shear Cylindrical Tokamaks

M. Sato, S. Hamaguchi, M. Wakatani

J. Phys. Soc. Japan, 70(9), 2578-2587　Vol. 70　No. 9　p. 2578-2587　2001/12　Research paper (scientific journal)

High-n ballooning instabilities in toroidally rotating tokamaks

M. Furukawa, Y. Nakamura, S. Hamaguchi, M. Wakatani

Phys. Plasmas 8(11), 4889-4897　Vol. 8　No. 11　p. 4889-4897　2001/12　Research paper (scientific journal)

Plasma Current Effects on Unstable Resistive Drift-Alfvén Modes in a Magnetized Cylindrical Plasma

Naoaki Miyato, Satoshi Hamaguchi, Masahiro Wakatani

Journal of the Physical Society of Japan　Vol. 70　No. 11　p. 3197-3200　2001/11　Research paper (scientific journal)

サブサーフェスのモデリング・シミュレーション

浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 48th　2001

Si-O-F系およびSi-O-Cl系の原子間ポテンシャルを用いたMDシミュレーション

太田裕朗, 浜口智志

応用物理学関係連合講演会講演予稿集　Vol. 48th　No. 1　2001

塩素/酸素を用いたシリコンの反応性イオンエッチングの分子動力学による研究

太田裕朗, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 62nd　No. 1　2001

Modeling of reactive ion etching for Si/SiO2 systems

S Hamaguchi, H Ohta

SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 2001　p. 170-173　2001　Research paper (international conference proceedings)

Fluid simulation of two-dimensional axially symmetric process plasmas

Ishiwata Hirotaka, Hamaguchi Satoshi

Meeting Abstracts of the Physical Society of Japan　Vol. 56　No. 0　p. 180-180　2001

Molecular dynamics evaluation of self diffusion in Yukawa systems

H. Ohta, S. Hamaguchi

Phys. Plasmas 7, 4506-4514　Vol. 7　No. 11　p. 4506-4514　2000/12　Research paper (scientific journal)

Dynamical properties of strongly coupled dusty plasmas

S. Hamaguchi, H. Ohta

Frontiers in Dusty Plasmas (ed. by Y. Nakamura, T. Yokota, and P. K. Shukla: Elsevier Sci., 2000) 135-140　p. 135-140　2000/12　Research paper (international conference proceedings)

Resistive Drift-Alfven Instability in a Cylindrical Magnetized Plasma

N. Miyato, S. Hamaguchi, M. Wakatani

Contrib. Plasma Phys. 40, 362-367　Vol. 40　No. 3-4　p. 362-367　2000/12　Research paper (scientific journal)

Resistive Drift-Alfven Instabilities in a Cylindrical Plasma

N. Miyato, S. Hamaguchi, M. Wakatani

J. Phys. Soc. Jpn. 69, 1401-1408　Vol. 69　No. 5　p. 1401-1408　2000/12　Research paper (scientific journal)

Classical plasmas with Yukawa potentials

S. Hamaguchi, H. Ohta

J. Phys. IV France 10, Pr5-19-26　Vol. 10　No. 5　2000/12　Research paper (scientific journal)

Tokamak equilibria with toroidal flows

M. Furukawa, Y. Nakamura, S. Hamaguchi, M. Wakatani

J. Plasma and Fusion Research, 76, 937-948　Vol. 76　No. 9　p. 937-948　2000/12

Wave dispersion relations in Yukawa fluids

H. Ohta, S. Hamaguchi

Phy. Rev. Lett. 84, 6026-6029　Vol. 84　No. 26　p. 6026-6029　2000/12　Research paper (scientific journal)

イントロダクトリートーク-Feature Profile Evolutionのためのプラズマ物理化学とは-

浜口智志

応用物理学会学術講演会講演予稿集　Vol. 61st　2000

酸化シリコンのハロゲンによるエッチングのMDシミュレーション

太田裕朗, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 61st　No. 1　2000

二次元軸対称二周波駆動型RFプラズマプロセシングシステムのPIC/MCCシミュレーション

春原聡, 浜口智志

応用物理学会学術講演会講演予稿集　Vol. 61st　No. 1　2000

モデリング・シミュレーション

浜口智志

第6回プラズマエレクトロにクス・サマースクールテキスト　1999/12

Modeling of plasma processing

S. Hamaguch

IBM J. Res. Develop. 43, 199-215　1999/12　Research paper (scientific journal)

