顔写真

PHOTO

Takenaka Kosuke
竹中　弘祐
Takenaka Kosuke
竹中　弘祐
Institutional repository
Joining and Welding Research Institute, Associate Professor
Institutional repository

Research History 3

  1. 2019/08 - Present
    Osaka University　Joining and Welding Research Institute

  2. 2008/04 - 2019/08
    Osaka University　Joining and Welding Research Institute

  3. 2005/04 - 2008/03
    Osaka University　Joining and Welding Research Institute

Education 3

  1. Kyushu University　Graduate School of Information Science and Electrical Engineering　Department of Electronic Device Engineering

    2002/04 - 2005/03

  2. Kyushu University　Graduate School of Information Science and Electrical Engineering　Department of Electronic Device Engineering

    2000/04 - 2002/03

  3. Doshisha University

    1996/04 - 2000/03

Committee Memberships 5

  1. スマートプロセス学会　編集委員会委員　Academic society

    2021/01 - Present

  2. 応用物理学会　プラズマエレクトロニクス分科会幹事　Academic society

    2022/04 - 2024/03

  3. 応用物理学会　プログラム委員(大分類８プラズマエレクトロニクス)　Academic society

    2018/04 - 2022/03

  4. 応用物理学会　プラズマエレクトロニクス分科会幹事　Academic society

    2016/04 - 2018/03

  5. スマートプロセス学会　評議員

    2011 -

Professional Memberships 4

  1. SMART PROCESSING SOCIETY FOR MATERIALS, ENVIRONMENT & ENERGY

  2. JAPAN WELDING SOCIETY

  3. THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN

  4. THE JAPAN SOCIETY OF APPLIED PHYSICS

Research Areas 2

  1. Nanotechnology/Materials / Material fabrication and microstructure control /

  2. Energy / Basic plasma science /

Awards 14

  1. 第20回(2022年秋季) 応用物理学会 Poster Award

    竹中 弘祐, 都甲 将, 節原 裕一　応用物理学会　2022/11

  2. Best Review賞

    内田 儀一郎、池田 純一郎、竹中 弘祐、節原 裕一　（一社）スマートプロセス学会　2021/04

  3. The Best Short Presentation Awards

    Kosuke Takenaka, Hiroyuki Hirayama, Tomoki Fujimura, Yuji Hayashi, Akinori Ebe, Yuichi Setsuhara　Organizing Committee of ISPlasma2021/IC-PLANTS2021　2021/03

  4. ICMaSS2019/ iLIM-s Outstanding Presentation Award

    Hiroyuki Hirayama, Kosuke Takenaka, Yuichi Setsuhara　ICMaSS2019　2019/11

  5. Best presentation award

    Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, Yuichi Setsuhara　ISPlasma2017/IC-PLANTS2017　2017/03

  6. Participants' Poster Prize

    G. Uchida, A. Nakajima, T. Ito, K. Takenaka, T. Kawasaki, K. Koga, M. Shiratani, Y. Setsuhara　6th International Conference on Plasma Medicine　2016/09

  7. 2015年応用物理学会秋季学術講演会 Poster Award

    竹中 弘祐, 内田 儀一郎, 節原 裕一　応用物理学会　2015/09

  8. Osaka University Presidential Awards for Encouragement

    Kosuke Takenaka　Osaka University　2015/07

  9. Award for Encouragement of Research in the 24th Annual Meeting of MRS-J

    Kosuke Takenaka　The Materials Research Society of Japan　2015/01

  10. 論文賞

    竹中 弘祐　（社）高温学会　2012/03

  11. Award for Encouragement of Research of Materials Science

    Kosuke Takenaka　The Materials Research Society of Japan　2005/12

  12. Paper Awards for Young Scientist

    Kosuke Takenaka　Japan Society for the Promotion of Scienece　2004/07

  13. 第14回応用物理学会講演奨励賞

    竹中 弘祐　応用物理学会　2003/08

  14. 平成12年度応用物理学会九州支部学術講演会・応用物理学会九州支部発表奨励賞

    竹中 弘祐　応用物理学会九州支部　2000/12

Papers 151

  1. Effective use of molecular sieves for methanation with plasma catalysis

    Susumu Toko, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Masakuni Ozawa, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 64　No. 7　p. 076003-076003　2025/07/01　Research paper (scientific journal)

    Publisher: IOP Publishing

  2. Photocatalytic decomposition of methylene blue using a zinc–tungsten oxide compound prepared by co-sputtering and calcination

    Sho Kakuta, Kosuke Takenaka, Makoto Takahashi, Yuichi Setsuhara, Takeru Okada

    Japanese Journal of Applied Physics　Vol. 64　No. 4　p. 04SP07-04SP07　2025/04/01　Research paper (scientific journal)

    Publisher: IOP Publishing

  3. 大気圧非平衡プラズマジェットを用いた有機材料と金属材料の直接接合

    節原 裕一, 竹中 弘祐, 内田 儀一郎

    表面技術　Vol. 76　No. 1　p. 27-33　2025/01/01

  4. Influence of pre-treatment with non-thermal atmospheric pressure plasma on bond strength of TP340 titanium-PEEK direct bonding

    Kosuke Takenaka, Soutaro Nakamoto, Ryosuke Koyari, Akiya Jinda, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    The International Journal of Advanced Manufacturing Technology　Vol. 134　p. 1637-1644　2024/08/07　Research paper (scientific journal)

    Publisher: Springer Science and Business Media LLC

  5. Hydrogen-included plasma-assisted reactive sputtering for conductivity control of ultra-wide bandgap amorphous gallium oxide

    Kosuke Takenaka, Hibiki Komatsu, Taichi Sagano, Keisuke Ide, Susumu Toko, Takayoshi Katase, Toshio Kamiya, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 63　No. 4　p. 04SP65/1-04SP65/5　2024/04/17　Research paper (scientific journal)

    Publisher: IOP Publishing

  6. Improving the efficiency of CO2 methanation using a combination of plasma and molecular sieves

    Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Results in Surfaces and Interfaces　p. 100204/1-100204/7　2024/02　Research paper (scientific journal)

    Publisher: Elsevier BV

  7. Stability and gap states of amorphous In-Ga-Zn-Ox thin film transistors: Impact of sputtering configuration and post-annealing on device performance

    Kosuke Takenaka, Shota Nunomura, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Hitoshi Tampo, Yuichi Setsuhara

    Thin Solid Films　Vol. 790　p. 140203/1-140203/8　2024/02　Research paper (scientific journal)

    Publisher: Elsevier BV

  8. Fundamental Study of Carbon Dioxide Reduction Reaction with Plasma Catalysis

    Susumu TOKO, Takamasa OKUMURA, Kunihiro KAMATAKI, Kosuke TAKENAKA, Kazunori KOGA, Masaharu SHIRATANI, Yuichi SETSUHARA

    Journal of Smart Processing　Vol. 13　No. 1　p. 31-36　2024/01/10　Research paper (scientific journal)

    Publisher: Sumart Processing Society for Minerals, Environment and Energy

  9. Influence of pre-treatment using non-thermal atmospheric pressure plasma jet on aluminum alloy A1050 to PEEK direct joining with hot-pressing process

    Kosuke Takenaka, Akiya Jinda, Soutaro Nakamoto, Ryosuke Koyari, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    The International Journal of Advanced Manufacturing Technology　Vol. 130　No. 3-4　p. 1925-1933　2023/12/15　Research paper (scientific journal)

    Publisher: Springer Science and Business Media LLC

  10. Improving bonding strength by non-thermal atmospheric pressure plasma-assisted technology for A5052/PEEK direct joining

    Kosuke Takenaka, Akiya Jinda, Soutaro Nakamoto, Ryosuke Koyari, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    The International Journal of Advanced Manufacturing Technology　Vol. 130　No. 1-2　p. 903-913　2023/12/06　Research paper (scientific journal)

    Publisher: Springer Science and Business Media LLC

  11. Direct bonding of stainless steel and PEEK using non-thermal atmospheric pressure plasma-assisted joining technology

    Kosuke Takenaka, Akiya Jinda, Soutaro Nakamoto, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    Journal of Manufacturing Processes　Vol. 105　p. 276-281　2023/11　Research paper (scientific journal)

    Publisher: Elsevier BV

  12. プラズマ支援反応性プロセスを用いた酸化物半導体薄膜形成

    竹中 弘祐、節原 裕一、江部 明憲

    真空ジャーナル　Vol. 186　p. 10-15　2023/10

  13. Analysis of residual oxygen during a-IGZO thin film formation by plasma-assisted reactive sputtering using a stable isotope

    Kosuke Takenaka, Masashi Endo, Hiroyuki Hirayama, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Vacuum　Vol. 215　2023/09　Research paper (scientific journal)

  14. Analysis of oxygen-based species introduced during plasma assisted reactive processing of a-IGZO films

    Kosuke Takenaka, Hiroyuki Hirayama, Masashi Endo, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　No. SL　2023/09/01　Research paper (scientific journal)

  15. Contribution of active species generated in plasma to CO2 methanation

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　No. SL　2023/09/01　Research paper (scientific journal)

  16. Optical emission spectroscopy study in CO<inf>2</inf> methanation with plasma

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　2023/07/01　Research paper (scientific journal)

  17. Plasma processing technique by combination of plasma-assisted reactive sputtering and plasma annealing for uniform electrical characteristics of InGaZnO thin film transistors formed on large-area substrates

    Kosuke Takenaka, Tomoki Yoshitani, Masashi Endo, Hiroyuki Hirayama, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 62　No. SI　p. SI1005/1-SI1005/9　2023/03　Research paper (scientific journal)

    Publisher: IOP Publishing

  18. Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis

    Susumu Toko, Masashi Ideguchi, Taiki Haseagawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 61　p. SI1002/1-SI1002/6　2022/04　Research paper (scientific journal)

  19. Plasma Synthesis of Silicon Nanoparticles: From Molecules to Clusters and Nanoparticle Growth

    Shota Nunomura, Kunihiro Kamataki, Takehiko Nagai, Tatsuya Misawa, Shinji Kawai, Kosuke Takenaka, Giichiro Uchida, Kazunori Koga

    IEEE Open Journal of Nanotechnology　Vol. 3　p. 94-100　2022　Research paper (scientific journal)

  20. Development of a non-thermal atmospheric pressure plasma-assisted technology for the direct joining of metals with dissimilar materials

    Kosuke Takenaka, Rikuro Machida, Tetsuya Bono, Akiya Jinda, Susumu Toko, Giichiro Uchida, Yuichi Setsuhara

    Journal of Manufacturing Processes　Vol. 75　p. 664-669　2022/01　Research paper (scientific journal)

  21. プラズマ支援反応性プロセスによるアモルファスInGaZnOx薄膜形成

    竹中 弘祐, 節原 裕一, 内田 儀一郎, 江部 明憲

    応用物理　Vol. 90　No. 1　p. 35-39　2021/01

  22. ミストを用いたプラズマ支援反応性プロセスによる機能性酸化物薄膜の形成

    竹中 弘祐, 節原 裕一

    スマートプロセス学会誌　Vol. 10　No. 1　p. 10-14　2021/01

  23. 非平衡プラズマが拓くパラダイム －薄膜トランジスタ形成から医療、異材接合まで－

    竹中 弘祐, 節原 裕一, 内田 儀一郎, 江部 明憲

    生産と技術　Vol. 72　No. 4　p. 15-19　2020/09

  24. Formation of functional oxide thin films using plasma-assisted reactive process

    Kosuke Takenaka, Yuichi Setsuhara

    J. Japan Welding Soc.　Vol. 89　No. 7　p. 472-475　2020/07　Research paper (scientific journal)

  25. Visualization Study on Interaction Between Nonequilibrium Atmospheric Pressure He Plasma Jet and Liquid Solution

    Giichiro Uchida, Junichiro Ikeda, Kosuke Takenaka, Yuichi Setsuhara

    Journal of Smart Processing　Vol. 9　No. 3　p. 90-96　2020/05

  26. Effects of surrounding gas on plasma-induced downward liquid flow

    Toshiyuki Kawasaki, Keisuke Nishida, Giichiro Uchida, Fumiaki Mitsugi, Kosuke Takenaka, Kazunori Koga, Yuichi Setsuhara, Masaharu Shiratani

    Japanese Journal of Applied Physics　Vol. 59　No. SH　p. SHHF02/1-SHHF02/6　2020/03　Research paper (scientific journal)

  27. Publisher Correction: Decomposition and oxidation of methionine and tryptophan following irradiation with a nonequilibrium plasma jet and applications for killing cancer cells (Scientific Reports, (2019), 9, 1, (6625), 10.1038/s41598-019-42959-4)

    Giichiro Uchida, Yusuke Mino, Tensho Suzuki, Jun ichiro Ikeda, Takashi Suzuki, Kosuke Takenaka, Yuichi Setsuhara

    Scientific Reports　Vol. 9　2019/12/01

  28. High-rate deposition of silicon nitride thin films using plasma-assisted reactive sputter deposition

    Kosuke Takenaka, Yuichi Setsuhara, Jeon Geon Han, Giichiro Uchida, Akinori Ebe

    Thin Solid Films　Vol. 685　p. 306-311　2019/09　Research paper (scientific journal)

  29. Droplet-Vaporization Behavior during Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films

    Kosuke Takenaka, Yuichi Setsuhara

    Plasma Sources Science & Technology　Vol. 28　p. 065015/1-065015/8　2019/06　Research paper (scientific journal)

  30. Low-temperature formation of high-mobility a-InGaZnOx films using plasma-enhanced reactive processes

    Kosuke Takenaka, Masashi Endo, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 58　p. 090605/1-090605/5　2019/06　Research paper (scientific journal)

  31. 大気圧非平衡プラズマによる水中活性種の生成・制御

    節原 裕一, 内田 儀一郎, 竹中 弘祐

    金属　Vol. 89　No. 6　p. 9-14　2019/05

  32. Decomposition and oxidation of methionine and tryptophan following irradiation with a nonequilibrium plasma jet and applications for killing cancer cells

    Giichiro Uchida, Yusuke Mino, Tensho Suzuki, Jun-ichiro Ikeda, Takashi Suzuki, Kosuke Takenaka, Yuichi Setsuhara

    Scientific Reports　Vol. 9　p. 6625/1-6625/17　2019/04　Research paper (scientific journal)

  33. 大気圧非平衡He プラズマジェットと溶液との相互作用に関する可視化研究

    内田 儀一郎, 竹中 弘祐, 川崎 敏之, 古閑 一憲, 白谷 正治, 節原 裕一

    スマートプロセス学会誌　Vol. 8　No. 2　p. 58-63　2019/03

  34. Effects of post-deposition plasma treatments on stability of amorphous InGaZnOx thin-film transistors prepared with plasma-assisted reactive magnetron sputtering

    K. Takenaka, M. Endo, G. Uchida, Y. Setsuhara

    Japanese Journal of Applied Physics　Vol. 58　No. 2s　p. SAAC03/1-SAAC03/5　2019/02　Research paper (scientific journal)

  35. Influence of deposition condition on electrical properties of a-IGZO films deposited by plasma-enhanced reactive sputtering

    K. Takenaka, M. Endo, G. Uchida, Y. Setsuhara, and A. Ebe

    Journal of Alloys and Compounds　Vol. 772　p. 642-649　2019/01　Research paper (scientific journal)

  36. Plasma-enhanced reactive linear sputtering source for formation of silicon-based thin films

    K. Takenaka, Y. Setsuhara, J. G. Han, G. Uchida, and A. Ebe

    Review of Scientific Instruments　Vol. 89　No. 8　p. 083902/1-083902/6　2018/08　Research paper (scientific journal)

  37. The effect of the H2/(H2+Ar) flow-rate ratio on hydrogenated amorphous carbon films grown using Ar/H2/C7H8 plasma chemical vapor deposition

    T. Fang, K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka, and Y. Setsuhara

    Thin Solid Films　Vol. 660　No. 8　p. 891-898　2018/08　Research paper (scientific journal)

  38. Effect of a plasma-activated medium produced by direct irradiation on cancer cell killing

    G. Uchida, T. Ito, J. Ikeda, T. Suzkuki, K. Takenaka, Y. Setsuhara

    Japanese Journal of Applied Physics　Vol. 57　No. 9　p. 096201-1-096201-6　2018/07　Research paper (scientific journal)

  39. Fabrication of high-performance InGaZnOx thin film transistors based on control of oxidation using a low-temperature plasma

    Kosuke Takenaka, Masashi Endo, Giichiro Uchida, Yuichi Setsuhara

    Applied Physics Letters　Vol. 112　No. 15　p. 152103/1-152103/3　2018/04/09　Research paper (scientific journal)

    Publisher: American Institute of Physics Inc.

  40. Low-temperature formation of c-axis-oriented aluminum nitride thin films by plasma-assisted reactive pulsed-DC magnetron sputtering

    Kosuke Takenaka, Yoshikatsu Satake, Giichiro Uchida, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 57　No. 1　p. 01AD06-1-01AD06-5　2018/01/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  41. Selective production of reactive oxygen and nitrogen species in the plasma-treated water by using a nonthermal high-frequency plasma jet

    Giichiro Uchida, Kosuke Takenaka, Keigo Takeda, Kenji Ishikawa, Masaru Hori, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 57　No. 1　p. 0102B4-1-0102B4-6　2018/01/01　Research paper (scientific journal)

    Publisher: Japan Society of Applied Physics

  42. Development of a non-equilibrium 60 MHz plasma jet with a long discharge plume

    Giichiro Uchida, Kazufumi Kawabata, Taiki Ito, Kosuke Takenaka, Yuichi Setsuhara

    Journal of Applied Physics　Vol. 122　No. 3　p. 033301-1-033301-8　2017/07/21　Research paper (scientific journal)

    Publisher: American Institute of Physics Inc.

  43. Control of reactive oxygen and nitrogen species production in liquid by nonthermal plasma jet with controlled surrounding gas

    Taiki Ito, Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 56　No. 1　p. 01AC06-1-01AC06-6　2017/01/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  44. Effects of Working Pressure on the Physical Properties of a-InGaZnOx Films Formed Using Inductively Coupled Plasma-Enhanced Reactive Sputtering Deposition

    Kosuke Takenaka, Keitaro Nakata, Giichiro Uchida, Yuichi Setsuhara, Akinori Ebe

    IEEE Transactions on Plasma Science　Vol. 44　No. 12　p. 3099-3106　2016/12/01　Research paper (scientific journal)

    Publisher: Institute of Electrical and Electronics Engineers Inc.

  45. Effects of nonthermal plasma jet irradiation on the selective production of H2O2 and NO2- in liquid water

    Giichiro Uchida, Atsushi Nakajima, Taiki Ito, Kosuke Takenaka, Toshiyuki Kawasaki, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    Journal of Applied Physics　Vol. 120　No. 20　p. 203302-1-203302-9　2016/11/28　Research paper (scientific journal)

    Publisher: American Institute of Physics Inc.

  46. Process controllability of inductively coupled plasma-enhanced reactive sputter deposition for the fabrication of amorphous InGaZnOx channel thin-film transistors

    Kosuke Takenaka, Keitaro Nakata, Hirofumi Otani, Soichiro Osaki, Giichiro Uchida, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 55　No. 1　p. 01AA18-1-01AA18-6　2016/01/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  47. Influence of voltage pulse width on the discharge characteristics in an atmospheric dielectric-barrier-discharge plasma jet

    Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 55　No. 1　p. 01AH03-1-01AH03-6　2016/01/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  48. Discharge Conditions of a Non-Thermal Plasma Jet in Helium, Surrounded by Flows of Nitrogen-Oxygen Mixtures of Various Proportions

    UCHIDA Giichiro, NAKAJIMA Atsushi, ITO Taiki, TAKENAKA Kosuke, SETSUHARA Yuichi

    Trans. JWRI　Vol. 44　No. 2　p. 5-7　2015/12　Research paper (bulletin of university, research institution)

    Publisher: Joining and Welding Research Institute, Osaka University

  49. Gas Flow Rate Dependence of the Discharge Characteristics of a Plasma Jet Impinging onto the Liquid Surface

    Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    IEEE Transactions on Plasma Science　Vol. 43　No. 12　p. 4081-4087　2015/12/01　Research paper (scientific journal)

    Publisher: Institute of Electrical and Electronics Engineers Inc.

  50. Analysis of Dynamic Discharge Characteristics of Plasma Jet Based on Voltage and Current Measurements Using a Metal Plate

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Atsushi Nakajima, Kosuke Takenaka

    IEEE Transactions on Plasma Science　Vol. 43　No. 11　p. 3821-3826　2015/11/01　Research paper (scientific journal)

    Publisher: Institute of Electrical and Electronics Engineers Inc.

  51. Effects of gas flow on oxidation reaction in liquid induced by He/O&lt;inf&gt;2&lt;/inf&gt; plasma-jet irradiation

    Atsushi Nakajima, Giichiro Uchida, Toshiyuki Kawasaki, Kazunori Koga, Thapanut Sarinont, Takaaki Amano, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara

    Journal of Applied Physics　Vol. 118　No. 4　p. 043301-1-043301-9　2015/07/28　Research paper (scientific journal)

    Publisher: American Institute of Physics Inc.

  52. Low-temperature formation of amorphous InGaZnO&lt;inf&gt;x&lt;/inf&gt; films with inductively coupled plasma-enhanced reactive sputter deposition

    Kosuke Takenaka, Ken Cho, Yasufumi Ohchi, Hirofumi Otani, Giichiro Uchida, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 54　No. 6　2015/06/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  53. Effects of discharge voltage waveform on the discharge characteristics in a helium atmospheric plasma jet

    Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara

    Journal of Applied Physics　Vol. 117　No. 15　p. 153301-1-153301-6　2015/04　Research paper (scientific journal)

  54. Plasma interaction with organic molecules in liquid as fundamental processes in plasma medicine

    Kosuke Takenaka, Atsushi Miyazaki, Hiroya Abe, Giichiro Uchida, Yuichi Setsuhara

    Journal of Nanoscience and Nanotechnology　Vol. 15　No. 3　p. 2120-2124　2015/03/01　Research paper (scientific journal)

    Publisher: American Scientific Publishers

  55. Atmospheric-Pressure Plasma Interaction with Soft Materials as Fundamental Processes in Plasma Medicine

    K. Takenaka, A. Miyazaki, G. Uchida, Y. Setsuhara

    Journal of Nanoscience and Nanotechnology　Vol. 15　No. 3　p. 2115-2119　2015/03　Research paper (scientific journal)

  56. Dynamic Properties of Helium Atmospheric Dielectric-Barrier-Discharge Plasma Jet

    G. Uchida, K. Takenaka, A. Miyazaki, K. Kawabata, Y. Setsuhara

    Journal of Nanoscience and Nanotechnology　Vol. 15　No. 3　p. 2324-2329　2015/03　Research paper (scientific journal)

  57. Atmospheric-pressure gas-breakdown characteristics with a radio-frequency voltage

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Yuichi Setsuhara

    Journal of Nanoscience and Nanotechnology　Vol. 15　No. 3　p. 2192-2196　2015/03/01　Research paper (scientific journal)

    Publisher: American Scientific Publishers

  58. Molecular-structure variation of biomolecules irradiated with atmospheric-pressure plasma through plasma/liquid interface

    Kosuke Takenaka, Atushi Miyazaki, Kazufumi Kawabata, Giichiro Uchida, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 54　No. 1　2015/01/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  59. Influence of He Gas Flow Rate on Optical Emission Characteristics in Atmospheric Dielectric-Barrier-Discharge Plasma Jet

    Giichiro Uchida, Kosuke Takenaka, Kazufumi Kawabata, Yuichi Setsuhara

    IEEE Transactions on Plasma Science　Vol. 43　No. 3　p. 737-744　2015　Research paper (scientific journal)

    Publisher: Institute of Electrical and Electronics Engineers Inc.

