Deposition of germanium dioxide films by the injection of oxygen ion beam in conjunction with hexamethyldigermane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment　Vol. 1056　p. 168707-168707　2023/11　Research paper (scientific journal)

Low energy Si+, SiCH5+, or C+ beam injections to silicon substrates during chemical vapor deposition with dimethylsilane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

Heliyon　p. e19002-e19002　2023/08　Research paper (scientific journal)

Low-energy Ar+ ion-beam-induced chemical vapor deposition of silicon dioxide films using tetraethyl orthosilicate

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Masato Kiuchi

Heliyon　p. e14643-e14643　2023/03　Research paper (scientific journal)

Injection of low-energy SiCH₅⁺ ion-beam to Si substrate during chemical vapor deposition process using methylsilane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

AIP Advances　Vol. 12　No. 11　p. 115104-115104　2022/11/01　Research paper (scientific journal)

Low-energy oxygen ion beam induced chemical vapor deposition using methylsilane or dimethylsilane for the formation of silicon dioxide films

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Masato Kiuchi

Thin Solid Films　p. 139508-139508　2022/09　Research paper (scientific journal)

Low-energy Ar+ ion beam induced chemical vapor deposition of silicon carbide films using dimethylsilane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms　Vol. 527　p. 40-44　2022/09　Research paper (scientific journal)

Low-energy O+ ion beam induced chemical vapor deposition using tetraethyl orthosilicate for silicon dioxide film formation

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms　Vol. 511　p. 113-117　2022/01　Research paper (scientific journal)

Low-energy O+ ion beam induced chemical vapor deposition using hexamethyldisilane or hexamethyldisilazane for silicon dioxide film formation

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Masato Kiuchi

AIP Advances　Vol. 11　No. 12　p. 125328-125328　2021/12/01　Research paper (scientific journal)

Low-energy Ar+ and N+ ion beam induced chemical vapor deposition using hexamethyldisilazane for the formation of nitrogen containing SiC and carbon containing SiN films

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

PLOS ONE　Vol. 16　No. 10　p. e0259216-e0259216　2021/10/27　Research paper (scientific journal)

Identification of fragment ions produced by the decomposition of tetramethyltin and the production of low-energy Sn+ ion beam

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

PLOS ONE　Vol. 16　No. 6　p. e0253870-e0253870　2021/06/25　Research paper (scientific journal)

Macroaggregation effect of TiO2nanoparticles on the photocatalytic activity and post-reaction separation for aqueous degradation of organic compounds

Hiroaki Sakurai, Masato Kiuchi, Tetsuro Jin

Journal of Environmental Chemical Engineering　Vol. 9　No. 1　2021/02/01　Research paper (scientific journal)

Production of low-energy SiCH3+ and SiC2H7+ ion beams for 3C-SiC film formation by selecting fragment ions from dimethylsilane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 487　p. 85-89　2021/01　Research paper (scientific journal)

Production of low-energy fragment-ion beams from hexamethyldisiloxane and the irradiation of SiO+ ion beam to substrates with supplemental oxygen gas for SiO2 film formation

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Masato Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 479　p. 13-17　2020/09　Research paper (scientific journal)

Stability of hexafluoroacetylacetone molecules on metallic and oxidized nickel surfaces in atomic-layer-etching processes

Abdulrahman H. Basher, Marjan Krstić, Takae Takeuchi, Michiro Isobe, Tomoko Ito, Masato Kiuchi, Kazuhiro Karahashi, Wolfgang Wenzel, Satoshi Hamaguchi

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　Vol. 38　No. 2　p. 022610-1-022610-8　2020/03/01　Research paper (scientific journal)

Suppression of cooking oil deterioration by electromagnetic field with harmonics generated by asymmetric circuit

Masato Kiuchi, Tatsuji Miyagawa

Plasma Medicine　Vol. 10　No. 2　p. 103-111　2020　Research paper (scientific journal)

Characteristics of films deposited by the irradiation of GeCHx+ ions produced from hexamethyldigermane and their dependence on the injected ion energy

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 461　p. 1-5　2019/12　Research paper (scientific journal)

Effects of injected ion energy on silicon carbide film formation by low-energy SiCH3+ beam irradiation

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

THIN SOLID FILMS　Vol. 685　p. 408-413　2019/09　Research paper (scientific journal)

Low-energy mass-selected ion beam deposition of silicon carbide with Bernas-type ion source using methylsilane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

AIP ADVANCES　Vol. 9　No. 9　p. 09501-2-095051-4　2019/09　Research paper (scientific journal)

Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Masato Kiuchi

AIP ADVANCES　Vol. 9　No. 2　2019/02　Research paper (scientific journal)

Identification of fragment ions produced from hexamethyldisilazane and production of low-energy mass-selected fragment ion beam

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 430　p. 1-5　2018/09　Research paper (scientific journal)

Pt/TiO 2 granular photocatalysts for hydrogen production from aqueous glycerol solution: Durability against seawater constituents and dissolved oxygen

Hiroaki Sakurai, Masato Kiuchi, Tetsuro Jin

Catalysis Communications　Vol. 114　2018/08

Low-energy mass-selected ion beam production of fragments from tetraethylorthosilicate for the formation of silicon dioxide film