Modeling and simulation methods for plasma processing

S. Hamaguchi

IBM Journal of Research and Development　Vol. 43　No. 1-2　p. 199-215　1999/04　Research paper (scientific journal)

Strongly coupled Yukawa plasmasmodels for dusty plasmas and colloidal suspensions

Satoshi Hamaguchi

Plasmas & Ions　1999　Research paper (scientific journal)

Strongly coupled Yukawa plasmas — models for dusty plasmas and colloidal suspensions

S. Hamaguchi

Plasmas &amp; Ions　Vol. 2　No. 2　p. 57-68　1999/01　Research paper (scientific journal)

Static and dynamic properties of Yukawa systems

S Hamaguchi, H Ohta

INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GASES, VOL IV, PROCEEDINGS　p. 133-134　1999　Research paper (international conference proceedings)

Triple point of Yukawa systems

S. Hamaguchi, R. T. Farouki, D. H. E. Dubin

Phys. Rev. E 56, 4671-4682　Vol. 56　No. 4　p. 4671-4682　1997/12　Research paper (scientific journal)

Numerical simulation of etching and deposition processes

S. Hamaguchi, A. A. Mayo, S. M. Rossnagel, D. E. Kotecki, K. R. Milkove, C. X. Wang, C. E. Farrell

Jpn. J. Appl. Phys. 36 4762-4768　Vol. 36　No. 7　p. 4762-4768　1997/12　Research paper (scientific journal)

Across-wafer nonuniformity of long-throw sputter deposition

A. A. Mayo, S. Hamaguchi, J. H. Joo, S. M. Rossnagel

J. Vac. Sci. Tech. B 15, 1788-1793　Vol. 15　No. 5　p. 1788-1793　1997/12　Research paper (scientific journal)

Electrostatic forces of plasma dust grains with position--dependent charges

S. Hamaguch

Comments Plasma Phys. Controlled Fusion 18, 95-101　1997/12　Research paper (scientific journal)

Mathematical methods for thin film deposition simulations

S. Hamaguchi

Modeling of Film Deposition for Microelectronic Applications, ed. by S. M. Rossnagel and A. Ulman,(Academic Press, San Diego 1996), Thin Films, vol. 22, p. 81-115　Vol. 22　No. C　p. 81-115　1996/12　Research paper (scientific journal)

Ionized physical vapor deposition of Cu for high aspect ratio damascene trench fill applications

C. A. Nichols, S. M. Rossnagel, S. Hamaguchi

J. Vac. Sci. Tech. B 14, 3270-3275　Vol. 14　No. 5　p. 3270-3275　1996/12　Research paper (scientific journal)

Phase diagram of Yukawa systems near the one-component-plasma limit revisited

S. Hamaguchi, R. T. Farouki, D. H. E. Dubin

J. Chem. Phys. 105 7641-7647　Vol. 105　No. 17　p. 7641-7647　1996/12　Research paper (scientific journal)

Liner conformality in ionized magnetron sputter metal deposition processes

S. Hamaguchi, S. M. Rossnagel

J. Vac. Sci. Tech. B 14, 2603-2608　Vol. 14　No. 4　p. 2603-2608　1996/12　Research paper (scientific journal)

Thin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer and seed layer applications

S. M. Rossnagel, C. Nichols, S. Hamaguchi, D. Ruzic, R. Turkot

J. Vac. Sci. Tech. B 14, 1819-1827　Vol. 14　No. 3　p. 1819-1827　1996/12　Research paper (scientific journal)

Simulations of trench--filling profiles under ionized magnetron sputter metal deposition

