Advanced pattern contour extraction function for see-through BSE images of high voltage SEM

Masahiro Oya, Yosuke Okamoto, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki, Shinji Murakami, Yoshihiro Midoh, Noriyuki Miura

Metrology, Inspection, and Process Control XXXIX　2025/04/24　Research paper (international conference proceedings)

20.1 A 3.5×3.5mm² 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack

Kotaro Naruse, Naru Kato, Takuma Matsumori, Jun Shlomi, Yoshihiro Midoh, Tetsuya Hirose, Gaku Imamura, Genki Yoshikawa, Constantine Sideris, Noriyuki Miura

2025 IEEE International Solid-State Circuits Conference (ISSCC)　p. 348-350　2025/02/16　Research paper (international conference proceedings)

Noise reduction of low-dose electron holograms using the wavelet hidden Markov model

Yuto Tomita, Yoshihiro Midoh, Takehiro Tamaoka, Yasukazu Murakami

Microscopy　No. dfaf007　p. 1-10　2025/01/22　Research paper (scientific journal)

Hardware Trojan Detection by Fine-grained Power Domain Partitioning

Takahiro Ishikawa, Kose Yokooji, Yoshihiro Midoh, Noriyuki Miura, Michihiro Shintani, Jun Shiomi

Proceedings of the 30th Asia and South Pacific Design Automation Conference　p. 1257-1263　2025/01/20　Research paper (international conference proceedings)

Changes in laryngeal movement during a water-swallowing test after a singing training for preventing aspiration

Tomoya ONISHI, Yoshihiro MIDOH, Jun SHIOMI, Toru YUBA, Noriyuki MIURA

IEICE Technical Report　Vol. HIP2024-87　p. 115-119　2025/01　Research paper (conference, symposium, etc.)

Performance evaluation of laryngeal motion measurement using a short-range RGB-D camera

Tomoya ONISHI, Yoshihiro MIDOH, Kiyohito HOSOKAWA, Nao HASHIDA, Jun SHIOMI, Toru YUBA, Hidenori INOHARA, Noriyuki MIURA

IEICE Technical Report　Vol. HIP2024-57　p. 30-34　2024/12　Research paper (conference, symposium, etc.)

Exemplification Study of Patent Applications in Advanced Semiconductor Materials

Kosuke Watahiki, Yoshihiro Midoh, Kazuya Okamoto

Journal of Japan Association for Management Systems　Vol. 41　No. 2　p. 59-68　2024/11　Research paper (scientific journal)

A study of robust pattern contour extraction using contour vibration network

S. Murakami, M. Oya, Y. Okamoto, S. Nakazawa, K. Maruyama, Y. Yamazaki, Y. Midoh, N. Miura

Nano Testing Symposium2024 Proceedings　p. 18-23　2024/11　Research paper (conference, symposium, etc.)

A generative model for SEM images of semiconductor line patterns and its application in metrology

S. Asano, Y. Midoh, J. Shiomi, N. Miura

Nano Testing Symposium2024 Proceedings　p. 12-17　2024/11　Research paper (conference, symposium, etc.)

Development of advanced pattern contour extraction function for underneath pattern in BSE see-through image of high voltage SEM

M. Oya, Y. Okamoto, S. Nakazawa, K. Maruyama, Y. Yamazaki, S. Murakami, Y. Midoh, N. Miura

Nano Testing Symposium2024 Proceedings　p. 24-28　2024/11　Research paper (conference, symposium, etc.)

Double-Sided Multimodal Attack Sensing and Partial Re-Keying in Shared Group Key System

Ryuki Ikemoto, Soichiro Fujii, Kotaro Naruse, Jun Shiomi, Yoshihiro Midoh, Yuki Yamashita, Misato Taguchi, Takuji Miki, Makoto Nagata, Yuichi Komano, Mitsugu Iwamoto, Kazuo Sakiyama, Noriyuki Miura

2024 IEEE European Solid-State Electronics Research Conference (ESSERC)　p. 681-684　2024/09/09　Research paper (international conference proceedings)

RGB-Dカメラを⽤いた⾮接触・⾮拘束な喉頭運動計測法による嚥下機能評価

大西智也, 御堂義博, 塩見 準, 弓場 徹, 三浦典之

生体医工学シンポジウム2024 講演予稿・抄録集　p. 167-167　2024/09　Research paper (conference, symposium, etc.)