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

THIN SOLID FILMS　Vol. 655　p. 22-26　2018/06　Research paper (scientific journal)

Deposition of Indium Nanoparticles on Powdered Material by Pulse Arc Plasma to Synthesize Catalysts for Friedel-Crafts Alkylation

Satoru Yoshimura, Yoshihiro Nishimoto, Satoshi Sugimoto, Masato Kiuchi, Makoto Yasuda

E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY　Vol. 16　p. 105-110　2018/04　Research paper (scientific journal)

Injected ion energy dependence of SiC film deposited by low-energy SiC3H9+ ion beam produced from hexamethyldisilane

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 420　p. 6-11　2018/04　Research paper (scientific journal)

Indium nano-particles deposition to zeolite powder by a pulse arc plasma processs for synthesizing catalysts

S. Yoshimura, Y. Nishimoto, S. Sugimoto, M. Kiuchi, M. Yasuda

The 8th International Symposium on Surface Science (ISSS-8), 22-26 October, 2017, Epochal Tsukuba, Tsukuba, Japan (6PN-113).　2017/10

Catalytic property of an indium-deposited powder-type material containing silicon and its dependence on the dose of indium nano-particles irradiated by a pulse arc plasma process

Satoru Yoshimura, Yoshihiro Nishimoto, Masato Kiuchi, Yoshiaki Agawa, Hiroyuki Tanaka, Makoto Yasuda

AIP ADVANCES　Vol. 7　No. 6　2017/06　Research paper (scientific journal)

Low-energy mass-selected ion beam production of fragments produced from hexamethyldisiloxane for the formation of silicon oxide film

Satoru Yoshimura, Satoshi Sugimoto, Kensuke Murai, Masato Kiuchi

SURFACE & COATINGS TECHNOLOGY　Vol. 313　p. 402-406　2017/03　Research paper (scientific journal)

Low-energy SiC2H6+ and SiC3H9+ ion beam productions by the mass-selection of fragments produced from hexamethyldisilane for SiC film formations

Satoru Yoshimura, Satoshi Sugimoto, Kensuke Murai, Masato Kiuchi

AIP ADVANCES　Vol. 6　No. 12　2016/12　Research paper (scientific journal)

Hydrogen evolution from glycerol aqueous solution under aerobic conditions over Pt/TiO2 and Au/TiO2 granular photocatalysts.

Hiroaki Sakurai, Masato Kiuchi, Claire Heck, Tetsuro Jin

Chemical communications (Cambridge, England)　Vol. 52　No. 93　p. 13612-13615　2016/11/15　Research paper (scientific journal)

Low-energy mass-selected ion beam production of fragments produced from hexamethyldisilane for SiC film formation

Satoru Yoshimura, Satoshi Sugimoto, Masato Kiuchi

JOURNAL OF APPLIED PHYSICS　Vol. 119　No. 10　2016/03　Research paper (scientific journal)

Erratum: Indium implantation onto zeolite by pulse arc plasma process for the development of novel catalysts (Chemistry Letters (2015) (1292-1294) DOI: 10.1246/cl.150499)

Satoru Yoshimura, Yoshihiro Nishimoto, Masato Kiuchi, Makoto Yasuda

Chemistry Letters　Vol. 45　No. 11　2016　Research paper (scientific journal)

Fragment ion production from hexamethyldisilane in a Freeman-type ion source for SiC film formation

S. Yoshimura, M. Kiuchi

Proceedings of 37th International Symposium on Dry Process, November 5-6, 2015, Awaji Yumebutai International Conference Center, Awaji Island, Japan　2015/11　Research paper (international conference proceedings)

Fragment ions produced from hexamethyldisilane in a Freeman-type ion source

Satoru Yoshimura, Masato Kiuchi

JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 54　No. 10　2015/10　Research paper (scientific journal)

Indium Implantation onto Zeolite by Pulse Arc Plasma Process for the Development of Novel Catalysts

Satoru Yoshimura, Yoshihiro Nishimoto, Masato Kiuchi, Makoto Yasuda

CHEMISTRY LETTERS　Vol. 44　No. 10　p. 1292-1294　2015/10　Research paper (scientific journal)

Gold nanoparticles deposited on Amberlyst-15: Metal-acid bifunctional catalyst for cellobiose conversion to gluconic acid

Hiroaki Sakurai, Kenji Koga, Masato Kiuchi

CATALYSIS TODAY　Vol. 251　p. 96-102　2015/08　Research paper (scientific journal)

Indium Implantation onto Zeolite for Development of Novel Catalysts with a Ion Beam System

YOSHIMURA Satoru, HAMAGUCHI Satoshi, KIUCHI Masato, KIUCHI Masato, NISHIMOTO Yoshihiro, NISHIMOTO Yoshihiro, YASUDA Makoto, BABA Akio, MOKUNO Yoshiaki, SUGIMOTO Satoshi

Journal of Smart Processing　Vol. 4　No. 5　p. 228-233　2015　Research paper (scientific journal)

Application of Ion Beam Induced Chemical Vapor Deposition for SiC Film Formation on Si Substrates using Methylsilane

Satoru Yoshimura, Satoshi Sugimoto, Kensuke Murai, Kuniaki Honjo, Masato Kiuchi

E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY　Vol. 13　p. 174-178　2015　Research paper (scientific journal)

