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Yoshihiro Midoh

御堂 義博

Graduate School of Information Science and Technology Department of Information Systems Engineering, Assistant Professor

keyword Metrology,Image Processing,Defect Detection,Electron Miscroscope,Semiconductor manufacturing

Education

  • 2003/04 - 2006/03, Osaka University, Graduate School of Information Science and Technology, Information Systems Engineering
  • 2001/04 - 2003/03, Osaka University, Graduate School, Division of Information Science, Information Systems Engineering
  • 1997/04 - 2001/03, Osaka University, Faculty of Engineering

Research History

  • 2019/01/23 - Present, Osaka University Institute for Open and Transdisciplinary Research Initiatives
  • 2007/06 - Present, Osaka University Graduate School of Information Science and Technology Department of Information Systems Engineering, Assistant Professor
  • 2006/04/01 - 2007/05/31, Osaka University Graduate School of Information Science and Technology Department of Information Systems Engineering, Specially Appointed Researcher

Research Areas

  • Informatics, Mathematical informatics
  • Natural sciences, Semiconductors, optical and atomic physics
  • Nanotechnology/Materials, Nanostructure physics
  • Life sciences, Medical systems
  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Measurement engineering
  • Informatics, Intelligent informatics
  • Informatics, Perceptual information processing

Professional Memberships

  • The Institute of NANO Testing (INANOT)
  • 応用物理学会
  • Japan Society for Equilibrium Research
  • The International Society for Optical Engineering (SPIE)
  • The institute of Electronics, Information and Communication Engineers