Noise reduction of electron holography observations for a thin-foiled Nd-Fe-B specimen using the wavelet hidden Markov model

Sujin Lee, Yoshihiro Midoh, Yuto Tomita, Takehiro Tamaoka, Mitsunari Auchi, Taisuke Sasaki, Yasukazu Murakami

Applied Microscopy　Vol. 54　No. 1　2024/04/17　Research paper (scientific journal)

Utilization of active contour model with 3D-SEM simulation for see-through BSE image of high voltage SEM

Masahiro Oya, Yosuke Okamoto, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki, Shinji Murakami, Yoshihiro Midoh, Noriyuki Miura

Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII　Vol. 129550R　2024/04/10　Research paper (international conference proceedings)

代用音声新世紀-失った声を取り戻す- 機械読唇による自然な日本語の発話を目指して

御堂 義博, 伊勢 拓真, 北山 一樹, 細川 清人, 猪原 秀典, 三浦 典之

日本耳鼻咽喉科頭頸部外科学会会報　Vol. 127　No. 4　p. 370-370　2024/04

High-precision charge analysis in a catalytic nanoparticle by electron holography

Ryotaro Aso, Yoshihiro Midoh, Toshiaki Tanigaki, Yasukazu Murakami

Microscopy　2024/03/29　Research paper (scientific journal)

Necl-1/CADM3 regulates cone synapse formation in the mouse retina

Rumi Kawashima, Kenji Matsushita, Kenji Mandai, Yuko Sugita, Tomohiko Maruo, Kiyohito Mizutani, Yoshihiro Midoh, Akiko Oguchi, Yasuhiro Murakawa, Kazuki Kuniyoshi, Ryohei Sato, Takahisa Furukawa, Kohji Nishida, Yoshimi Takai

iScience　p. 109577-109577　2024/03　Research paper (scientific journal)

Disclosure Characteristics of Patent Information and Profitability in Advanced Semiconductor Materials

Kosuke Watahiki, Yoshihiro Midoh, Kazuya Okamoto

Journal of Japan Association for Management Systems　Vol. 40　No. 3　p. 227-234　2024/03　Research paper (scientific journal)

Open Set Domain Adaptation for Image Classification With Multiple Unknown Labels Using Unsupervised Clustering in a Target Domain

Daichi Nishihara, Yoshihiro Midoh, Youyang Ng, Osamu Yamane, Maasa Takahashi, Shuhei Iijima, Jun Shiomi, Goh Itoh, Noriyuki Miura

Electronic Imaging　Vol. 36　No. 15　p. 162-1　2024/01/21　Research paper (scientific journal)

Edge-Oriented Point Cloud Compression by Moving Object Detection for Realtime Smart Monitoring

Itsuki Takada, Daiki Nitto, Yoshihiro Midoh, Noriyuki Miura, Jun Shiomi, Ryoichi Shinkuma

2024 IEEE 21st Consumer Communications & Networking Conference (CCNC)　2024/01/06　Research paper (international conference proceedings)

A relational analysis between physical sample features and electron microscope images

Shuichiro Asano, Yoshihiro Midoh, Jun Shiomi, Noriyuki Miura

The 43rd NANO Testing Symposium (NANOTS2023)　p. 166-170　2023/11　Research paper (conference, symposium, etc.)

Development of advanced pattern contour extraction function for underness pattern in BSE see-through image of high voltage SEM

Masahiro Oya, Yosuke Okamoto, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki, Shinji Murakami, Yoshihiro Midoh, Noriyuki. Miura

The 43rd NANO Testing Symposium (NANOTS2023)　p. 160-165　2023/11　Research paper (conference, symposium, etc.)

A study on the effect of unknown classes in domain adaptation for image classification

Daichi Nishihara, Yoshihiro Midoh, Youyang. Ng, Osamu Yamane, Maasa Takahashi, Go Itoh, Jun Shiomi, Noriyuki Miura

The 43rd NANO Testing Symposium (NANOTS2023)　p. 160-165　2023/11　Research paper (conference, symposium, etc.)

Case Studies and Prospects of AI-Assisted Metrology

Yoshihiro Midoh

Journal of Smart Processing　Vol. 12　No. 6　p. 300-305　2023/11　Research paper (scientific journal)

A Fetal-Movement Circuit Harvesting High-Energy Plasma During Fabrication, Concept and Its Application to Self-Programing PUF

Kotaro Naruse, Takayuki Ueda, Jun Shiomi, Yoshihiro Midoh, Noriyuki Miura

IEEE Solid-State Circuits Letters　Vol. 6　p. 269-272　2023/09　Research paper (scientific journal)

Measurement of laryngeal movement during swallowing using a short-range RGB-D camera

Vol. 123　No. 25　p. 163-165　2023/05　Research paper (conference, symposium, etc.)