Low energy indium or gallium ion implantations to SiO<inf>2</inf> thin films for development of novel catalysts

Satoru Yoshimura, Masato Kiuchi, Yoshihiro Nishimoto, Makoto Yasuda, Akio Baba, Satoshi Hamaguchi

e-Journal of Surface Science and Nanotechnology　Vol. 12　p. 197-202　2014/04　Research paper (scientific journal)

Low energy gallium ion injections to silicon dioxide thin films for development of novel catalysts

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

International Symposium on Non-equilibrium Plasma and Complex-System Sciences (IS-NPCS), 26-28 February, 2014, Icho Kaikan, Osaka University, Osaka, Japan (P-04).　2014/02

Air modification apparatus by using a UV lamp and corona discharge

Masato Kiuchi, Hiroaki Sakurai, Susumu Kitagawa, Takae Takeuchi

Plasma Medicine　Vol. 4　No. 1-4　p. 131-135　2014　Research paper (scientific journal)

Dependence of catalytic properties of indium implanted SiO<inf>2</inf> thin films on the film-substrate temperature during indium ion implantation

S. Yoshimura, K. Ikuse, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms　Vol. 315　p. 222-226　2013/11/15　Research paper (scientific journal)

Low energy indium or gallium iom beam injection to SiO2 thin films for development of novel catalysts

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12) & 21st International Colloquium on Scanning Probe Microscopy (ICSPM21), 4-8 November, 2013, Tsukuba International Congress Center, Tsukuba, Japan, 5P　2013/11

Surface Modification of Poly(methyl methacrylate) by Hydrogen-Plasma Exposure and Its Sputtering Characteristics by Ultraviolet Light Irradiation

Satoru Yoshimura, Kazumasa Ikuse, Satoshi Sugimoto, Kensuke Murai, Kuniaki Honjo, Masato Kiuchi, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 52　No. 9　2013/09　Research paper (scientific journal)

Colorless alkaline solution of chloride-free gold acetate for impregnation: An innovative method for preparing highly active Au nanoparticles catalyst

Hiroaki Sakurai, Kenji Koga, Yasuo Iizuka, Masato Kiuchi

APPLIED CATALYSIS A-GENERAL　Vol. 462　p. 236-246　2013/07　Research paper (scientific journal)

Hydrogen Plasma Exposure of Polymethylmethacrylate and Etching by Low Energy Ar^+ Ion Beam

YOSHIMURA Satoru, IKUSE Kazumasa, SUGIMOTO Satoshi, MURAI Kensuke, KIUCHI Masato, HAMAGUCHI Satoshi

Journal of the Vacuum Society of Japan　Vol. 56　No. 4　p. 129-132　2013/04/10　Research paper (scientific journal)

Development of the Detection Technique of Microbial Contaminant Caused by Odor Compound

SUZUKI Takahito, KIUCHI Masahito, TAKEUCHI Takae

Journal of Antibacterial and Antifungal AgentsJ. Antibact. Antifung. Agents　Vol. 41　No. 2　p. 93-97　2013/02/10

Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation

Satoru Yoshimura, Yasuhiro Tsukazaki, Masato Kiuchi, Satoshi Sugimoto, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 45　No. 50　2012/12　Research paper (scientific journal)

Sputtering yields of magnesium hydroxide [Mg(OH)(2)] by noble-gas ion bombardment

Kazumasa Ikuse, Satoru Yoshimura, Masato Kiuchi, Masaharu Terauchi, Mikihiko Nishitani, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 45　No. 43　2012/10　Research paper (scientific journal)

Sputtering Yields of CaO, SrO, and BaO by Monochromatic Noble Gas Ion Bombardment

Satoru Yoshimura, Kiyohiro Hine, Masato Kiuchi, Jun Hashimoto, Masaharu Terauchi, Yosuke Honda, Mikihiko Nishitani, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS　Vol. 51　No. 8　2012/08　Research paper (scientific journal)

Analysis of volatile metabolites emitted by soil-derived fungi using head space solid-phase microextraction/gas chromatography/mass spectrometry: I. Aspergillus fumigatus, Aspergillus nidulans, Fusarium solani and Penicillium paneum

Takae Takeuchi, Tomoko Kimura, Haruna Tanaka, Sachiyo Kaneko, Shoko Ichii, Masato Kiuchi, Takahito Suzuki

SURFACE AND INTERFACE ANALYSIS　Vol. 44　No. 6　p. 694-698　2012/06　Research paper (scientific journal)

Dependence of catalytic properties of indium-implanted SiO2 thin films on the energy and dose of incident indium ions

S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

THIN SOLID FILMS　Vol. 520　No. 15　p. 4894-4897　2012/05　Research paper (scientific journal)

Low energy metal ion beam production with a modified freeman-type ion source for development of novel catalysts

S. Yoshimuray, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

e-Journal of Surface Science and Nanotechnology　Vol. 10　p. 139-144　2012/04　Research paper (scientific journal)

Chromium nitride films formed by ion beam assisted deposition at low nitrogen ion energies in comparison to high energies

W. Ensinger, S. Flege, M. Kiuchi, K. Honjo

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 272　p. 437-440　2012/02　Research paper (scientific journal)