  60. Effects of driving voltage frequency on the discharge characteristics of atmospheric dielectric-barrier-discharge plasma jet

    Giichiro Uchida, Kosuke Takenaka, Kazufumi Kawabata, Atsushi Miyazaki, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 53　No. 11　2014/11/01　Research paper (international conference proceedings)

    Publisher: Japan Society of Applied Physics

  61. Deposition of Carbon Films on PMMA Using H-assisted Plasma CVD

    X. Dong, R. Torigoe, K. Koga, G. Uchida, M. Shiratani, N. Itagaki, Y. Setsuhara, K. Takenaka, M. Sekine, M. Hori

    Proceedings of the 12th Asia Pacific Physics Conference(APPC12)　p. 015072-1-015072-4　2014/03　Research paper (international conference proceedings)

  62. Investigation of plasma-organic materials interaction in aqueous solution with atmospheric pressure plasmas

    K. Takenaka, A. Miyazaki, Y. Setsuhara

    Journal of Physics: Conference Series　Vol. 518　No. 1　2014　Research paper (international conference proceedings)

    Publisher: Institute of Physics Publishing

  63. Molecular-structure variation of organic materials irradiated with atmospheric pressure plasma

    K. Takenaka, A. Miyazaki, Y. Setsuhara

    Journal of Physics: Conference Series　Vol. 518　No. 1　2014　Research paper (international conference proceedings)

    Publisher: Institute of Physics Publishing

  64. Plasma Interactions with Biological Molecules in Aqueous Solution

    Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Masaru Hori

    MRS Proceedings　Vol. 1598　2013/12　Research paper (international conference proceedings)

  65. Plasma-enhanced reactive magnetron sputtering assisted with inductively coupled plasma for reactivity-controlled deposition of microcrystalline silicon thin films

    Kosuke Takenaka, Yuichi Setsuhara, Akinori Ebe

    Japanese Journal of Applied Physics　Vol. 52　No. 11　2013/11　Research paper (international conference proceedings)

  66. Plasma interactions with organic materials in liquid through plasma/liquid interface

    Kosuke Takenaka, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 52　No. 11　2013/11　Research paper (international conference proceedings)

  67. Plasma interaction with Zn nano layer on organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara

    Surface and Coatings Technology　Vol. 228　No. 1　p. S271-S275　2013/08/15　Research paper (scientific journal)

  68. Investigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Journal of Physics: Conference Series　Vol. 441　2013/06　Research paper (scientific journal)

  69. Plasma-assisted mist chemical vapor deposition of zinc oxide films using solution of zinc acetate

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 52　No. 1　2013/01　Research paper (scientific journal)

  70. Investigation of chemical bonding states at interface of Zn/organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Thin Solid Films　Vol. 523　p. 15-19　2012/11/15　Research paper (international conference proceedings)

  71. Low-temperature deposition of zinc oxide film by plasma-assisted mist chemical vapor deposition

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    Japanese Journal of Applied Physics　Vol. 51　No. 8　p. 08HF05-1-08HF05-4　2012/08　Research paper (scientific journal)

  72. Low-Temperature Growth of Zinc Oxide Films from Zinc Acetate Solution Using Plasma-Assisted Mist Chemical Vapor Deposition

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    Transactions of the Materials Research Society of Japan　Vol. 37　No. 2　p. 173-176　2012/06　Research paper (scientific journal)

    Publisher: The Materials Research Society of Japan

  73. Characterization of inductively coupled RF plasmas for plasma-assisted mist CVD of ZnO films

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    Journal of Physics: Conference Series　Vol. 379　No. 1　p. 012031-1-012031-6　2012　Research paper (international conference proceedings)

    Publisher: Institute of Physics Publishing

  74. Effects of irradiation with ions and photons in ultraviolet-vacuum ultraviolet regions on nano-surface properties of polymers exposed to plasmas

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Japanese Journal of Applied Physics　Vol. 51　No. 1　p. 01AJ02-1-01AJ02-5　2012/01　Research paper (international conference proceedings)

  75. Investigations on Plasma Interactions with Soft Materials for Fabrication of Flexible Devices

    Ken Cho, Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Journal of High Temperature Society　Vol. 37　No. 6　p. 289-297　2011/11　Research paper (scientific journal)

    Publisher: High Temperature Society of Japan

  76. Effects of photoirradiation in UV and VUV regions during plasma exposure to polymers

    Ken Cho, Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Thin Solid Films　Vol. 519　No. 20　p. 6810-6814　2011/08/01　Research paper (international conference proceedings)

  77. Plasma processing of soft materials for development of flexible devices

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Thin Solid Films　Vol. 519　No. 20　p. 6721-6726　2011/08/01　Research paper (international conference proceedings)

  78. Combinatorial analyses of plasma-polymer interactions

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Surface and Coatings Technology　Vol. 205　No. 2　p. S484-S489　2011/07/25　Research paper (scientific journal)

  79. Low-damage plasma processing of polymers for development of organic-inorganic flexible devices

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Surface and Coatings Technology　Vol. 205　No. 1　p. S355-S359　2010/12/25　Research paper (scientific journal)

  80. Effects of photon irradiation in UV and VUV regions during plasma processing of organic materials

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Trans. JWRI　Vol. 39　No. 2　p. 298-299　2010/12　Research paper (bulletin of university, research institution)

  81. Combinatorial analysis of plasma-polymer interactions for formation of inorganic-soft materials hybrid structure

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Trans. JWRI　Vol. 39　No. 2　p. 248-250　2010/12　Research paper (bulletin of university, research institution)

  82. Advanced research and development for plasma processing of polymers with combinatorial plasma-process analyzer

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Thin Solid Films　Vol. 518　No. 22　p. 6320-6324　2010/09/01　Research paper (international conference proceedings)

  83. Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Japanese Journal of Applied Physics　Vol. 49　No. 8　p. 08JA02-1-08JA02-4　2010/08　Research paper (scientific journal)

  84. Plasma-Enhanced Nanoparticles-Beam Deposition for High-Rate Formation of Nanocomposite Films

    Kosuke Takenaka, Yuki Nakajima, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    Ceramic Transactions　Vol. 219　p. 293-297　2010/08　Research paper (scientific journal)

  85. Development of a Combinatorial Plasma Process Analyzer for Advanced R&D of Next Generation Nanodevice Fabrication

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Ceramic Transactions　Vol. 219　p. 279-284　2010/08　Research paper (scientific journal)

  86. Low-damage surface modification of polymethylmethacrylate with argon-oxygen mixture plasmas driven by multiple low-inductance antenna units

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Shigeaki Zaima

    Thin Solid Films　Vol. 518　p. 3561-3565　2010/03　Research paper (scientific journal)

  87. Hard X-ray photoelectron spectroscopy analysis for organic-inorganic hybrid materials formation

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

    Ceramic Transactions　Vol. 219　p. 183-188　2010　Research paper (international conference proceedings)

  88. Radial Profile Control of Cylindrical Plasma Source with Multiple Low-Inductance Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Plasma Processes and Polymers　Vol. 6　No. S1　p. S278-S281　2009/11　Research paper (scientific journal)

  89. Large-area and low-damage processes for hybrid flexible device fabrications with reactive high-density plasmas driven by multiple low-inductance antenna modules

    Y. Setsuhara, K. Takenaka, K. Cho, J.G. Han

    Journal of Physics: Conference Series　Vol. 165　p. 12042-1-12042-6　2009/06　Research paper (scientific journal)

  90. Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

    Y. Setsuhara, K. Cho, K. Takenaka, A. Ebe, M. Shiratani, M. Sekine, M. Hori, E. Ikeitaga, H. Kondo, O. Nakatsuka, S. Zaima

    Thin Solid Films　Vol. 518　p. 1006-1011　2009/06　Research paper (scientific journal)

  91. Discharge power dependence of Hα intensity and electron density of Ar+H2 discharges in H-assisted plasma CVD reactor

    Jun Umetsu, Kazunori Koga, Kazuhiko Inoue, Hidefumi Matsuzaki, Kosuke Takenaka, Masaharu Shiratani

    Surface and Coatings Technology　Vol. 202　p. 5659-5662　2008/09　Research paper (scientific journal)

  92. Corrosion Resistance of Plasma-Oxidized Stainless Steel

    Jiro Okado, Ken Okada, Asahiko Ishiyama, Yuichi Setsuhara, and Kosuke Takenaka

    Surface and Coatings Technology　Vol. 202　p. 5595-5598　2008/09　Research paper (scientific journal)

  93. Large-Area Low-Damage Plasma Sources Driven by Multiple Low-Inductance-Antenna Modules for Next-Generation Flat-Panel Display Processes

    Yuichi Setsuhara, Kosuke Takenaka, and Akinori Ebe

    Surface and Coatings Technology　Vol. 202　p. 5225-5229　2008/09　Research paper (scientific journal)

  94. Uniformity of 500-mm Cylindrical Plasma Source Sustained with Multiple Low-Inductance Antenna Units

    Yuichi Setsuhara, Daisuke Tsukiyama, Kosuke Takenaka

    Surface and Coatings Technology　Vol. 202　p. 5238-5241　2008/09　Research paper (scientific journal)

  95. Modification of Yttrium-Iron-Oxide Nanoparticle Films Using Inductively-Coupled Plasma Annealing

    Kosuke Takenaka, Hiroaki Nakayama, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    Surface and Coatings Technology　Vol. 202　p. 5336-5338　2008/09　Research paper (scientific journal)

  96. Discharge Profiles of Internal-Antenna-Driven Inductively-Coupled Plasmas

    Yuichi Setsuhara, Takashi Sera, and Kosuke Takenaka

    Surface and Coatings Technology　Vol. 202　p. 5234-5237　2008/09　Research paper (scientific journal)

  97. Properties of Argon/Oxygen Mixture Plasmas Driven by Multiple Internal-Antenna Units

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe, Jeon G. Han

    Surface and Coatings Technology　Vol. 202　p. 5230-5233　2008/09　Research paper (scientific journal)

  98. Interface structure of microcrystalline silicon deposited by inductive coupled plasma using internal low inductance antenna

    H. Kaki, A. Tomyo, E. Takahashi, T. Hayashi, K. Ogata, A. Ebe, K. Takenaka, Y. Setsuhara

    Surface and Coatings Technology　Vol. 202　No. 22-23　p. 5672-5675　2008/08/30　Research paper (scientific journal)

  99. Simulation-aided designing of meter-scale large-area plasma source with multiple low-inductance antenna modules

    Yuichi Setsuhara, Daisuke Tsukiyama, Kosuke Takenaka, Koichi Ono

    Japanese Journal of Applied Physics　Vol. 47　No. 8　p. 6903-6906　2008/08/22　Research paper (scientific journal)

  100. Characterization of ion energy distribution in inductively coupled argon plasmas sustained with multiple internal-antenna units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Japanese Journal of Applied Physics　Vol. 47　No. 8　p. 6900-6902　2008/08/22　Research paper (scientific journal)

  101. Mechanical milling with capacitively coupled plasma for surface modification of particulate materials

    Jun-ichi Noma, Hiroya Abe, Kosuke Takenaka, Yuichi Setsuhara, Makio Naito

    Surface and Coatings Technology　Vol. 202　p. 5347-5349　2008/08　Research paper (scientific journal)

  102. マルチアンテナ型RFプラズマによるメートル級大面積での低ダメージプロセスと制御

    節原 裕一, 竹中 弘祐, 江部 明憲

    日本機械学会関東支部第14期総会講演会講演論文集　p. 391-392　2008/03　Research paper (conference, symposium, etc.)

  103. Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing

    Yuichi Setsuhara, Kosuke Takenaka, Daisuke Tsukiyama, Kazuaki Nishisaka, Akinori Ebe

    Materials Science Forum　Vol. 561-565　No. PART 2　p. 1237-1240　2007/10　Research paper (scientific journal)

  104. Characterization of Argon/Oxygen Mixture Plasmas Driven by Multiple Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Yong-Mo Kim, Jeon G. Han

    Full-Papers CD of the 18th International Symposium on Plasma Chemistry　p. 30P-76-1-30P-76-4　2007/08　Research paper (international conference proceedings)

  105. Meters-Scale Ultra-Large-Area Plasma-Source Designs Employing Multiple Low-Inductance -Antenna Modules

    Yuichi Setsuhara, Daisuke Tsukiyama, Kosuke Takenaka, Akinori Ebe

    Full-Papers CD of the 18th International Symposium on Plasma Chemistry　p. 30P-77-1-30P-77-4　2007/08　Research paper (international conference proceedings)

  106. Properties of Inductively-Coupled RF Plasmas Sustained with Internal Antenna for Deposition of Carbon-Related Films

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Characterization and Control of Interfaces for High Quality Advanced Materials II: Ceramic Transactions　Vol. 198　p. 413-417　2007/07　Research paper (scientific journal)

  107. Meters-Scale Large-Area Plasma Sources with Multiple Low-Inductance Antenna Units for Next-Generation Flat-Panel Display Processing

    Daisuke Tsukiyama, Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Transactions of the Materials Research Society of Japan　Vol. 32　p. 497-500　2007/04　Research paper (scientific journal)

  108. Modification of nanoparticle films with inductively-coupled high-pressure RF plasmas

    Kosuke Takenaka, Hiroaki Nakayama, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    Transactions of the Materials Research Society of Japan　Vol. 32　p. 505-508　2007/04　Research paper (scientific journal)

  109. Effect of Pressure on Inductively-Coupled Plasmas Sustained with Multiple Low-Inductance Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Transactions of the Materials Research Society of Japan　Vol. 32　p. 493-496　2007/04　Research paper (scientific journal)

  110. Plasma profiles of Inductively-Coupled Plasmas Sustained with Low-Inductance Internal Antenna

    Kosuke Takenaka, Takashi Sera, Akinori Ebe, Yuichi Setsuhara

    Plasma Processes and Polymers　Vol. 4　p. S1013-S1016　2007/04　Research paper (scientific journal)

  111. Properties of Inductively-Coupled Plasmas Driven by Multiple Low-Inductance Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Plasma Processes and Polymers　Vol. 4　p. S1009-S1012　2007/04　Research paper (scientific journal)

  112. Production and Control of Large-Area Plasmas for Meters-Scale Flat-Panel-Display Processing with Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe, Kazuaki Nishisaka

    Plasma Processes and Polymers　Vol. 4　p. S628-S632　2007/04　Research paper (scientific journal)

  113. Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe, Kazuaki Nishisaka

    Solid State Phenomena　Vol. 127　p. 239-244　2007/04　Research paper (scientific journal)

  114. Electric Discharge in Comminution Process and Surface Modification of Nanoparticles

    J.Noma, H.Abe, K.Takenaka, Y.Setsuhara, M.Naito

    Proceedings of the 24th Symposium on Plasma Processing　p. 5-6　2007/01　Research paper (conference, symposium, etc.)

  115. Phase Structure Control of Yttrium Iron Garnet Nanoparticle Films Using Inductively-Coupled High-Pressure RF Plasmas

    Yuichi Setsuhara, Hiroaki Nakayama, Kosuke Takenaka, Hiroya Abe, Kiyoshi Nogi

    Proceedings of the 24th Symposium on Plasma Processing　p. 111-112　2007/01　Research paper (conference, symposium, etc.)

  116. Potential Formation in Inductively-Coupled Plasmas Driven by Internal Antenna

    Takashi Sera, Kosuke Takenaka, Akinori Ebe, Yuichi Setsuhara

    Proceedings of the 24th Symposium on Plasma Processing　p. 69-70　2007/01　Research paper (conference, symposium, etc.)

  117. Properties of Ar+O2 Mixture Discharge plasmas Sustained with Multiple Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Akinori Ebe, Yong-Mo Kim, Jeon G. Han

    Proceedings of the 24th Symposium on Plasma Processing　p. 67-68　2007/01　Research paper (conference, symposium, etc.)

  118. Ion Energy Distributions in Inductively-Coupled Plasmas Sustained with Multiple Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Proceedings of the 24th Symposium on Plasma Processing　p. 65-66　2007/01　Research paper (conference, symposium, etc.)

  119. Uniformity of 500-mm Cylindrical Plasmas Sustained with Low-Inductance Antennas

    Daisuke Tsukiyama, Kosuke Takenaka, Yuichi Setsuhara, Akinori Ebe

    Proceedings of the 24th Symposium on Plasma Processing　p. 63-64　2007/01　Research paper (conference, symposium, etc.)

  120. Designing of Meters-Scale Ultra-Large Area RF Plasma Sources Sustained with Multiple Low-Inductance-Antenna Modules

    Yuichi Setsuhara, Daisuke Tsukiyama, Kosuke Takenaka, Akinori Ebe

    Proceedings of the 24th Symposium on Plasma Processing　p. 61-62　2007/01　Research paper (conference, symposium, etc.)

  121. Effects of antenna size and configurations in large-area RF plasma production with internal low-inductance antenna units

    Hiroshige Deguchi, Hitoshi Yoneda, Kenji Kato, Kiyoshi Kubota, Tsukasa Hayashi, Kiyoshi Ogata, Akinori Ebe, Kosuke Takenaka, Yuichi Setsuhara

    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers　Vol. 45　No. 10 B　p. 8042-8045　2006/10/21　Research paper (scientific journal)

  122. Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Unit

    Kosuke TAKENAKA, Yuichi SETSUHARA, Kazuaki NISHISAKA, Akinori EBE, Shinya SUGIURA, Kazuo TAKAHASHI, Koichi ONO

    Japanese Journal of Applied Physics　Vol. 45　No. 10B　p. 8046-8049　2006/10　Research paper (scientific journal)

  123. Surface Modification of Nanopowder by Milling under Electric Discharge

    Hiroya Abe, Akira Kondo, Kosuke Takenaka, Yuichi Setsuhara, Makio Naito

    Advances in Science and Technology　Vol. 45　p. 363-367　2006/09　Research paper (scientific journal)

  124. Properties of Inductively Coupled Hydrogen Plasmas Sustained with Multiple Low-Inductance Internal-Antenna Units

    K.Takenaka, Y.Setsuhara, K.Nishisaka, and A.Ebe

    Transactions of the Materials Research Society of Japan　Vol. 31　No. 2　p. 511-514　2006/06　Research paper (scientific journal)

    Publisher: The Materials Research Society of Japan

  125. Development of Internal-Antenna-Driven RF Plasma Sources for Ultra-Large-Area Deposition of Carbon-Related Films

    Y. Setsuhara, K. Takenaka

    11th International Conferences on Modern Materials and Technologies　2006/06　Research paper (international conference proceedings)

  126. Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing

    Y.Setsuhara, K.Takenaka, A.Ebe, K.Nishisaka

    Proceedings of InternationalWorkshop on Designing of Interfacial Structrures in Advanced Materials and their Joints　p. 17-17　2006/05　Research paper (international conference proceedings)

  127. Mechanism of Cu Deposition from Cu(EDMDD)2 Using H-assisted Plasma CVD

    Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Toshiya Shingen

    Thin Solid Films　Vol. 506-507　p. 197-201　2006/04　Research paper (scientific journal)

  128. Novel ICP plasma source for large area CVD processing

    Y. Setsuhara, K. Takenaka, A. Ebe, K. Nishisaka

    The 3rd International Workshop on Advanced Plasma Processing and Diagnostics　p. 3-3　2006/04　Research paper (international conference proceedings)

  129. Development of Meters-Scale Large-Area RF Plasma Sources with Control Capabilities of Power Deposition Profiles

    Yuichi Setsuhara, Akinori Ebe, Kazuaki Nishisaka, Kosuke Takenaka

    Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing　p. 179-180　2006/01　Research paper (international conference proceedings)

  130. Properties of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Modules

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Shinya Sugiura, Kazuo Takahashi, Koichi Ono

    Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing　p. 183-184　2006/01　Research paper (international conference proceedings)

  131. Potential Distributions and Ionic Behaviors during Electrophoretic Deposition of Ceramics Films in Nanoparticles-Dispersed Liquid

    T.Sano, K.Takenaka, Y.Setsuhara, K.Sato, H.Abe, K.Nogi

    The 16th Symposium of The Material Research Society of Japan　2005/12　Research paper (conference, symposium, etc.)

  132. Properties of Inductively Coupled RF Plasmas Sustained with Multiple Low-Inductance Internal-Antenna Units

    Y.Setsuhara, K.Takenaka, K.Nishisaka, A.Ebe, S.Sugiura, K.Takahashi, K.Ono

    The 16th Symposium of The Material Research Society of Japan　2005/12　Research paper (conference, symposium, etc.)

  133. Development of Meters-Scale/Large-Area Inductively Coupled Plasma Sources with Integrated Control of Multiple Low-Inductance Internal-Antenna Modules

    Y.Setsuhara, K.Takenaka, K.Nishisaka, A.Ebe

    The 16th Symposium of The Material Research Society of Japan　2005/12　Research paper (conference, symposium, etc.)

  134. Control of deposition profile of copper for large-scale integration (LSI) interconnects by plasma chemical vapor deposition

    Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga, Yukio Watanabe

    Pure and Applied Chemistry　Vol. 77　No. 2　p. 391-398　2005/02　Research paper (international conference proceedings)

  135. Study on ion irradiation effects on plasma anisotropic Cu CVD using triode discharge

    Takao Kaji, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe

    Proc. 22th Symposium on Plasma Processing　p. 641-642　2005/01　Research paper (conference, symposium, etc.)

  136. Measurement of H density in Cu CVD discharges using VUV absorption spectroscopy

    Kosuke Takenaka, Takao Kaji, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, and Toshiya Shingen

    Proc. 22th Symposium on Plasma Processing　p. 639-640　2005/01　Research paper (conference, symposium, etc.)

  137. Effects of solvent on properties of Cu films prepared by HAPCVD using Cu(EDMDD)2

    Kosuke Takenaka, Takao Kaji, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, and Toshiya Shingen

    Proceedings of 4th International Symposium on Dry Process　p. 347-352　2004/11　Research paper (international conference proceedings)

  138. Anisotropic deposition of Cu in trenches by H-assisted plasma chemical vapor deposition

    K. Takenaka, M. Kita, T. Kinoshita, K. Koga, M. Shiratani, and Y. Watanabe

    Journal of Vacuum Science & Technology A　Vol. 22　No. 12　p. 1903-1907　2004/06　Research paper (scientific journal)

  139. Effects of ions on trench-sidewall deposition in anisotropic plasma CVD

    Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, and Yukio Watanabe

    Proc. 21th Symposium on Plasma Processing　p. 168-169　2004/01　Research paper (conference, symposium, etc.)

  140. Anisotropic Plasma Chemical Vapor Deposition of Copper Films in Trenches

    K. Takenaka, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, M. Shiratani, Y. Watanabe, and T. Shingen

    Proceedings of 2003 MRS Spring Meeting　Vol. 766　p. 465-470　2003/04　Research paper (international conference proceedings)

  141. Anisotropic Deposition of Copper by H-assisted Plasma Chemical Vapor Deposition

    K. Takenaka, M. Shiratani, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, and Y. Watanabe

    Materials Science in Semiconductor Processing　Vol. 5　p. 301-304　2003/04　Research paper (scientific journal)

  142. Residual Stress in Cu Films Deposited by H-assisted Plasma CVD Using Cu(EDMDD)2

    K. Takenaka, M. Shiratani, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, Y. Watanabe, and Toshiya Shingen

    Proceedings of 3rd International Symposium on Dry Process　p. 231-236　2003/01　Research paper (international conference proceedings)

  143. Conformal and anisotropic depositions of Cu in trenches by Using H-assisted plasma CVD method

    K. Takenaka, M. Takeshita, K. Koga, M. Shiratani, and Y. Watanabe

    Proceedings of International Symposium on Information Science and Electrical Engineering　p. 514-517　2003/01　Research paper (international conference proceedings)

  144. Conformal deposition of pure Cu films in trenches by H-assisted plasma CVD using Cu(EDMDD)2

    K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe, and T. Shingen

    Conference Proceedings of Joint Conference of Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases and Fifth International Conference on Reactive Plasmas　Vol. 2　p. 199-200　2002/07　Research paper (international conference proceedings)

  145. Anisotropic deposition of Cu with H-assisted plasma CVD

    K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, and Y. Watanabe

    Conference Proceedings of Joint Conference of Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases and Fifth International Conference on Reactive Plasmas　Vol. 2　p. 173-174　2002/07　Research paper (international conference proceedings)

  146. Deposition of Cu films in trenches for LSI interconnects by H assisted Plasma CVD method

    K. Takenaka, M. Onishi, T. Kinoshita, K. Koga, M. Shiratani, Y. Watanabe, and T. Shingen

    Proceedings of International Workshop on Informations & Electrical Engineering　p. 227-232　2002/05　Research paper (international conference proceedings)

  147. Anisotropic Deposition of Copper by Plasma CVD Method

    K. Takenaka, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, M. Shiratani, and Y. Watanabe

    Proceedings of 2nd International Symposium on Dry Process　p. 221-226　2002/01　Research paper (international conference proceedings)

  148. Deposition of Pure Copper Thin Films by H-assisted Plasma CVD Using New Cu Complex Cu(EDMDD)2

    K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, and Y. Watanabe

    Proceedings of 1st International Symposium on Dry Process　p. 169-174　2001/11　Research paper (international conference proceedings)

  149. H assisted control of quality and conformality in Cu film deposition using plasma CVD method

    M Shiratani, HJ Jin, K Takenaka, K Koga, T Kinoshita, Y Watanabe

    ADVANCED METALLIZATION CONFERENCE 2000 (AMC 2000)　p. 271-276　2001　Research paper (international conference proceedings)

  150. H-assisted plasma CVD of Cu films for interconnects in ultra-large-scale integration

    M. Shiratani, H. J. Jin, K. Takenaka, K. Koga, T. Kinoshita, Y. Watanabe

    Science and Technology of Advanced Materials　Vol. 2　p. 505-515　2000/01　Research paper (scientific journal)

  151. H-Assisted Plasma CVD Using Cu(hfac)2 and Cu(EDMDD)2

    M. Shiratani, H. J. Jin, K. Takenaka, K. Koga, T. Kinoshita, Y. Watanabe

    Advanced Metalization Conference 2000, MRS Conference Proceedings Series V-16　p. 271-276　2000/01　Research paper (international conference proceedings)

Misc. 474

  1. プラズマ/触媒/ゼオライト混合系を利用したCO2メタネーションの促進

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2025年第72回応用物理学会春季学術講演会, 東京理科大学 野田キャンパス＆オンライン　2025/03/14　Research paper, summary (national, other academic conference)

  2. 金属と有機材料の接着接合における大気圧非平衡プラズマジェット処理の効果

    竹中 弘祐, 小鑓 亮輔, 重森 俊祥, 都甲 将, 内田 儀一郎, 節原 裕一

    2025年第72回応用物理学会春季学術講演会, 東京理科大学 野田キャンパス＆オンライン　2025/03/14　Research paper, summary (national, other academic conference)

  3. Adhesive Bonding of SPFC980Y and Polypropylene/Polyethylene via Pre-Treatment by Atmospheric Pressure Non-Equilibrium Plasma Jet

    Kosuke Takenaka, Ryosuke Kyari, Shunsho Shigemori, Giichiro Uchida, Yuichi Setsuhara

    17th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2025) / 18th International Conference on Plasma Nano Technology & Science(IC-PLANTS2025), Chubu University, Aichi, Japan　2025/03/03　Research paper, summary (international conference)

  4. Deposition of IGZO Film Using High-Power Impulse Magnetron Sputtering

    Taketo Nagata, Kazuya Ota, Kosuke Takenaka, Yuichi Setsuhara, Takayuki Ohta

    17th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2025) / 18th International Conference on Plasma Nano Technology & Science(IC-PLANTS2025), Chubu University, Aichi, Japan　2025/03/03　Research paper, summary (international conference)

  5. プラズマ触媒作用による低温下でのCO2還元反応促進技術の創生

    Yuichi Setsuhara, Kosuke Takenaka, Susumu Toko, Masakuni Ozawa

    DEJIMA 令和6年度公開討論会, 東京都 東京科学大学すずかけ台キャンパス　2025/03/02　Research paper, summary (national, other academic conference)

  6. 金属-ポリマー直接接合における大気圧プラズマジェットによる表面処理の効果

    竹中 弘祐, 小鑓 亮輔, 重森 俊祥, 陣田 尭哉, 都甲 将, 内田 儀一郎, 節原 裕一

    第42回プラズマプロセシング研究会, J:COMホルトホール大分　2025/01/28　Research paper, summary (national, other academic conference)

  7. Plasma-catalyst-zeolite system for high-efficiency methanation

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    第25回微粒子プラズマ研究会 (WFPP25), 岐阜県 核融合科学研究所　2025/01/16　Research paper, summary (national, other academic conference)

  8. Droplet Behavior Analysis in Plasma in Plasma-Assisted Mist CVD

    Kosuke Takenaka, Yuichi Setsuhara

    25th Workshop on Fine Particle Plasmas (WFPP25) and 45th Workshop on Plasma Frontiers, National Institute for Fusion Science, Toki, Gifu & Hybrid　2025/01/16　Research paper, summary (international conference)

  9. Effect of Molecular Sieve Type on Methanation Reaction

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    第34回 日本MRS年次大会, 横浜市開港記念会館 他　2024/12/18　Research paper, summary (national, other academic conference)

  10. amorphous In-Ga-Zn-Ox (a-IGZO) gap states and TFT stability

    S. Nunomura, K. Takenaka, Y. Hayashi, H. Komatsu, S. Toko, H. Tampo, Y. Setsuhara

    第34回 日本MRS年次大会, 横浜市開港記念会館 他　2024/12/18　Research paper, summary (national, other academic conference)