Papers

  • Accuracy improvement of phase estimation in electron holography using noise reduction methods, Yoshihiro Midoh,Koji Nakamae, Microscopy, Vol. dfz115, p. 1-9, 2020/01
  • Image quality enhancement of a CD-SEM image using conditional generative adversarial networks, Y. Midoh,K. Nakamae, SPIE Advanced Lithography 10959-10, 2019/02
  • Study on Deep Learning Algorithm for Automatic Cell Nucleus Extraction from Transmitted Light Images of Pluripotent Stem Cells, Yoshihiro MIDOH,Kosuke ARITA,Tadashi FUKAMI,Koji NAKAMAE, Vol. J104-D, No. 4, p. 453-461, 2021/04
  • Denoising electron holograms using the wavelet hidden Markov model for phase retrieval—Applications to the phase-shifting method, Takehiro Tamaoka,Yoshihiro Midoh,Kazuo Yamamoto,Shodai Aritomi,Toshiaki Tanigaki,Masao Nakamura,Koji Nakamae,Masashi Kawasaki,Yasukazu Murakami, AIP Advances, AIP Publishing, Vol. 11, No. 2, p. 025135-025135, 2021/02/01
  • Improvement of phase accuracy in electron holography by noise suppression in the Fourier domain, T. Okada,Y. Midoh,K. Nakamae,N. Miura, Proc. 40th NANO Testing Symposium, p. 64-69, 2020/11
  • Study on explainability of experimental data using a neural network with physical models, T. Takemoto,Y. Midoh,K. Nakamae,N. Miura, Proc. 40th NANO Testing Symposium, p. 116-120, 2020/11
  • Change-point prediction in time-series using dimensionality reduction and deep learning, K. Otsuka,Y. Midoh,K. Nakamae,N. Miura, Proc. 40th NANO Testing Symposium, p. 121-126, 2020/11
  • Deep reinforcement learning in continuous state and action spaces under partial observation, T. Nishimura,Y. Midoh,K. Nakamae,N. Miura, Proc. 40th NANO Testing Symposium, p. 127-131, 2020/11
  • SEM image generator with charging effect by monte carlo simulation and deep learning, K. Iwamoto,Y. Midoh,K. Nakamae,N. Miura, Proc. 40th NANO Testing Symposium, p. 132-137, 2020/11
  • Suppressing geometric phase shift owing to antiphase boundaries in dark-field electron holography, Youngji Cho,Kodai Niitsu,Yoshihiro Midoh,Koji Nakamae,Daisuke Shindo,Jun Mo Yang,Yasukazu Murakami, Materials Transactions, Vol. 60, No. 5, p. 698-703, 2019/02
  • Visual target strategies in infantile nystagmus patients with horizontal jerk waveform, Takao Imai,Yasumitsu Takimoto,Tomoko Okumura,Kayoko Higashi-Shingai,Noriaki Takeda,Koji Kitamura,Bukasa Kalubi,Takashi Fujikado,Masakazu Hirota,Yoshihiro Midoh,Koji Nakamae,Hidenori Inohara, frontiers in Neurology, Vol. 9, No. 622, p. 1-12, 2018/07
  • Thermal behavior analysis of interconnect structures of Si semiconductor devices using the temperature dependent reflectance of an incoherent light beam, K. Endo,Y. Midoh,T. Nakamura,T. Matsumoto,K. Koshikawa,K. Nakamae, Japanese Journal of Applied Physics, Vol. 57, No. 07ME02, p. 1-5, 2018/06
  • Dual-Tree複素数ウェーブレット隠れマルコフモデルを用いた電子線 ホログラムの雑音低減, 御堂義博,中前幸治, 第65 回応用物理学会春季学術講演会予稿集, 2018/03
  • A Note on Image Analysis and Anomaly Detection Using Deep Learning, Yoshihiro Midoh,Koji Nakamae, The journal of Reliability Engineering Association of Japan, Vol. 40, No. 2, p. 81-86, 2018/03
  • Image quality improvement of tomographic reconstruction using image fusion of multi-focus STEM images, Yu Akahori,Yoshihiro Midoh,Koji Nakamae, Proceedings of the 37th Nano Testing Symposium, p. 59-64, 2017/11