Materials Technology Correlation Between Front-end and Back-end Processes in Advanced Semiconductor Industry

Kosuke Watahiki, Yoshihiro Midoh, Kazuya Okamoto

Vol. TB4-1　p. 1-2　2023/04　Research paper (international conference proceedings)

胎動回路のPUF応用

成瀬厚太郎, 上田貴之, 塩見準, 御堂義博, 三浦典之

信学技報　Vol. 123　No. 6　p. 49-50　2023/04　Research paper (conference, symposium, etc.)

固有PRNUを利用したインフラ監視カメラの計測セキュリティ

成瀬厚太郎, 佐々木輝, 川村康輔, 塩見準, 御堂義博, 三浦典之

信学技報　Vol. 123　No. 6　p. 32-33　2023/04　Research paper (conference, symposium, etc.)

物理攻撃センサを利用した部分鍵更新付きAES暗号プロセッサ

池本龍生, 藤井聡一朗, 山下憂記, 永田真, 塩見準, 御堂義博, 三浦典之

信学技報　Vol. 123　No. 6　p. 34-36　2023/04　Research paper (conference, symposium, etc.)

暗号回路から漏えいする電磁波の電源電圧依存性モデル

南口和生, 御堂義博, 三浦典之, 塩見準

信学技報　Vol. 123　No. 6　p. 9-10　2023/04　Research paper (conference, symposium, etc.)

センサ固有特性のPUF利用による計測データと計測デバイスの同時認証

川村康輔, 久保田康裕, 永田真, 塩見準, 御堂義博, 三浦典之

信学技報　Vol. 123　No. 6　p. 51-53　2023/04　Research paper (conference, symposium, etc.)

Deep Learning-Based Segmentation of Label-Free Cell Nuclei from Transmitted Light Images

Japanese Journal of Optics　Vol. 52　No. 3　p. 116-122　2023/03　Research paper (scientific journal)

A Triturated Sensing System

Noriyuki Miura, Kotaro Naruse, Jun Shiomi, Yoshihiro Midoh, Tetsuya Hirose, Takaaki Okidono, Takuji Miki, Makoto Nagata

International Solid-State Circuits Conference (ISSCC) Digest of Technical Papers　p. 216-217　2023/02　Research paper (international conference proceedings)

A Self-Programming PUF Harvesting the High-Energy Plasma During Fabrication

Kotaro Naruse, Takayuki Ueda, Jun Shiomi, Yoshihiro Midoh, Noriyuki Miura

International Solid-State Circuits Conference (ISSCC) Digest of Technical Papers　p. 218-219　2023/02　Research paper (international conference proceedings)

Technology Trends and Characteristics of Patent Information Disclosure in Advanced Semiconductor Photoresist

Kosuke Watahiki, Yoshihiro Midoh, Kazuya Okamoto

2022 International Symposium on Semiconductor Manufacturing (ISSM)　No. NM-45　p. 1-4　2022/12　Research paper (international conference proceedings)

複雑系データから複数支配方程式の抽出が可能なデータ駆動型探索法

御堂義博, 武本侑己, 塩見 準, 三浦典之

第42回ナノテスティングシンポジウム(NANOTS2022)　p. 108-112　2022/11　Research paper (conference, symposium, etc.)

物理的な雑音特性の異なる画像の分類におけるドメイン適応

西原大地, 御堂義博, Youyang Ng, 山根 統, 伊藤 剛, 藤原 剛, 塩見 準, 三浦典之

第42回ナノテスティングシンポジウム(NANOTS2022)　p. 1-6　2022/11　Research paper (conference, symposium, etc.)

感情推定のための高重要度生体センサ選択による身体負荷低減効果の評価

江木悠貴, 筧玲央, 御堂 義博, 塩見準, 三浦典之

信号処理研究会　Vol. 122　No. 165　p. 104-108　2022/08　Research paper (conference, symposium, etc.)

静電容量型タッチセンサの計測中間値を利用した高信頼電子筆跡認証方式の検討

村康輔, 久保田康裕, 永田真, 御堂 義博, 塩見準, 三浦典之

信号処理研究会　Vol. 122　No. 165　p. 125-128　2022/08　Research paper (conference, symposium, etc.)

固有PRNUに基づく撮像カメラデバイス同定技術のインフラ監視システムへの応用

佐々木輝, 川村康輔, 御堂 義博, 塩見準, 三浦典之

信号処理研究会　Vol. 122　No. 165　p. 65-69　2022/08　Research paper (conference, symposium, etc.)

集積回路より漏えいする電磁波の電源電圧依存性モデル

南口 和生, 御堂 義博, 三浦 典之, 塩見 準

DAシンポジウム2022　p. 58-63　2022/08　Research paper (conference, symposium, etc.)