S. Hamaguchi, S. M. Rossnage

J. Vac. Sci. Tech. B, 13, 183-191　Vol. 13　No. 2　p. 183-191　1995/12　Research paper (scientific journal)

Surface-topography simulations of ionized sputter metal deposition

S. Hamaguchi, S. M. Rossnagel

Materials Research Society Symposium - Proceedings　Vol. 389　p. 113-117　1995　Research paper (international conference proceedings)

Thermodynamics of strongly-coupled Yukawa systems near the OCP limit II. Molecular dynamics simulations

R. T. Farouki, S. Hamaguchi

J. Chem. Phys., 101, 9885-9893　Vol. 101　No. 11　p. 9885-9893　1994/12　Research paper (scientific journal)

Thermodynamics of strongly-coupled Yukawa systems near the OCP limit I.~Derivation of the excess energy

S. Hamaguchi, R. T. Farouki

J. Chem. Phys., 101, 9876-9884　Vol. 101　No. 11　p. 9876-9884　1994/12　Research paper (scientific journal)

Spline approximation of ``effective'' potentials under periodic boundary conditions

R. T. Farouki, S. Hamaguchi

J. Comp. Phys. 115, 276--287　Vol. 115　No. 2　p. 276-287　1994/12　Research paper (scientific journal)

Plasma-particulate interactions in non--uniform plasmas with finite flows

S. Hamaguchi, R. T. Farouki

Phys. Plasmas, 1, 2110-2118　Vol. 1　No. 7　p. 2110-2118　1994/12　Research paper (scientific journal)

Intrinsic and passivation-induced trench tapering during plasma etching

S. Hamaguchi, M. Dalvie

J. Electrochem. Soc., 141, 1964-1972　Vol. 141　No. 7　p. 1964-1972　1994/12　Research paper (scientific journal)

The polarization force on a charged particulate in a non-uniform plasma

S. Hamaguchi, R. T. Farouki

Phys. Rev. E, 49, 4430-4441　Vol. 49　No. 5　p. 4430-4441　1994/12　Research paper (scientific journal)

Micro-profile simulations for plasma etching with surface passivation

S. Hamaguchi, M. Dalvie

J. Vac. Sci. Tech. A 12, 2745-2753　Vol. 12　No. 5　p. 2745-2753　1994/04　Research paper (scientific journal)

Simulation of surface topology evolution during plasma etching by the method of characteristics

J. C. Arnold, H. H. Sawin, M. Dalvie, S. Hamaguchi

J. Vac. Sci. Tech. A12, 620-635　Vol. 12　No. 3　p. 620-635　1994/04　Research paper (scientific journal)

Dynamics of charged particulates in plasmas

S. Hamaguchi, R. T. Farouki

IEEE International Conference on Plasma Science　1994　Research paper (international conference proceedings)

A shock-tracking algorithm for surface evolution under reactive-ion etching

S. Hamaguchi, M. Dalvie, R. T. Farouki, S. Sethuraman

J. Appl. Phys. 74, 5172-5184　Vol. 74　No. 8　p. 5172-5184　1993/12　Research paper (scientific journal)

Thermal energy of the crystalline one-component plasma from dynamical simulations

R. T. Farouki, S. Hamaguchi

Phys. Rev. E 47, 4330-4336　Vol. 47　No. 6　p. 4330-4336　1993/12　Research paper (scientific journal)

New fluid model for the turbulent transport due to the ion temperature gradient

Chang Bae Kim, Wendell Horton, Satoshi Hamaguchi

Physics of Fluids B　Vol. 5　No. 5　p. 1516-1522　1993/05　Research paper (scientific journal)

ION-TEMPERATURE-GRADIENT-DRIVEN TRANSPORT IN A DENSITY MODIFICATION EXPERIMENT ON THE TOKAMAK FUSION TEST REACTOR - REPLY

HORTON W, LINDBERG D, KIM JY, DONG JQ, HAMMETT GW, SCOTT SD, ZARNSTORFF MC, HAMAGUCHI S

PHYSICS OF FLUIDS B-PLASMA PHYSICS　Vol. 5　No. 3　p. 1034-1035　1993/03　Research paper (scientific journal)

Ion temperature gradient driven transport in a density modification experiment on the Tokamak Fusion Test Reactor