  • Denoising of noisy electron hologram by using a wavelet-based hidden markov model, Yoshihiro Midoh,Koji Nakamae, Proceedings of the 37th Nano Testing Symposium (NANOTS2017), p. 123-128, 2017/11
  • A study on signal restoration using probabilistic spin logic p-bits, Hiroaki Fujino,Yoshihiro Midoh,Koji Nakamae, Proceedings of the 37th Nano Testing Symposium, p. 41-46, 2017/11
  • A study on stem cell monitoring using transmitted light images, Kosuke Arita,Yoshihiro Midoh,Koji Nakamae, Proceedings of the 37th Nano Testing Symposium, p. 25-30, 2017/11
  • Mitochondria segmentation in scanning electron microscope images using a machine learning approach, Kenta Adachi,Yoshihiro Midoh,Koji Nakamae, Proceedings of the 37th Nano Testing Symposium, p. 19-24, 2017/11
  • Thermal behavior analysis of interconnect of Si semiconductor device with optical probed thermo-reflectance image mapping (OPTIM) and waveform (OPTW), K. Endo,Y. Midoh,T. Nakamura,T. Matsumoto,K. Koshikawa,K. Nakamae, Proc. Advanced Metallization Conference 2017 (ADMETAPlus 2017), 2017/10
  • High accurate measurement of fine line patterns using SEM simulation and artificial intelligence analysis, Yoshihiro Midoh,Chihiro Ida,Akira Hamaguchi,Koji Nakamae, 2017/10
  • Comparison of wavelet-domain thresholding and hidden Markov tree model denoising on noisy electron hologram, Yoshihiro Midoh,Katsuyoshi Miura,Yasukazu Murakami,Koji Nakamae, The 43rd international conference on micro- and nanoengineering (MNE2017), 2017/09
  • ウェーブレット隠れマルコフモデルを用いた電子線ホログラムの雑音低減(2), 御堂義博,三浦克介,村上恭和,中前幸治, 第78回応用物理学会秋季学術講演会予稿集, 2017/09
  • High accurate measurement of fine line patterns using SEM simulation and artificial intelligence analysis, Yoshihiro Midoh,Yusuke Iida,Akira Hamaguchi,Chihiro Ida,Koji Nakamae, 2017/07
  • 培養細胞の画像モニタリング技術に関する動向調査と研究, 御堂義博, 2017/07
  • ウェーブレット隠れマルコフモデルを用いた電子線ホログラムの雑音低減, 御堂義博,三浦克介,村上恭和,中前幸治, 第64回応用物理学会春季学術講演会予稿集, 2017/03
  • Repair of discontinuous interference fringes in electron holograpy by using the relaxation method, Katsuyoshi Miura,Yoshihiro Midoh,Yasukazu Murakami,Koji Nak, Proceedings of the 64th JSAP Spring Meeting, No. 14p-424-9, 2017/03
  • 細胞培養時スクリーニングのための細胞画像の自動領域分割法, 御堂義博, 2016/11
  • Mitochondria detection method for electron microscope images of serial sections using a machine learning, Kenta Adachi,Yoshihiro Midoh,Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium, p. 143-148, 2016/11
  • Automatic cell image segmentation for screening in cell culture, Kosuke Arita,Yoshihiro Midoh,Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium, p. 137-141, 2016/11
  • Study of multi-class image segmentation from three-dimensional electron microscope biological cell images (II), Hayato Tsutsumi,Yoshihiro Midoh,Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium, p. 131-135, 2016/11
  • High accurate measurement of fine line patterns using SEM simulation and artificial intelligence analysis, Yoshihiro Midoh,Yusuke Iida,Akira Hamaguchi,Chihiro Ida,Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium, p. 125-129, 2016/11