Accurate measurement of charge density in nanoscale particles using an aperture optimization of Fourier based phase reconstruction

Okada Takuma, Midoh Yoshihiro, Nakamae Koji, Miura Noriyuki

Electronic Imaging　Vol. 34　No. 14　p. 248-1　2022/01/16　Research paper (scientific journal)

A deep generative model of the SEM image using a small simulation dataset

Y. Midoh, K. Iwamoto, K. Nakamae, N. Miura

p. 96-99　2021/10　Research paper (conference, symposium, etc.)

A data-driven method for finding physical laws using neural networks with polynomial constraints

T. Takemoto, Y. Midoh, K. Nakamae, N. Miura

p. 91-95　2021/10　Research paper (conference, symposium, etc.)

Noise reduction in phase reconstruction of electron holograms using an aperture shape optimization by Fourier ring correlation

T. Okada, Y. Midoh, K. Nakamae, N. Miura

p. 60-64　2021/10　Research paper (conference, symposium, etc.)

Study on Deep Learning Algorithm for Automatic Cell Nucleus Extraction from Transmitted Light Images of Pluripotent Stem Cells

Yoshihiro MIDOH, Kosuke ARITA, Tadashi FUKAMI, Koji NAKAMAE

Vol. J104-D　No. 4　p. 453-461　2021/04　Research paper (scientific journal)

Denoising electron holograms using the wavelet hidden Markov model for phase retrieval—Applications to the phase-shifting method

Takehiro Tamaoka, Yoshihiro Midoh, Kazuo Yamamoto, Shodai Aritomi, Toshiaki Tanigaki, Masao Nakamura, Koji Nakamae, Masashi Kawasaki, Yasukazu Murakami

AIP Advances　Vol. 11　No. 2　p. 025135-025135　2021/02/01　Research paper (scientific journal)

Improvement of phase accuracy in electron holography by noise suppression in the Fourier domain

T. Okada, Y. Midoh, K. Nakamae, N. Miura

Proc. 40th NANO Testing Symposium　p. 64-69　2020/11　Research paper (conference, symposium, etc.)

Study on explainability of experimental data using a neural network with physical models

T. Takemoto, Y. Midoh, K. Nakamae, N. Miura

Proc. 40th NANO Testing Symposium　p. 116-120　2020/11　Research paper (conference, symposium, etc.)

Change-point prediction in time-series using dimensionality reduction and deep learning

K. Otsuka, Y. Midoh, K. Nakamae, N. Miura

Proc. 40th NANO Testing Symposium　p. 121-126　2020/11　Research paper (conference, symposium, etc.)

Deep reinforcement learning in continuous state and action spaces under partial observation

T. Nishimura, Y. Midoh, K. Nakamae, N. Miura

Proc. 40th NANO Testing Symposium　p. 127-131　2020/11　Research paper (conference, symposium, etc.)

SEM image generator with charging effect by monte carlo simulation and deep learning

K. Iwamoto, Y. Midoh, K. Nakamae, N. Miura

Proc. 40th NANO Testing Symposium　p. 132-137　2020/11　Research paper (conference, symposium, etc.)

Suppressing geometric phase shift owing to antiphase boundaries in dark-field electron holography

Youngji Cho, Kodai Niitsu, Yoshihiro Midoh, Koji Nakamae, Daisuke Shindo, Jun Mo Yang, Yasukazu Murakami

Materials Transactions　Vol. 60　No. 5　p. 698-703　2019/02　Research paper (scientific journal)

Thermal behavior analysis of interconnect structures of Si semiconductor devices using the temperature dependent reflectance of an incoherent light beam

Koichi Endo, Yoshihiro Midoh, Tomonori Nakamura, Toru Matsumoto, Kazushige Koshikawa, Koji Nakamae

Japanese Journal of Applied Physics　Vol. 57　No. 7S2　2018/07/01　Research paper (scientific journal)

Visual Target Strategies in Infantile Nystagmus Patients With Horizontal Jerk Waveform.