Low energy mass-selected metal ion beam production with a modified Freeman-type ion source

S. Yoshimura, M. Kiuchi, S. Hamaguchi

The 8th EU-Japan Joint Symposium on Plasma Processing (JSPP2012), 16-18 January, 2012, Todaiji Culture Center, Nara, Japan, P-21　2012/01

Fungal Oder Analysis for Conservation of Cultural Properties

Takae Takeuchi, Masato Kiuchi, Takahito Suzuki

J. Jpn. Assoc. Oder Environ.　Vol. 43　No. 3　p. 211-216　2012　Research paper (scientific journal)

Texture modification of wurtzite piezoelectric films by ion beam irradiation

Takahiko Yanagitani, Masato Kiuchi

SURFACE & COATINGS TECHNOLOGY　Vol. 206　No. 5　p. 816-819　2011/11　Research paper (scientific journal)

Measurement of MgO, CaO, SrO, and BaO sputtering yields by noble gas ions for plasma display panel cells

S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M. Nishitani, S. Hamaguchi

Proceedings of International Symposium on Dry Process　2011/11　Research paper (international conference proceedings)

Experimental evaluation of CaO, SrO and BaO sputtering yields by Ne+ or Xe+ ions

Satoru Yoshimura, Kiyohiro Hine, Masato Kiuchi, Jun Hashimoto, Masaharu Terauchi, Yosuke Honda, Mikihiko Nishitani, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 44　No. 25　2011/06　Research paper (scientific journal)

Novel catalysts: Indium implanted SiO2 thin films

S. Yoshimura, K. Hine, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi

APPLIED SURFACE SCIENCE　Vol. 257　No. 1　p. 192-196　2010/10　Research paper (scientific journal)

Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO(2) film by CF(3) ion beam injections

S. Yoshimura, Y. Tsukazaki, K. Ikuse, M. Kiuchi, S. Hamaguchi

FOURTH INTERNATIONAL SYMPOSIUM ON ATOMIC TECHNOLOGY　Vol. 232　2010　Research paper (international conference proceedings)

Measurement of sputtering/etching yields by CF3 ion beam injection with UV light irradiation

Y. Tsukazaki, K. IKuse, S.Yoshimura, M. Kiuchi, S. Hamaguchi

The 4th International Symposium on Atomic Technologies (ISAT-4), 18-19 November, 2009, Seaside Hotel MAIKO VILLA KOBE, Hyogo, Japan, P-21　2009/11

Sputtering yields of Au by low-energy noble gas ion bombardment

Kazumasa Ikuse, Satoru Yoshimura, Kiyohiro Hine, Masato Kiuchi, Satoshi Hamaguchi

JOURNAL OF PHYSICS D-APPLIED PHYSICS　Vol. 42　No. 13　2009/07　Research paper (scientific journal)

Ion beam assisted deposition of nitrogen-containing chromium films: A comparison of argon vs nitrogen ions

W. Ensinger, M. Kiuchi

SURFACE & COATINGS TECHNOLOGY　Vol. 203　No. 17-18　p. 2763-2766　2009/06　Research paper (scientific journal)

Effects of Ultraviolet Light Irradiation on Etching of Polymethylmethacrylate by CF_3^+ Ion Beam Injections

IKUSE Kazumasa, YOSHIMURA Satoru, TSUKAZAKI Yasuhiro, KIUCHI Masato, HAMAGUCHI Satoshi

Journal of the Vacuum Society of Japan　Vol. 52　No. 3　p. 127-130　2009/03/20　Research paper (scientific journal)

Effect of ultraviolet light irradiation on etching process of poly(methyl methacrylate) by ion beam injections

S. Yoshimura, K. Ikuse, Y. Tsukazaki, M. Kiuchi, S. Hamaguchi

Journal of Physics: Conference Series　Vol. 191　2009　Research paper (international conference proceedings)

Experimental evaluation of MgO sputtering yields by monochromatic Ne, Kr, or Xe ion beams

Kiyohiro Hine, Satoru Yoshimura, Kazumasa Ikuse, Masato Kiuchi, Jun Hashimoto, Masaharu Terauchi, Mikihiko Nishitani, Satoshi Hamaguchi

THIN SOLID FILMS　Vol. 517　No. 2　p. 835-840　2008/11　Research paper (scientific journal)

SiO_2 Etching Yield Measurements by CF_3 Ion Beam Injections Superposed with Light Irradiation

IKUSE Kazumasa, YOSHIMURA Satoru, TAKIZAWA Toshifumi, KARAHASHI Kazuhiro, KIUCHI Masato, HAMAGUCHI Satoshi

Journal of the Vacuum Society of Japan　Vol. 51　No. 3　p. 158-161　2008/03/20　Research paper (scientific journal)

Indium Ion Implantation into SiO_2/Si Substrates with a Low-Energy Mass Analyzed Ion Beam System

HINE Kiyohiro, YOSHIMURA Satoru, KARAHASHI Kazuhiro, KIUCHI Masato, HAMAGUCHI Satoshi

Journal of the Vacuum Society of Japan　Vol. 51　No. 3　p. 218-220　2008/03/20　Research paper (scientific journal)