  11. Deposition of InGaZnO film using high power impulse magnetron sputtering

    T. Nagata, K. Ota, K. Takenaka, Y. Setsuhara, T. Ohta.

    The 45th International Symposium on Dry Process (DPS2024), Chitose Civic Culture Center, Hokkaido, Japan　2024/11/15　Research paper, summary (international conference)

  12. Evaluation of Stability and Electronic Gap States of Amorphous In-Ga-Zn-Ox Thin Film Transistors

    K. Takenaka, S. Nunomura, Y. Hayashi, H. Komatsu, S. Toko, H. Tampo, Y. Setsuhara

    The 45th International Symposium on Dry Process (DPS2024), Chitose Civic Culture Center, Hokkaido, Japan　2024/11/15　Research paper, summary (international conference)

  13. Formation of ZnWO4/WO3 Composite by RF Magnetron Sputtering

    S. Kakuta, K. Takenaka, Y. Setsuhara, T. Okada

    The 45th International Symposium on Dry Process (DPS2024), Chitose Civic Culture Center, Hokkaido, Japan　2024/11/15　Research paper, summary (international conference)

  14. プラズマとモレキュラーシーブの併用による低温下高効率メタネーションの実現

    都甲 将, 奥村 賢直, 鎌滝 邦弘, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第40回九州・山口プラズマ研究会, 長崎県 五島コンカナ王国　2024/11/02　Research paper, summary (national, other academic conference)

  15. Deposition of tin monoxide film using high-power impulse magnetron sputtering

    Yuta Saito, Kazuya Ota, Kosuke Takenaka, Yuichi Setsuhara, Takayuki Ohta

    The 10th International Symposium on Surface Science（ISSS-10）, Kitakyushu International Conference Center, Fukuoka, Japan　2024/10/20　Research paper, summary (international conference)

  16. Plasma-assisted methanation with molecular sieves

    Susumu Toko Kosuke Takenaka, Yuichi Setsuhara, and Masakuni Ozawa

    The 4th International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-4), Kokukaikan Business Forum, Tokyo, Japan　2024/10/03　Research paper, summary (international conference)

  17. Low-temperature Formation of High-Quality Amorphous Oxide Films via Plasma-assisted Reactive Sputtering

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara, Keisuke Ide, Toshio Kamiya

    The 4th International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-4), Kokukaikan Business Forum, Tokyo, Japan　2024/10/03　Research paper, summary (international conference)

  18. 大電力パルスマグネトロンスパッタを用いた結晶性IGZOの成膜

    永田 健人、太田 和哉、竹中 弘祐、節原 裕一、太田 貴之

    2024年第85回応用物理学会秋季学術講演会, 朱鷺メッセ他2会場＆ハイブリッド開催　2024/09　Research paper, summary (national, other academic conference)

  19. プラズマ支援メタネーションにおけるモレキュラーシーブの役割

    都甲 将、奥村 賢直、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2024年第85回応用物理学会秋季学術講演会, 朱鷺メッセ他2会場＆ハイブリッド開催　2024/09　Research paper, summary (national, other academic conference)

  20. プラズマを用いたCO2のメタン化におけるモレキュラーシーブの活用

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2024年第71回応用物理学会春季学術講演会, 東京都市大学世田谷キャンパス＆オンライン　2024/03　Research paper, summary (national, other academic conference)

  21. プラズマ支援反応性パルスDCスパッタリングを用いたa-IGZO薄膜の特性制御

    竹中 弘祐、上田 拓海、都甲 将、江部 明憲、節原 裕一

    2024年第71回応用物理学会春季学術講演会, 東京都市大学世田谷キャンパス＆オンライン　2024/03　Research paper, summary (national, other academic conference)

  22. Formation of amorphous gallium oxide thin film transistors using plasma-assisted reactive processes

    Kosuke Takenaka, Hibiki Komatsu, Kazuya Ota, Susumu Toko, Keisuke Ide, Toshio Kamiya, Yuichi Setsuhara

    16th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2024) / 17th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2024), 13th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-13), Nagoya University, Nagoya, Japan　2024/03　Research paper, summary (international conference)

  23. Plasma-assisted mist chemical vapor deposition for formation of 3D nanostructured oxide thin films

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara

    16th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2024) / 17th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2024), 13th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-13), Nagoya University, Nagoya, Japan　2024/03　Research paper, summary (international conference)

  24. 酸素原子の除去によるプラズマ触媒作用を用いたCO2還元反応の効率化

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第41回プラズマプロセシング研究会, 東京工業大学大岡山キャンパス　2024/01　Research paper, summary (national, other academic conference)

  25. 大気圧非平衡プラズマジェットを用いた表面処理による金属-ポリマー直接接合

    竹中 弘祐, 小鑓 亮輔, 重森 俊祥, 陣田 尭哉, 中本 壮太郞, 都甲 将, 内田 儀一郎, 節原 裕一

    第41回プラズマプロセシング研究会, 東京工業大学大岡山キャンパス　2024/01　Research paper, summary (national, other academic conference)

  26. Improved efficiency of CO2 reduction reaction using plasma catalysis by removal of oxygen atoms

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    41th Symposium on Plasma Processing, Tokyo Institute of Technology　2024/01　Research paper, summary (international conference)

  27. Catalytic ability of Cu and Ni in methanation with plasma catalysis

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    MRM2023/IUMRS-ICA2023, Kyoto International Conference Center, Kyoto, Japan　2023/12　Research paper, summary (international conference)

  28. Non-thermal atmospheric pressure plasma technology for advanced dissimilar-materials joining: enhancing metal joining with organic materials

    K. Takenaka, R. Machida, T. Bono, A. Jinda, S. Nakamoto, R. Koyari, S. Toko, G. Uchida, Y. Setsuhara

    MRM2023/IUMRS-ICA2023, Kyoto International Conference Center, Kyoto, Japan　2023/12　Research paper, summary (international conference)

  29. Experimental study on the effect of plasma-catalyst interaction on methanation reaction

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    97th IUVSTA Workshop on plasma-assisted conversion of gases for a sustainable future, Cerklje na Gorenjskem, Slovenia　2023/12　Research paper, summary (international conference)

  30. Catalytic ability of Cu and Ni in methanation with plasma catalysis

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    MRM2023/IUMRS-ICA2023, Kyoto International Conference Center　2023/12　Research paper, summary (international conference)

  31. Fabrication of amorphous gallium oxide thin film transistors by plasma-assisted reactive processes

    K. Takenaka, T. Komatsu, S. Toko, Y. Setsuhara

    The 44th International Symposium on Dry Process (DPS2023), Winc Aichi, Nagoya, Japan　2023/11　Research paper, summary (international conference)

  32. Synergistic Effects of Molecular Sieves and Plasma for CO2 Methanation

    Yuichi Setsuhara, Susumu Toko, Kosuke Takenaka, Masatomo Hattori

    The 3rd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-3), International Conference Center, Waseda University, Tokyo, Japan　2023/10　Research paper, summary (international conference)

  33. Development of Plasma Processing Technology for Low-temperature Formation of High Quality Functional Thin Films

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara, Keisuke Ide, Toshio Kamiya

    The 3rd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-3), International Conference Center, Waseda University, Tokyo, Japan　2023/10　Research paper, summary (international conference)

  34. プラズマを用いたCO2の水素還元における選択性の制御

    都甲 将、奥村 賢直、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2023年第84回応用物理学会秋季学術講演会, 熊本城ホール他3会場＆ハイブリッド開催　2023/09　Research paper, summary (national, other academic conference)

  35. 大気圧非平衡RFプラズマジェット照射が金属-有機材料異材直接接合に与える影響

    竹中 弘祐、中本 壮太郞、小鑓 亮輔、都甲 将、内田 儀一郎、節原 裕一

    2023年第84回応用物理学会秋季学術講演会, 熊本城ホール他3会場＆ハイブリッド開催　2023/09　Research paper, summary (national, other academic conference)

  36. Formation of Ga-based amorphous oxide thin film transistors using plasma-assisted reactive processes

    Kosuke Takenaka, Hibiki Komatsu, Susumu, Toko, Akinori Ebe, Yuichi Setsuhara

    25th International Symposium on Plasma Chemistry（ISPC25）, Miyako Messe、Kyoto, Japan　2023/05　Research paper, summary (international conference)

  37. 大気圧非平衡プラズマジェットを用いた有機材料－金属異材接合技術の開発

    竹中 弘祐, 中本 壮太郞, 小鑓 亮輔, 都甲 将, 内田 儀一郎, 節原 裕一

    2023年第70回応用物理学会春季学術講演会, 上智大学四谷キャンパス＋オンライン　2023/03　Research paper, summary (national, other academic conference)

  38. プラズマ支援反応性スパッタリングによるアモルファス酸化ガリウム薄膜形成

    竹中 弘祐, 小松 響, 藤村 知輝, 都甲 将, 井手 啓介, 江部 明憲, 神谷 利夫, 節原 裕一

    2023年第70回応用物理学会春季学術講演会, 上智大学四谷キャンパス＋オンライン　2023/03　Research paper, summary (national, other academic conference)

  39. Droplet-Vaporization Behavior Analysis in Plasma for Fabrication of 3D Nanostructured Zinc Oxide Thin Films by Plasma-assisted Mist CVD

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara

    15th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2023) / 16th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2023), Gifu University, Gifu, Japan　2023/03　Research paper, summary (international conference)

  40. Development of Plasma Assisted Reactive Process for Uniform Formation of High Mobility Oxide Semiconductor Thin Film Transistors over Large Areas

    Kosuke Takenaka, Tomoki Yoshitani, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    7th International Conference on Advances in Functional Materials (AFM2022), Centennial Hall of Kyushu University. Kyushu, Japan　2023/01　Research paper, summary (international conference)

  41. Estimation of the excited CO density in plasma contributing to CO2 methanation by optical emission spectroscopy

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    AFM2023, 福岡県福岡市 九大医学部 百年記念講堂　2023/01　Research paper, summary (international conference)

  42. Improvement of energy efficiency for CO2 decomposition using molecular capture catalysts

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    第32回日本MRS年次大会 (MRS-J2021), 産業貿易センター（横浜）　2022/12　Research paper, summary (national, other academic conference)

  43. Relationship between vibrational temperature and CO2 methanation with plasma catalysis

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    MRS-J 2022, 神奈川県横浜市 産業貿易センタービル　2022/12　Research paper, summary (international conference)

  44. Development of Plasma-Assisted Reactive Process for Large-Area Uniform Formation of High Mobility IGZO Thin-Film Transistors

    K. Takenaka, T. Yoshitani, G. Uchida, A. Ebe, Y. Setsuhara

    The 43rd International Symposium on Dry Process (DPS2022), Osaka International Convention Center, (Osaka, Japan) & Online　2022/11　Research paper, summary (international conference)

  45. プラズマ支援反応性プロセスを用いた機能性薄膜の低温形成

    竹中 弘祐, 都甲 将, 内田 儀一郎, 江部 明徳、節原 裕一

    第38回九州・山口プラズマ研究会, 指宿白水館　2022/11　Research paper, summary (national, other academic conference)

  46. Effect of H2O capture in methanation with plasma catalysis

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    DPS2022, オンライン　2022/11　Research paper, summary (international conference)

  47. プラズマ触媒作用によるメタネーションにおけるH2O吸着の効果

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    第38回九州山口プラズマ研究会, 鹿児島県指宿市 指宿白水館　2022/11　Research paper, summary (national, other academic conference)

  48. Development Plasma Processing Technology for Low-temperature Formation of High Quality Functional Thin Films

    Yuichi Setsuhara, Kosuke Takenaka, Susumu Toko, Keisuke Ide, Toshio Kamiya

    The 6th International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2022) & The 2nd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-2), Senri Life Science Center, Osaka, Japan　2022/10　Research paper, summary (international conference)

  49. Development of Virus Inactivation Technology with Integration of Atmospheric Pressure and Low Temperature Plasma Generation Control and Environmental Catalyst Technology

    Yuichi Setsuhara, Kosuke Takenaka, Susumu Toko, and Masatomo Hattori

    The 6th International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2022) & The 2nd International Symposium on Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-2), Senri Life Science Center, Osaka, Japan　2022/10　Research paper, summary (international conference)

  50. Relationship between vibrational temperature and CO2 methanation with plasma catalysis

    S. Toko, T. Haseagawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    11th International Conference on Reactive Plasmas (ICRP-11)/2022 Gaseous Electronics Conference (GEC 2022)/40th Symposium on Plasma Processing (SPP-40)/35th Symposium on Plasma Science for Materials (SPSM35), Sendai International Center, Sendai, Japan　2022/10　Research paper, summary (international conference)

  51. Low-Temperature Formation of High-Mobility IGZO Thin Films Transistors Fabricated with Plasma-Assisted Reactive Processes

    Yuichi Setsuhara, Hibiki Komatsu, Susumu Toko, Kosuke Takenaka, Akinori Ebe

    11th International Conference on Reactive Plasmas (ICRP-11)/2022 Gaseous Electronics Conference (GEC 2022)/40th Symposium on Plasma Processing (SPP-40)/35th Symposium on Plasma Science for Materials (SPSM35), Sendai International Center, Sendai, Japan　2022/10　Research paper, summary (international conference)

  52. Relationship between vibrational temperature and CO2 methanation with plasma catalysis

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    11th International Conference on Reactive Plasmas/ 2022 Gaseous Electronics Conference/ 40 th Symposium on Plasma Processing/ 35th Symposium on Plasma Science for Materials, オンライン　2022/10　Research paper, summary (international conference)

  53. プラズマ触媒作用を用いたCO2メタネーションのためのゼロ次元シミュレーション

    都甲 将, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2022年第83回応用物理学会秋季学術講演会, 東北大学川内キャンパス＆ハイブリッド開催　2022/09　Research paper, summary (national, other academic conference)

  54. 反応性プラズマプロセスを用いた高性能IGZO薄膜トランジスタの低温形成

    竹中 弘祐, 林 祐仁, 都甲 将, 江部 明憲, 節原 裕一

    2022年第83回応用物理学会秋季学術講演会, 東北大学川内キャンパス＆ハイブリッド開催　2022/09　Research paper, summary (national, other academic conference)

  55. プラズマ支援ミストCVDによる３次元ナノ構造酸化亜鉛薄膜形成に向けたプラズマ中の液滴蒸発挙動の解析

    竹中 弘祐, 都甲 将, 節原 裕一

    2022年第83回応用物理学会秋季学術講演会, 東北大学川内キャンパス＆ハイブリッド開催　2022/09　Research paper, summary (national, other academic conference)

  56. プラズマ触媒作用を用いたCO2メタネーションのためのゼロ次元シミュレーション

    都甲 将, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第83回秋季応用物理学会, オンライン　2022/09　Research paper, summary (national, other academic conference)

  57. プラズマ触媒作用を用いた低温下メタネーションプロセスの開発

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2022年度 放電学会シンポジウム 「カーボンニュートラルの研究動向」, オンライン　2022/08　Research paper, summary (national, other academic conference)

  58. プラズマ触媒作用を用いたCO2メタネーションにおける振動回転励起CO分子の役割

    都甲 将, 出口 雅志, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第69回春季応用物理学会, オンライン　2022/03　Research paper, summary (national, other academic conference)

  59. プラズマ触媒作用を用いたCO2メタネーションにおける振動回転励起CO分子の役割

    都甲 将、出口 雅志、長谷川 大樹、奥村 賢直、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2022年第69回応用物理学会春季学術講演会, ハイブリッド開催(青山学院大学相模原キャンパス＋オンライン)　2022/03　Research paper, summary (national, other academic conference)

  60. 高移動度IGZO薄膜トランジスタの大面積均一形成に向けたプラズマ支援反応性プロセスの開発

    竹中 弘祐、吉谷 友希、都甲 将、内田 儀一郎、江部 明憲、節原 裕一

    2022年第69回応用物理学会春季学術講演会, ハイブリッド開催(青山学院大学相模原キャンパス＋オンライン)　2022/03　Research paper, summary (national, other academic conference)

  61. プラズマ触媒を用いたCO2メタン化のためのプラズマシミュレーション

    都甲 将, 出口 雅志, 長谷川 大樹, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    The 39-th Symposium on Plasma Processing/ The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), オンライン　2022/01　Research paper, summary (international conference)

  62. 大気圧RFプラズマジェットを用いた異材接合プロセスの開発

    陣田 尭哉, 中本 壮太郞, 都甲 将, 竹中 弘祐, 内田 儀一郎, 節原 裕一

    The 39-th Symposium on Plasma Processing/The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), Web会議　2022/01　Research paper, summary (international conference)

  63. プラズマ支援反応プロセスで作成されたIGZO薄膜トランジスタの特性評価

    林 祐仁, 小松 響, 都甲 将, 竹中 弘祐, 江部 明憲, 節原 裕一

    The 39-th Symposium on Plasma Processing/The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), Web会議　2022/01　Research paper, summary (international conference)

  64. プラズマ触媒を用いたCO2メタン化のためのプラズマシミュレーション

    都甲 将、出口 雅志、長谷川 大樹、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    The 39-th Symposium on Plasma Processing/The 34-th Symposium on Plasma Science for Materials (SPP-39/SPSM34), Web会議　2022/01　Research paper, summary (international conference)

  65. Improvement of energy cost in methanation of CO2 with plasma catalysis

    S. Toko, M. Ideguchi, T. Haseagawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    Materials Research Meeting 2021 (MRM2021), Web会議　2021/12　Research paper, summary (international conference)

  66. Energy utilization efficiency in CO2 methanation with plasma catalysis

    S. Toko, M. Ideguchi, T. Hasegawa, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    The 42nd International Symposium on Dry Process (DPS2021), Web会議　2021/11　Research paper, summary (international conference)

  67. Effect of process conditions on characteristics of InGaZnO thin-film transistors fabricated with plasma-assisted reactive process

    K. Takenaka, H. Hirayama, Y. Hayashi, H. Komatsu, G. Uchida, A. Ebe, Y. Setsuhara

    The 42nd International Symposium on Dry Process (DPS2021), Web会議　2021/11　Research paper, summary (international conference)

  68. プラズマ触媒反応において触媒が二酸化炭素リサイクリングのエネルギーコストに与える影響

    都甲 将, 出口 雅志, 長谷川 大樹, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第82回秋季応用物理学会, オンライン　2021/09　Research paper, summary (national, other academic conference)

  69. Plasma-Enhanced Reactive Processes for Low-Temperature Fabrication of High-Mobility Oxide Thin Film Transistors

    Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    INTERFINISH2020 20th World Congress, Web会議　2021/09　Research paper, summary (international conference)

  70. プラズマ触媒反応において触媒が二酸化炭素リサイクリングのエネルギーコストに与える影響

    都甲 将、出口 雅志、長谷川 大樹、鎌滝 晋礼、竹中 弘祐、古閑 一憲、白谷 正治、節原 裕一

    2021年第82回応用物理学会秋季学術講演会, Web会議　2021/09　Research paper, summary (national, other academic conference)

  71. 反応性プラズマプロセスを用いた高移動度IGZO薄膜トランジスタの低温形成(IV)

    竹中 弘祐, 平山 裕之, 藤村 知輝, 林 祐仁, 内田 儀一郎, 江部 明憲, 節原 裕一

    2021年第82回応用物理学会秋季学術講演会, Web会議　2021/09　Research paper, summary (national, other academic conference)

  72. 反応性プラズマプロセスを用いた高移動度IGZO薄膜トランジスタの低温形成(II)

    竹中 弘祐, 平山 裕之, 藤村 知輝, 林 祐仁, 内田 儀一郎, 江部 明憲, 節原 裕一

    2021年第68回応用物理学会春季学術講演会, Web会議　2021/03　Research paper, summary (national, other academic conference)

  73. Effects of post-plasma annealing processing on performance on IGZO TFTs

    Kosuke Takenaka, Hiroyuki Hirayama, Tomoki Fujimura, Yuji Hayashi, Akinori Ebe, and Yuichi Setsuhara

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2021) / 14th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2021), Web Conference　2021/03　Research paper, summary (international conference)

  74. プラズマ支援反応性プロセスで作製されたIGZO薄膜トランジスタの特性に対するポストプロセス温度の影響

    竹中 弘祐, 平山 裕之, 藤村 知輝, 林 祐仁, 内田 儀一郎, 江部 明憲, 節原 裕一

    第38回プラズマプロセシング研究会(SPP-38)/第33回プラズマ材料科学シンポジウム(SPSM33), Web会議　2021/01　Research paper, summary (national, other academic conference)

  75. 反応性プラズマプロセスを用いた高移動度IGZO薄膜トランジスタの低温形成(II)

    節原 裕一, 竹中 弘祐, 平山 裕之, 内田 儀一郎, 江部 明憲

    第67回応用物理学会春季学術講演会, 東京　2020/03　Research paper, summary (national, other academic conference)

  76. Effects of post-processing temperature on performance of IGZO TFTs fabricated with plasma-enhanced reactive processes

    Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2020) / 13th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2020), Nagoya, Japan　2020/03　Research paper, summary (international conference)

  77. Plasma-assisted Reactive Process for Fabrication of High Mobility IGZO Thin Film Transistor at Low-Temperature

    Kosuke Takenaka, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe, and Yuichi Setsuhara

    Materials Researchmeeting 2019, Yokohama, Japan　2019/12　Research paper, summary (international conference)

  78. Formation of amorphous oxide thin films using plasma-assisted reactive sputter deposition

    Hiroyuki Hirayama, Kosuke Takenaka, Yuichi Setsuhara

    International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development Satellite (iLIM-s), Nagoya, Japan　2019/11　Research paper, summary (international conference)

  79. Effect of hydrogen plasma treatment for ultra-wide bandgap amorphous oxide semiconductor, amorphous Ga-O

    Keisuke Ide, Yurika Kasai, Kosuke Takenaka, Yuichi Setsuhara, Atsushi Hiraiwa, Hiroshi Kawarada, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4), Sendai, Japan　2019/10　Research paper, summary (international conference)

  80. Development of Plasma Surface Modification Technique towards Application of Polymers to Biomaterials

    Yuichi Setsuhara, Kosuke Takenaka

    4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4), Sendai, Japan　2019/10　Research paper, summary (international conference)

  81. Development of low-temperature plasma process for formation of functional thin films

    Yuichi Setsuhara, Kosuke Takenaka, Hiroyuki Hirayama, Keisuke Ide, and Toshio Kamiya

    4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4), Sendai, Japan　2019/10　Research paper, summary (international conference)

  82. プラズマ支援ミストCVDにおけるプラズマ中の液滴蒸発挙動（II）

    竹中 弘祐, 節原 裕一

    第80回応用物理学会秋季学術講演会, 北海道大学　2019/09　Research paper, summary (national, other academic conference)

  83. 反応性プラズマプロセスを用いた高移動度IGZO薄膜トランジスタの低温形成

    節原 裕一, 竹中 弘祐, 平山 裕之, 遠藤 雅, 内田 儀一郎, 江部 明憲

    第80回応用物理学会秋季学術講演会, 北海道大学　2019/09　Research paper, summary (national, other academic conference)

  84. Applications of plasma-treated amino acid water for killing cancer cells

    Giichiro Uchida, Jun-ichiro Ikeda, Kosuke Takenaka, and Yuichi Setsuhara

    12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019), Jeju, Korea　2019/09　Research paper, summary (international conference)

  85. Plasma-Enhanced Reactivity-Control Processes for Low-Temperature Formation of High-Mobility IGZO Thin-Film Transistors

    Yuichi Setsuhara, Kosuke Takenaka, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe

    12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019), Jeju, Korea　2019/09　Research paper, summary (international conference)

  86. Droplet-vaporization behavior in vacuum during plasma-assisted mist chemical vapor deposition

    Kosuke Takenaka, Yuichi Setsuhara

    XXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10), Sapporo, Hokkaido, Japan　2019/07　Research paper, summary (international conference)

  87. Plasma-assisted reactive processes for low-temperature fabrication of high-mobility InGaZnOx TFTs

    Yuichi Setsuhara, Masashi Endo, Horoyuki Hirayama, Tomoki Yoshitani, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    XXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10), Sapporo, Hokkaido, Japan　2019/07　Research paper, summary (international conference)

  88. Effects of liquid properties on plasma-induced liquid flow

    Keisuke Nishida, Makoto Kawaguchi, Yuka Hazama, Giichiro Uchida, Fumiaki Mitsugi, Nozomi Takeuchi, Kosuke Takenaka, Kazunari Koga, Yuichi Setsuhara, Masaharu Shiratani, Toshiyuki Kawasaki

    XXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10), Sapporo, Hokkaido, Japan　2019/07　Research paper, summary (international conference)

  89. Effects of surrounding gas on plasma-induced liquid flow

    Toshiyuki Kawasaki, Keisuke Nishida, Makoto Kawaguchi, Yuka Hazama, Giichiro Uchida, Fumiaki Mitsugi, Nozomi Takeuchi, Kosuke Takenaka, Kazunori Koga, Yuichi Setsuhara, Masaharu Shiratani

    XXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10), Sapporo, Hokkaido, Japan　2019/07　Research paper, summary (international conference)

  90. Gate-bias instability of amorphous In-Ga-Zn-Ox thin-film transistors fabricated by plasma-assisted reactive processes

    Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2019) / 12th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2019), Nagoya Institute of Technology, Nagoya, Japan　2019/03　Research paper, summary (international conference)

  91. プラズマ支援ミストCVDにおけるプラズマ中の液滴蒸発挙動

    竹中 弘祐, 節原 裕一

    第６６回応用物理学会春季学術講演会, 東京工業大学 大岡山キャンパス　2019/03　Research paper, summary (national, other academic conference)

  92. プラズマ支援反応性プロセスを用いた大面積基板へのIGZO薄膜トランジスタの形成

    節原 裕一, 竹中 弘祐, 吉谷 友希, 平山 裕之, 遠藤 雅, 内田 儀一郎, 江部 明憲

    第６６回応用物理学会春季学術講演会, 東京工業大学 大岡山キャンパス　2019/03　Research paper, summary (national, other academic conference)

  93. Gate-bias instability of Amorphous InGaZnOx Thin-film Transistors Prepared with Plasma-assisted Reactive Processes

    Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    2019/01　Research paper, summary (national, other academic conference)

  94. Positive-current-bias Instability of Post-deposition Plasma-treated IGZO TFTs Prepared with Plasma-assisted Reactive Sputtering

    Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Hiroyuki Hirayama, Giichiro Uchida, and Yuichi Setsuhara