Takao Imai, Yasumitsu Takimoto, Tomoko Okumura, Kayoko Higashi-Shingai, Noriaki Takeda, Koji Kitamura, Bukasa Kalubi, Takashi Fujikado, Masakazu Hirota, Yoshihiro Midoh, Koji Nakamae, Hidenori Inohara

Frontiers in neurology　Vol. 9　No. 622　p. 1-12　2018/07　Research paper (scientific journal)

Thermal behavior analysis of interconnect structures of Si semiconductor devices using the temperature dependent reflectance of an incoherent light beam

K. Endo, Y. Midoh, T. Nakamura, T. Matsumoto, K. Koshikawa, K. Nakamae

Japanese Journal of Applied Physics　Vol. 57　No. 07ME02　p. 1-5　2018/06　Research paper (scientific journal)

Dual-Tree複素数ウェーブレット隠れマルコフモデルを用いた電子線 ホログラムの雑音低減

御堂義博, 中前幸治

第65 回応用物理学会春季学術講演会予稿集　2018/03　Research paper (other academic)

A Note on Image Analysis and Anomaly Detection Using Deep Learning

Yoshihiro Midoh, Koji Nakamae

The journal of Reliability Engineering Association of Japan　Vol. 40　No. 2　p. 81-86　2018/03　Research paper (scientific journal)

Image quality improvement of tomographic reconstruction using image fusion of multi-focus STEM images

Yu Akahori, Yoshihiro Midoh, Koji Nakamae

Proceedings of the 37th Nano Testing Symposium　p. 59-64　2017/11　Research paper (other academic)

Denoising of noisy electron hologram by using a wavelet-based hidden markov model

Yoshihiro Midoh, Koji Nakamae

Proceedings of the 37th Nano Testing Symposium (NANOTS2017)　p. 123-128　2017/11　Research paper (international conference proceedings)

A study on signal restoration using probabilistic spin logic p-bits

Hiroaki Fujino, Yoshihiro Midoh, Koji Nakamae

Proceedings of the 37th Nano Testing Symposium　p. 41-46　2017/11　Research paper (other academic)

A study on stem cell monitoring using transmitted light images

Kosuke Arita, Yoshihiro Midoh, Koji Nakamae

Proceedings of the 37th Nano Testing Symposium　p. 25-30　2017/11　Research paper (other academic)

Mitochondria segmentation in scanning electron microscope images using a machine learning approach

Kenta Adachi, Yoshihiro Midoh, Koji Nakamae

Proceedings of the 37th Nano Testing Symposium　p. 19-24　2017/11　Research paper (other academic)

Thermal behavior analysis of interconnect of Si semiconductor device with optical probed thermo-reflectance image mapping (OPTIM) and waveform (OPTW)

K. Endo, Y. Midoh, T. Nakamura, T. Matsumoto, K. Koshikawa, K. Nakamae

Proc. Advanced Metallization Conference 2017 (ADMETAPlus 2017)　2017/10　Research paper (international conference proceedings)

High accurate measurement of fine line patterns using SEM simulation and artificial intelligence analysis

Yoshihiro Midoh, Chihiro Ida, Akira Hamaguchi, Koji Nakamae

2017/10　Research paper (other academic)

Comparison of wavelet-domain thresholding and hidden Markov tree model denoising on noisy electron hologram

Yoshihiro Midoh, Katsuyoshi Miura, Yasukazu Murakami, Koji Nakamae

The 43rd international conference on micro- and nanoengineering (MNE2017)　2017/09　Research paper (other academic)

ウェーブレット隠れマルコフモデルを用いた電子線ホログラムの雑音低減(2)

御堂義博, 三浦克介, 村上恭和, 中前幸治

第78回応用物理学会秋季学術講演会予稿集　2017/09　Research paper (other academic)

High accurate measurement of fine line patterns using SEM simulation and artificial intelligence analysis

Yoshihiro Midoh, Yusuke Iida, Akira Hamaguchi, Chihiro Ida, Koji Nakamae

2017/07　Research paper (other academic)

培養細胞の画像モニタリング技術に関する動向調査と研究

御堂義博

2017/07　Research paper (other academic)

ウェーブレット隠れマルコフモデルを用いた電子線ホログラムの雑音低減

御堂義博, 三浦克介, 村上恭和, 中前幸治

第64回応用物理学会春季学術講演会予稿集　2017/03　Research paper (other academic)

Repair of discontinuous interference fringes in electron holograpy by using the relaxation method

Katsuyoshi Miura, Yoshihiro Midoh, Yasukazu Murakami, Koji Nak

Proceedings of the 64th JSAP Spring Meeting　No. 14p-424-9　2017/03　Research paper (international conference proceedings)

細胞培養時スクリーニングのための細胞画像の自動領域分割法

御堂義博

2016/11　Research paper (other academic)

Mitochondria detection method for electron microscope images of serial sections using a machine learning

Kenta Adachi, Yoshihiro Midoh, Koji Nakamae

The Proceeding of the 36th Nano Testing Symposium　p. 143-148　2016/11　Research paper (other academic)

Automatic cell image segmentation for screening in cell culture

Kosuke Arita, Yoshihiro Midoh, Koji Nakamae

The Proceeding of the 36th Nano Testing Symposium　p. 137-141　2016/11　Research paper (other academic)