  • Image quality improvement for a single SEM image using convolutional neural network, Satoshi Miyake,Yoshihiro Midoh,Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium, p. 119-124, 2016/11
  • 電顕画像からのミトコンドリアの自動抽出, 御堂義博, 2016/06
  • 自動・高速輪郭抽出による3次元像可視化ソフトウェア, 御堂義博, 2016/03
  • Study of multi-class image segmentation from three-dimensional electron microscope biological cell images, H. Tsutsumi,Y. Midoh,K. Nakamae, Proc. NANOTS2015, p. 157-162, 2015/11
  • Three-dimensional reconstruction from a TEM tilt-series movie using support vector regression, Y. Midoh,Y. Mitsuya,R. Nishi,K. Nakamae, Proc. NANOTS2015, p. 151-156, 2015/11
  • A learning based super-resolution for a single SEM image using continuous wavelet transform and markov random field, N. Okamoto,Y. Midoh,K. Nakamae, Proc. NANOTS2015, p. 117-121, 2015/11
  • トモグラフィー電子顕微鏡用ソフトウェアの活用・普及促進, 御堂義博, 2015/09
  • 縁膜帯電現象:シミュレーションと実験の比較, 御堂義博, 2015/01
  • Line extraction method for SEM metrology by utilizing watershed algorithm and machine learning, K. Miura,Y. Midoh,Y. Toyoda,H. Ushiba,S. Shinoda,K. Nakamae, Proceedings of the 34th annual NANO Testing Symposium, The Institute of NANO Testing, p. 189-194, 2014/11
  • Prediction of performance degradation and lifetime for semiconductor devices using markov chain model, K. Momoda,K. Endo,Y. Midoh,K. Miura,K. Nakamae, ナノテスティングシンポジウム/2014 会議録, p. 235-240, 2014/11
  • マルコフ連鎖モデルによる半導体素子劣化・寿命予測, 桃田 快,遠藤幸一,御堂義博,三浦克介,中前幸治, 信学技報, Vol. 114, No. 314, p. 1-5, 2014/11
  • Prediction of performance degradation and lifetime for semiconductor devices using markov chain model, K. Momoda,K. Endo,Y. Midoh,K. Miura,K. Nakamae, Nano Testing Symposium 2014, p. 235-240, 2014/11
  • TEM 動画像を用いた電子線トモグラフィーの検討, 三津屋陽介,御堂義博,西竜治,中前幸治, ナノテスティングシンポジウム/2014 会議録, p. 199-204, 2014/11
  • 離散コサイン変換を用いた単一SEM 画像の学習型超解像度化, 御堂義博,中前幸治, ナノテスティングシンポジウム/2014 会議録, p. 195-198, 2014/11
  • モンテカルロSEMシミュレーションを用いた帯電現象の研究, 飯田悠介,御堂義博,濱口晶,井田知宏,阿部秀昭,中前幸治, ナノテスティングシンポジウム/2014 会議録, p. 183-188, 2014/11
  • 自己組織化リソグラフィにおける微細ラインパターン画像処理(I), 御堂義博,三浦克介,豊田康隆,中前幸治, 2014/09
  • Image Processing for Fine Line Patterns in Self-Assembly Lithography (I), Y. Midoh,K. Miura,Y. Toyoda,K. Nakamae, 2014/09
  • HawkC: computer-aided 3D visualization and analysis software for electron tomography, 2014/09
  • 絶縁膜帯電シミュレーションにおけるパラメータ依存性の検討, 御堂義博, 2014/08
  • ソフトウェアの概要と活用事例の紹介, 御堂義博, 2014/07
  • The effect of non-linear total variation based denoising on TEM electron tomography tilt-series images, Y. Midoh,N. Okamoto,K. Nakamae, 2014/03
  • 絶縁膜二次電子放出シミュレーションにおける物性パラメータ依存性の検討, 御堂義博, 2014/02
  • A shape-modification strategy of electron beam direct writing considering circuit performance in LSI interconnects, Yoshihiro Midoh,Atsushi Osaki,Koji Nakamae, ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES VI, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 9049-68, 2014/02
  • Statistical edge detection utilizing nonlinear total variation based noise removal for measurement of fine line patterns in the SEM image of LSI, Y. Midoh,N. Okamoto,K. Nakamae, Proc. The 33rd NANO Testing, p. 165-169, 2013/11
  • Ultra-high voltage electron microscopy analysis for semiconductor devices, S. Kudo,Y. Hirose,R. Nishi,Y. Midoh,N. Hattori,T. Koyama,K. Nakamae, Proc. The 33rd NANO Testing, p. 225-230, 2013/11