    2018/12　Research paper, summary (national, other academic conference)

  95. プラズマ接触照射で作製したプラズマ活性培養液のがん細胞殺傷効果

    内田 儀一郎, 池田 純一郎, 鈴木 天翔, 竹中 弘祐, 節原 裕一

    第35回プラズマ核融合学会年会, 大阪大学吹田キャンパス　2018/12　Research paper, summary (national, other academic conference)

  96. Gate-bias instability of post-deposition plasma treated amorphous InGaZnOx thin-film transistors prepared with plasma-assisted reactive magnetron sputtering

    Kosuke Takenaka, Yuichi Setsuhara, Masashi Endo, and Giichiro Uchida

    40th International Symposium on Dry Process (DPS2018), Nagoya University, Nagoya　2018/11　Research paper, summary (international conference)

  97. Development of Low-Temperature Plasma Process for Nitride and Oxide Functional Films Formation

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara, Takeru Okada

    The 15th International Conference on Flow Dynamics (ICFD2018), Sendai, Miyagi, Japan　2018/11　Research paper, summary (international conference)

  98. プラズマ誘起流のPIV法による定量解析－照射距離が与える影響－

    川口 諒, 西田 佳祐, 間 結夏, 内田 儀一郎, 竹中 弘祐, 古閑 一憲, 節原 裕一, 白谷 正治, 川崎 敏之

    平成30年度（第71回）電気・情報関係学会九州支部連合大会, 大分大学 旦野原キャンパス　2018/09　Research paper, summary (national, other academic conference)

  99. プラズマ誘起流のPIV法による定量解析－酸素添加の影響－

    間 結夏, 川口 諒, 西田 佳祐, 内田 儀一郎, 竹中 弘祐, 古閑 一憲, 節原 裕一, 白谷 正治, 川崎 敏之

    平成30年度（第71回）電気・情報関係学会九州支部連合大会, 大分大学 旦野原キャンパス　2018/09　Research paper, summary (national, other academic conference)

  100. プラズマ誘起流のPIV法による定量解析－水質の影響－

    西田 佳祐, 川口 諒, 間 結夏, 内田 儀一郎, 竹中 弘祐, 古閑 一憲, 節原 裕一, 白谷 正治, 川崎 敏之

    平成30年度（第71回）電気・情報関係学会九州支部連合大会, 大分大学 旦野原キャンパス　2018/09　Research paper, summary (national, other academic conference)

  101. Device characteristics of rare-earth doped amorphous oxide semiconductors

    Toshio Kamiya, Kosuke Ide, Kosuke Takenaka, Yuichi Setsuhara, Atsushi Hiraiwa, H. Kawarada, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono

    3nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3), Tokyo Garden Palace, Tokyo, Japan　2018/09　Research paper, summary (international conference)

  102. Effects of base pressure on optoelectronic properties of amorphous In-Ga-Zn-O

    Keisuke Ide, Kosuke Takenaka, Yuichi Setsuhara, Atsushi Hiraiwa, Hiroshi Kawarada, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    3nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3), Tokyo Garden Palace, Tokyo, Japan　2018/09　Research paper, summary (international conference)

  103. Development of functionalization techniques of organic material surfaces for functional materials

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida

    3nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3), Tokyo Garden Palace, Tokyo, Japan　2018/09　Research paper, summary (international conference)

  104. Development of low-temperature plasma process for formation of functional thin films

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida, Keisuke Ide, and Toshio Kamiya

    3nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3), Tokyo Garden Palace, Tokyo, Japan　2018/09　Research paper, summary (international conference)

  105. 様々なプラズマ照射条件で作製されたプラズマ活性培養液のがん細胞殺傷効果

    内田 儀一郎, 池田 純一郎, 鈴木 天翔, 竹中 弘祐, 節原 裕一

    第79回応用物理学会秋季学術講演会, 名古屋国際会議場、愛知　2018/09　Research paper, summary (national, other academic conference)

  106. プラズマ支援反応性スパッタ製膜を用いた高移動度IGZO薄膜トランジスタの形成（III）

    竹中 弘祐、遠藤 雅, 吉谷 友希、内田 儀一郎、節原 裕一

    第79回応用物理学会秋季学術講演会, 名古屋国際会議場、愛知　2018/09　Research paper, summary (national, other academic conference)

  107. ICP-Assisted Reactive Sputter Deposition and Plasma-Enhanced Annealing Processes for Low-Temperature Formation of High-Mobility In-Ga-Zn-O Thin-Film Transistors

    Yuichi Setsuhara, Kosuke Takenaka, Masashi Endo, Giichiro Uchida, Akinori Ebe

    16th International Conference on Plasma Surface Engineering, Congress Center, Garmisch-Partenkirchen, Germany　2018/09　Research paper, summary (international conference)

  108. プラズマジェット照射が誘起する液体流に雰囲気ガスが与える影響

    川崎 敏之, 川口 諒, 西田 佳祐, 間 結夏, 内田 儀一郎, 竹中 弘祐, 古閑 一憲, 節原 裕一, 白谷 正治

    第42回静電気学会全国大会, 東京工業大学大岡山キャンパス　2018/09　Research paper, summary (national, other academic conference)

  109. 非平衡プラズマジェットと水溶液中アミノ酸との相互作用に関する研究

    内田 儀一郎, 美濃 祐資, 鈴木 天翔, 竹中 弘祐, 節原 裕一

    第６５回応用物理学会春季学術講演会,　2018/03　Research paper, summary (national, other academic conference)

  110. プラズマ支援反応性パルスDCスパッタリングによるC軸配向窒化アルミニウム薄膜の形成

    竹中 弘祐, 吉谷 友希, 内田 儀一郎, 節原 裕一

    第６５回応用物理学会春季学術講演会,　2018/03　Research paper, summary (national, other academic conference)

  111. プラズマ支援反応性プロセスを用いた高移動度IGZO薄膜の低温形成

    節原 裕一, 遠藤 雅, 竹中 弘祐, 内田 儀一郎, 江部 明憲

    第６５回応用物理学会春季学術講演会,　2018/03　Research paper, summary (national, other academic conference)

  112. Analysis of amino acids in plasma-activated water with mass spectrometer

    Giichiro Uchida, Yusuke Mino, Tensho Suzuki, Kosuke Takenaka, and Yuichi Setsuhara

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018) / 11th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2018), Meijo University, Nagoya, Japan　2018/03　Research paper, summary (international conference)

  113. Low-temperature fabrication of high-performance IGZO thin film transistor using plasma-assisted reactive processes

    Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Giichiro Uchida, Yuichi Setsuhara, and Akinori Ebe

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018) / 11th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2018), Meijo University, Nagoya, Japan　2018/03　Research paper, summary (international conference)

  114. 機能性材料創成に向けたプラズマプロセス

    竹中 弘祐

    第２６回 プラズマ医療 サイエンスの扉／第２６回 サイエンスカフェ－プラズマ医療－, 名古屋大学　2017/12　Research paper, summary (national, other academic conference)

  115. Development of a 60 MHz nonthermal plasma jet and selective production of reactive oxygen and nitrogen species in the plasma treated water

    Giichiro Uchida, Yusuke Mino, Tensho Suzuki, Kosuke Takenaka, and Yuichi Setsuhara

    2017/12　Research paper, summary (national, other academic conference)

  116. Oxidation and decomposition of amino acids in water induced by plasma irradiation

    Yusuke Mino, Giichiro Uchida, Tensho Suzuki, Kosuke Takenaka, and Yuichi Setsuhara

    2017/12　Research paper, summary (national, other academic conference)

  117. Fabrication of High Mobility IGZO Thin Film Transistor at Low Temperature using Plasma-assisted Reactive Processes

    Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara, and Akinori Ebe

    2017/12　Research paper, summary (national, other academic conference)

  118. Development of plasma-assisted reactive sputtering processes for functional thin films formation

    Kosuke Takenaka, Yoshiki Yoshitani, Giichiro Uchida, Yuichi Setsuhara

    2017/12　Research paper, summary (national, other academic conference)

  119. 非平衡プラズマジェット照射溶液中のアミノ酸成分に関する液体クロマトグラフ質量分析

    内田 儀一郎、美濃 祐資、竹中 弘祐、節原 裕一

    Plasma Conference 2017, 姫路商工会議所　2017/11　Research paper, summary (international conference)

  120. 誘導結合プラズマ支援反応性DCパルススパッタリングを用いた窒化アルミニウム薄膜の堆積

    竹中 弘祐、内田 儀一郎、節原 裕一

    Plasma Conference 2017, 姫路商工会議所　2017/11　Research paper, summary (international conference)

  121. Formation of c-axis Orientated AlN Films Using ICP-enhanced Reactive DC-pulsed Sputtering

    Kosuke Takenaka, Yoshikatsu Satake, Giichiro Uchida, Yuichi Setsuhara

    39th International Symposium on Dry Process (DPS2017), Tokyo, Japan　2017/11　Research paper, summary (international conference)

  122. Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors Using ICP-Enhanced Reactive Plasma Processes

    Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    39th International Symposium on Dry Process (DPS2017), Tokyo, Japan　2017/11　Research paper, summary (international conference)

  123. Effects of film microstructures on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors

    Keisuke Ide, Masato Ota, Takayoshi Katase, Kosuke Takenaka, Yuichi Setsuhara, Atsushi Hiraiwa, Hiroshi Kawarada, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2), Nagoya, Japan　2017/10　Research paper, summary (international conference)

  124. Functionalization of Organic Material Surfaces for Development of Functional Materials

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida

    International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2), Nagoya, Japan　2017/10　Research paper, summary (international conference)

  125. Development of Low-Temperature Plasma Process for High Quality Functional Films Formation

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida, Keisuke Ide, Toshio Kamiya

    International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2), Nagoya, Japan　2017/10　Research paper, summary (international conference)

  126. Advanced Plasma Processing for Formation of Functional Thin Films

    Kosuke Takenaka, Giichiro Uchida, Keisuke Ide, Toshio Kamiya, Yuichi Setsuhara

    International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2), Nagoya, Japan　2017/10　Research paper, summary (international conference)

  127. プラズマ支援反応性スパッタ製膜を用いた高移動度IGZO薄膜トランジスタの形成（II）

    節原 裕一、遠藤 雅、竹中 弘祐、内田 儀一郎、江部 明憲

    第78回応用物理学会秋季学術講演会, 福岡国際会議場・国際センター、福岡　2017/09　Research paper, summary (national, other academic conference)

  128. 長尺高周波非平衡プラズマジェットの開発

    内田 儀一郎、伊藤 泰喜、竹中 弘祐、節原 裕一

    第78回応用物理学会秋季学術講演会, 福岡国際会議場・国際センター、福岡　2017/09　Research paper, summary (national, other academic conference)

  129. プラズマ支援パルスDCマグネトロンスパッタリングによる結晶化窒化アルミニウム薄膜の低温形成

    竹中 弘祐、佐竹 義旦、内田 儀一郎、節原 裕一

    第78回応用物理学会秋季学術講演会, 福岡国際会議場・国際センター、福岡　2017/09　Research paper, summary (national, other academic conference)

  130. Development of an atmospheric pressure very-high-frequency plasma jet

    Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, Yuichi Setsuhara

    The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2017), Jeju, Republic of Korea　2017/09　Research paper, summary (international conference)

  131. Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors for Flexible Electrinics with ICP-Enhanced Reactive Plasma Processes

    Kosuke Takenaka, Yuichi Setsuhara, Masashi Endo, Giichiro Uchida, Akinori Ebe

    The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2017), Jeju, Republic of Korea　2017/09　Research paper, summary (international conference)

  132. Irradiation of a nonequilibrium plasma jettoliquidwaterwith amino acids

    Giichiro Uchida, Yusuke Mino, Taiki Ito, Kosuke Takenaka, Yuichi Setsuhara

    IUMRS The15th Intesrnational Conference on Advanced Materials (IUMRS-ICAM 2017), Kyoto, Japan　2017/09　Research paper, summary (international conference)

  133. 非平衡プラズマジェット照射による溶液中RNS 生成におけるアミノ酸の寄与

    内田 儀一郎, 伊藤 泰喜, 美濃 裕資, 竹中 弘祐, 節原 裕一

    第６４回応用物理学会春季学術講演会, 横浜　2017/03　Research paper, summary (national, other academic conference)

  134. プラズマ支援反応性スパッタ製膜を用いた高移動度IGZO薄膜トランジスタの形成

    節原 裕一, 遠藤 雅, 竹中 弘祐, 内田 儀一郎, 江部 明憲

    第６４回応用物理学会春季学術講演会, 横浜　2017/03　Research paper, summary (national, other academic conference)

  135. プラズマ支援反応性スパッタ製膜による窒化アルミニウム薄膜の形成

    竹中 弘祐, 佐竹 義旦, 内田 儀一郎, 節原 裕一

    第６４回応用物理学会春季学術講演会, 横浜　2017/03　Research paper, summary (national, other academic conference)

  136. Deposition of AlN films using ICP-enhanced reactive DC-pulsed sputtering

    Kosuke Takenaka, Yoshikatsu Satake, Giichiro Uchida, Yuichi Setsuhara

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2017) / 10th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2017), Nagoya, Japan　2017/03　Research paper, summary (international conference)

  137. Measurements of the ROS and RNS in liquid treated by a nonthermal plasma jet

    Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, and Yuichi Setsuhara

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2017) / 10th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2017), Nagoya, Japan　2017/03　Research paper, summary (international conference)

  138. ROS and RNS Production in Liquid under the Various Plasma Irradiation Conditions

    Giichiro Uchida, Taiki Ito, Yusuke Mino, Kosuke Takenaka, Junichiro Ikeda, and Yuichi Setsuhara

    International Conference on Plasma Medical Science Innovation (ICPMSI) 2017, Nagoya, Japan　2017/02　Research paper, summary (international conference)

  139. Formation of High-mobility IGZO Thin Film Transistors Using ICP-enhanced Reactive Sputter Deposition

    Yuichi Setsuhara, Kosuke Takenaka, Masashi Endo, Giichiro Uchida, and Akinori Ebe

    2017/01　Research paper, summary (national, other academic conference)

  140. Selective Production of H2O2 and NO2- in Cell Culture Medium Exposed to Nonthermal Plasma Jet

    Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, and Yuichi Setsuhara

    2017/01　Research paper, summary (national, other academic conference)

  141. The effects of nonthermal plasma irradiation on the surface of liquid and its effects on ROS and RNS generations in bulk solution

    Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, and Yuichi Setsuhara

    2016/12　Research paper, summary (national, other academic conference)

  142. Evaluation of H2O2 and NO2- concentrations in plasma activated liquid produced under various plasma-jet conditions

    Taiki Ito, Giichiro Uchida, Kosuke Takenaka, Junichiro Ikeda, and Yuichi Setsuhara

    2016/12　Research paper, summary (national, other academic conference)

  143. Properties of AlN thin films deposited with plasma-enhanced reactive DC-pulsed sputtering

    Yoshikatsu Satake, Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara

    2016/12　Research paper, summary (national, other academic conference)

  144. Combinatorial analysis of a-IGZO film properties deposited with ICP-enhanced reactive sputtering

    Kosuke Takenaka, Masashi Endo, Giichiro Uchida, Yuichi Setsuhara, and Akinori Ebe

    2016/12　Research paper, summary (national, other academic conference)

  145. Combinatorial characterization of a-IGZO film properties deposited with ICP-enhanced reactive sputtering

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    38th International Symposium on Dry Process (DPS2016), Hokkaido, Japan　2016/11　Research paper, summary (international conference)

  146. Influence of Mist Size on Surface Structure of ZnO Films Deposited with Plasma Assisted Mist Chemical Vapor Deposition

    Kosuke TAKENAKA, Giichiro UCHIDA, Yuichi SETSUHARA

    The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2016), Osaka, Japan　2016/10　Research paper, summary (international conference)

  147. Development of Plasma Processing Technology for Low-Temperature Formation of High Quality Functional Films

    Kosuke TAKENAKA, Yuichi SETSUHARA, Giichiro UCHIDA, Keisuke IDE, Toshio KAMIYA

    The 1st International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-1), Osaka, Japan　2016/10　Research paper, summary (international conference)

  148. Plasma Interactions with Organic Materials for Low-Temperature Processing of Engineering Polymers and Biomolecules

    Kosuke TAKENAKA, Giichiro UCHIDA, Yuichi SETSUHARA

    The 1st International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-1), Osaka, Japan　2016/10　Research paper, summary (international conference)

  149. Control of ROS and RNS productions in liquid in atmospheric pressure plasma-jet system

    Giichiro Uchida, Taiki Ito, Kosuke Takenaka, Junichiro Ikeda, Yuichi Setsuhara

    69th Annual Gaseous Electronics Conference, Bochum, Germany　2016/10　Research paper, summary (international conference)

  150. Dynamical-Behavior Characterization of Atmospheric-Pressure Dielectric-Barrier-Discharge Plasma Jets for Control of Reactive Oxygen and Nitrogen Species in Liquid

    Yuichi Setsuhara, Giichiro Uchida, Atsushi Nakajima, Taiki Ito, Kosuke Takenaka

    15th International Conference on Plasma Surface Engineering,　2016/09　Research paper, summary (international conference)

  151. 周辺ガス制御型大気圧Heプラズマジェット照射による純水中RNS/ROS濃度比制御

    伊藤 泰喜, 内田 儀一郎, 竹中 弘祐, 池田 純一郎, 節原 裕一

    第77回応用物理学会学術講演会,　2016/09　Research paper, summary (national, other academic conference)

  152. 大気圧プラズマジェット照射による培地中ROS，RNS生成制御

    内田 儀一郎, 伊藤 泰喜, 竹中 弘祐, 池田 純一郎, 節原 裕一

    第77回応用物理学会学術講演会,　2016/09　Research paper, summary (national, other academic conference)

  153. プラズマを重畳した反応性パルススパッタリングによる窒化物薄膜の低温形成

    竹中 弘祐, 佐竹 義旦, 内田 儀一郎, 節原 裕一

    第77回応用物理学会学術講演会,　2016/09　Research paper, summary (national, other academic conference)

  154. Effects of plasma-irradiation distance on ROS and RNS productions in liquid

    G. Uchida, A. Nakajima, T. Ito, K. Takenaka, T. Kawasaki, K. Koga, M. Shiratani, Y. Setsuhara

    6th International Conference on Plasma Medicine (ICPM-6),　2016/09　Research paper, summary (international conference)

  155. Effects of surrounding gas flow on ROS and RNS productions in non-thermal plasma-jet system

    Y. Setsuhara, G. Uchida, T. Ito, A. Nakajima, K. Takenaka, J. Ikeda

    6th International Conference on Plasma Medicine (ICPM-6),　2016/09　Research paper, summary (international conference)

  156. Spatio-temporal behaviors of atmospheric-pressure dielectric barrier discharge plasma jets for reactive interactions with materials

    Y. Setsuhara, G. Uchida, A. Nakajima, K. Kawabata, K. Takenaka

    International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC’2016),　2016/06　Research paper, summary (international conference)

  157. Spatio‐temporal behaviors of atmospheric‐pressure plasma jets for investigation of reactive‐species production in liquid

    Y. Setsuhara, A. Nakajima, G. Uchida, T. Ito, K. Takenaka, J. Ikeda

    43rd IEEE International Conference on Plasma Science (ICOPS 2016), Banff, Canada　2016/06　Research paper, summary (international conference)

  158. 周辺雰囲気ガス制御型プラズマジェット照射による溶液中活性酸素･窒素種生成

    内田 儀一郎, 中島 厚, 伊藤 泰喜, 竹中 弘祐, 節原 裕一

    第63回応用物理学会春季学術講演会, 東京　2016/03　Research paper, summary (national, other academic conference)

  159. プラズマ支援反応性スパッタリングを用いたアモルファスIGZO薄膜トランジスタの低温形成

    節原 裕一, 中田 慶太郎, 佐竹 義且, 竹中 弘祐, 内田 儀一郎, 江部 明憲

    第63回応用物理学会春季学術講演会, 東京　2016/03　Research paper, summary (national, other academic conference)

  160. Electrical discharge characteristics of atmospheric plasma jets

    Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara

    8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2016) / 9th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2016), Nagoya, Japan　2016/03　Research paper, summary (international conference)

  161. ICP-Enhanced Reactivity-Controlled Sputter Deposition of a-IGZO Films for Thin Film Transistor Applications

    Yuichi Setsuhara, Keitaro Nakata, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    9th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-9) /28th Symposium on Plasma Science for Materials (SPSM-28), Nagasaki, Japan　2015/12　Research paper, summary (international conference)

  162. Plasma-Assisted Mist CVD for Formation of Textured ZnO Films : Effect of Mists on Surface Structure of ZnO Films

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    9th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-9) /28th Symposium on Plasma Science for Materials (SPSM-28), Nagasaki, Japan　2015/12　Research paper, summary (international conference)

  163. Control of discharge characteristics of a plasma jet by ambient gas-flow conditions

    Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara

    2015/12　Research paper, summary (national, other academic conference)

  164. Effects of plasma-irradiation distance on oxidation reaction in liquid induced by He/O2 plasma-jet irradiation

    Atsushi Nakajima, Giichiro Uchida, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara

    2015/12　Research paper, summary (national, other academic conference)

  165. Reaction controllability of a-IGZO films deposited with plasma-enhanced reactive sputtering

    Keitaro Nakata, Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara, Akinori Ebe

    2015/12　Research paper, summary (national, other academic conference)

  166. Effect of Mists on Surface Structure of ZnO Films Deposited with Plasma-Assisted Mist CVD

    Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara

    2015/12　Research paper, summary (national, other academic conference)

  167. Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation

    Giichiro Uchida, Atsushi Nakajima, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara

    9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68), Hawaii, USA　2015/10　Research paper, summary (international conference)

  168. Discharge characteristics in atmospheric plasma jets produced in various gas flow patterns

    Yuichi Setsuhara, Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani

    9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68), Hawaii, USA　2015/10　Research paper, summary (international conference)

  169. ICP-Enhanced Sputter Deposition for Reactivity Control and Low-Temperature Formation of a-IGZO Films

    Yuichi Setsuhara, Keitaro Nakata, Yoshikatsu Satake, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68), Hawaii, USA　2015/10　Research paper, summary (international conference)

  170. Plasma-Assisted Mist Chemical Vapor Deposition of Zinc Oxide Films for Flexible Electronics

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    9th International Conference on Reactive Plasmas (ICRP-9) / 33rd Symposium on Plasma Processing (SPP-33) / 68th Gaseous Electronics Conference (GEC-68), Hawaii, USA　2015/10　Research paper, summary (international conference)

  171. Dynamical Characterizations of Atmospheric-Pressure Plasma Jets as Evaluation Protocols for Plasma Medicine

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Atsushi Nakajima, Kosuke Takenaka

    The 21st Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Material, Yangyang, Korea　2015/10　Research paper, summary (international conference)

  172. 非平衡プラズマジェットの動的放電特性

    内田 儀一郎, 竹中 弘祐, 節原 裕一, 川崎 敏之, 古閑 一憲, 白谷 正治

    第21回 プラズマ新領域研究会 『プラズマ流の可視化』, 大阪　2015/10　Research paper, summary (national, other academic conference)

  173. Effects of discharge voltage waveform on discharge characteristics in a helium atmospheric plasma jet

    Giichiro Uchida, Kosuke Takenaka, and Yuichi Setsuhara

    The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015), Jeju, Korea　2015/09　Research paper, summary (international conference)

  174. Discharge characteristics of a helium atmospheric plasma jet impinging onto the liquid surface

    Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Yuichi Setsuhara, Kazunori Koga, and Masaharu Shiratani

    The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015), Jeju, Korea　2015/09　Research paper, summary (international conference)

  175. Low-Temperature Formation of a-IGZO TFTs with ICP-Enhanced Reactivity-Controlled Sputter Deposition

    Yuichi Setsuhara, Kosuke Takenaka, Keitaro Nakata, Giichiro Uchida, and Akinori Ebe

    The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015), Jeju, Korea　2015/09　Research paper, summary (international conference)

  176. Atmospheric-Pressure-Plasma Assisted Mist CVD of Zinc Oxide Films

    Kosuke Takenaka, Giichiro Uchida, and Yuichi Setsuhara

    The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE 2015), Jeju, Korea　2015/09　Research paper, summary (international conference)

  177. プラズマ医療装置に求められている要素と世界動向

    節原 裕一, 内田 儀一郎, 竹中 弘祐, 竹田 圭吾, 石川 健治, 堀 勝

    第76回応用物理学会学術講演会, 名古屋　2015/09　Research paper, summary (national, other academic conference)

  178. 液面に入射するプラズマジェットの放電特性

    内田 儀一郎, 中島 厚, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    第76回応用物理学会学術講演会, 名古屋　2015/09　Research paper, summary (national, other academic conference)

  179. 大気圧He/O2プラズマジェット照射による液中活性酸素種生成に及ぼすガス流パターンの効果

    中島 厚, 内田 儀一郎, 川崎 敏之, 古閑 一憲, Thapanut Sarinont, 天野 孝昭, 竹中 弘祐, 白谷 正治, 節原 裕一

    第76回応用物理学会学術講演会, 名古屋　2015/09　Research paper, summary (national, other academic conference)

  180. プラズマ支援ミスト化学気相堆積におけるミストが製膜形状に与える影響

    竹中 弘祐, 内田 儀一郎, 節原 裕一

    第76回応用物理学会学術講演会, 名古屋　2015/09　Research paper, summary (national, other academic conference)

  181. 大気圧非平衡プラズマと液面の相互作用の可視化

    内田 儀一郎, 竹中 弘祐, 節原 裕一

    平成27年度 東北大学電気通信研究所共同プロジェクト研究会, 仙台　2015/08　Research paper, summary (national, other academic conference)

  182. Formation of Thin Film Transistor using a-IGZO Channels Deposited by Plasma-Enhanced Reactive Sputtering

    Yuichi Setsuhara, Kosuke Takenaka, Yutaro Suyama, Yuichiro Nakata, Giichiro Uchida, Akinori Ebe

    The 5th International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials and the 51st Summer Symposium on Powder Technology(ICCCI2015), Kurashiki, Japan　2015/07　Research paper, summary (international conference)

  183. Low-Temperature Growth of Zinc Oxide Films by Atmospheric-Pressure Plasma-Assisted Mist CVD

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    The 5th International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials and the 51st Summer Symposium on Powder Technology(ICCCI2015), Kurashiki, Japan　2015/07　Research paper, summary (international conference)