Study of multi-class image segmentation from three-dimensional electron microscope biological cell images (II)

Hayato Tsutsumi, Yoshihiro Midoh, Koji Nakamae

The Proceeding of the 36th Nano Testing Symposium　p. 131-135　2016/11　Research paper (other academic)

High accurate measurement of fine line patterns using SEM simulation and artificial intelligence analysis

Yoshihiro Midoh, Yusuke Iida, Akira Hamaguchi, Chihiro Ida, Koji Nakamae

The Proceeding of the 36th Nano Testing Symposium　p. 125-129　2016/11　Research paper (other academic)

Image quality improvement for a single SEM image using convolutional neural network

Satoshi Miyake, Yoshihiro Midoh, Koji Nakamae

The Proceeding of the 36th Nano Testing Symposium　p. 119-124　2016/11　Research paper (other academic)

電顕画像からのミトコンドリアの自動抽出

御堂義博

2016/06　Research paper (other academic)

自動・高速輪郭抽出による３次元像可視化ソフトウェア

御堂義博

2016/03

Study of multi-class image segmentation from three-dimensional electron microscope biological cell images

H. Tsutsumi, Y. Midoh, K. Nakamae

Proc. NANOTS2015　p. 157-162　2015/11　Research paper (other academic)

Three-dimensional reconstruction from a TEM tilt-series movie using support vector regression

Y. Midoh, Y. Mitsuya, R. Nishi, K. Nakamae

Proc. NANOTS2015　p. 151-156　2015/11　Research paper (other academic)

A learning based super-resolution for a single SEM image using continuous wavelet transform and markov random field

N. Okamoto, Y. Midoh, K. Nakamae

Proc. NANOTS2015　p. 117-121　2015/11　Research paper (other academic)

トモグラフィー電子顕微鏡用ソフトウェアの活用・普及促進

御堂義博

2015/09

縁膜帯電現象：シミュレーションと実験の比較

御堂義博

2015/01　Research paper (other academic)

Line extraction method for SEM metrology by utilizing watershed algorithm and machine learning

K. Miura, Y. Midoh, Y. Toyoda, H. Ushiba, S. Shinoda, K. Nakamae

Proceedings of the 34th annual NANO Testing Symposium　p. 189-194　2014/11　Research paper (international conference proceedings)

Prediction of performance degradation and lifetime for semiconductor devices using markov chain model

K. Momoda, K. Endo, Y. Midoh, K. Miura, K. Nakamae

ナノテスティングシンポジウム/2014 会議録　p. 235-240　2014/11　Research paper (international conference proceedings)

マルコフ連鎖モデルによる半導体素子劣化・寿命予測

桃田 快, 遠藤幸一, 御堂義博, 三浦克介, 中前幸治

信学技報　Vol. 114　No. 314　p. 1-5　2014/11　Research paper (other academic)

Prediction of performance degradation and lifetime for semiconductor devices using markov chain model

K. Momoda, K. Endo, Y. Midoh, K. Miura, K. Nakamae

Nano Testing Symposium 2014　p. 235-240　2014/11　Research paper (international conference proceedings)

TEM 動画像を用いた電子線トモグラフィーの検討

三津屋陽介, 御堂義博, 西竜治, 中前幸治

ナノテスティングシンポジウム/2014 会議録　p. 199-204　2014/11　Research paper (other academic)

離散コサイン変換を用いた単一SEM 画像の学習型超解像度化

御堂義博, 中前幸治

ナノテスティングシンポジウム/2014 会議録　p. 195-198　2014/11　Research paper (other academic)

モンテカルロSEMシミュレーションを用いた帯電現象の研究

飯田悠介, 御堂義博, 濱口晶, 井田知宏, 阿部秀昭, 中前幸治

ナノテスティングシンポジウム/2014 会議録　p. 183-188　2014/11　Research paper (other academic)

自己組織化リソグラフィにおける微細ラインパターン画像処理(I)

御堂義博, 三浦克介, 豊田康隆, 中前幸治

2014/09　Research paper (other academic)

Image Processing for Fine Line Patterns in Self-Assembly Lithography (I)

Y. Midoh, K. Miura, Y. Toyoda, K. Nakamae

2014/09　Research paper (other academic)

HawkC: computer-aided 3D visualization and analysis software for electron tomography

No. 43　p. 33-35　2014/09　Research paper (international conference proceedings)

絶縁膜帯電シミュレーションにおけるパラメータ依存性の検討

御堂義博

2014/08

ソフトウェアの概要と活用事例の紹介

御堂義博

2014/07　Research paper (bulletin of university, research institution)