Pure-shear mode BAW resonator consisting of (112̄0) textured AlN films

Takahiko Yanagitani, Masato Kiuch

Proceedings - IEEE Ultrasonics Symposium　p. 90-93　2008　Research paper (international conference proceedings)

Measurement of Au sputtering yields by Ar and He ions with a low-energy mass selected ion beam system - art. no. 012019

Kiyohiro Hine, Satoru Yoshimura, Kazumasa Ikuse, Masato Kiuchi, Satoshi Hamaguchi

SECOND INTERNATIONAL SYMPOSIUM ON ATOMIC TECHNOLOGY　Vol. 106　p. 12019-12019　2008　Research paper (international conference proceedings)

Measurement of Sticking Probability and Sputtering Yield of Au by Low-Energy Mass Selected Ion Beams with a Quartz Crystal Microbalance - art. no. 012016

Kazumasa Ikuse, Satoru Yoshimura, Masato Kiuchi, Kiyohiro Hine, Satoshi Hamaguchi

SECOND INTERNATIONAL SYMPOSIUM ON ATOMIC TECHNOLOGY　Vol. 106　p. 12016-12016　2008　Research paper (international conference proceedings)

MgO sputtering yields by noble gas ions at relatively low injection energies

S. Yoshimura, K. Hine, M. Matsukuma, K. Ikuse, M. Kiuchi, T. Nakao, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi

IDW '08 - Proceedings of the 15th International Display Workshops　Vol. 3　p. 1865-1868　2008　Research paper (international conference proceedings)

Highly oriented ZnO thin films deposited by grazing ion-beam sputtering: Application to acoustic shear wave excitation in the GHz range

Takahiko Yanagitani, Masato Kiuchi

Japanese Journal of Applied Physics, Part 2: Letters　Vol. 46　No. 45-49　p. L1167-L1169　2007/12/14　Research paper (scientific journal)

Measurement of magnesium oxide sputtering yields by He and Ar ions with a low-energy mass-selected ion beam system

Kiyohiro Hine, Satoru Yoshimura, Kazumasa Ikuse, Masato Kiuchi, Jun Hashimoto, Masaharu Terauchi, Mikihiko Nishitani, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS　Vol. 46　No. 45-49　p. L1132-L1134　2007/12　Research paper (scientific journal)

Sputtering yields by noble gas injections measured with a low-energy mass analyzed ion beam system

K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi

2nd International Symposium on Atomic Technologies (ISAT-2), 1-2 October, 2007, Awaji Yumebutai International Conference Center, Yumebutai, Awaji City, Hyogo, Japan, P-27　2007/10

Control of in-plane and out-of-plane texture in shear mode piezoelectric ZnO films by ion-beam irradiation

Takahiko Yanagitani, Masato Kiuchi

JOURNAL OF APPLIED PHYSICS　Vol. 102　No. 4　2007/08　Research paper (scientific journal)

Effect of ultraviolet (UV) light irradiation on sputtering yields by CF3 ion beam injection

K. Ikuse, S. Yoshimura, M. Kiuchi, T. Takizawa, T. Toyoshima, K. Karahashi, S. Hamaguchi

18th International Symposium on Plasma Chemistry, August 26-31, 2007, Kyoto University, Kyoto, Japan　2007/08　Research paper (international conference proceedings)

Characteristics of pure-shear mode BAW resonators consisting of (1120) textured ZnO films.

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

IEEE transactions on ultrasonics, ferroelectrics, and frequency control　Vol. 54　No. 8　p. 1680-6　2007/08　Research paper (scientific journal)

Shear mode electromechanical coupling coefficient k(15) and crystallites alignment of (11(2)over-bar0) textured ZnO films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

JOURNAL OF APPLIED PHYSICS　Vol. 102　No. 2　2007/07　Research paper (scientific journal)

Temporal evolution of ion fragment production from dimethylsilane by a hot tungsten wire and compounds deposited on the tungsten surface

Satoru Yoshimura, Akinori Toh, Masato Kiuchi, Satoshi Hamaguchi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　Vol. 46　No. 4A　p. 1707-1709　2007/04　Research paper (scientific journal)

Incident-energy dependence of crystalline structures of ion beam deposited Au thin films

T. Takizawa, T. Maeda, M. Kiuchi, S. Yoshimura, S. Hamaguchi

PHILOSOPHICAL MAGAZINE　Vol. 87　No. 10　p. 1487-1495　2007/04　Research paper (scientific journal)

Preparation of Ge-C films by low-energy ion beam induced chemical vapor deposition with hexamethyldigermane

Takaomi Matsutani, Masato Kiuchi, Takae Takeuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 257　p. 261-264　2007/04　Research paper (scientific journal)

Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System

HINE Kiyohiro, YOSHIMURA Satoru, KIUCHI Masato, HAMAGUCHI Satoshi

Shinku　Vol. 50　No. 3　p. 217-219　2007/03/20　Research paper (scientific journal)

Measurement of sputtering yields of Au thin film with low-energy mass analyzed ion beam system

K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi

The 1st International Symposium on Atomic Technology (ISAT-2007), 16-17 March, 2007, Tsukuba, Japan.　2007/03

Ion beam sputter-deposited ZnO thin film for broadband shear wave excitation in the GHz range

Takahiko Yanagitani, Masato Much

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6　p. 1413-+　2007　Research paper (international conference proceedings)