  184. A Investigation of Metal Nanocluster Structure and Electronic Property

    Tomonaga Ueno, T. Morishita, M. Mizushita, Nagahiro Saito, Kosuke Takenaka, Yuichi Setsuhara, Giichiro Uchida

    The 6th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-6), Tokyo, Japan　2015/06　Research paper, summary (international conference)

  185. Low-damage plasma processing technology for fabrication of advanced catalyst

    Kosuke Takenaka, Yuichi Setsuhara, Giichiro Uchida, Tomonaga Ueno, Nagahiro Saito

    The 6th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-6), Tokyo, Japan　2015/06　Research paper, summary (international conference)

  186. Development of reactivity controlled low-temperature plasma processing for fabrication of flexible devices

    Kosuke Takenaka, Yuichi Setsuhara, Giichiro Uchida, Toshio Kamiya

    The 6th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-6), Tokyo, Japan　2015/06　Research paper, summary (international conference)

  187. プラズマ支援反応性スパッタ製膜プロセスによるIGZO薄膜デバイス低温形成

    節原 裕一, 陶山 悠太郎, 中田 慶太郎, 竹中 弘祐, 内田 儀一郎, 江部 明憲

    第27回酸化物半導体討論会, 東京　2015/05　Research paper, summary (national, other academic conference)

  188. 大気圧非平衡プラズマ照射による液中ラジカル生成の制御

    内田 儀一郎, 竹中 弘祐, 節原 裕一

    応用物理学会九州支部 特別講演会, 福岡　2015/04　Research paper, summary (national, other academic conference)

  189. Discharge characteristics of atmospheric RF plasma jet

    Giichiro Uchida, Kosuke Takenaka, Kazufumi Kawabata, Yuichi Setsuhara, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015) / 8th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  190. Plasma interactions with organic materials in liquid through gas/liquid interface via atmospheric-pressure plasma

    Kosuke Takenaka, Kazufumi Kawabata, Atsushi Nakajima, Giichiro Uchida, Yuichi Setsuhara

    7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015) / 8th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  191. Deposition of zinc oxide films with atmospheric-pressure plasma-assisted mist CVD

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015) / 8th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  192. Low-temperature formation of a-IGZO films with ICP-enhanced reactive sputter deposition

    Yuichi Setsuhara, Yutaro Sutama, Keitaro Nakata, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2015) / 8th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  193. Plasma/biomolecules interaction in liquid as fundamental processes in plasma medicine

    Kosuke Takenaka, Kazufumi Kawabata, Atsushi Nakajima, Giichiro Uchida, Yuichi Setsuhara

    The 2nd International Workshop on Plasma for Cancer Treatment (IWPCT2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  194. Influence of voltage pulse width on discharge characteristics in dbd plasma jet

    Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Yuichi Setsuhara

    The 2nd International Workshop on Plasma for Cancer Treatment (IWPCT2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  195. Spatial and temporal properties of atmospheric-pressure dbd plasma jet

    Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Yuichi Setsuhara, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    The 2nd International Workshop on Plasma for Cancer Treatment (IWPCT2015), Nagoya, Japan　2015/03　Research paper, summary (international conference)

  196. 大気圧プラズマジェット放電特性に及ぼす放電電圧パルス幅の効果

    内田 儀一郎, 竹中 弘祐, 川端 一史, 節原 裕一

    第62回応用物理学会春季学術講演会, 神奈川　2015/03　Research paper, summary (national, other academic conference)

  197. 気液界面を介した大気圧非平衡プラズマ照射が液体中のアミノ酸へ与える影響

    竹中 弘祐、内田 儀一郎、川端 一史、中島 厚、阿部 浩也、節原 裕一

    第62回応用物理学会春季学術講演会, 神奈川　2015/03　Research paper, summary (national, other academic conference)

  198. プラズマ支援反応性スパッタリング法を用いたアモルファスIGZO薄膜の低温形成とその特性評価

    節原 裕一、陶山 悠太郎、中田 慶太郎、竹中 弘祐、内田 儀一郎、江部 明憲

    第62回応用物理学会春季学術講演会, 神奈川　2015/03　Research paper, summary (national, other academic conference)

  199. 液面に入射するプラズマジェットの放電特性と動的挙動

    内田儀一郎, 中島厚, 竹中弘祐, 古閑一憲, 白谷正治, 節原裕一

    応用物理学会秋季学術講演会講演予稿集(CD-ROM)　Vol. 76th　2015

  200. Spatio-temporal behaviors of atmospheric-pressure discharges

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    The 20th Workshop on Advanced Plasma Processes and Diagnostics & The 7th Workshop on NU-SKKU Joint Institute for Plasma-Nano Materials, Sapporo, Japan　2015/01　Research paper, summary (international conference)

  201. Formation of Zinc Oxide Films Deposited by Plasma-Assisted Mist CVD for Transparent Conducting Oxide Application

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    2015 Japan-Korea Joint Symposium on Advanced Solar Cells, Fukuoka, Japan　2015/01　Research paper, summary (international conference)

  202. Discharge characteristics of atmospheric pressure plasma jet operated under various gas conditions

    Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Yuichi Setsuhara

    2014/12　Research paper, summary (national, other academic conference)

  203. Dynamic Properties of Atmospheric Pressure Plasma Jet for Plasma Medicine

    Kazufumi Kawabata, Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara

    2014/12　Research paper, summary (national, other academic conference)

  204. Process Control of ICP-Enhanced Reactive Sputtering Deposition for Fabrication of IGZO TFT

    Yutaro Suyama, Keitaro Nakata, Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    2014/12　Research paper, summary (national, other academic conference)

  205. Plasma Interactions with Mist in Atmospheric-Pressure Plasma Irradiation

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    2014/12　Research paper, summary (national, other academic conference)

  206. Frequency Dependence of Atmospheric-Pressure Discharge Generation

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    2014 MRS Fall Meeting & Exhibit, Boston, USA　2014/12　Research paper, summary (international conference)

  207. Spatial and Temporal Characteristics of Atmospheric-Pressure Plasma Jet

    Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Yuichi Setsuhara

    2014 MRS Fall Meeting & Exhibit, Boston, USA　2014/12　Research paper, summary (international conference)

  208. Deposition of Zinc Oxide Film Using Atmospheric-Pressure Non-Equilibrium Plasma

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW 2014), Osaka, Japan　2014/11　Research paper, summary (international conference)

  209. Process Controllability of ICP-Enhanced Reactive Sputter Deposition for Low-Temperature Formation of IGZO TFT

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    36th International Symposium on Dry Process (DPS2014), YOKOHAMA, Japan　2014/11　Research paper, summary (international conference)

  210. Effect of Plasma Excitation Frequency on the Discharge Characteristics of Atmospheric Plasma Jet

    Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Yuichi Setsuhara, Keigo Takeda, Kenji Ishikawa, and Masaru Hori

    Plasma Conference 2014, 新潟　2014/11　Research paper, summary (international conference)

  211. Deposition of Oxide Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices

    Yuichi Setsuhara, Giichiro Uchida, Kosuke Takenaka, Yutaro Suyama, Soichiro Osaki, Akinori Ebe

    Plasma Conference 2014, 新潟　2014/11　Research paper, summary (international conference)

  212. Development of low-damage plasma processing technology for advanced catalyst fabrication

    Yuichi Setsuhara, Giichiro Uchida, Kosuke Takenaka, Tomonaga Ueno, Nagahiro Saito

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials, Tokyo, Japan　2014/11　Research paper, summary (international conference)

  213. Development of low-temperature reactivity controlled process for flexible device fabrication

    Yuichi Setsuhara, Giichiro Uchida, Kosuke Takenaka, Toshio Kamiya

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials, Tokyo, Japan　2014/11　Research paper, summary (international conference)

  214. ミストプラズマCVDを用いた透明導電酸化物薄膜の形成

    竹中 弘祐、節原 裕一

    平成26年度 東北大学電気通信研究所共同プロジェクト研究会, 仙台　2014/09　Research paper, summary (national, other academic conference)

  215. 大気圧高周波放電プラズマの動的特性

    内田 儀一郎, 竹中 弘祐, 川端 一史, 節原 裕一

    第75回応用物理学会学術講演会, 札幌　2014/09　Research paper, summary (national, other academic conference)

  216. 気液界面を介した大気圧非平衡プラズマと生体分子との相互作用

    竹中 弘祐、川端 一史、宮崎 敦史、阿部 浩也、内田 儀一郎、節原 裕一

    第75回応用物理学会学術講演会, 札幌　2014/09　Research paper, summary (national, other academic conference)

  217. 大気圧プラズマ支援による酸化亜鉛薄膜の形成に向けたプラズマ/ミスト相互作用の解析

    竹中 弘祐, 内田 儀一郎, 節原 裕一

    第75回応用物理学会学術講演会, 札幌　2014/09　Research paper, summary (national, other academic conference)

  218. Discharge Characteristics and Interaction with Soft Materials in Vacuum, Air and Liquid

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Atsushi Miyazaki, Kosuke Takenaka

    14th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2014/09　Research paper, summary (international conference)

  219. Discharge Properties and Radical-Generation Chracteristics in DBD Plasma Jet

    Giichiro Uchida, Kosuke Takenaka, Kazufumi Kawabata, Atsushi Miyazaki, Yuichi Setsuhara, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    14th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2014/09　Research paper, summary (international conference)

  220. Discharge Characteristics and Radical Generation in Dielectric Barrier Discharge

    Giichiro Uchida, Kosuke Takenaka, Kazufumi Kawabata, Atsushi Miyazaki, Yuichi Setsuhara, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    14th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2014/09　Research paper, summary (international conference)

  221. Low-Temperature Formation of a-IGZO Films by ICP-Enhanced Reactive Sputter Deposition

    Yuichi Setsuhara, Soichiro Osaki, Yutaro Suyama, Kosuke Takenaka, Giichiro Uchida

    International Union of Materials Research Societies-The IUMRS International Conference in Asia 2014, Fukuoka, Japan　2014/08　Research paper, summary (international conference)

  222. Plasma Interactions with Biological Molecules in Atmospheric-Pressure Plasma Irradiation through Gas/Liquid Interface

    Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Giichiro Uchida, Yuichi Setsuhara

    International Union of Materials Research Societies-The IUMRS International Conference in Asia 2014, Fukuoka, Japan　2014/08　Research paper, summary (international conference)

  223. Temporal Behavior of Reactive Particle Production in DBD Plasma Jet

    Giichiro Uchida, Kosuke Takenaka, Kazufumi Kawabata, Atsushi Miyazaki, Keigo Takeda, Kenji Ishikawa, Masaru Hori, Yuichi Setsuhara

    International Union of Materials Research Societies-The IUMRS International Conference in Asia 2014, Fukuoka, Japan　2014/08　Research paper, summary (international conference)

  224. Discharge Characteristics and Dynamics of Atmospheric Pressure Plasmas for Plasma Medicine

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka

    19th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & 6th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Gunsan, Korea　2014/06　Research paper, summary (international conference)

  225. 低ダメージプロセスに向けたプラズマ技術－フレキシブルデバイスからプラズマ医療－

    節原 裕一, 竹中 弘祐, 内田 儀一郎

    日本真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第138回定例研究会, 大阪　2014/06　Research paper, summary (national, other academic conference)

  226. Interactions of Atmospheric Pressure Non-equilibrium-Plasma with Organic Materials through Gas/Liquid Interface

    Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Giichiro Uchida, Yuichi Setsuhara

    5th International Conference on Plasma Medicine (ICPM5), Nara, Japan　2014/05　Research paper, summary (international conference)

  227. Characteristics of Reactive Particle Production in Atmospheric Pressure DBD Plasma Jet

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara, Keigo Takeda, Kenji Ishikawa, Masaru Hori

    5th International Conference on Plasma Medicine (ICPM5), Nara, Japan　2014/05　Research paper, summary (international conference)

  228. Plasma Interactions with Soft Materials in Air and Liquid

    Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Hiroya Abe, Masaru Hori

    5th International Conference on Plasma Medicine (ICPM5), Nara, Japan　2014/05　Research paper, summary (international conference)

  229. RF plasma sources for PECVD and soft-material processes

    Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe

    The International Symposium on Plasma-Nano Materials and Processes, Seoul, South Korea　2014/04　Research paper, summary (international conference)

  230. Plasma Irradiation Effects on Properties of ZnO Films Prepared with Plasma-Assisted Mist-CVD

    Kosuke Takenaka, Yuichi Setsuhara

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014), Nagoya, Japan　2014/03　Research paper, summary (international conference)

  231. Molecular Structural Change of Soft Materials via Irradiation with Atmospheric-Pressure Plasma Jet for Plasma Medicine

    Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Giichiro Uchida, and Yuichi Setsuhara

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014), Nagoya, Japan　2014/03　Research paper, summary (international conference)

  232. Spatial profiles of emission spectra from atmospheric-pressure plasma jet for plasma medicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara, Masaru Hori

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014), Nagoya, Japan　2014/03　Research paper, summary (international conference)

  233. Effects of gas-mixing structure on discharge properties of atmospheric-pressure plasma jet for plasma medicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, and Yuichi Setsuhara

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014), Nagoya, Japan　2014/03　Research paper, summary (international conference)

  234. Properties of ICP-Enhanced Reactive Sputter Discharge for Formation of Advanced Semiconductor Films

    Yuichi Setsuhara, Kosuke Takenaka, Soichiro Osaki, Yutaro Sutama, Hirofumi Ohtani, Atsuki Kanai

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014) / 7th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2014), Nagoya, Japan　2014/03　Research paper, summary (international conference)

  235. 大気圧誘電体バリア放電プラズマジェットにおける反応性粒子生成挙動 - 放電周波数に対する効果 -

    内田 儀一郎, 竹中 弘祐, 宮崎 敦史, 川端 一史, 節原 裕一, 竹田 圭吾, 石川 健治, 堀 勝

    第61回応用物理学会春季学術講演会, 東京　2014/03　Research paper, summary (national, other academic conference)

  236. 気液界面を介した大気圧非平衡プラズマと液体中有機物との相互作用

    竹中 弘祐、宮崎 敦史、川端 一史、内田 儀一郎、阿部 浩也、節原 裕一

    第61回応用物理学会春季学術講演会, 東京　2014/03　Research paper, summary (national, other academic conference)

  237. 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御性

    節原 裕一、竹中 弘祐、大崎 創一郎、陶山 悠太郎、大谷 浩史、金井 厚毅、江部 明憲

    第61回応用物理学会春季学術講演会, 東京　2014/03　Research paper, summary (national, other academic conference)

  238. Properties of ZnO Film Deposited by Plasma-Assisted Mist Chemical Vapor Deposition

    Kosuke Takenaka, Yuichi Setsuhara

    8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31), Fukuoka, Japan　2014/02　Research paper, summary (international conference)

  239. Plasma-Enhanced Reactivity-Controlled Sputter Deposition Process for Low-Temperature Formation of Semiconductor Films

    Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Atsuki Kanai, and Soichiro Osaki

    8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31), Fukuoka, Japan　2014/02　Research paper, summary (international conference)

  240. Molecular-Structure Variation of Soft Material Irradiated with Atmospheric-Pressure Plasma Jet

    Kosuke Takenaka, Atsushi Miyazaki, Giichiro Uchida, and Yuichi Setsuhara

    8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31), Fukuoka, Japan　2014/02　Research paper, summary (international conference)

  241. Optical Emission Characteristics of Atmospheric-Pressure Plasma Jet for Plasma Biomedicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara, and Masaru Hori

    8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31), Fukuoka, Japan　2014/02　Research paper, summary (international conference)

  242. Discharge Characteristics of Plasma Jet Operated in Gas-Mixture System for Plasma Biomedicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, and Yuichi Setsuhara

    International workshop on control of fluctuation of plasma processes, Fukuoka, Japan　2014/02　Research paper, summary (international conference)

  243. Pressure Dependence of Carbon Film Deposition Using H-assisted Plasma CVD

    Xiao Dong, Kazunori Koga, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Kosuke Takenaka, Yuichi Setsuhara, Makoto Sekine, and Masaru Hori

    8th International Conference on Reactive Plasmas (ICRP-8)/31st Symposium on Plasma Processing (SPP-31), Fukuoka, Japan　2014/02　Research paper, summary (international conference)

  244. Advanced reactive sputter deposition system enhanced with ICPs driven by new type of low--inductance antenna modules

    Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe

    International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2013), Las Vegas, USA　2013/12　Research paper, summary (international conference)

  245. Surface Structure Analysis of Zinc Oxide Thin films Deposited by Plasma-Assisted Mist Chemical Vapor Deposition

    Kosuke Takenaka, and Yuichi Setsuhara

    2013/12　Research paper, summary (national, other academic conference)

  246. Control Capability of ICP-Enhanced Reactive Sputtering System with Inner Type Low-Inductance Antenna Modules

    Yuichi Setsuhara, Soichiro Osaki, Hirofumi Otani, Atsuki Kanai, Kosuke Takenaka, and Akinori Ebe

    2013/12　Research paper, summary (national, other academic conference)

  247. Variation of Molecular Structure of Bio-molecules after Atmospheric-Pressure Plasma Irradiation

    Kosuke Takenaka, Atushi Miyazaki, Giichiro Uchida, Yuichi Setsuhara

    2013/12　Research paper, summary (national, other academic conference)

  248. Basic characteristics of atmospheric-pressure dielectric barrier discharge plasma jet for biomedical applications (I)

    Yuichi Setsuhara, Giichiro Uchida, Atushi Miyazaki, Kosuke Takenaka

    2013/12　Research paper, summary (national, other academic conference)

  249. Basic characteristics of atmospheric-pressure dielectric barrier discharge plasma jet for biomedical applications (II)

    Giichiro Uchida, Atushi Miyazaki, Kosuke Takenaka, Yuichi Setsuhara, Takayoshi Tsutsumi, Keigo Tekeda, Kenji Ishikawa, Masaru Hori

    2013/12　Research paper, summary (national, other academic conference)

  250. Low-Temperature and Low-Damage Plasma Processing of Inorganic/Organic Hybrid Structure for Fabrication of Electronics on Polymers

    Kosuke Takenaka, Yuichi Setsuhara

    The 4th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials, Nagoya, Japan　2013/12　Research paper, summary (international conference)

  251. Plasma Processing of Functional Oxide Material for Creations of Rare Metal-Free Catalyst

    Kosuke Takenaka, Tomonaga Ueno, Nagahiro Saito, Yuichi Setsuhara

    The 4th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials, Nagoya, Japan　2013/12　Research paper, summary (international conference)

  252. Atmospheric-Pressure Gas-Breakdown Characteristics with RF and UHF Voltage for Plasma Medicine

    Giichiro Uchida, Atsushi Miyazaki, Kosuke Takenaka, and Yuichi Setsuhara

    International Conference on Surface Engineering (ICSE 2013), Busan, Korea　2013/11　Research paper, summary (international conference)

  253. DC-Voltage Gas-Breakdown Characteristics at Atmospheric Pressure for Plasma Medicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara

    International Conference on Surface Engineering (ICSE 2013), Busan, Korea　2013/11　Research paper, summary (international conference)

  254. Properties of Dielectric-Barrier-Discharge Plasma Jet for Plasma Medicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara

    International Conference on Surface Engineering (ICSE 2013), Busan, Korea　2013/11　Research paper, summary (international conference)

  255. Plasma Interaction with Soft Materials in Liquid as Fundamental Processes in Plasma Medicine

    Kosuke Takenaka, Atsushi Miyazaki, Hiroya Abe, and Yuichi Setsuhara

    International Conference on Surface Engineering (ICSE 2013), Busan, Korea　2013/11　Research paper, summary (international conference)

  256. Atmospheric-Pressure Plasma Interaction with Soft Materials as Fundamental Processes in Plasma Medicine

    Kosuke Takenaka, Atsushi Miyazaki, and Yuichi Setsuhara

    International Conference on Surface Engineering (ICSE 2013), Busan, Korea　2013/11　Research paper, summary (international conference)

  257. Deposition of Textured Zinc Oxide Thin films Using Plasma-Assisted Mist Chemical Vapor Deposition

    Kosuke Takenaka, Yuichi Setsuhara

    International Symposium on Interfacial Joining and Surface Technology (IJST2013), Osaka, Japan　2013/11　Research paper, summary (international conference)

  258. Formation of Textured Zinc Oxide Thin films by Plasma-Assisted Mist Chemical Vapor Deposition

    Kosuke Takenaka, Yuichi Setsuhara

    第26回プラズマ材料科学シンポジウム(SPSM26), 福岡　2013/09　Research paper, summary (national, other academic conference)

  259. Controllability of Plasma-Enhanced Reactive Sputter Deposition Process with ICPs Sustained by Multiple Inner Type Low-Inductance Antenna Modules

    Yuichi Setsuhara, Soishiro Osaki, Kosuke Takenaka, Akinori Ebe

    2013/09　Research paper, summary (national, other academic conference)

  260. Investigation of Plasma-Organic Materials Interaction in Aqueous Solution with Atmospheric Pressure Plasmas

    Kosuke Takenaka, Atsushi Miyazaki, Yuichi Setsuhara

    第26回プラズマ材料科学シンポジウム(SPSM26), 福岡　2013/09　Research paper, summary (national, other academic conference)

  261. Molecular-Structure Variation of Organic Materials Irradiated with Atmospheric Pressure Plasma

    Kosuke Takenaka, Atsushi Miyazaki, Yuichi Setsuhara

    第26回プラズマ材料科学シンポジウム(SPSM26), 福岡　2013/09　Research paper, summary (national, other academic conference)

  262. Plasma Interactions with Biological Molecules in Aqueous Solution

    Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Masaru Hori

    2013 JSAP-MRS Joint Symposia, Kyoto, Japan　2013/09　Research paper, summary (international conference)

  263. プラズマ支援ミストCVDによる微小凹凸構造を有した酸化亜鉛薄膜形成

    竹中 弘祐, 節原 裕一

    第74回応用物理学会学術講演会, 京都　2013/09　Research paper, summary (national, other academic conference)

  264. 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御

    節原 裕一、竹中 弘祐、大谷 浩史、金井 厚毅、大崎 創一郎、江部 明憲

    第74回応用物理学会学術講演会, 京都　2013/09　Research paper, summary (national, other academic conference)

  265. ICP-Enhanced Reactive Sputter Deposition Processes for Low-Temperature Formation of IGZO TFT

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    35th International Symposium on Dry Process (DPS2013), Jeju, Korea　2013/08　Research paper, summary (international conference)

  266. ICP-Enhanced Reactivity-Controlled Sputter Deposition with New Type of Low-Inductance Antenna Modules for High-Rate and Large-Area Deposition of Functional Films

    Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe

    The 9th Asian-European International Conference on Plasma Surface Engineering (AEPSE2013), Jeju, Korea　2013/08　Research paper, summary (international conference)

  267. Degradation of methylene blue in aqueous solution via plasma exposure through gas/liquid interface

    Kosuke Takenaka, Atsushi Miyazaki, Yuichi Setsuhara

    The 12th Asia Pacific Physics Conference (APPC12), The third Asia-Europe Physics Summit (ASEPS3), Chiba, Japan　2013/07　Research paper, summary (international conference)

  268. Plasma-Assisted Mist Chemical Vapor Deposition for Formation of Textured Zinc Oxide Thin films

    Kosuke Takenaka, Yuichi Setsuhara

    1st Japan-Taiwan workshop on Materials Design and Joining, Osaka, Japan　2013/05　Research paper, summary (international conference)

  269. プラズマ医療の基礎過程としての気液界面を介したプラズマと液体中有機物との相互作用

    竹中 弘祐、節原 裕一

    第60回応用物理学関係連合講演会, 厚木　2013/03　Research paper, summary (national, other academic conference)

  270. 高品質半導体薄膜作製のためのプラズマ支援反応性スパッタリングプロセスの高度制御性

    節原 裕一、竹中 弘祐、大谷 浩史、金井 厚毅、江部 明憲

    第60回応用物理学関係連合講演会, 厚木　2013/03　Research paper, summary (national, other academic conference)

  271. Designing Plasma-Enhanced Magnetron Sputtering with Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    The 6th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2013), Gifu, Japan　2013/02　Research paper, summary (international conference)

  272. Plasma-Biomaterials Interaction Analysis as a Basis of Fundamental Processes in Plasma Medicine

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    5rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013), Nagoya, Japan　2013/02　Research paper, summary (international conference)

  273. ICP-Enhanced Reactive Sputtering with Multiple Inner Type Low-Inductance Antenna Modules for Large-Area Formation of Thin Film Devices

    Yuichi Setsuhara, Kosuke Takenaka, and Akinori Ebe

    5rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013), Nagoya, Japan　2013/02　Research paper, summary (international conference)

  274. Surface Structure Control of ZnO Films by Plasma-Assisted Mist-CVD

    Kosuke Takenaka, Yuichi Setsuhara

    5rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013), Nagoya, Japan　2013/02　Research paper, summary (international conference)

  275. Development of Low-Temperature and High-Speed Deposition Technology of Nano Surface Structure Controlled Oxide Ceramics Thin Films

    No. 34　p. 134-138　2013

    Publisher: 日本板硝子材料工学助成会

  276. Plasma Interactions with Organic Materials in Liquid as Fundamental Processes in Plasma Medicine

    Kosuke Takenaka, Hiroya Abe, Yuichi Setsuhara

    第30回プラズマプロセシング研究会, 浜松　2013/01　Research paper, summary (national, other academic conference)

  277. Structure Control of ZnO Film Surface Using Plasma-Assisted Mist CVD

    Kosuke Takenaka, Yuichi Setsuhara

    2013/01　Research paper, summary (national, other academic conference)

  278. Low-Temperature Formation of Semiconductor Films via ICP-Enhanced Reactive Sputtering for Development of Advanced Flexible Devices

    Yuichi Setsuhara, Kosuke Takenaka, Hirofimi Ohtani, Akinori Ebe

    2013/01　Research paper, summary (national, other academic conference)

  279. Plasma-Assisted Mist CVD for Formation of Zinc Oxide Film as Transparent Conducting Oxide

    Kosuke Takenaka, and Yuichi Setsuhara

    The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation (Visual-JW2012), Osaka, Japan　2012/11　Research paper, summary (international conference)

  280. Development of ICP-Enhanced Reactive Sputtering System with Multiple Low-Inductance Antenna Modules for Large-Area Deposition of Silicon Films

    Yuichi Setsuhara, Kosuke Takenaka, and Akinori Ebe

    34th International symposium on Dry Process, Tokyo, Japan　2012/11　Research paper, summary (international conference)

  281. Inductively Coupled Plasma-Assisted Mist CVD for Low Temperature and High Rate Deposition of ZnO Films

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    34th International symposium on Dry Process, Tokyo, Japan　2012/11　Research paper, summary (international conference)