W. Horton, D. Lindberg, J. Y. Kim, J. Q. Dong, Q. W. Hammet, S. D. Scott, M. C. Zarnstorff, S. Hamaguchi

Phys. Fluids B 4, 953-966　Vol. 4　No. 4　p. 953-966　1992/12　Research paper (scientific journal)

Dynamical N-body simulations of Coulomb scattering in plasma sheaths

R. T. Farouki, S. Hamaguchi, M. Dalvie, M. Surendra

Phys. Rev. A 46, 7815-7829　Vol. 46　No. 12　p. 7815-7829　1992/12　Research paper (scientific journal)

Self-consistent Monte-Carlo simulation of the cathode fall including treatment of negative glow electrons

M. Dalvie, S. Hamaguchi, R. T. Farouki

Phys. Rev. A 46, 1066-1077　Vol. 46　No. 2　p. 1066-1077　1992/12　Research paper (scientific journal)

Analysis of a kinematic model for ion transport in RF plasma sheaths

R. T. Farouki, S. Hamaguchi, M. Dalvie

Phys. Rev. A 45, 5913-5928　Vol. 45　No. 8　p. 5913-5928　1992/12　Research paper (scientific journal)

The ponderomotive force and ion energy distribution in an RF sheath

S. Hamaguchi, R. T. Farouki, M. Dalvie

Phys. Rev. Lett. 68 44-47　Vol. 68　No. 1　p. 44-47　1992/12　Research paper (scientific journal)

Ion energetics in collisionless sheaths of RF process plasmas

S. Hamaguchi, R. T. Farouki, M. Dalvie

Phys. Fluids B 4, 2362-2367　Vol. 4　No. 7　p. 2362-2367　1992/12　Research paper (scientific journal)

Effects of sheared flows on ion temperature gradient driven turbulence

S. Hamaguchi, W. Horton

Phys. Fluids B 4, 319-328　Vol. 4　No. 2　p. 319-328　1992/12　Research paper (scientific journal)

Hydrodynamic analysis of electron motion in the cathode fall using a Monte Carlo simulation

M. Dalvie, S. Hamaguchi, R.T. Farouki, M. Surendra

J. Appl. Phys. 72, 2620-2631　Vol. 72　No. 7　p. 2620-2631　1992/12　Research paper (scientific journal)

Phase transitions of dense systems of charged ``dust'' grains in plasmas

R. T. Farouki, S. Hamaguchi

Appl. Phys. Lett. 61, 2973-2975　Vol. 61　No. 25　p. 2973-2975　1992/12　Research paper (scientific journal)

Transition from resistive-g to eta_i driven turbulence in stellarator systems

B. G. Hong, W. Horton, S. Hamaguchi, M. Wakatani, M. Yagi, H. Sugama

Phys. Fluids B 3, 1638-1643　Vol. 3　No. 7　p. 1638-1643　1991/12　Research paper (scientific journal)

Monte Carlo simulations of space-charge-limited ion transport through collisional plasma sheaths

R. T. Farouki, S. Hamaguchi, M. Dalvie

Phys. Rev. A 44, 2664-2681　Vol. 44　No. 4　p. 2664-2681　1991/12　Research paper (scientific journal)

The Ion distribution function in a weakly collisional sheath

S. Hamaguchi, R. T. Farouki, M. Dalvie

Phys. Rev. A 44, 3804-3821　p. 137-138　1991/12　Research paper (scientific journal)

Flux considerations in the coupling of Monte Carlo plasma sheath simulations with feature evolution models

M. Dalvie, R. T. Farouki, S. Hamaguchi

IEEE Trans. Electron Devices 39, 1090-1099　Vol. 39　No. 5　p. 1090-1099　1991/12　Research paper (scientific journal)

Ion distribution function in a weakly collisional sheath

S. Hamaguchi, R. T. Farouki, M. Dalvie

Physical Review A　Vol. 44　No. 6　p. 3804-3821　1991/09　Research paper (scientific journal)