  • トモグラフィー電子顕微鏡用ソフトウェアの活用・普及促進, 御堂義博, 2013/09
  • 電子線照射による表面から放出された電子のエネルギースペクトル計算, 御堂義博, 2013/08
  • Energy spectrum simulation of electrons emitted from specimen surface by electron beam irradiation, Y. Midoh, 2013/08
  • トモグラフィー電子顕微鏡用ソフトウェアHawkCの紹介, 御堂 義博,西 竜治,メディヌリシラジ,鎌倉 快之,井上 雄紀,三浦 順一郎,鷹岡 昭夫,中前 幸治, 2013/05
  • 電子線トモグラフィーにおけるアライメント手法の定量的評価, 御堂義博,中前幸治, 2013/03
  • A dose modification strategy of electron-beam directwriting considering TDDB reliability in LSI interconnects, Yoshihiro Midoh,Atsushi Osaka,Koji Nakamae, ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES V, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 8680, 2013/02
  • テラヘルツ光放射を用いたLSI 故障解析, 山下将嗣,大谷知行,松本徹,御堂義博,三浦克介,二川 清,中前幸治,斗内政吉, 砥粒加工学会誌, 2012/08
  • レーザーテラヘルツ放射顕微鏡の無バイアスLSI故障解析への応用, 山下将嗣,大谷知行,松本徹,御堂義博,三浦克介,中前幸治,二川清, 2012/07
  • レーザー励起 テラヘルツ波放射における多層配線の影響, 山下将嗣,大谷知行,松本 徹,御堂義博,三浦克介,二川 清,中前幸治, 2012/03
  • The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localization, Kiyoshi Nikawa,Masatsugu Yamashita,Toru Matsumoto,Katsuyoshi Miura,Yoshihiro Midoh,Koji Nakamae, Microelectronics Reliability, PERGAMON-ELSEVIER SCIENCE LTD, Vol. 51, No. 9-11, p. 1624-1631, 2011/10
  • Non-electrical-contact LSI failure analysis using non-bias laser terahertz emission microscope, Kiyoshi Nikawa,Masatsugu Yamashita,Toru Matsumoto,Chiko Otani,Masayoshi Tonouchi,Yoshihiro Midoh,Katsuyoshi Miura,Koji Nakamae, Proc. 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IEEE, 2011/07
  • THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis, M. Yamashita,O. Otani,T. Matsumoto,Y. Midoh,K. Miura,K. Nakamae,K. Nikawa,S. Kim,M. Murakami,M. Tonouchi, OPTICS EXPRESS, OPTICAL SOC AMER, Vol. 19, No. 11, p. 10864-10873, 2011/05
  • Simulation of THz-wave signals in laser terahertz emission microscope for LSI failure analysis, Y. Midoh,M. Yamashita,T. Matsumoto,K. Nikawa,K. Nakamae, Proc. the 30th LSI Testing Symposium, 2010/11
  • Three-dimensional metrology from SEM tilt-series images, F. Hayashi,Y. Midoh,K. Nakamae, Proc. 30th LSI Testing Symposium, 2010/11
  • Non-bias inspection of electrical failures in LSI interconnects using LTEM prototype system, M. Yamashita,C. Otani,T. Matsumoto,Y. Midoh,K. Miura,K. Nikawa,K. Nakamae,M. Tonouchi, 35TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ 2010), IEEE, 2010/09
  • Determining Magnetic Field Close to Air-Bearing Surface by Projection Electron-Beam Tomography and Fourier Extrapolation, Hiroyuki SHINADA,Yoshihiro MIDOH,Tomokazu SHIMAKURA,Koji NAKAMAE, SICE Journal of Control, Measurement, and System Integration, The Society of Instrument and Control Engineers, Vol. 3, No. 4, p. 223-228, 2010
  • Observation of LSI TEG chips using laser THz emission microscope II, M. Yamashita,C. Otani,S. Kim,H. Murakami,M. Tonouchi,T. Matsumoto,Y. Midoh,K. Miura,K. Nakamae,K. Nikawa, 2009/11
  • Laser THz emission microscope as a novel tool for LSI failure analysis, Masatsugu Yamashita,Chiko Otani,Sunmi Kim,Hironaru Murakami,Masayoshi Tonouchi,Toru Matsumoto,Yoshihiro Midoh,Katsuyoshi Miura,Koji Nakamae,Kiyoshi Nikawa, MICROELECTRONICS RELIABILITY, PERGAMON-ELSEVIER SCIENCE LTD, Vol. 49, No. 9-11, p. 1116-1126, 2009/09