  282. Water Plasma Interactions in Solution

    Yuichi Setsuhara, Kosuke Takenaka

    First International Symposium on Advanced Water Science and Technology (ISAWST-1), Aichi, Japan　2012/11　Research paper, summary (international conference)

  283. プラズマ支援ミストCVDを用いた酸化亜鉛薄膜の低温・高速形成

    竹中 弘祐、節原 裕一

    第28回九州・山口プラズマ研究会, 大分　2012/11　Research paper, summary (national, other academic conference)

  284. Nano-Surface Plasma Processing of Functional Oxide Materials for Development of Rare Metal-Free Catalyst

    Kosuke Takenaka, Tomonaga Ueno, Nobuyuki Zettsu, Nagahiro Saito, Yuichi Setsuhara

    5th International Symposium on Designing, Processing and Properties of Advanced Engineering Materials (ISAEM-2012) and Advanced Materials Development and Integration of Novel Structural Metallic and Inorganic Materials, Aichi, Japan　2012/11　Research paper, summary (international conference)

  285. Low-Temperature and Low-Damage Plasma Processing of Inorganic/Organic Hybrid Materials for Development of Flexible Electronics

    Kosuke Takenaka, Yuichi Setsuhara

    5th International Symposium on Designing, Processing and Properties of Advanced Engineering Materials (ISAEM-2012) and Advanced Materials Development and Integration of Novel Structural Metallic and Inorganic Materials, Aichi, Japan　2012/11　Research paper, summary (international conference)

  286. Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    65th Annual Gaseous Electronics Conference, Texas, USA　2012/10　Research paper, summary (international conference)

  287. Process Control Capabilities Of Plasma-Enhanced Reactive Sputter Deposition With New Type Of Low-Inductance-Antenna Driven ICP For Large-Area Formation Of Semiconductor Films

    Yuichi Setsuhara, Kosuke Takenaka, Hirofumi Ohtani, Akinori Ebe

    Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25), Kyoto, Japan　2012/10　Research paper, summary (international conference)

  288. Investigations on Plasma-Biomolecules Interactions as Fundamental Process for Plasma Medicine

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25), Kyoto, Japan　2012/10　Research paper, summary (international conference)

  289. Low-Temperature and High-Rate Deposition of Crystalline Zinc Oxide Films by Plasma-Enhanced Mist Chemical Vapor Deposition

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    Joint conference on the 11th Asia Pacific Conference on Plasma Science and Technology (11th APCPST-11) and 25th Symposium on Plasma Science for Materials (SPSM-25), Kyoto, Japan　2012/10　Research paper, summary (international conference)

  290. Effect of Plasma Irradiation on Interfacial Nano Layers in Inorganic / Organic Hybrid Structures

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara

    International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012), Yokohama, Japan　2012/09　Research paper, summary (international conference)

  291. Radio Frequency Plasma Generation over Water Surface at Saturated Water Vapor Pressure

    Kosuke Takenaka, Yuichi Setsuhara

    International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012), Yokohama, Japan　2012/09　Research paper, summary (international conference)

  292. Plasma-Assisted Mist CVD with Inductively-Coupled RF Plasma Source for ZnO Film Formation

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    International Union of Materials Research Societies - International conference on Electronic Materials (IUMRS-ICEM2012), Yokohama, Japan　2012/09　Research paper, summary (international conference)

  293. Plasma-Enhanced Sputtering Assisted with ICP via New Type of Low-Inductance Antenna for Reactivity-Controlled and Low-Damage Formation of Semiconductor Films

    Yuichi Setsuhara, Yasufumi Ohchi, Ken Cho, Kosuke Takenaka, Akinori Ebe

    13th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2012/09　Research paper, summary (international conference)

  294. プラズマ支援反応性スパッタリング法を用いた長尺基板対応大面積プラズマスパッタシステムの開発

    竹中 弘祐, 節原 裕一, 江部 明憲

    第73回応用物理学会学術講演会, 松山　2012/09　Research paper, summary (national, other academic conference)

  295. プラズマ支援ミストCVDを用いた酸化亜鉛薄膜の形成と表面形状評価

    竹中 弘祐, 奥村 祐介, 節原 裕一

    第73回応用物理学会学術講演会, 松山　2012/09　Research paper, summary (national, other academic conference)

  296. Plasma-Assisted Mist CVD for Low-Temperature and High-Rate Formation of Zinc Oxide Films

    Kosuke Takenaka, Yusuke Okumura, and Yuichi Setsuhara

    The Fourth International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials (ICCCI 2012), Kurashiki, Japan　2012/09　Research paper, summary (international conference)

  297. XPS Studies on Plasma Interactions with Soft-materials as a Basis of Investigations on Fundamental Processes with Biomolecules in Plasma Medicine

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    2012 MRS Spring Meeting & Exhibit, San Francisco, USA　2012/04　Research paper, summary (international conference)

  298. プラズマ支援ミストCVDを用いた酸化亜鉛薄膜形成におけるプラズマ照射の効果

    竹中 弘祐, 奥村 祐介, 節原 裕一

    第59回応用物理学関係連合講演会, 東京　2012/03　Research paper, summary (national, other academic conference)

  299. プラズマ支援反応性スパッタリング法による透明アモルファス酸化物半導体薄膜トランジスタ低温形成技術の開発

    節原 裕一, 趙 研, 大地 康史, 竹中 弘祐, 江部 明憲

    第59回応用物理学関係連合講演会, 東京　2012/03　Research paper, summary (national, other academic conference)

  300. ICP-Enhanced Reactive Processes with Low-Inductance Antenna

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe

    The 5th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2012), Aichi, Japan　2012/03　Research paper, summary (international conference)

  301. Plasma-Assisted Sputtering with ICP Driven by Inner-Type Low-Inductance Antenna

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, and Akinori Ebe

    4th International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2012), Aichi, Japan　2012/03　Research paper, summary (international conference)

  302. Nano-Surface Analysis of Plasma-Polymer Interactions for Fabrications of Flexible Electronics with Inorganic/Organic Hybrid Structures

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    4th International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2012), Aichi, Japan　2012/03　Research paper, summary (international conference)

  303. Deposition of ZnO Films by Plasma-Assisted Mist-CVD with Inductively-Coupled RF Plasma Source

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    4th International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2012), Aichi, Japan　2012/03　Research paper, summary (international conference)

  304. Characterization of Inductively-Coupled RF Plasmas with Inner-Type Low-Inductance Antennas and Application to Plasma-Assisted Reactive Sputter Deposition

    Ken Cho, Yasufumi Ohchi, Kosuke Takenaka, Yuichi Setsuhara

    2011/12　Research paper, summary (national, other academic conference)

  305. Formation of ZnO by Plasma Assisted Mist-CVD Using Zn(CH3COO)2 Solution

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    2011/12　Research paper, summary (national, other academic conference)

  306. Nano-Surface analysis of plasma-polymer interactions for development of low-damage and low-temperature plasma processes of organic materials

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    International Symposium on Materials Science and Innovation for Sustainable Society (ECO-MATES 2011), Osaka, Japan　2011/11　Research paper, summary (international conference)

  307. Zinc Oxide Films Formation Using Plasma-Assisted Mist- CVD

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    International Symposium on Materials Science and Innovation for Sustainable Society (ECO-MATES 2011), Osaka, Japan　2011/11　Research paper, summary (international conference)

  308. Effect of Plasma Irradiation on Interfacial Nano Layers in Organic/Inorganic Hybrid Structures

    Ken Cho, Kosuke Takenaka, and Yuichi Setsuhara

    Plasma Conference 2011, Ishikawa, Japan　2011/11　Research paper, summary (international conference)

  309. Development of Low-Damage Reactive Sputter Deposition Processes with Inner-Type Low Inductance Antenna

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, and Akinori Ebe

    Plasma Conference 2011, Ishikawa, Japan　2011/11　Research paper, summary (international conference)

  310. Formation of ZnO Films by Plasma-Assisted Mist-CVD Using Zn(CH3COO)2

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    Plasma Conference 2011, Ishikawa, Japan　2011/11　Research paper, summary (international conference)

  311. Investigation of Chemical Bonding States at Inorganic/Organic Interface For Development of Low-Damage Fabrication Processes of Hybrid Multi-Layer Structure

    Ken Cho, Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    7th Handai Nanoscience and Nanotechnology International Symposium, Osaka, Japan　2011/11　Research paper, summary (international conference)

  312. Deposition of Zinc Oxide films with Plasma-Assisted Mist Chemical Vapor Deposition Method

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    7th Handai Nanoscience and Nanotechnology International Symposium, Osaka, Japan　2011/11　Research paper, summary (international conference)

  313. Investigation of plasma interactions with organic semiconductors for fabrication of flexible electronics devices

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    33rd International symposium on Dry Process, Kyoto, Japan　2011/11　Research paper, summary (international conference)

  314. Plasma-Assisted Mist CVD for Deposition of Zinc Oxide Films

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    33rd International symposium on Dry Process, Kyoto, Japan　2011/11　Research paper, summary (international conference)

  315. Plasma Oxidation Behaviors of Zn Nano Films

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    15th International Conference on Thin Films (ICTF-15), Kyoto, Japan　2011/11　Research paper, summary (international conference)

  316. 埋め込み型低インダクタンスアンテナを用いたプラズマ支援反応性スパッタリング法により作製したa-IGZO膜の特性評価

    大地 康史、趙 研、竹中 弘祐、節原 裕一、江部 明憲

    応用物理学会 プラズマエレクトロニクス分科会20周年（研究会創設25周年）記念 特別シンポジウム, 名古屋　2011/10　Research paper, summary (national, other academic conference)

  317. 次世代フレキシブルデバイスの作製プロセスに向けたプラズマ－有機相互作用のナノ表面解析

    趙 研、竹中 弘祐、節原 裕一、白谷 正治、関根 誠、堀 勝

    応用物理学会 プラズマエレクトロニクス分科会20周年（研究会創設25周年）記念 特別シンポジウム, 名古屋　2011/10　Research paper, summary (national, other academic conference)

  318. プラズマ支援ミストCVDによる酸化亜鉛薄膜形成

    竹中 弘祐、奥村 祐介、節原 裕一

    応用物理学会 プラズマエレクトロニクス分科会20周年（研究会創設25周年）記念 特別シンポジウム, 名古屋　2011/10　Research paper, summary (national, other academic conference)

  319. Plasma Interaction with Zn Nano layer on Organic Materials for Analysis of Early Stage of Inorganic/Organic Hybrid Multi-Layer Formation

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 8th Asian-European International Conference on Plasma Surface Engineering, Dalian city, China　2011/09　Research paper, summary (international conference)

  320. Discharge Control Capabilities of Low-Inductance-Antenna-Driven RF Plasmas

    Kosuke Takenaka, Ken Cho, and Yuichi Setsuhara

    The 8th Asian-European International Conference on Plasma Surface Engineering, Dalian city, China　2011/09　Research paper, summary (international conference)

  321. 埋込型低インダクタンスアンテナによるプラズマ生成技術の開発と大面積・低ダメージ反応性プロセスへの応用

    節原 裕一, 趙 研, 竹中 弘祐, 江部 明憲

    第72回応用物理学会学術講演会, 山形　2011/08　Research paper, summary (national, other academic conference)

  322. 無機／有機積層構造形成初期過程における界面の化学結合状態分析

    趙 研, 節原 裕一, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第72回応用物理学会学術講演会, 山形　2011/08　Research paper, summary (national, other academic conference)

  323. 酢酸亜鉛を含むミストを用いたプラズマ支援による酸化亜鉛薄膜形成

    竹中 弘祐, 奥村 祐介, 節原 裕一

    第72回応用物理学会学術講演会, 山形　2011/08　Research paper, summary (national, other academic conference)

  324. Investigation of chemical bonding states at interface of Zn/organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    第24回プラズマ材料科学シンポジウム, 大阪　2011/07　Research paper, summary (national, other academic conference)

  325. Plasma-Assisted Mist-CVD of Zinc Oxide Films with Zinc Acetate Solution

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    2011/07　Research paper, summary (national, other academic conference)

  326. Development of Surface Modification Process for Fabrication of Alternative Rare-Metal Catalyst

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara

    Joint Conference of The Fifth International Conference on the Science and Technology for Advanced Ceramics (STAC5) and The 2nd International Conference on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI2), Yokohama, Japan　2011/06　Research paper, summary (international conference)

  327. Development of Low-Temperature and Low-Damage Interface Control Process For Fabrication of Flexible Electronics

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara

    Joint Conference of The Fifth International Conference on the Science and Technology for Advanced Ceramics (STAC5) and The 2nd International Conference on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI2), Yokohama, Japan　2011/06　Research paper, summary (international conference)

  328. 気相中に導入した酢酸亜鉛のプラズマ照射による酸化亜鉛形成

    竹中 弘祐, 奥村 祐介, 節原 裕一

    第58回応用物理学関係連合講演会,　2011/03　Research paper, summary (national, other academic conference)

  329. プラズマを用いた無機／有機積層構造の形成初期過程における界面の化学結合状態分析

    趙 研, 節原 裕一, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第58回応用物理学関係連合講演会,　2011/03　Research paper, summary (national, other academic conference)

  330. 埋込型低インダクタンスアンテナを用いた高周波プラズマ源の開発と大面積・低ダメージ反応性プロセスへの応用

    節原 裕一, 趙 研, 竹中 弘祐, 江部 明憲

    第58回応用物理学関係連合講演会,　2011/03　Research paper, summary (national, other academic conference)

  331. HXPES Analysis of Ar+O2 Plasma Exposed Zn/PET Interface for Inorganic Layer Formation on Organic Materials

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 4th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2011), Gifu, Japan　2011/03　Research paper, summary (international conference)

  332. Mist-Plasma CVD of ZnO Films with Zn(CH3COO)2 Solution

    Kosuke Takenaka, Yusuke Okumura, Yuichi Setsuhara

    The 4th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2011), Gifu, Japan　2011/03　Research paper, summary (international conference)

  333. Inveastigation of Plasma-Polymer Interactions with Combinatorial Method

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    3rd International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2011), Nagoya, Japan　2011/03　Research paper, summary (international conference)

  334. Effects of Irradiations with Ions and Photons in UV-VUV Regions on Nano-Surface of Polymers Exposed to Plasma

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    3rd International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2011), Nagoya, Japan　2011/03　Research paper, summary (international conference)

  335. Combinatorial Analyses of Plasma Materials Processing

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 12th International Workshop of Advanced Plasma Processing and Diagnostics, Fukuoka, Japan　2011/01　Research paper, summary (international conference)

  336. Combinatorial Analyses of Plasma Interactions with Organic Materials

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    第20回日本MRS学術シンポジウム, 横浜　2010/12　Research paper, summary (national, other academic conference)

  337. Effects of Photo-Irradiations in UV-VUV Regions on Chemical Bonding States of Soft Materials Exposed to Plasmas

    Ken Cho, Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    2010/12　Research paper, summary (national, other academic conference)

  338. 次世代デバイス創製に向けたプラズマー材料相互作用に関する光電子分光分析

    趙 研, 竹中 弘祐, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第12回関西表面技術フォーラム, 宇治　2010/12　Research paper, summary (national, other academic conference)

  339. コンビナトリアルプラズマプロセス解析装置の開発

    竹中 弘祐, 趙 研, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第12回関西表面技術フォーラム, 宇治　2010/12　Research paper, summary (national, other academic conference)

  340. Combinatorial Analysis of Plasma-Polymer Interactions for Soft Material Processing

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    32nd International symposium on Dry Process, Tokyo, Japan　2010/11　Research paper, summary (international conference)

  341. Effects of Photo-Irradiations in VUV and UV Regions on Chemical Bonding States of Polymers during Plasma Exposure

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    32nd International symposium on Dry Process, Tokyo, Japan　2010/11　Research paper, summary (international conference)

  342. Plasma Processing of Soft Materials for Development of Inorganic/Organic Hybrid Devices

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka

    2010 KISE Fall Meeting & International Symposium, Korea　2010/11　Research paper, summary (international conference)

  343. Effects of photon irradiation in UV and VUV regions during plasma processing of organic materials

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Visual-JW2010, Osaka, Japan　2010/11　Research paper, summary (international conference)

  344. Combinatorial analysis of plasma-polymer interactions for formation of inorganic-soft materials hybrid structure

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Visual-JW2010, Osaka, Japan　2010/11　Research paper, summary (international conference)

  345. Effects of Photoemissions in UV and VUV Regions on Nano-Surface Strucures of Soft Materials during Plasma Processes

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference (ICRP-7/SPP-28/GEC-63), Paris, France　2010/10　Research paper, summary (international conference)

  346. Investigation of Plasma Interactions with Soft Materials via Combinatorial Plasma-Process Analyzer for Plasma Nano Processes

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference (ICRP-7/SPP-28/GEC-63), Paris, France　2010/10　Research paper, summary (international conference)

  347. Nanoparticle film deposition via mist-included plasma source

    Kosuke Takenaka, Yusuke Okumura, Ken Cho, Yuichi Setsuhara

    7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference (ICRP-7/SPP-28/GEC-63), Paris, France　2010/10　Research paper, summary (international conference)

  348. Low-Damage Plasma Processing of Inorganic/Organic Hybrid Materials for Development of Flexible Devices

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Twelfth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2010/09　Research paper, summary (international conference)

  349. Combinatorial Analyses of Plasma-Polymer Interactions for Development of Advanced Nano-Process Technologies

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Twelfth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2010/09　Research paper, summary (international conference)

  350. Ｘ線光電子分光によるプラズマーソフト材料相互作用の解析 -UV-VUV領域の発光がナノ表面に及ぼす影響-

    趙 研, 節原 裕一, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第71回応用物理学会学術講演会, 長崎　2010/09　Research paper, summary (national, other academic conference)

  351. コンビナトリアルプラズマプロセス解析装置を用いたプラズマ・ポリマー相互作用の解析（IV）

    竹中 弘祐, 趙 研, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第71回応用物理学会学術講演会, 長崎　2010/09　Research paper, summary (national, other academic conference)

  352. Effects of Irradiations with Ions and Photoemissions in UV-VUV Regions on Chemical Bonding States of Polymers Exposed to Plasmas

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 11th International Workshop on Advanced Plasma Processing and Diagnostics, Jeju, Korea　2010/07　Research paper, summary (international conference)

  353. Plasma Processing of Soft Materials for Development of Flexible Electronics

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Asia Pacific Conference on Plasma Science and Technology (10th APCPST) and Symposium on Plasma Science for Materials (23th SPSM), Jeju, Korea　2010/07　Research paper, summary (international conference)

  354. Effects of Photo-Irradiation in UV and VUV Regions during Plasma Exposure to Polymers

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Asia Pacific Conference on Plasma Science and Technology (10th APCPST) and Symposium on Plasma Science for Materials (23th SPSM), Jeju, Korea　2010/07　Research paper, summary (international conference)

  355. Investigations of Plasma-Polymer Interactions via Combinatorial Plasma-Process Analyzer for Development of Advanced Nano Processes

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Asia Pacific Conference on Plasma Science and Technology (10th APCPST) and Symposium on Plasma Science for Materials (23th SPSM), Jeju, Korea　2010/07　Research paper, summary (international conference)

  356. Combinatorial plasma-process analysis for research and development of nano devices

    Y. Setsuhara, K. Cho, K. Takenaka, M. Shiratani, M. Sekine, M. Hori

    International Symposium on Technology Evolution for Silicon Nano-Electronics (ISTESNE), Tokyo,Japan　2010/06　Research paper, summary (international conference)

  357. Plasma-Enhanced Nanoparticle-Beam Deposition for Formation of High-Quality Nanocomposite Films

    Kosuke Takenaka, Yusuke Okumura, Yuki Nakajima, Hiroya Abe, Yuichi Setsuhara

    International Conference on Core Research and Engineering Science of Advanced Materials (Global COE Program) & Third International Conference on Nanospintronics Design and Realization, 3rd-ICNDR, Osaka,Japan　2010/06　Research paper, summary (international conference)

  358. 低温・低ダメージプラズマプロセスによる無機／有機ハイブリッド積層構造の形成

    竹中 弘祐, 趙 研, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第57回応用物理学関係連合講演会, 神奈川　2010/03　Research paper, summary (national, other academic conference)

  359. 低温・低ダメージプラズプロセスの開発に向けたプラズマ・ポリマー相互作用のナノ表面解析

    趙 研, 竹中 弘祐, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第57回応用物理学関係連合講演会, 神奈川　2010/03　Research paper, summary (national, other academic conference)

  360. コンビナトリアルプラズマプロセス解析装置を用いたプラズマ・ポリマー相互作用の解析（III）

    節原 裕一, 趙 研, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第57回応用物理学関係連合講演会, 神奈川　2010/03　Research paper, summary (national, other academic conference)

  361. XPS Analysis of Plasma-Polymer Interactions for Organic-Inorganic Hybrid Material

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 3rd International Conference on Plasma Nano Technology & Science(IC-PLANTS 2010), Nagoya, Japan　2010/03　Research paper, summary (international conference)

  362. Analysis of Plasma Interactions with Soft Materials Using Combinatorial Plasma Process Analyzer

    Kosuke Takenaka, Yuichi Setsuhara, Ken Cho, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 3rd International Conference on Plasma Nano Technology & Science(IC-PLANTS 2010), Nagoya, Japan　2010/03　Research paper, summary (international conference)

  363. Combinatorial Analysis of Plasma Interactions with Soft Materials

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Second International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2010), Nagoya, Japan　2010/03　Research paper, summary (international conference)

  364. Hard X-ray Photoelectron Spectroscopy for Analysis of Plasma-Exposed Polymer Surface

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Second International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2010), Nagoya, Japan　2010/03　Research paper, summary (international conference)

  365. 先進セラミックスナノコンポジット作製のためのプラズマ支援ナノ粒子ビーム堆積

    竹中 弘祐, 中嶋 悠揮, 奥村 祐介, 阿部 浩也, 節原 裕一

    第27回プラズマプロセシング研究会, 横浜　2010/02　Research paper, summary (national, other academic conference)

  366. 低温・低ダメージプラズマプロセスの開発に向けたＸ線光電子分光法を用いたプラズマ-ポリマー相互作用の解析

    趙 研, 竹中 弘祐, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝, 池永 英司, 中塚 理, 財満 鎭明

    第27回プラズマプロセシング研究会, 横浜　2010/02　Research paper, summary (national, other academic conference)

  367. 傾斜プラズマを用いたプラズマ－ポリマー相互作用に関するコンビナトリアル解析

    節原 裕一, 趙 研, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第27回プラズマプロセシング研究会, 横浜　2010/02　Research paper, summary (national, other academic conference)

  368. Development of Plasma-Enhanced Nanoparticles-Beam Deposition for Fabrication of Functional Nanocomposite Films

    Kosuke Takenaka, Yuki Nakajima, Yusuke Okumura, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    第19回日本MRS学術シンポジウム, 横浜　2009/12　Research paper, summary (national, other academic conference)

  369. Investigation of Plasma-Polymer Interactions Using Hard X-Ray Photoelectron Spectroscopy

    Ken Cho, Kota Fujiwara, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    2009/12　Research paper, summary (national, other academic conference)

  370. Analysis of Plasma-Polymer Interaction with Combinatorial Plasma-Process Analyzer for Plasma Nano Processing of Soft Materials

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    2009/12　Research paper, summary (national, other academic conference)

  371. Combinatorial analysis of plasma-materials interaction for advanced R＆D of future nano devices

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    31st International symposium on Dry Process, Busan, Korea　2009/09　Research paper, summary (international conference)

  372. Advanced Research and Development for Plasma Processing of Polymers with Combinatorial Plasma-Process Analyzer

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    Second International Conference on Microelectronics and Plasma Technology, Busan, Korea　2009/09　Research paper, summary (international conference)

  373. Development of Combinatorial Plasmaprocess Analyzer for Advanced R&D of Next Generation Nanodevice Fabrications

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The Third International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials (ICCCI 2009), Kurashiki, Japan　2009/09　Research paper, summary (international conference)

  374. Hard X-Ray Photoelectron Spectroscopy Analysis for Organic-Inorganic Hybrid Materials Formation

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

    The Third International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials (ICCCI 2009), Kurashiki, Japan　2009/09　Research paper, summary (international conference)

  375. Plasma-Enhanced Nanoparticles-Beam Deposition for High-Rate Formation of Nanocomposite Films

    Kosuke Takenaka, Yuki Nakajima, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    The Third International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials (ICCCI 2009), Kurashiki, Japan　2009/09　Research paper, summary (international conference)

  376. High-Rate Formation of Oxide-Ceramics Nanocomposite Using Plasma-Enhanced Nanoparticle-Beam Deposition Method

    Kosuke Takenaka, Yuki Nakajima, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    5th Handai Nanoscience and Nanotechnology International Symposium, Osaka, Japan　2009/09　Research paper, summary (international conference)

  377. コンビナトリアルプラズマプロセス解析装置を用いたプラズマ・ポリマー相互作用の解析(2)

    節原 裕一, 趙 研, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第70回応用物理学会学術講演会, 富山　2009/09　Research paper, summary (national, other academic conference)

  378. 機能性ナノコンポジットの形成のための気相分散ナノ粒子堆積法の開発

    竹中弘祐, 中嶋悠揮, 節原裕一

    第70回応用物理学会学術講演会, 富山　2009/09　Research paper, summary (national, other academic conference)

  379. Ion-damage Control in Argon/Oxygen Mixture Plasmas Sustained with Low-Inductance Antenna Units for Low-Damage Plasma Processing of Polymers

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, and Masaru Hori

    2009/06　Research paper, summary (national, other academic conference)

  380. コンビナトリアルプラズマプロセス解析装置を用いたプラズマ・ポリマー相互作用の解析

    趙 研, 竹中 弘祐, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第56回応用物理学関係連合講演会, 筑波　2009/03　Research paper, summary (national, other academic conference)

  381. コンビナトリアルプラズマプロセス解析装置の創製 -傾斜分布プラズマの特性-

    竹中 弘祐, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝

    第56回応用物理学関係連合講演会, 筑波　2009/03　Research paper, summary (national, other academic conference)

  382. プラズマナノプロセスの先進的研究開発に向けたコンビナトリアル・プラズマプロセス解析装置の開発

    節原 裕一, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会, 名古屋　2009/02　Research paper, summary (national, other academic conference)

  383. 低インダクタンスアンテナを用いて生成した低ダメージプラズマを照射したポリマーの表面分析

    竹中 弘祐, 趙 研, 節原 裕一, 白谷 正治, 関根 誠, 堀 勝, 池永 英司, 近藤 博基, 中塚 理, 財満 鎮明

    プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会, 名古屋　2009/02　Research paper, summary (national, other academic conference)