Tin Oxide Thin Films Prepared by Ion Beam Induced Chemical Vapor Deposition

FUJIKAWA Yuka, KIUCHI Masato, MATSUTANI Takaomi, TAKEUCHI Takae

Shinku　Vol. 49　No. 12　p. 780-781　2006/12/20　Research paper (scientific journal)

Temporal evolution of ion fragment production from methylsilane by a hot tungsten wire

Satoru Yoshimura, Akinori Toh, Takahiro Toyoshima, Masato Kiuchi, Satoshi Hamaguchi

JOURNAL OF APPLIED PHYSICS　Vol. 100　No. 9　2006/11　Research paper (scientific journal)

Temperature characteristics of pure shear mode FBARs consisting of (112̄0) textured ZnO films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

Proceedings - IEEE Ultrasonics Symposium　Vol. 1　p. 1459-1462　2006　Research paper (international conference proceedings)

Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

Proceedings - IEEE Ultrasonics Symposium　Vol. 1　p. 1463-1466　2006　Research paper (international conference proceedings)

Crystalline structure control of Au thin films in ion beam deposition processes

T. Takizawa, T. Maeda, S. Yoshimura, M. Kiuchi, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and 23th Symposium on Plasma Processing　2006/01　Research paper (international conference proceedings)

Fragment ions of methylsilane and dimethylsilane generated in tungsten-based catalytic chemical vapor deposition (Cat-CVD) processes

S. Yoshimura, A. Toh, T. Maeda, S. Sugimoto, M. Kiuchi, S. Hamaguchi

Proceedings of the 6th International Conference on Reactive Plasmas and 23th Symposium on Plasma Processing　2006/01　Research paper (international conference proceedings)

Structural characterization of nanocrystalline TiO2 and TiO2 : SiO2 powders and thin films at 35 degrees C

C Liu, Q Fu, JB Wang, WK Zhao, YL Fang, T Mihara, M Kiuchi

JOURNAL OF THE KOREAN PHYSICAL SOCIETY　Vol. 46　p. S104-S108　2005/06　Research paper (scientific journal)

LPI法によるナノ形状セラミックスの高感度ガスセンサへの適用

出来 成人, 水畑 穣, 梶並 昭彦, 大前 伸夫, 田川 雅人, 横田 久美子, 竹内 俊文, 石川 博, 蔡 奎千, 前川 享, 前田 浩一, 齋藤 靖弘, 関口 幸成, 小林 哲彦, 木内 正人, 桜井 宏昭, 山中 直樹, 山口 寿一

地域新生コンソーシアム研究開発事業 平成16年度報告書　Vol. 全24p　2005/03　Research paper (scientific journal)

Self-assembled nano-dots of heteroepitaxial SiC on Si

Takashi Matsumoto, Masato Kiuchi, Satoshi Sugimoto, Seiichi Goto

Materials Research Society Symposium Proceedings　Vol. 908　p. 114-117　2005　Research paper (international conference proceedings)

Exploration of diamond thin-film formation dynamics using low-energy C+ ion beam

T. Takizawa, T. Sadahiro, M. Kiuchi, T. Fukuda, S. Goto

Proc. International COE Forum on Plasma Science and Technology, 5-7 April 2004, Nagoya, Japan　2004/04　Research paper (international conference proceedings)

Exploration of the dynamics of group IV heteroepitaxial structure formation using extremely low-energy ion beam

T. Fukuda, S. Goto, M. Inomoto, T. Isono, M. Kiuchi, T. Maeda, T. Sadahiro, T. Takizawa

Proc. International Workshop on Plasma-Nano Technology and Its Future Vision, Takayama, Japan, 4-6 February, P-9 (2004)　2004/02

Exploration of the dynamics of nano-structure formation of group IV crystals using extremely low-energy ion Beam

T. Fukuda, S. Goto, S. Okada, M. Kiuchi, S. Sugimoto, M. Inomoto, Y. Kitano, T. Sadahiro, T. Takizawa, T. Isono, S. Ueda, T. Maeda, T. Yamada

Proc. International Symposium on the Creation of Novel Nanomaterials, Osaka, Japan, 20-22 January, p.83 (2004)　2004/01

Research activities at science and technology center for atoms, molecules and ions control, graduate school of engineering, Osaka University

T. Fukuda, S. Goto, S. Okada, M. Kiuchi, S. Sugimoto, M. Inomoto, Y. Yano, F. Kodera, M. Ohta, Y. Kitano, T. Sadahiro, T. Takizawa, T. Isono, S. Ueda, T. Maeda, D. Kohno, T. Yamada

Proc. 21st Symposium on Plasma Processing, Sapporo, Japan, 28-30 January, p.16 (2004)　2004/01　Research paper (international conference proceedings)

Low-Energy Ion-Beam Process

KIUCHI Masato, MATSUMOTO Takashi, SUGIMOTO Satoshi, GOTO Seiichi, TAKEUCHI Takae

Journal of High Temperature Society.　Vol. 29　No. 5　p. 193-195　2003/09/20

Low-Energy Ion Beam Technology for a Material Application

KIUCHI Masato

Kakuyūgō kenkyū　Vol. 79　No. 7　p. 645-649　2003/07/25

Characteristics of an Inverter Power Discharge for Plasma Production

Seiji Takechi, Satoshi Sugimoto, Masato Kiuchi, Katsutoshi Tanaka, Seiichi Goto

2001/07　Research paper (international conference proceedings)