  • 3D analysis of benign positional nystagmus due to cupulolithiasis in posterior semicircular canal, T. Imai,N. Takeda,M. Ito,K. Sekine,G. Sato,Y. Midoh,K. Nakamae,T. Kubo, Acta Oto-Laryngologica, TAYLOR & FRANCIS AS, Vol. 129, No. 10, p. 1044-1049, 2009/01
  • Development of an LTEM prototype system for LSI failure analysis, Masatsugu Yamashita,Chiko Otani,Sunmi Kim,Hironaru Murakmai,Masayoshi Tonouchi,Toru Matsumoto,Yoshihiro Midoh,Katsuyoshi Miura,Koji Nakamae,Kiyoshi Nikawa, 2009 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, VOLS 1 AND 2, IEEE, p. 241-+, 2009
  • Development of automatic system on electron microscopic tomography for 3D medical examination, Akio Takaoka,Meng Cao,Yoshihiro Midoh,Tomoki Nishida,Toshiaki Hasegawa,Ryuji Nishi,Yuuki Inoue,Mitsuo Ogasawara, Korean Journal of Microscopy, 2008/11
  • Object size measurement method from noisy SEM images by utilizing scale space, Y. Midoh,K. Nakamae,H. Fujioka, Measurement Science and Technology, Vol. vol. 18, no. 3. pp. 579-591, 2007/03
  • Computer-assisted lesion detection system for stomach screening using stomach shape and appearance models, Y. Midoh,M. Nakamura,M. Takashima,K. Nakamae,H. Fujioka, Proc. SPIE: Medical Imaging, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 6514, 2007/02
  • Computer-assisted lesion detection system for stomach screening using stomach shape and appearance models, Y. Midoh,M. Nakamura,M. Takashima,K. Nakamae,H. Fujioka, Progress in Biomedical Optics and Imaging - Proceedings of SPIE, Vol. 6514, No. 2, 2007
  • Line edge roughness measurement of nanostructures in SEM metrology by using statistically matched wavelet, Yoshihiro Midoh,Koji Nakamae,Hiromu Fujioka, Proceedings of SPIE - The International Society for Optical Engineering, Vol. 6763, 2007
  • A comparison of wavelet multiresolution analysis and scale-space edge detection for lithography metrology, Yoshihiro Midoh,Koji Nakamae,Hiromu Fujioka, Proc. SPIE: Wavelet Applications in Industrial Processing IV, Vol. vol. 6383, 2006/10
  • Statistical optimization of Canny edge detector for measurement of fine line patterns in SEM image, Yoshihiro Midoh,Katsuyoshi Miura,Koji Nakamae,Hiromu Fujioka, Measurement Science and Technology, Institute of Physics Publishing, Vol. 16, No. 2, p. 477-487, 2005
  • Boundary extraction in the SEM cross section of LSI by multiple Gaussian filtering, Y Midoh,K Nakamae,H Fujioka, TWO- AND THREE - DIMENSIONAL VISION SYSTEMS FOR INSPECTION, CONTROL, AND METROLOGY II, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 5606, p. 169-178, 2004
  • Fine structure measurement in the SEM cross section of LSI using the canny edge detector, Y Midoh,K Miura,K Nakamae,H Fujioka, MACHINE VISION APPLICATIONS IN INDUSTRIAL INSPECTION XI, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 5011, p. 190-199, 2003
  • Boundary extraction in the SEM cross section of LSI, K Nakamae,Y Midoh,K Miura,H Fujioka, INTELLIGENT ROBOTS AND COMPUTER VISION XX: ALGORITHMS, TECHNIQUES, AND ACTIVE VISION, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 4572, p. 451-458, 2001