  384. Low Energetic Ion Bombardment on Polymer Surfaces

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hor

    The 8th International Workshop of Advanced Plasma Processing and Diagnostics, Gifu, Japan　2009/01　Research paper, summary (international conference)

  385. Optical Emission Analysis of Water Vapor Plasmas

    Shogo Kawajiri, Kosuke Takenaka, Yuichi Setsuhara

    The IUMRS International Conference in Asia 2008, Nagoya, Japan　2008/12　Research paper, summary (international conference)

  386. Modification and Deposition of Nanoparticles with ICPs Sustained in High Pressure

    Yuki Nakajima, Kosuke Takenaka, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    The IUMRS International Conference in Asia 2008, Nagoya, Japan　2008/12　Research paper, summary (international conference)

  387. Characterization of Reactive Plasmas Sustained with Low-Inductance Antenna Units for Low Damage Processing of Materials

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Akinori Ebe

    The IUMRS International Conference in Asia 2008, Nagoya, Japan　2008/12　Research paper, summary (international conference)

  388. Nano-Layer Chemical Bonding-State Analysis of Polymer Surface Exposed to Low-Damage Plasmas via Hard X-Ray Photoelectron Spectroscopy

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Hiroki Kondo, Osamu Nakatsuka, Eiji Ikenaga, Shigeaki Zaima

    The IUMRS International Conference in Asia 2008, Nagoya, Japan　2008/12　Research paper, summary (international conference)

  389. Simulation-Aided Designing of Density-Inclination Plasmas for Advanced Analysis of Plasma Processes via Combinatorial Method

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The IUMRS International Conference in Asia 2008, Nagoya, Japan　2008/12　Research paper, summary (international conference)

  390. Simulation Aided Designing of Density-Inclination Plasmas for Combinatorial Plasmas-Process Analyzer

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    30th International Symposium on Dry Process (DPS2008), Tokyo, Japan　2008/11　Research paper, summary (international conference)

  391. Development of Combinatorial Plasma Process Analyzer for Next-Generation Plasma Nano Technologies

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    30th International Symposium on Dry Process (DPS2008), Tokyo, Japan　2008/11　Research paper, summary (international conference)

  392. Low-Damage Processing of Polymers Using Argon/Oxygen Mixture Plasmas Sustained with Multiple Internal Antenna Units

    Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Jeon G. Han, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, and Shigeaki Zaima

    30th International Symposium on Dry Process (DPS2008), Tokyo, Japan　2008/11　Research paper, summary (international conference)

  393. Control Capabilities of Low-Inductance-antenna-Driven RF Plasmas for Low-Damage Processing of Polymers

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The Sixty First Annual Gaseous Electronics Conference (GEC), Dallas, Texas, USA　2008/10　Research paper, summary (international conference)

  394. Low-Damage Processing of Polymers with Low-inductance-Antenna-Driven Inductivity-Coupled RF Plasmas

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikeitaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

    9th Asia-Pacific Conference on Plasma Science and Technology (APCPST9) and 21st Symposium on Plasma Science for Materials (SPSM21), Huangshan, China　2008/10　Research paper, summary (international conference)

  395. Development of Density-Inclination Plasmasfor Analysis of Plasma Nano-Processes via Combinatorial Method

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, and Masaru Hori

    9th Asia-Pacific Conference on Plasma Science and Technology (APCPST9) and 21st Symposium on Plasma Science for Materials (SPSM21), Huangshan, China　2008/10　Research paper, summary (international conference)

  396. Spatio-Temporal Control of Low-Inductance-Antenna-Driven RF Plasmas for Advanced Ultra-Low-Damage Processes

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    Eleventh International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2008/09　Research paper, summary (international conference)

  397. Low-damage Plasma Processing of Polymers for High-quality Organic-inorganic Hybrid Device Fabrications with Low-potential Plasmas Driven by Low-inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, and Jeon G. Han

    The 14th International Congress on Plasma Physics (ICPP2008), Fukuoka International Congress Center, Fukuoka, Japan　2008/09　Research paper, summary (international conference)

  398. Control of Ion energy Distributions in Inductively-coupled Plasmas Driven by Low-inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, and Akinori Ebe

    The 14th International Congress on Plasma Physics (ICPP2008), Fukuoka International Congress Center, Fukuoka, Japan　2008/09　Research paper, summary (international conference)

  399. Development of Combinatorial Plasma-process Analyzer for Next-generation Plasma-nano-fabrications

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Kazunori Koga, Keigo Takeda, Makoto Sekine, Masaru Hori

    The 14th International Congress on Plasma Physics (ICPP2008), Fukuoka International Congress Center, Fukuoka, Japan　2008/09　Research paper, summary (international conference)

  400. 硬X線光電子分光法によるポリマーのプラズマ照射損傷に関するナノ表面分析

    趙 研, 竹中 弘祐, 節原 裕一, 近藤 博基, 中塚 理, 池永 英司, 財満 鎮明

    第69回応用物理学会学術講演会, 愛知　2008/09　Research paper, summary (national, other academic conference)

  401. マルチ低インダクタンスアンテナで生成した誘導結合プラズマによるポリマーの低ダメージプロセス

    竹中 弘祐, 趙 研, 節原 裕一, 江部 明憲, Han Jeon

    第69回応用物理学会学術講演会, 愛知　2008/09　Research paper, summary (national, other academic conference)

  402. コンビナトリアルプラズマプロセス解析装置の創製 -傾斜分布プラズマの生成と制御-

    節原 裕一, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第69回応用物理学会学術講演会, 愛知　2008/09　Research paper, summary (national, other academic conference)

  403. Nano-Surface Analysis of Polymers Exposed to Low-Damage Plasmas Inductively Sustained with Low-Inductance Antenna Modules

    Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Jeon G. Han

    The 7th Korea-Japan Workshop on Plasma Technology, Sungkyunkwan University, Korea　2008/07　Research paper, summary (international conference)

  404. Nano-Surface Processing of Polymer with Low-Damage Reactive high-Density Plasma for Fexibele Electronics

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe, Jeon G. Han

    The 7th Korea-Japan Workshop on Plasma Technology, Sungkyunkwan University, Korea　2008/07　Research paper, summary (international conference)

  405. コンビナトリアルプラズマプロセス解析装置の創製 -傾斜分布プラズマの設計と制御-

    節原 裕一, 長尾 勝久, 竹中 弘祐, 白谷 正治, 関根 誠, 堀 勝

    第55回応用物理学関係連合講演会, 日本大学理工学部 船橋キャンパス　2008/03　Research paper, summary (national, other academic conference)

  406. マルチ内部アンテナ型I C P 生成におけるアンテナ近接配置の効果

    竹中 弘祐, 節原 裕一, 江部 明憲

    第55回応用物理学関係連合講演会, 日本大学理工学部 船橋キャンパス　2008/03　Research paper, summary (national, other academic conference)

  407. Spatio-Temporal Control of Inductively-Coupled RF Plasmas Sustained with Multiple Low-Inductance Antenna Modules

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    2008/01　Research paper, summary (national, other academic conference)

  408. Plasma Surface Modification of Polymers with Argon/Oxygen Mixture Discharge Sustained with Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Jeon G. Han

    2008/01　Research paper, summary (national, other academic conference)

  409. Dependence of electron density in main discharge on main discharge power in H-assisted plasma CVD

    Jun Umetsu, Kazuhiko Inoue, Kazunori Koga, Masaharu Shiratani, Kosuke Takenaka

    2007/12　Research paper, summary (national, other academic conference)

  410. Modification of Oxide Ceramics Nano-particles Using Inductively-Coupled RF Plasmas

    Kosuke Takenaka, Hiroaki Nakayama, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    第18回日本MRS学術シンポジウム, 日本大学理工学部駿河台キャンパス　2007/12　Research paper, summary (national, other academic conference)

  411. Effect of Antenna Configurations on Discharge Characteristics of Inductively Coupled Plasmas Driven by Low-Inductance Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    2007/12　Research paper, summary (national, other academic conference)

  412. Control Capabilities of Low-Inductance-Antenna-Driven RF Plasmas for Low-Temperature Processes

    Yuichi Setsuhara, Kosuke Takenaka, Kazuaki Nishisaka, Akinori Ebe

    2007/12　Research paper, summary (national, other academic conference)

  413. Deposition of Carbon-Related Films Using Inductively-Coupled Plasmas Sustained with Multiple Low-Inductance Internal Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    The Second International Symposium on Smart Processing Technology, Osaka, Japan　2007/11　Research paper, summary (international conference)

  414. Controllability of Plasmas Using Multiple Low-Inductance-Antenna Modules for Ultra-Large-Area Processing

    Yuichi Setsuhara, Kosuke Takenaka, Kazuaki Nishisaka, Akinori Ebe

    The Second International Symposium on Smart Processing Technology, Osaka, Japan　2007/11　Research paper, summary (international conference)

  415. Control Capabilities of RF Plasmas Sustained with Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Kazuaki Nishisaka, Akinori Ebe

    2007 International Symposium on Dry Process, Tokyo International Exchange Center, Tokyo, Japan　2007/11　Research paper, summary (international conference)

  416. Surface Treatment of Polymers Using Argon/Oxygen Mixture Plasmas Sustained with Multiple Internal Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Yong-Mo Kim, Jeon G. Han

    2007 International Symposium on Dry Process, Tokyo International Exchange Center, Tokyo, Japan　2007/11　Research paper, summary (international conference)

  417. Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal Antenna Modules for Flat Panel Display Processing

    Yuichi Setsuhara, Daisuke Tsukiyama, Kosuke Takenaka, Kazuaki Nishisaka, Akinori Ebe

    The 6th Pacific Rim International Conference on Advanced Materials and Processing, Jeju Island, Korea　Vol. 561-565　No. PART 2　p. 1237-1240　2007/11　Research paper, summary (international conference)

  418. Mechanical Milling of Nanoparticles under Electric Discharge

    J.Noma, H.Abe, M.Naito, K.Takenaka, Y. Setsuhara

    6th Asian-European Int. Conf. Plasma Surface Eng. (AEPSE 2007), Nagasaki,Japan　2007/09　Research paper, summary (international conference)

  419. Uniformity of 500-mm Cylindrical Plasma Source Sustained with Multiple Low-inductance Antenna Units

    Kosuke Takenaka, Daisuke Tsukiyama, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    6th Asian-European Int. Conf. Plasma Surface Eng. (AEPSE 2007), Nagasaki,Japan　2007/09　Research paper, summary (international conference)

  420. Effects of Antenna Shapes on Discharge Profiles of Internal-antenna-driven Inductively-coupled Plasmas

    Kosuke Takenaka, Takashi Sera, Yuichi Setsuhara, Akinori Ebe

    6th Asian-European Int. Conf. Plasma Surface Eng. (AEPSE 2007), Nagasaki,Japan　2007/09　Research paper, summary (international conference)

  421. Modification of Yttrium-iron-oxide Nanoparticle Films Using Inductively-coupled Plasma Annealing

    Kosuke Takenaka, Hiroaki Nakayama, Yuichi Setsuhara, Hiroya Abe, Kiyoshi Nogi

    6th Asian-European Int. Conf. Plasma Surface Eng. (AEPSE 2007), Nagasaki,Japan　2007/09　Research paper, summary (international conference)

  422. Characterization of Mass-separated Ion Energy Distributions in Rf Plasmas Driven by Multiple Internal-antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Yong-Mo Kim, Jeon G. Han

    6th Asian-European Int. Conf. Plasma Surface Eng. (AEPSE 2007), Nagasaki,Japan　2007/09　Research paper, summary (international conference)

  423. マルチ内部アンテナで生成したアルゴン酸素混合プラズマによるポリマーの表面改質

    節原 裕一, 竹中 弘祐, 江部 明憲, 西坂 和晃, キム ヨンモ, ハン ジェオン

    第68回応用物理学会学術講演会, 北海道工業大学　2007/09　Research paper, summary (national, other academic conference)

  424. マルチ内部アンテナ型誘導結合放電で生成したアルゴン酸素混合プラズマの特性

    竹中 弘祐, 節原 裕一, 江部 明憲, 西坂 和晃, キム ヨンモ, ハン ジェオン

    第68回応用物理学会学術講演会, 北海道工業大学　2007/09　Research paper, summary (national, other academic conference)

  425. Meters-Scale Ultra-Large-Area Plasma-Source Designs Employing Multiple Low-Inductance -Antenna Modules

    Yuichi Setsuhara, Daisuke Tsukiyama, Kosuke Takenaka, Akinori Ebe

    The 18th International Symposium on Plasma Chemistry, Kyoto, Japan　2007/08　Research paper, summary (international conference)

  426. Characterization of Argon/Oxygen Mixture Plasmas Driven by Multiple Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Yong-Mo Kim, Jeon G. Han

    The 18th International Symposium on Plasma Chemistry, Kyoto, Japan　2007/08　Research paper, summary (international conference)

  427. Control Capabilities of Large-Area Plasmas Sustained with Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Daisuke Tsukiyama, Kazuaki Nishisaka, Akinori Ebe

    2007/06　Research paper, summary (national, other academic conference)

  428. Characterization of Argon/Oxygen Mixture Plasmas Sustained with Multiple Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Yong-Mo Kim, Jeon G. Han

    2007/06　Research paper, summary (national, other academic conference)

  429. Modification of Yttrium-Iron-Oxide Nanoparticle Films Using Inductively-Coupled RF Plasmas

    Kosuke Takenaka, Yuichi Setsuhara, Hiroaki Nakayama, Hiroya Abe, Kiyoshi Nogi

    第20回プラズマ材料科学シンポジウム(SPSM-20), 名古屋大学 野依記念学術交流館　2007/06　Research paper, summary (national, other academic conference)

  430. Discharge Profiles of Internal-Antenna-Driven Inductive-Coupled Plasmas - Investigations on Plasma Profiles in the Vicinity of RF Antenna -

    Kosuke Takenaka, Yuichi Setsuhara, Akinori Ebe, Kazuaki Nishisaka

    2007/06　Research paper, summary (national, other academic conference)

  431. マルチ内部アンテナを用いて生成した誘導結合プラズマのイオンエネルギー分布

    節原 裕一, 竹中 弘祐, 江部 明憲, 西坂 和晃

    第54回応用物理学関係連合講演会, 青山学院大学 相模原キャンパス　2007/03　Research paper, summary (national, other academic conference)

  432. マルチ内部アンテナを用いてアルゴン酸素混合気体中で生成した誘導結合プラズマの特性

    竹中 弘祐, 節原 裕一, 江部 明憲, Kim Yong-Mo, Han Jeon G.

    第54回応用物理学関係連合講演会, 青山学院大学 相模原キャンパス　2007/03　Research paper, summary (national, other academic conference)

  433. 内部アンテナを用いて生成した誘導結合プラズマの構造

    竹中 弘祐, 世良 崇, 節原 裕一, 江部 明憲

    第54回応用物理学関係連合講演会, 青山学院大学 相模原キャンパス　2007/03　Research paper, summary (national, other academic conference)

  434. 高気圧誘導結合プラズマを用いたナノ粒子膜の改質

    節原 裕一, 中山 浩明, 竹中 弘祐, 阿部 浩也, 野城 清

    第17回日本MRS学術シンポジウム, 日本大学駿河台校舎　2006/12　Research paper, summary (national, other academic conference)

  435. マルチ低位インダクタンスアンテナを用いた次世代フラットパネルディスプレー製造に向けた大面積低ダメージプラズマ源

    竹中 弘祐, 節原 裕一, 西坂 和晃, 江部 明憲

    第17回日本MRS学術シンポジウム, 日本大学駿河台校舎　2006/12　Research paper, summary (national, other academic conference)

  436. 低インダクタンス内部アンテナを用いて生成したアルゴンプラズマの電位形成

    竹中 弘祐, 節原 裕一, 世良 崇, 築山 大輔, 西坂 和晃, 江部 明憲

    第17回日本MRS学術シンポジウム, 日本大学駿河台校舎　2006/12　Research paper, summary (national, other academic conference)

  437. Ion Energy Distributions and Large-Area Deposition of Thin Films Employing ICP Plasmas with Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Takashi Sera, Daisuke Tsukiyama, Akinori Ebe

    The 4th International Workshop on Advanced Plasma Processing and Diagnostics & Thin Film Technology for Electronic Materials, Green Hotel Sangane, Aichi, Japan　2006/12　Research paper, summary (international conference)

  438. Properties of Inductively-Coupled Plasmas Sustained with Low-Inductance Antenna Units - Effects of Antenna Size -

    Kosuke Takenaka, Takashi Sera, Daisuke Tsukiyama, Yuichi Setsuhara, Akinori Ebe

    The 4th International Workshop on Advanced Plasma Processing and Diagnostics & Thin Film Technology for Electronic Materials, Green Hotel Sangane, Aichi, Japan　2006/12　Research paper, summary (international conference)

  439. Development of High-Density RF Plasma Sources Using Multiple Low-Inductance Antenna Units for Materials Processing

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    Handai Nanoscience and Nanotechnology International Symposium, Nakanoshima Center, Osaka University　2006/11　Research paper, summary (international conference)

  440. Ultra-Large-Area Plasma Source for Meters-Scale Flat-Panel-Display Processing with Profile Control by Independently-Operated Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Akinori Ebe, Kazuaki Nishisaka, Kosuke Takenaka

    Tenth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2006/09　Research paper, summary (international conference)

  441. Duplex Processing with Mechanical Milling and Plasma Irradiation for Surface Modification of Nanoparticles

    Hiroya Abe, Kosuke Takenaka, Akira Kondo, Yuichi Setsuhara, Makio Naito

    Tenth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2006/09　Research paper, summary (international conference)

  442. Modifications of Nano-Sized Oxide Particles by High-Density RF Plasmas

    Hiroaki Nakayama, Yoichi Sakawa, Kosuke Takenaka, Hiroya Abe, Kiyoshi Nogi, Yuichi Setsuhara

    Tenth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2006/09　Research paper, summary (international conference)

  443. Discharge Structures of Inductively-Coupled Plasmas Sustained with Low-Inductance Internal Antennas

    Takashi Sera, Akinori Ebe, Kosuke Takenaka, Yuichi Setsuhara

    Tenth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2006/09　Research paper, summary (international conference)

  444. Properties of Inductively-Coupled Plasmas Driven by Multiple Low-Inductance Internal-Antenna Units

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe, Shinya Sugiura, Kazuo Takahashi, Koichi Ono

    Tenth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany　2006/09　Research paper, summary (international conference)

  445. Properties of Inductively-Coupled RF Plasmas Sustained with Internal Antenna for Deposition of Carbon-Related Films

    Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

    The Second International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials (ICCCI2006), Kurashiki, Japan　2006/09　Research paper, summary (international conference)

  446. Modifications of Oxide Nanoparticles with High-density RF Plasmas

    Yuichi Setsuhara, Hiroaki Nakayama, Kosuke Takenaka, Hiroya Abe, Kiyoshi Nogi

    The Second International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials (ICCCI2006), Kurashiki, Japan　2006/09　Research paper, summary (international conference)

  447. 内部アンテナ型誘導結合プラズマ生成におけるアンテナ周辺構造とプラズマ分布の相関

    世良 崇, 竹中 弘祐, 節原 裕一, 江部 明憲

    第67回応用物理学会学術講演会, 立命館大学びわこ・くさつキャンパス　2006/08　Research paper, summary (national, other academic conference)

  448. 高気圧誘導結合プラズマを用いた気相中でのナノ粒子改質(II)

    中山 浩明, 竹中 弘祐, 節原 裕一, 阿部 浩也, 野城 清

    第67回応用物理学会学術講演会, 立命館大学びわこ・くさつキャンパス　2006/08　Research paper, summary (national, other academic conference)

  449. 低インダクタンス型マルチ内部アンテナを用いた誘導結合プラズマによるa-C:H膜堆積

    竹中 弘祐, 節原 裕一, 江部 明憲, 西坂 和晃

    第67回応用物理学会学術講演会, 立命館大学びわこ・くさつキャンパス　2006/08　Research paper, summary (national, other academic conference)

  450. Surface Modification of Nanopowder by Milling under Electric Discharge

    H.Abe, A.Kondo, K.Takenaka, Y.Setsuhara, M.Naito

    CIMTEC 2006, Sicily, Italy　2006/06　Research paper, summary (international conference)

  451. Development of Internal-Antenna-Driven RF Plasma Sources for Ultra-Large Area Deposition of Carbon-Related Films

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    International Conference on Modern Materials & Technologies 2006, Sicily, Italy　2006/06　Research paper, summary (international conference)

  452. 低インダクタンス型内部アンテナを用いた誘導結合プラズマの特性

    世良 崇, 竹中 弘祐, 節原 裕一

    第５３回応用物理学関係連合講演会, 武蔵工業大学　2006/03　Research paper, summary (national, other academic conference)

  453. 高気圧誘導結合プラズマを用いた気相中でのナノ粒子改質

    中山 浩明, 竹中 弘祐, 節原 裕一, 阿部 浩也, 野城 清

    第５３回応用物理学関係連合講演会, 武蔵工業大学　2006/03　Research paper, summary (national, other academic conference)

  454. マルチ低インダクタンスアンテナによるメートル級大面積プラズマの生成と制御

    節原 裕一, 竹中 弘祐, 江部 明憲, 西坂 和晃, 高橋 英二, 林 司, 緒方 潔

    第５３回応用物理学関係連合講演会, 武蔵工業大学　2006/03　Research paper, summary (national, other academic conference)

  455. 低インダクタンス型マルチ内部アンテナを用いた誘導結合高周波プラズマ中のラジカル計測

    竹中 弘祐, 節原 裕一, 江部 明憲, 西坂 和晃

    第５３回応用物理学関係連合講演会, 武蔵工業大学　2006/03　Research paper, summary (national, other academic conference)

  456. Properties of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Modules

    K. Takenaka, Y. Setsuhara, A. Ebe, T. Shoji

    Joint Conference of the 6th International Conference on Reactive Plasmas and the 24rd Symposium on Plasma Processing, Hotel Taikanso, Matsushima/Sendai, Japan　2006/01　Research paper, summary (international conference)

  457. Development of Meters-Scale Large-Area RF Plasma Sources with Control Capabilities of Power Deposition Profiles

    Y. Setsuhara, K. Takenaka, A. Ebe, T. Shoji

    Joint Conference of the 6th International Conference on Reactive Plasmas and the 23rd Symposium on Plasma Processing, Hotel Taikanso, Matsushima/Sendai, Japan　2006/01　Research paper, summary (international conference)

  458. NH3プラズマ照射によるTiO2ナノ粒子の表面改質

    阿部 浩也, 佐藤 和好, 内藤 牧男, 竹中 弘祐, 節原 裕一

    第１６回日本MRS学術シンポジウム, 日本大学駿河台校舎　2005/12　Research paper, summary (national, other academic conference)

  459. 電気泳動法によるセラミックス膜堆積におけるナノ粒子分散液中の電位分布とイオン挙動

    佐野 友彦, 竹中 弘祐, 節原 裕一, 佐藤 和好, 阿部 浩也, 野城 清

    第１６回日本MRS学術シンポジウム, 日本大学駿河台校舎　2005/12　Research paper, summary (national, other academic conference)

  460. 統合制御型マルチ内部アンテナモジュールを用いたメートル級大面積誘導結合プラズマ源の開発

    節原 裕一, 竹中 弘祐, 江部 明憲, 西坂 和晃

    第１６回日本MRS学術シンポジウム, 日本大学駿河台校舎　2005/12　Research paper, summary (national, other academic conference)

  461. 低インダクタンス型マルチ内部アンテナを用いた誘導結合高周波プラズマの特性

    竹中 弘祐, 節原 裕一, 江部 明憲, 西坂 和晃, 杉浦 慎哉, 高橋 和生, 斧 高一

    第１６回日本MRS学術シンポジウム, 日本大学駿河台校舎　2005/12　Research paper, summary (national, other academic conference)

  462. 銅のプラズマ異方性CVDにおけるイオン照射効果に関する検討

    白谷 正治, 鍜治 昂男, 古閑 一憲, 竹中 弘祐, 渡辺 征夫

    第５８回電気関係学会九州支部連合大会, 福岡工業大学　2005/09　Research paper, summary (national, other academic conference)

  463. 銅のプラズマ異方性CVD における成膜速度の基板温度依存性

    鍜治 昂男, 古閑 一憲, 白谷 正治, 竹中 弘祐, 久保田 智広, 寒川 誠二

    第６６回応用物理学会学術講演会, 徳島大学常三島キャンパス　2005/09　Research paper, summary (national, other academic conference)

  464. 低メートル級大面積プラズマ制御のためのマルチ内部アンテナモジュールの開発(II)

    節原 裕一, 竹中 弘祐, 江部 明憲, 西坂 和晃

    第６６回応用物理学会学術講演会, 徳島大学常三島キャンパス　2005/09　Research paper, summary (national, other academic conference)

  465. 低インダクタンス型マルチ内部アンテナを用いたRFプラズマ源の特性

    竹中 弘祐, 節原 裕一, 江部 明憲, 西坂 和晃, 杉浦 慎哉, 高橋 和生, 斧 高一

    第６６回応用物理学会学術講演会, 徳島大学常三島キャンパス　2005/09　Research paper, summary (national, other academic conference)

  466. Effects of spruttering due to ion irradiation on plasma anisotropic CVD of Cu

    Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe

    Novel Materials Processing by Advanced Electromagnetic Energy Sources　p. 75-78　2005

    Publisher: Elsevier

  467. Deposition of Ru in trench by using plasma anisotropic chemical vapor doposition

    SHIRATANI Masaharu, KAJI Takao, TAKENAKA Kosuke

    Kyushu University-Venture Business Laboratory annual report　Vol. 2004　p. 115-116　2004

    Publisher: Kyushu University

  468. Deposition of Copper Thin Films for Ultra Large Scale Integration by Plasma Anisotropic CVD

    TAKENAKA Kosuke

    Kyushu University-Venture Business Laboratory annual report　Vol. 2002　p. 132-133　2002

    Publisher: Kyushu University

  469. Study on Initial Deposition of Copper Deposited by H Asissted Plasma CVD Using Cu(EDMDD)_2

    SHIRATANI Masaharu, TAKENAKA Kosuke, ONISHI Masao[et al.]

    Kyushu University-Venture Business Laboratory annual report　Vol. 2002　p. 19-22　2002

    Publisher: Kyushu University

  470. Deposition of High Purity Copper Thin Films by H Asissted Plasma CVD Using Cu(EDMDD)_2

    SHIRATANI Masaharu, TAKENAKA Kousuke, JIN H.J.