Flux integration in 2D vs. 3D feature evolution models of plasma processing

Manoj Dalvie, Rida T. Farouki, Satoshi Hamaguchi

1991　Research paper (international conference proceedings)

Nonlinear behavior of magnetohydrodynamic modes near marginally stable state

N. Nakajima, S. Hamaguchi

Phys. Fluids B 2, 1184-1189　1990/12　Research paper (scientific journal)

Wave particle power transfer in a steady state driven system

H. L. Berk, B. N. Breizman, S. Hamaguchi

Phys. Fluids B 2, 3212-3214　Vol. 2　No. 12　p. 3212-3214　1990/12　Research paper (scientific journal)

Ion temperature gradient driven turbulence in the weak density gradient limit

S. Hamaguchi, W. Horton

Phys. Fluids B 2, 3040-3046　Vol. 2　No. 12　p. 3040-3046　1990/12　Research paper (scientific journal)

Fluctuation spectrum and transport from ion temperature gradient driven modes in sheared magnetic fields

S. Hamaguchi, W. Horton

Phys. Fluids B 2, 1833-1851　Vol. 2　No. 8　p. 1833-1851　1990/12　Research paper (scientific journal)

Nonlinear behavior of magnetohydrodynamic modes near marginally stable states. II. Application to the resistive fast interchange mode

Noriyoshi Nakajima, Satoshi Hamaguchi

Physics of Fluids B　Vol. 2　No. 6　p. 1184-1189　1990/06　Research paper (scientific journal)

Modelling of drift wave turbulence with a finite ion temperature gradient

S. Hamaguchi, W. Horton

Plasma Phys. Control. Fusion 34 No 2 203-233　Vol. 34　No. 2　p. 203-233　1990/02　Research paper (scientific journal)

Nonlinear development of η_i-mode and effects of radial electric field on it.

中島徳嘉, 浜口智志, HORTON W

プラズマ・核融合学会秋季講演会予稿集　Vol. 7th　1990

Theory of long-period magnetic pulsations

S. Hamaguchi, W. Grossmann

Courant Institute of Mathematical Sciences, MF-120　1989/12

Anomalous transport arising from nonlinear resistive pressure-driven modes in a plasma

S. Hamaguchi

Phys. Fluids B 1, 1416-1430　Vol. 1　No. 7　p. 1416-1430　1989/12　Research paper (scientific journal)

Summary of very low-q discharges in Toriut tokamaks

H. Yamada, S. Hamaguchi, K. Hattori, Y. Kamada, M. Kikuchi, J. Morikawa, H. Nihei, Z. Yoshida, N. Inoue

Kakuyugo Kenkyu, 56, 341-354　Vol. 56　No. 5　p. 341-354　1986/12　Research paper (scientific journal)

Selective acceleration of NBI-injected fast ion cyclotron wave in a tokomak plasma

Y. Murakami, K. Itami, S. Ishida, N. Suzuki, S. Hamaguchi, H. Yamada, H. Nihei, Morikawa, Z. Yoshida, N. Inoue

Jpn. J. Appl. Phys., 25, 1045-1047　Vol. 25　No. 7　p. 1045-1048　1986/12　Research paper (scientific journal)

Helically assisted low-q tokamak with l = 2 helical winding

S. Hamaguchi, H. Yamada, Z. Yoshida, Y. Kamada, K. Hattori, N. Inoue, T. Uchida

Jpn. J. Appl. Phys., 23, 505-507　Vol. 23　No. 7　p. L505-L508　1984/12　Research paper (scientific journal)

Shrinkage of a tokamak current channel by external ergodization

K. Hattori, Y. Seike, Z. Yoshida, S. Hamaguchi, H. Yamada, N. Suzuki, K. Itami, Y. Kamada, N. Inoue, T. Uchida

J. Nucl. Mater., 121, 368-373　Vol. 121　No. C　p. 368-373　1984/12　Research paper (scientific journal)

低q領域における破壊的不安定性の抑制

吉田善章, 岡野邦彦, 清家裕次郎, 伊丹潔, 鈴木信治, 山田弘司, 浜口智志, 井上信幸, 内田たい二郎

核融合研究　Vol. 49　No. 3　1983