Misc.

  • ウェーブレット隠れマルコフモデルを用いた電子線ホログラムの雑音除去, 御堂 義博,中前 幸治,品田 博之,村上 恭和, 顕微鏡, Vol. 55, No. 2, p. 53-59, 2020/09
  • Image analysis and abnormality detection using deep learning, Yoshihiro Midoh, 2019/10
  • Noise reduction from electron hologram by using hidden Markov model, T. Tamaoka,K. Yamamoto,Y. Midoh,T. Tanigaki,M. Nakamura,M. Kawasaki,K. Nakamae,Y. Murakami, 2019/06
  • Effect of variance stabilization on denoising in electron hologram with low SNR using wavelet-based hidden Markov models, 2018/09
  • Improving SEM image quality using wavelet transform and convolutional neural networks, Yoshihiro Midoh,Koji Nakamae, 2018/07
  • Three-dimensional reconstruction from microscope tilt-series images using object tracking based on particle filter, Yoshihiro Midoh,Fumiya Hayashi,Koji Nakamae, 2010/09
  • Three-dimensional reconstruction from electron microscopic tilt series using object tracking based on particle filters, Fumiya Hayashi,Yoshihiro Midoh,Koji Nakamae, 2010/09
  • レーザテラヘルツエミッション顕微鏡のLSI 故障解析への応用, 松本徹,山下将嗣,大谷知行,金鮮美,村上博成,斗内政吉,御堂義博,三浦克介,中前幸治,二川清, 2010/03
  • LTEMによるLSI故障解析のためのTHz 波シミュレーション(II), 御堂義博,山下将嗣,松本徹,斗内政吉,二川清,中前幸治, 2010/03
  • Evaluation of maskless electron-beam direct writingwith double character projection apertures, Y. Midoh,T. Terasaka,K. Nakamae, ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES II, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 7637, 2010/02
  • 電子顕微鏡トモグラフィのためのマーカーフリーアライメント手法の検討, 2010
  • Three-dimensional reconstruction from microscope tilt-series images using object tracking based on particle filter, 2010
  • A study of marker-free alignment for electron tomography by trifocal geometry, 2010
  • LSI故障解析の新手法―レーザSQUID 法とレーザテラヘルツ法の複合的利用:外部電力・外部信号不用な電気的解析法―, 二川清,山下将嗣,大谷知行,斗内政吉,村上博成,金鮮美,中前幸治,三浦克介,御堂義博,松本徹,青木芳充,井上彰二,永石竜起,酒井哲哉, クリーンテクノロジー, 日本工業出版, Vol. 12, 2009/12
  • Evaluation of defect inspection using a high-resolution pattern image obtained from multiple low-resolution SEM images, Y. Midoh,M. Takashima,K. Nakamae, 2009/11
  • Maskless electron beam direct writing with double character projection apertures, T. Terasaka,Y. Midoh,K. Nakamae, 2009/11
  • Novel electrical failure analysis tools for LSI chips: non-bias and non-signal-application, K. Nikawa,M. Yamashita,C. Otani,M. Tonouchi,H. Murakami,S. Kim,K. Nakamae,K. Miura,Y.Midoh,T. Matsumoto,Y. Aoki,T. Nagaishi,S. Inoue,T. Sakai, 2009/10
  • Laser terahertz emission microscope for inspecting interconnect defects in semiconductor devices, Masatsugu Yamashita,Chiko Otani,Sunmi Kim,Hironaru Murakami,Masayoshi Tonouchi,Toru Matsumoto,Yoshihiro Midoh,Katsuyoshi Miura,Koji Nakamae,Kiyoshi Nikawa, 2009/10
  • LSI故障解析用LTEMプロトタイプ装置の開発, 山下将嗣,大谷知行,金鮮美,村上博成,斗内政吉,松本徹,御堂義博,三浦克介,中前幸治,二川清, 2009/09
  • LSI故障解析用レーザーテラヘルツ放射顕微鏡プロトタイプ装置の開発, 山下将嗣,大谷知行,金鮮美,村上博成,斗内政吉,松本徹,御堂義博,三浦克介,中前幸治,二川清, 2009/05
  • 新しい眼球運動解析システム(2), 2009
  • 複数低解像度SEM画像からの高解像度化を用いた欠陥検査の評価, 2009
  • Laser terahertz emission microscope for inspecting interconnect defects in semiconductor devices, 2009
  • 二段キャラクタプロジェクションマスクレス電子ビーム直接描画方式の検討, 2009
  • Novel electrical failure analysis tools for LSI chips: non-bias and non-signal-application, 2009
  • Pattern images alignment for on-line SEM measurement and defect inspection, M. Takashima,Y. Midoh,K. Nakamae, 2008/11
  • 新しい眼球運動解析システム, 今井貴夫,御堂義博,関根和教,佐藤 豪,中前幸治,武田憲昭, 2008/10
  • LTEMによるLSI 故障解析のためのTHz波シミュレーション, 御堂義博,中前幸治,山下将嗣,斗内政吉,二川 清, 2008/09
  • SIFT特徴量を用いた電子顕微鏡トモグラフィ自動化の検討, 御堂義博,高島真彦,鷹岡昭夫,西 竜治,中前幸治, 2008/09
  • Defect inspection using a high-resolution pattern image obtained from multiple low-resolution images of the same pattern on an observed noisy SEM image, Masahiko Takashima,Yoshihiro Midoh,Koji Nakamae, METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII, PTS 1 AND 2, SPIE-INT SOC OPTICAL ENGINEERING, Vol. 6922, No. 1-2, 2008/05
  • オンラインSEM形状計測・欠陥検査のための観測画像アライメント, 2008
  • 平衡神経・眼球運動シミュレータを用いた良性発作性頭位めまい症の治療支援, 吉村昌悟,御堂義博,中前幸治,今井貴夫,関根和教,武田憲昭, FIT2007 第6 回情報科学技術フォーラム, No. G-023, 2007/09
  • SEM画像におけるLSI微細構造計測のためのスケールスペース理論を用いた境界抽出, 御堂義博,中前幸治,藤岡 弘, 電子情報通信学会2006 年総合大会, Vol. D-11-127, 2006/03
  • LSI断面SEM観測画像の微細形状計測アルゴリズム, 御堂義博,三浦克介,中前幸治,藤岡 弘, 2002年電子情報通信学会総合大会, Vol. C-12-4, p. 86, 2002