Ionization of Organosilicon in Freeman-type Ion Source

Takae Takeuchi, Masato Kiuchi, Takashi Matsumoto, Kazuhiko Mimoto, Satoshi Sugimoto, Seiichi Goto

2001/04　Research paper (international conference proceedings)

Analysis of hydrophile process of a polymer surface with an inverter plasma

Nariaki Murakami, Katsutoshi Tanaka, Satoshi Sugimoto, Masato Kiuchi, Seiichi Goto

Surface and Coatings Technology　Vol. 136　No. 1-3　p. 265-268　2001/02/02　Research paper (scientific journal)

Ion-assisted deposition of copper using an inverter plasma

Masato Kiuchi, Kensuke Murai, Katsutoshi Tanaka, Seiji Takechi, Satoshi Sugimoto, Seiichi Goto

Surface and Coatings Technology　Vol. 136　No. 1-3　p. 273-275　2001/02/02　Research paper (scientific journal)

Operational parameter effects on inverter plasma performance

Seiji Takechi, Satoshi Sugimoto, Masato Kiuchi, Katsutoshi Tanaka, Seiichi Goto

Surface and Coatings Technology　Vol. 136　No. 1-3　p. 69-72　2001/02/02　Research paper (scientific journal)

Inverter plasma discharge system

Satoshi Sugimoto, Masato Kiuchi, Seiji Takechi, Katsutoshi Tanaka, Seiichi Goto

Surface and Coatings Technology　Vol. 136　No. 1-3　p. 65-68　2001/02/02　Research paper (scientific journal)

Formation of Cubic-SiC Thin Films on Si(111) using the Molecular Ion Beam Technique

Takashi Matsumoto, M. Kiuchi, Masato Kiuchi, Satoshi Sugimoto, Seiichi Goto

2001/01　Research paper (other academic)

Crystallization in low-energy deposition of titanium ions

M Kiuchi, T Matsumoto, T Yoshikawa, S Goto, W Ensinger

COLLOIDS AND SURFACES B-BIOINTERFACES　Vol. 19　No. 3　p. 269-273　2000/12　Research paper (scientific journal)

Deposition of 3C-SiC films using ECR plasma of methylsilane

Takaomi Matsutani, Masato Kiuchi, Takae Takeuchi, Takashi Matsumoto, Kazuhiko Mimoto, Seiichi Goto

Vacuum　Vol. 59　No. 1　p. 152-158　2000/10　Research paper (scientific journal)

Tantalum nitride films formed by ion beam assisted deposition: analysis of the structure in dependence on the ion irradiation intensity

K Volz, M Kiuchi, W Ensinger

SURFACE & COATINGS TECHNOLOGY　Vol. 128　p. 298-302　2000/06　Research paper (scientific journal)

Ion beam-assisted deposition of nitrides of the 4th group of transition metals

W Ensinger, K Volz, M Kiuchi

SURFACE & COATINGS TECHNOLOGY　Vol. 128　p. 81-84　2000/06　Research paper (scientific journal)

C-SiC-Si gradient films formed on silicon by ion beam assisted deposition at room temperature

K Volz, M Kiuchi, M Okumura, W Ensinger

SURFACE & COATINGS TECHNOLOGY　Vol. 128　p. 274-279　2000/06　Research paper (scientific journal)

Development and properties of a Freeman-type hybrid ion source

T Matsumoto, K Mimoto, S Goto, M Ohba, Y Agawa, M Kiuchi

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 71　No. 2　p. 1168-1170　2000/02　Research paper (scientific journal)

Production of organosilicon ions for SiC epitaxy

M Kiuchi, T Matsumoto, K Mimoto, T Takeuchi, S Goto

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 71　No. 2　p. 1157-1159　2000/02　Research paper (scientific journal)

Deposition of cubic-SiC thin films on Si(111) using the molecular ion beam technique

T Matsumoto, K Mimoto, M Kiuchi, S Sugimoto, S Goto

FUNDAMENTAL MECHANISMS OF LOW-ENERGY-BEAM-MODIFIED SURFACE GROWTH AND PROCESSING　Vol. 585　p. 165-169　2000　Research paper (international conference proceedings)

Heteroepitaxial Growth of Silicon Carbide Using Organosilicon Ion Beams

Masato Kiuchi, Takaomi Matsutani, Takae Takeuchi, Takashi Matsumoto, Kazuhiko Mimoto, Seiichi Goto

J. Vac. Soc. Jpn.　Vol. 43　No. 3　2000/01　Research paper (scientific journal)

Formation of hafnium nitride films by medium-energy ion-beam-assisted deposition

K Volz, M Kiuchi, W Ensinger

SURFACE & COATINGS TECHNOLOGY　Vol. 120　p. 353-357　1999/11　Research paper (scientific journal)

An ab initio molecular orbital study of the electron affinity of boron clusters

T Takeuchi, M Yamamoto, M Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 153　No. 1-4　p. 298-301　1999/06　Research paper (scientific journal)