The effect of non-linear total variation based denoising on TEM electron tomography tilt-series images

Y. Midoh, N. Okamoto, K. Nakamae

2014/03

絶縁膜二次電子放出シミュレーションにおける物性パラメータ依存性の検討

御堂義博

2014/02

A shape-modification strategy of electron beam direct writing considering circuit performance in LSI interconnects

Yoshihiro Midoh, Atsushi Osaki, Koji Nakamae

ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES VI　Vol. 9049-68　2014/02　Research paper (international conference proceedings)

Statistical edge detection utilizing nonlinear total variation based noise removal for measurement of fine line patterns in the SEM image of LSI

Y. Midoh, N. Okamoto, K. Nakamae

Proc. The 33rd NANO Testing　p. 165-169　2013/11　Research paper (international conference proceedings)

Ultra-high voltage electron microscopy analysis for semiconductor devices

S. Kudo, Y. Hirose, R. Nishi, Y. Midoh, N. Hattori, T. Koyama, K. Nakamae

Proc. The 33rd NANO Testing　p. 225-230　2013/11　Research paper (international conference proceedings)

トモグラフィー電子顕微鏡用ソフトウェアの活用・普及促進

御堂義博

2013/09

電子線照射による表面から放出された電子のエネルギースペクトル計算

御堂義博

2013/08

Energy spectrum simulation of electrons emitted from specimen surface by electron beam irradiation

Y. Midoh

2013/08　Research paper (bulletin of university, research institution)

トモグラフィー電子顕微鏡用ソフトウェアHawkCの紹介

御堂 義博, 西 竜治, メディヌリシラジ, 鎌倉 快之, 井上 雄紀, 三浦 順一郎, 鷹岡 昭夫, 中前 幸治

2013/05

電子線トモグラフィーにおけるアライメント手法の定量的評価

御堂義博, 中前幸治

2013/03

A dose modification strategy of electron-beam directwriting considering TDDB reliability in LSI interconnects

Yoshihiro Midoh, Atsushi Osaka, Koji Nakamae

ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES V　Vol. 8680　2013/02　Research paper (international conference proceedings)

LSI failure analysis using laser terahertz emission microscope

YAMASHITA Masatsugu, OTANI Chiko, MATSUMOTO Toru, MIDOH Yoshihiro, MIURA Katsuyoshi, NIKAWA Kiyoshi, NAKAMAE Koji, TONOUCHI Masayoshi

Vol. 56　No. 8　p. 523-526　2012/08　Research paper (scientific journal)

レーザーテラヘルツ放射顕微鏡の無バイアスLSI故障解析への応用

山下将嗣, 大谷知行, 松本徹, 御堂義博, 三浦克介, 中前幸治, 二川清

2012/07

レーザー励起 テラヘルツ波放射における多層配線の影響

山下将嗣, 大谷知行, 松本 徹, 御堂義博, 三浦克介, 二川 清, 中前幸治

2012/03

The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localization

Kiyoshi Nikawa, Masatsugu Yamashita, Toru Matsumoto, Katsuyoshi Miura, Yoshihiro Midoh, Koji Nakamae

Microelectronics Reliability　Vol. 51　No. 9-11　p. 1624-1631　2011/10　Research paper (international conference proceedings)

Non-electrical-contact LSI failure analysis using non-bias laser terahertz emission microscope

Kiyoshi Nikawa, Masatsugu Yamashita, Toru Matsumoto, Chiko Otani, Masayoshi Tonouchi, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae

Proc. 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits　2011/07　Research paper (international conference proceedings)

THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis

M. Yamashita, O. Otani, T. Matsumoto, Y. Midoh, K. Miura, K. Nakamae, K. Nikawa, S. Kim, M. Murakami, M. Tonouchi

OPTICS EXPRESS　Vol. 19　No. 11　p. 10864-10873　2011/05　Research paper (scientific journal)

Simulation of THz-wave signals in laser terahertz emission microscope for LSI failure analysis

Y. Midoh, M. Yamashita, T. Matsumoto, K. Nikawa, K. Nakamae

Proc. the 30th LSI Testing Symposium　p. A9-A14　2010/11

Three-dimensional metrology from SEM tilt-series images

F. Hayashi, Y. Midoh, K. Nakamae

Proc. 30th LSI Testing Symposium　2010/11

Non-bias inspection of electrical failures in LSI interconnects using LTEM prototype system

M. Yamashita, C. Otani, T. Matsumoto, Y. Midoh, K. Miura, K. Nikawa, K. Nakamae, M. Tonouchi

35TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ 2010)　2010/09　Research paper (international conference proceedings)