Publications

  • 日本学術振興会研究開発専門委員会 自律型・複合型AI先端計測の新しい価値創造 研究成果報告書, 2021/03
  • 立体像可視化ソフトウェア「HawkC」の開発, 御堂義博, エヌ・ティー・エス, ISBN:9784860434281, 2015/05

Works

  • トモグラフィー電子顕微鏡用のソフトウェア, 御堂義博,西竜治,鎌倉快之,井上雄紀,メディ・ヌリ・シラジ,三浦順一郎, 2015/09/02 - 2015/09/03
  • めまい診断のための眼球運動解析システム, 御堂義博,今井貴夫,関根和教,武田憲昭,猪原秀典,中前幸治, 2009/11/25 - 2009/11/29

Awards

  • 第39回ナノテスティングシンポジウム若手奨励賞, 岩本 航, 御堂義博, 中前幸治, ナノテスティング学会, 2019/12
  • 第42回(2012年度)信頼性・保全性シンポジウム奨励報文賞, 山下将嗣,大谷知行,松本 徹,御堂義博,三浦克介,中前幸治,二川清, 一般財団法人日本化学技術連盟, 2012/07

Presentations

  • Improving Phase Accuracy of Electron Holograms Using Noise Reduction, Yoshihiro Midoh,Koji Nakamae, The 77th Annual Meeting of the Japanese Society of Microscopy, 2021/06/16
  • ウェーブレット隠れマルコフモデルを用いた電子線ホログラムの雑音除去, 御堂 義博, 顕微鏡計測インフォマティックス 第2回研究会, 2021/01/23
  • Application developments of machine learning and deep learning in metrology, Yoshihiro Midoh, The 40th NANO Testing Symposium, 2020/11/18
  • Comparison of phase reconstruction by applying wavelet hidden Markov model denoising to electron hologram and its Fourier plane image, Yoshihiro Midoh,Koji Nakamae, 2020/03
  • Residue reduction method by repairing defects of interference fringes in electron hologram, K. Miura,Y. Midoh,Y. Murakami,K. Nakamae, Proceedings of the 39th Nano Testing Symposium, 2019/11
  • Cell state prediction of cultured adipocyte from quantitative phase microscope images using deep learning, S. Tanigawa,Y. Midoh,K. Nakamae, Proceedings of the 39th Nano Testing Symposium, 2019/11
  • Study on time-series data prediction using explainable deep-learning algorithms, K. Shinoda,Y. Midoh,K. Nakamae, Proceedings of the 39th Nano Testing Symposium, 2019/11
  • Performance improvement in dual-tree complex wavelet-based denoising by redesigning the first-scale filters, Y. Midoh,K. Nakamae, 第39回ナノテスティングシンポジウムNANOTS2019会議録, 2019/11
  • Study on a parameter optimization of scanning electron microscope simulation using deep learning, K. Iwamoto,Y. Midoh,K. Nakamae, Proceedings of the 39th Nano Testing Symposium, 2019/11
  • Image analysis and abnormality detection using deep learning, Yoshihiro Midoh, 2019/10
  • Effect of first-scale filters on denoising in electron holography using dual-tree complex wavelet transform and hidden Markov models, Yoshihiro Midoh,Koji Nakamae, 2019/09
  • Image quality enhancement of a CD-SEM image using conditional generative adversarial networks, Y. Midoh,K. Nakamae, 2019/02
  • Image quality enhancement of a CD-SEM image using conditional generative adversarial networks, Y. Midoh,K. Nakamae, 第38回ナノテスティングシンポジウムNANOTS2018会議録, 2019/02
  • Automatic cell nucleus extraction from transmitted light images of pluripotent stem cells using deep learning, K. Arita,Y. Midoh,K. Nakamae, Proceedings of the 38th Nano Testing Symposium, 2018/11
  • Phase unwrapping of quantitative phase microscope images for cell culture monitoring, S. Tanigawa,Y. Midoh,K. Nakamae, Proceedings of the 38th Nano Testing Symposium, 2018/11
  • Effect of variance stabilization on denoising of low SNR fringe patterns using wavelet hidden markov models, Y. Midoh,K. Nakamae, 第38回ナノテスティングシンポジウムNANOTS2018会議録, 2018/11
  • Mitochondria segmentation in scanning electron microscope images using a machine learning approach (2), K. Adachi,Y. Midoh,K. Nakamae, Proceedings of the 38th Nano Testing Symposium, 2018/11
  • 深層学習の概要と多能性幹細胞透過光像への適用事例, 御堂義博, 2018/10
  • Noise reduction in electron hologram by using dual-tree complex wavelet transform and hidden Markov tree models, Yoshihiro Midoh,Koji Nakamae, 19th International Microscopy Congress (IMC19), 2018/09
  • Effect of variance stabilization on denoising in electron hologram by wavelet hidden Markov models, Yoshihiro Midoh,Koji Nakamae, The 44rd international conference on micro- and nanoengineering (MNE2018), 2018/09

Academic Activities

  • Nano Testing Symposium, ナノテスティング学会, 2020/11 -
  • Nano Testing Symposium, ナノテスティング学会, 2019/11 -
  • Nano Testing Symposium, ナノテスティング学会, 2018/11 -
  • Nano Testing Symposium, ナノテスティング学会, 2017/11 -
  • Nano Testing Symposium, ナノテスティング学会, 2016/11 -
  • Nano Testing Symposium, ナノテスティング学会, 2015/11 -
  • Nano Testing Symposium, ナノテスティング学会, 2014/11 -
  • ナノテスティングシンポジウム, ナノテスティング学会, 2013/11 -
  • LSIテスティングシンポジウム, LSIテスティング学会, 2012/11 -
  • LSIテスティングシンポジウム, LSIテスティング学会, 2011/11 -
  • LSIテスティングシンポジウム, LSIテスティング学会, 2010/11 -
  • LSIテスティングシンポジウム, LSIテスティング学会, 2009/11 -
  • LSIテスティングシンポジウム, LSIテスティング学会, 2008/11 -

Committee Memberships

  • 日本顕微鏡学会, 顕微鏡計測インフォマティックス研究部会, 2019/09 - Present
  • ナノテスティング学会, 事務局, 2007/06 - Present
  • 独立行政法人 日本学術振興会, AI活用型システム創成委員会, 2021/02 - 2022/03
  • Japan Society for the Promotion of Science, Value Creation of Autonomous- and Cooperative-Type Advanced Measurement using “AI”, 2018/04 - 2021/03