    Kyushu University-Venture Business Laboratory annual report　Vol. 2001　p. 19-24　2001

    Publisher: Kyushu University

  471. H assisted control of quality and conformality in Cu film deposition using plasma CVD method

    Masaharu Shiratani, Hong Jie Jin, Kosuke Takenaka, Kazunori Koga, Toshio Kinoshita, Yukio Watanabe

    Advanced Metallization Conference (AMC)　p. 271-278　2000/12/01

  472. Deposition of Cu Seed Layer for Electroplating using Plasma CVD Method

    JIN Hong Jie, TAKENAKA Kousuke, KOGA Kazunori

    Kyushu University-Venture Business Laboratory annual report　Vol. 2000　p. 95-99　2000

    Publisher: Kyushu University

  473. Deposition Mechanism of Cu Films by Plasma CVD Using Cu(hfac)_2

    SHIRATANI Masaharu, JIN Hong Jie, TAKENAKA Kosuke

    Kyushu University-Venture Business Laboratory annual report　Vol. 2000　p. 19-23　2000

    Publisher: Kyushu University

  474. Deposition of Copper Thin Films by Plasma CVD Using Cu(EDMDD)_2

    TAKENAKA Kosuke

    Kyushu University-Venture Business Laboratory annual report　Vol. 2000　p. 143-144　2000

    Publisher: Kyushu University

Publications 2

  1. Plasma Medical Science

    Yuichi Setsuhara, Giichiro Uchida, Kosuke Takenaka

    Elsevier　2018/07　Textbook, survey, introduction

    ISBN: 9780128150047

  2. Designing of Interfacial Structures in Advanced Materials and their Joints ed. By M. Naka

    Y. Setsuhara, K. Takenaka, A. Ebe, K. Nishisaka

    Trans Tech Publications　2007/03　Scholarly book

    ISBN: 9783908451334

Presentations 84

  1. Plasma-catalyst-zeolite system for high efficiency methanation

    Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

    25th Workshop on Fine Particle Plasmas (WFPP25) and 45th Workshop on Plasma Frontiers　2025/01/16

  2. プラズマ支援ミストCVDを用いた機能性薄膜形成

    竹中 弘祐、都甲 将、節原 裕一

    2024年度 第 2 回表面改質技術研究委員会　2024/10/31

  3. Formation of thin film transistors using amorphous oxide semiconductors deposited by plasma-assisted reactive processes

    Kosuke Takenaka, Akinori Ebe, Yuichi Setsuhara

    The Fourteenth International Conference on the Science and Technology for Advanced Ceramics (STAC14)　2024/09/10

  4. 大気圧プラズマジェットによる異種基板の直接接合

    竹中 弘祐、内田 儀一郎、節原 裕一

    2024年第85回応用物理学会秋季学術講演会　2024/08

  5. Experimental study on the effect of plasma-catalyst interaction on methanation reaction

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, and Y. Setsuhara

    97th IUVSTA Workshop on plasma-assisted conversion of gases for a sustainable future　2023/12

  6. Plasma-assisted Mist CVD for Formation of 3D Nanostructured Zinc Oxide Thin Films

    Kosuke Takenaka, Susumu Toko, Yuichi Setsuhara

    Joint Conference of Global Plasma Forum and 24th Workshop on Fine Particle Plasmas (WFPP24)　2023/12

  7. Reactivity-Control Plasma Processes for Low-Temperature Formation of High-Quality Oxide Thin-Film Transistors

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS，(THERMEC‘2023)　2023/07

  8. プラズマ触媒作用を用いたCO2メタネーション

    都甲 将, 奥村 賢直, 鎌滝 晋礼, 竹中 弘祐, 古閑 一憲, 白谷 正治, 節原 裕一

    2022年度第3回表面改質技術研究委員会　2023/02

  9. Low-temperature formation of functional oxide materials with plasma-assisted reactive processes

    K. Takenaka, S. Toko, Y. Setsuhara

    第32回日本MRS年次大会 (MRS-J2021)　2022/12

  10. 大気圧非平衡高周波プラズマジェットの開発と有機ー金属異種材料接合への応用

    節原 裕一、町田 陸朗、坊野 哲也、陣田 尭哉、都甲 将、竹中 弘祐、内田 儀一郎

    一般社団法人 溶接学会 第１３９回マイクロ接合研究委員会　2022/09

  11. Reactive Plasma Processes for Low-Temperature Formation of High-Mobility IGZO Thin-Film Transistors

    Yuichi Setsuhara, Kosuke Takenaka, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe

    Annual Meeting, Center For Plasma and Thin Film Tech　2022/06

  12. 大気圧プラズマの可視化研究 ー医療応用、Liイオン電池応用に向けて

    内田 儀一郎, 竹中 弘祐, 節原 裕一

    日本学術振興会プラズマ材料科学第153委員会第155回研究会　2022/04

  13. 反応性プラズマプロセスによる酸化物半導体薄膜形成

    竹中 弘祐, 都甲 将, 節原 裕一

    2021 (令和3)年度第3回表面改質技術研究委員会　2022/02

  14. The role of plasma and catalyst in methanation of CO2 with plasma catalysis

    S. Toko, M. Ideguchi, T. Haseagawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    5th Asia Pacific Conf. on Plasma Physics (AAPPS-DPP2021)　2021/09

  15. Plasma-assisted reactive processes for low-temperature formation of functional materials

    Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    5th Asia Pacific Conference on Plasma Physics (AAPPS-DPP2021)　2021/09

  16. 低圧から大気圧にわたる非平衡プラズマプロセス-高移動度半導体薄膜形成から医療、有機／金属異材接合まで-

    節原 裕一、竹中 弘祐、内田 儀一郎

    2020 (令和2)年度第3回表面改質技術研究委員会　2021/02

  17. Paradigms explored with non-equilibrium plasmas -from low-pressure to atmospheric-pressure plasma processing of materials -

    Yuichi Setsuhara, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    MRS-Taiwan Annual Meeting 2020　2020/11

  18. Low-temperature fabrication of high-mobility InGaZnO thin-film transistors using plasma-assisted reactive processes

    Kosuke Takenaka, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    4th Asia Pacific Conference on Plasma Physics (AAPPS-DPP2020)　2020/10

  19. 機能性酸化物・窒化物薄膜の長尺低温形成に向けた反応性プラズマプロセスの開発

    節原 裕一、竹中 弘祐、平山 裕之、内田 儀一郎、江部 明憲

    スパッタリングおよびプラズマプロセス技術部会(SP部会)第164回定例研究会　2020/09

  20. Plasma Surface Modification towards Application of Polymers to Biomaterials

    Kosuke Takenaka, Yuichi Setsuhara

    Materials Researchmeeting 2019　2019/12

  21. Low-temperature Formation of High-Mobility InGaZnOx Thin-Film Transistors by Plasma-Enhanced Reactive Processes

    Yuichi Setsuhara, Kosuke Takenaka, Masashi Endo, Giichiro Uchida

    7th Global Nanotechnology Congress and Expo　2019/12

  22. Development of a direct bonding process by using high-frequency Ar plasma jet

    Giichiro Uchida, Rikuro Machida, Kosuke Takenaka, and Yuichi Setsuhara

    Materials Researchmeeting 2019　2019/12

  23. Low-temperature Formation of High-Mobility In GaZnOx Thin-Film Transistors by Plasma-Enhanced Reactive Processes

    Yuichi Setsuhara, Kosuke Takenaka, Masashi Endo, Giichiro Uchida

    7th Global Nanotechnology Congress and Expo　2019/12

  24. プラズマジェット照射によるアミノ酸の酸化・分解とがん細胞殺傷への応用

    内田 儀一郎, 池田 純一郎, 竹中 弘祐, 節原 裕一

    第29回日本MRS年次大会　2019/11

  25. Functional thin film deposition using plasma-assisted reactive process

    Kosuke Takenaka, Hiroyuki Hirayama, Yuichi Setsuhara, Keisuke Ide, Toshio Kamiya

    International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development Satellite (iLIM-s)　2019/11

  26. Studies on selective production of RONS and chemical change of amino acids in plasma-treated solutions

    Giichiro Uchida, Kosuke Takenaka, Jun-ichiro Ikeda, Yuichi Setsuhara

    XXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10)　2019/07

  27. Low-temperature formation of high-mobility InGaZnOx thin film transistor by ICP-enhanced reactive plasma processes Yuichi Setsuhara

    Yuichi Setsuhara, Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Giichiro Uchida, Akinori Ebe

    The 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)　2019/06

  28. ICP-Enhanced Reactive Plasma Processes for Low-Temperature Formation of High-Mobility Oxide Semiconductor TFT

    Yuichi Setsuhara, Masashi Endo, Tomoki Yoshitani, Kosuke Takenaka, Giichiro Uchida, and Akinori Ebe

    The 5th Asian Workshop on Applied Plasma Science and Engineering 2019 (APSE2019)　2019/01

  29. Formation of Functional Thin Films at Low Temperature using Plasma-assisted Reactive Processes

    Kosuke Takenaka, Masashi Endo, Tomoki Yoshitani, Hiroyuki Hirayama, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara

    第28回日本MRS年次大会　2018/12

  30. Control of RONS in plasma-activated solutions and their application to cancer cell killing

    G. Uchida, T. Suzuki, J. Ikeda, K. Takenaka, Y.Setsuhara

    28th Annual meeting of MRS-Japan 2018　2018/12

  31. Control of ROS and RNS productions in liquid by using a nonthermal high-frequency plasma jet

    Giichiro Uchida, Kosuke Takenaka, Yuichi Setsuhara

    2nd Asia-Pacific Conference on Plasma Physics　2018/11

  32. プラズマアシスト反応性プロセスを用いた低温での高移動度薄膜トランジスタの作製

    竹中 弘祐、節原 裕一、内田 儀一郎、井手 啓介、神谷 利夫

    第2回酸化物半導体討論会/学際・国際的高度人材育成ライフイノベーションマテリアル創製共同研究プロジェクト分科会/第76回フロンティア材料研究所講演会　2018/10

  33. 反応性プラズマプロセスを用いた機能性薄膜合成

    竹中 弘祐、内田 儀一郎、節原 裕一

    日本溶接協会平成30年度第2回(通算88回) 表面改質技術研究委員会　2018/10

  34. 大気圧プラズマプロセスの最前線-異材接合から医療応用まで-

    内田 儀一郎、竹中 弘祐、節原 裕一

    第22回電子デバイス実装研究委員会　2018/07

  35. 大気圧プラズマプロセスの最前線 -異材接合から医療応用まで-

    内田 儀一郎, 竹中 弘祐, 節原 裕一

    第22回電子デバイス実装研究委員会　2018/07

  36. Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor by Advanced Reactive Sputter Deposition Enhanced with ICP

    Yuichi Setsuhara、Masashi Endo、Kosuke Takenaka、Giichiro Uchida

    International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC’2018)　2018/07

  37. プラズマ支援反応性プロセスを用いた高移動度IGZO薄膜の低温形成

    節原 裕一, 遠藤 雅, 竹中 弘祐, 内田 儀一郎, 江部 明憲

    第65回応用物理学会春季学術講演会　2018/03

  38. Plasma-Enhanced Reactive Processes for Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor and Functional Films for Solar Cells

    Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    5th Japan-Korea Joint Symposium on Advanced Solar Cells 2018 and 2nd International Symposium on Energy Research and Application　2018/02

  39. 機能性材料創成に向けたプラズマプロセス

    竹中 弘祐

    第２６回 プラズマ医療 サイエンスの扉/第２６回 サイエンスカフェ－プラズマ医療－　2017/12

  40. Development of a 60 MHz non-thermal plasma jet and selective production of reactive oxygen and nitrogen species in the plasma treated water

    G. Uchida, Y. Mino, T. Suzuki, K. Takenaka, Y. Setsuhara

    27th Annual Meeting of MRS-Japan 2017 International Symposium "Frontier of nano-materials based on advanced plasma technologies"　2017/12

  41. Advanced Plasma Processing for Formation of Functional Thin Films

    K. Takenaka, G. Uchida, K. Ide, T. Kamiya, Y. Setsuhara

    Int. Conf. on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd Int. Symp. on Creation of Life Innovation Materials for Interdisciplinaryand Int. Researcher Development (iLIM-2)　2017/09

  42. Advanced ICP-Enhanced Plasma Systems for Meters-Scale Large-Area Processes

    Akinori Ebe, Kazuaki Nishisaka, Kazuto Okazaki, Atsushi Osawa, Kosuke Takenaka, and Yuichi Setsuhara

    The 11th Asian-European International Conference on Plasma Surface Engineering　2017/09

  43. Functional Thin Film Deposition by Advanced Plasma Assisted CVD & PVD Process

    Kosuke Takenaka, Masashi Endo, Giichiro Uchida, and Yuichi Setsuhara

    International union of materials research societies-The 15th International conference of advanced materials　2017/08

  44. Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor by Advanced Reactive Sputter Deposition Enhanced with ICP

    Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, Akinori Ebe

    Frontiers in Materials Processing Applications, Research and Technology　2017/07

  45. ICP-Enhanced Reactive Sputter Deposition for Low-Temperature Formation of High-Mobility IGZO Thin Films Transistor Yuichi Setsuhara

    Yuichi Setsuhara, Masashi Endo, Kosuke Takenaka, Giichiro Uchida, and Akinori Ebe

    The 22nd Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and The 9th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials　2017/04

  46. Development of atmospheric pressure plasma sources for energy device materials processing

    G.Uchida, T.Ito, Y.Mino, K.Takenaka, Y.Setsuhara

    International Symposium on Energy Symposium on Energy Research and Applications 2017　2017/02

  47. Characterization of atmospheric-pressure plasma jets and interaction with liquid for control of reactive species in plasma-activated aqueous solutions

    Yuichi Setsuhara, Giichiro Uchida, Taiki Ito, Junichiro Ikeda, Yusuke Mino, and Kosuke Takenaka

    International Conference on Plasma Medical Science Innovation (ICPMSI) 2017　2017/02

  48. Plasma-Liquid Interactions with Atmospheric-Pressure Plasma Jets for Controlling Reactive Species in Plasma-Activated Aqueous Solutions

    Yuichi Setsuhara, Giichiro Uchida, Taiki Ito, Junichiro Ikeda, Yusuke Mino, Kosuke Takenaka

    The 3rd International Workshop on Advanced Plasma Technology and Applications　2017/01

  49. Effects of plasma-jet irradiation on the surface of liquid and its effects on ROS and RNS generations in bulk solution

    G. Uchida, T. Ito, K. Takenaka, J. Ikeda, Y. Setsuhara

    26th Annual meeting of MRS-Japan 2016　2016/12

  50. Spatio-temporal Behaviors of Atmospheric-pressure Dielectric Barrier Discharge Plasma Jets for Reactive Interactions with Materials

    Y. Setsuhara, G. Uchida, A. Nakajima, T. Ito, K. Takenaka

    9th International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2016)　2016/05

  51. Dynamical Behaviors and Plasma-Liquid Interactions of Atmospheric-Pressure Dielectric-Barrier-Discharge Plasma Jets

    Y. Setsuhara, G. Uchida, A. Nakajima, T. Ito, K. Takenaka

    The 2nd Asian International Workshop on Advanced Plasma Technology and Applications Major Topics: Plasma Technology for Agriculture, Bio and Medicine　2016/02

  52. Dynamical Characterizations of Atmospheric-Pressure Plasma Jets as Evaluation Protocols for Plasma Medicine

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Atsushi Nakajima, Kosuke Takenaka

    The 21st Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Material　2015/10

  53. 非平衡プラズマジェットの動的放電特性

    内田 儀一郎, 竹中 弘祐, 節原 裕一, 川崎 敏之, 古閑 一憲, 白谷 正治

    第21回プラズマ新領域研究会「プラズマ流の可視化」　2015/10

  54. プラズマ医療装置に求められている要素と世界動向

    節原 裕一, 内田 儀一郎, 竹中 弘祐, 竹田 圭吾, 石川 健治, 堀 勝

    第76回応用物理学会学術講演会　2015/09

  55. プラズマ医療のための大気圧放電プラズマの時空間制御

    内田 儀一郎, 竹中 弘祐, 節原 裕一

    新学術領域研究「プラズマ医療科学の創成」＋「統合的神経機能の制御を標準とした糖鎖の作動原理解明」合同公開シンポジウム　2015/08

  56. プラズマ支援反応性スパッタ製膜プロセスによるIGZO薄膜デバイス低温形成

    節原 裕一, 陶山 悠太郎, 中田 慶太郎, 竹中 弘祐, 内田 儀一郎, 江部 明憲

    第27回酸化物半導体討論会　2015/05

  57. 大気圧非平衡プラズマ照射による液中ラジカル生成の制御

    内田 儀一郎, 竹中 弘祐, 節原 裕一

    応用物理学会九州支部 特別講演会　2015/04

  58. Formation of Zinc Oxide Films Deposited by Plasma-Assisted Mist CVD for Transparent Conducting Oxide Application

    Kosuke Takenaka, Giichiro Uchida, Yuichi Setsuhara

    2015 Japan-Korea Joint Symposium on Advanced Solar Cells　2015/01

  59. Spatio-temporal behaviors of atmospheric-pressure discharges

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka, Keigo Takeda, Kenji Ishikawa, and Masaru Hori

    The 20th Workshop on Advanced Plasma Processes and Diagnostics & The 7th Workshop on NU-SKKU Joint Institute for Plasma-Nano Materials　2015/01

  60. ミストプラズマCVDを用いた透明導電酸化物薄膜の形成

    竹中 弘祐, 節原 裕一, 内田 儀一郎

    平成26年度 東北大学電気通信研究所共同プロジェクト研究会　2014/09

  61. 低ダメージプロセスに向けたプラズマ技術－フレキシブルデバイスからプラズマ医療－

    節原 裕一, 竹中 弘祐, 内田 儀一郎

    日本真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第138回定例研究会　2014/06

  62. Discharge Characteristics and Dynamics of Atmospheric Pressure Plasmas for Plasma Medicine

    Yuichi Setsuhara, Giichiro Uchida, Kazufumi Kawabata, Kosuke Takenaka

    19th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & 6th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials　2014/06

  63. RF plasma sources for PECVD and soft-material processes

    Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe

    The International Symposium on Plasma-Nano Materials and Processes　2014/04

  64. Discharge characteristics of plasma jet operated in gas-mixture system for plasma biomedicine

    Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara

    International workshop on control of fluctuation of plasma processes　2014/02

  65. Advanced reactive sputter deposition system enhanced with ICPs driven by new type of low-inductance antenna modules

    Yuichi Setsuhara, Soichiro Osaki, Kosuke Takenaka, Akinori Ebe

    International Conference on Processing & Manufacturing of Advanced Materials (THERMEC'2013)　2013/12

  66. Plasma Interactions with Soft Materials in Air and Liquid

    Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Hiroya Abe, Masaru Hori

    3rd International Symposium for Plasma Biosciences (ISPB2013-3)　2013/06

  67. Plasma Interactions with Soft Materials in Air and Liquid

    Yuichi Setsuhara, Atsushi Miyazaki, Kosuke Takenaka, Hiroya Abe, Masaru Hori

    The 17th Korea-Japan Workshop on Advanced Plasma Process and Diagnostics & 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials Abstract　2013/05

  68. Characteristics of Atmospheric Pressure Discharge and Interactions with Soft Materials

    Yuichi Setsuhara, Kosuke Takenaka

    The 16th International Workshop on Advanced Plasma Processing and Diagnostics　2013/01

  69. Plasma Interactions with Soft Materials as a Basis for Plasma Medicine

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    International Workshop on Advanced Plasma Technology for Green Energy and Biomedical Applications (APT2012)　2012/08

  70. Plasma Interactions with Soft-Materials as a Basis of Fundamental Processes for Plasma Medicine

    Yuichi Setsuhara, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    The 2nd International Symposium for Plasma Biosciences　2012/08

  71. Process Control Capabilities of ICP-Enhanced Sputter Discharge for Reactive Large-Area Deposition of Functional Films

    Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

    The 15th Korea-Japan Workshop for Advanced Plasma Process and Diagnostics　2012/06

  72. Combinatorial Plasma-Process Analyses for Advanced Inorganic/Organic Device Formation

    Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

    6th China International Conference on Surface Engineering (ICSE) 2011　2011/05

  73. Plasma Processing of Soft Materials for Development of Flexible Electronics

    Y. Setsuhara, K. Cho, K. Takenaka, M. Shiratani, M. Sekine, and M. Hori

    10th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 23rd Symposium on Plasma Science for Materials(SPSM)　2010/07

  74. Advanced Research and Development for Plasma Processing of Polymers with Combinatorial Plasma-Process Analyzer

    Y. Setsuhara, K. Cho, K. Takenaka, M. Shiratani, M. Sekine, M. Hori

    The 2nd International Conference on Microelectronics and Plasma Technology (ICMAP 2009)　2009/09

  75. Low-Damage Plasma Processing of Thin Films on Polymers For Flexible Device Fabrications

    Y. Setsuhara, K. Cho, K. Takenaka, M. Shiratani, M. Sekine, M. Hori

    International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS　2009/08

  76. Analyses of Plasma-Materials Interactions for Development of Advanced Devices

    Y. Setsuhara, K. Cho, K. Takenaka, M. Shiratani, M. Sekine, M. Hori

    The 7th Korea-Japan Workshop on Thin Film and Plasma Process for Green Technology Advanced Plasma Diagnostics for Plasma-Nano Processing　2009/07

  77. Low-Damage Processing of Polymers with Reactive High-Density Plasmas Driven by Multiple Low-Inductance Antenna Modules

    Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Akinori Ebe, Jeon G. Han

    The Eleventh International Conference on Plasma Surface Engineering(PSE2008)　2008/09

  78. Development of Combinatorial Plasma Process Analyzer for Advanced Materials Processing

    Y. Setsuhara, K. Takenaka, M. Shiratani, M. Sekine, M. Hori

    ICPP2008 Satellite Meeting on Plasma Physics and Advanced Applications in ASO　2008/09

  79. Large-area Low-damage Plasma Sources Driven by Multiple Low-inductance-antenna Modules for Next-generation Flat-panel and Polymer Processes

    Y. Setsuhara, K. Takenaka, K. Nishisaka, A. Ebe

    The Sixth Asian-European International Conference on Plasma Surface Engineering　2007/09

  80. Control Capabilities of Inductively-Coupled RF Plasmas Driven by Multiple Low-Inductance Antenna Modules for Low-Damage Large-Area Processing - Ion Energy Distributions and Spatio-Temporal Profiles -

    Y. Setsuhara, K. Takenaka, A. Ebe

    The 5th International Symposium on Advanced Plasma Processes and Diagnostics & The 1st International Symposium on Flexible Electronics Technology　2007/04

  81. Ion Energy Distributions and Large-Area Deposition of Thin Films Employing ICP Plasmas with Multiple Low-Inductance Antenna Modules

    Y. Setsuhara, K. Takenaka, T. Sera, D. Tsukiyama, A. Ebe

    The 4th Int. Workshop on Adv. Plasma Processing and Diagnostics & Thin Film Technology for Electronic Materials　2006/12

  82. Large-Area Plasma Sources with Multiple Low-Inductance Antenna Modules for Next-Generation Low-Damage Flat-Panel Display Processing

    Y. Setsuhara, K. Takenaka, T. Sera, D. Tsukiyama, K. Nishisaka, A. Ebe

    The 6th Korea-Japan Symposium on Plasma and Thin Film Technology　2006/10

  83. Development of Internal-Antenna-Driven RF Plasma Sources for Ultra-Large-Area Deposition of Carbon-Related Films

    Y. Setsuhara, K. Takenaka

    11th Int. Conf. s on Modern Materials and Technologies　2006/06

  84. Novel ICP Plasma Source for Large Area CVD Processing

    Y. Setsuhara, K. Takenaka, A. Ebe, K. Nishisaka

    The 3rd Int. Workshop on Adv. Plasma Processing and Diagnostics　2006/04

Industrial Property Rights 2

  1. プラズマ発生装置及びこれを用いたプラズマ生成方法

    節原裕一, 内田儀一郎, 竹中弘祐

  2. 樹脂材と金属材との接合体およびその製造方法

    内田儀一郎, 節原裕一, 竹中弘祐

Institutional Repository 6

Content Published in the University of Osaka Institutional Repository (OUKA)

  1. Influence of pre-treatment with non-thermal atmospheric pressure plasma on bond strength of TP340 titanium-PEEK direct bonding

    Takenaka Kosuke, Nakamoto Soutaro, Koyari Ryosuke, Jinda Akiya, Toko Susumu, Uchida Giichiro, Setsuhara Yuichi

    International Journal of Advanced Manufacturing Technology　Vol. 134　No. 3-4　p. 1637-1644　2024/09/01

  2. Influence of pre-treatment using non-thermal atmospheric pressure plasma jet on aluminum alloy A1050 to PEEK direct joining with hot-pressing process

    Takenaka Kosuke, Jinda Akiya, Nakamoto Soutaro, Koyari Ryosuke, Toko Susumu, Uchida Giichiro, Setsuhara Yuichi

    International Journal of Advanced Manufacturing Technology　Vol. 130　p. 1925-1933　2024/01/01

  3. Improving bonding strength by non-thermal atmospheric pressure plasma-assisted technology for A5052/PEEK direct joining

    Takenaka Kosuke, Jinda Akiya, Nakamoto Soutaro, Koyari Ryosuke, Toko Susumu, Uchida Giichiro, Setsuhara Yuichi

    International Journal of Advanced Manufacturing Technology　Vol. 130　No. 1-2　p. 903-913　2023/12/06

  4. Discharge Conditions of a Non-Thermal Plasma Jet in Helium, Surrounded by Flows of Nitrogen-Oxygen Mixtures of Various Proportions

    Uchida Giichiro, Ito Taiki, Takenaka Kosuke, Setsuhara Yuichi, Nakajima Atsushi

    Transactions of JWRI　Vol. 44　No. 2　p. 5-7　2015/12

  5. Effects of photon irradiation in UV and VUV regions during plasma processing of organic materials

    Cho Ken, Takenaka Kosuke, Setsuhara Yuichi, Shiratani Masaharu, Sekine Makoto, Hori Masaru

    Transactions of JWRI　Vol. 39　No. 2　p. 298-300　2010/12

  6. Combinatorial analysis of plasma-polymer interactions for formation of inorganic-soft materials hybrid structure

    Takenaka Kosuke, Cho Ken, Setsuhara Yuichi, Shiratani Masaharu, Sekine Makoto, Hori Masaru

    Transactions of JWRI　Vol. 39　No. 2　p. 250-252　2010/12