Determining Magnetic Field Close to Air-Bearing Surface by Projection Electron-Beam Tomography and Fourier Extrapolation

Hiroyuki SHINADA, Yoshihiro MIDOH, Tomokazu SHIMAKURA, Koji NAKAMAE

SICE Journal of Control, Measurement, and System Integration　Vol. 3　No. 4　p. 223-228　2010　Research paper (scientific journal)

Observation of LSI TEG chips using laser THz emission microscope II

M. Yamashita, C. Otani, S. Kim, H. Murakami, M. Tonouchi, T. Matsumoto, Y. Midoh, K. Miura, K. Nakamae, K. Nikawa

p. 343-348　2009/11

Laser THz emission microscope as a novel tool for LSI failure analysis

Masatsugu Yamashita, Chiko Otani, Sunmi Kim, Hironaru Murakami, Masayoshi Tonouchi, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa

MICROELECTRONICS RELIABILITY　Vol. 49　No. 9-11　p. 1116-1126　2009/09　Research paper (scientific journal)

3D analysis of benign positional nystagmus due to cupulolithiasis in posterior semicircular canal

T. Imai, N. Takeda, M. Ito, K. Sekine, G. Sato, Y. Midoh, K. Nakamae, T. Kubo

Acta Oto-Laryngologica　Vol. 129　No. 10　p. 1044-1049　2009/01　Research paper (scientific journal)

Development of an LTEM prototype system for LSI failure analysis

Masatsugu Yamashita, Chiko Otani, Sunmi Kim, Hironaru Murakmai, Masayoshi Tonouchi, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa

2009 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, VOLS 1 AND 2　p. 241-+　2009　Research paper (international conference proceedings)

Development of automatic system on electron microscopic tomography for 3D medical examination

Akio Takaoka, Meng Cao, Yoshihiro Midoh, Tomoki Nishida, Toshiaki Hasegawa, Ryuji Nishi, Yuuki Inoue, Mitsuo Ogasawara

Korean Journal of Microscopy　2008/11

Object size measurement method from noisy SEM images by utilizing scale space

Y. Midoh, K. Nakamae, H. Fujioka

Measurement Science and Technology　Vol. vol. 18, no. 3. pp. 579-591　2007/03　Research paper (scientific journal)

Computer-assisted lesion detection system for stomach screening using stomach shape and appearance models

Y. Midoh, M. Nakamura, M. Takashima, K. Nakamae, H. Fujioka

Proc. SPIE: Medical Imaging　Vol. 6514　2007/02　Research paper (international conference proceedings)

Computer-assisted lesion detection system for stomach screening using stomach shape and appearance models

Y. Midoh, M. Nakamura, M. Takashima, K. Nakamae, H. Fujioka

Progress in Biomedical Optics and Imaging - Proceedings of SPIE　Vol. 6514　No. 2　2007　Research paper (international conference proceedings)

Line edge roughness measurement of nanostructures in SEM metrology by using statistically matched wavelet

Yoshihiro Midoh, Koji Nakamae, Hiromu Fujioka

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 6763　2007　Research paper (international conference proceedings)

A comparison of wavelet multiresolution analysis and scale-space edge detection for lithography metrology

Yoshihiro Midoh, Koji Nakamae, Hiromu Fujioka

Proc. SPIE: Wavelet Applications in Industrial Processing IV　Vol. vol. 6383　2006/10　Research paper (international conference proceedings)

Statistical optimization of Canny edge detector for measurement of fine line patterns in SEM image

Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Hiromu Fujioka

Measurement Science and Technology　Vol. 16　No. 2　p. 477-487　2005　Research paper (scientific journal)

Boundary extraction in the SEM cross section of LSI by multiple Gaussian filtering

Y Midoh, K Nakamae, H Fujioka

TWO- AND THREE - DIMENSIONAL VISION SYSTEMS FOR INSPECTION, CONTROL, AND METROLOGY II　Vol. 5606　p. 169-178　2004　Research paper (international conference proceedings)

Fine structure measurement in the SEM cross section of LSI using the canny edge detector

Y Midoh, K Miura, K Nakamae, H Fujioka

MACHINE VISION APPLICATIONS IN INDUSTRIAL INSPECTION XI　Vol. 5011　p. 190-199　2003　Research paper (international conference proceedings)

Boundary extraction in the SEM cross section of LSI

K Nakamae, Y Midoh, K Miura, H Fujioka

INTELLIGENT ROBOTS AND COMPUTER VISION XX: ALGORITHMS, TECHNIQUES, AND ACTIVE VISION　Vol. 4572　p. 451-458　2001　Research paper (international conference proceedings)