Development of Freeman Type Sputter Ion Source and Application for Coatings

MATSUMOTO Takashi, MIMOTO Kazuhiko, YOSHIKAWA Takafumi, KIUCHI Masato, GOTO Seiichi, OHBA Masatoshi, AGAWA Yoshiaki

Shinku　Vol. 42　No. 3　p. 341-344　1999/03

Effect of charge on ion-solid interaction at the surface of two-dimensional materials

T Takeuchi, M Yamamoto, M Kiuchi

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 148　No. 1-4　p. 132-136　1999/01　Research paper (scientific journal)

Structural investigations of chromium nitride films formed by ion beam-assisted deposition

K Volz, M Kiuchi, W Ensinger

SURFACE & COATINGS TECHNOLOGY　Vol. 108　No. 1-3　p. 303-307　1998/10　Research paper (scientific journal)

The microstructure of transparent and electrically conducting titanium nitride films

M. Kiuchi, A. Chayahara, M. Tarutani, Y. Takai, R. Shimizu

Materials Chemistry and Physics　Vol. 54　No. 1-3　p. 330-333　1998　Research paper (scientific journal)

The formation of chromium/nitrogen phases by nitrogen ion implantation during chromium deposition as a function of ion-to-atom arrival ratio

W Ensinger, M Kiuchi

SURFACE & COATINGS TECHNOLOGY　Vol. 94-5　No. 1-3　p. 433-436　1997/10　Research paper (scientific journal)

Effects of charge in ion-surface interactions

M Kiuchi, T Takeuchi, M Yamamoto

SURFACE SCIENCE　Vol. 372　No. 1-3　p. L319-L322　1997/02　Research paper (scientific journal)

The charge effects in the low-energy ion depositing processes

M Kiuchi, T Takeuchi, M Yamamoto

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 121　No. 1-4　p. 154-156　1997/01　Research paper (scientific journal)

Cubic nitrides of the sixth group of transition metals formed by nitrogen ion irradiation during metal condensation

W Ensinger, M Kiuchi

SURFACE & COATINGS TECHNOLOGY　Vol. 84　No. 1-3　p. 425-428　1996/10　Research paper (scientific journal)

LOW-TEMPERATURE FORMATION OF METASTABLE CUBIC TANTALUM NITRIDE BY METAL CONDENSATION UNDER ION IRRADIATION

W ENSINGER, M KIUCHI, M SATOU

JOURNAL OF APPLIED PHYSICS　Vol. 77　No. 12　p. 6630-6635　1995/06　Research paper (scientific journal)

EFFECT OF ION AND ATOM MASSES ON THE CRYSTALLOGRAPHIC ORIENTATION OF NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION

W ENSINGER, M KIUCHI, M SATOU

SURFACE & COATINGS TECHNOLOGY　Vol. 66　No. 1-3　p. 313-317　1994/08　Research paper (scientific journal)

NITRIDATION OF VANADIUM BY ION-BEAM IRRADIATION

M KIUCHI, A CHAYAHARA, A KINOMURA

SURFACE & COATINGS TECHNOLOGY　Vol. 65　No. 1-3　p. 142-147　1994/07　Research paper (scientific journal)

3-DIMENSIONAL ANALYSIS OF LOCALLY DEPOSITED SILICON-OXIDE ON FERRITE BY A COMBINATION OF MICROPROBE RBS AND PIXE

A KINOMURA, Y HORINO, Y MOKUNO, A CHAYAHARA, M KIUCHI, K FUJII, M TAKAI, YF LU

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 85　No. 1-4　p. 689-692　1994/03　Research paper (scientific journal)

OBSERVATION OF LOCAL SIMOX LAYERS BY MICROPROBE RBS

A KINOMURA, Y HORINO, Y MOKUNO, A CHAYAHARA, M KIUCHI, K FUJII, M TAKAI, T LOHNER, H RYSSEL, R SCHORK

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 85　No. 1-4　p. 921-924　1994/03　Research paper (scientific journal)

MEV HEAVY-ION MICROPROBE PIXE FOR THE ANALYSIS OF THE MATERIALS SURFACE

Y MOKUNO, Y HORINO, A KINOMURA, A CHAYAHARA, M KIUCHI, K FUJII, M TAKAI

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 85　No. 1-4　p. 741-743　1994/03　Research paper (scientific journal)

TITANIUM NITRIDE FOR TRANSPARENT CONDUCTORS

M KIUCHI, A CHAYAHARA

APPLIED PHYSICS LETTERS　Vol. 64　No. 8　p. 1048-1049　1994/02　Research paper (scientific journal)

Formation of Thick Coatings of Titanium Nitride by Dynamic Ion Beam Mixing Technique.

KIUCHI Masato, CHAYAHARA Akiyoshi, SHIMAOKA Tomoji, NAGASAKA Hiroshi, TSUCHIYA Naoki

Jitsumu Hyomen Gijutsu　Vol. 45　No. 7　p. 741-742　1994

Transparent Ultra-thin Titanium Nitride Films Produced by Dynamic Ion Beam Mixing.

KIUCHI Masato, CHAYAHARA Akiyoshi

Jitsumu Hyomen Gijutsu　Vol. 45　No. 9　p. 954-955　1994

Surface and interface study of titanium nitride on si substrate produced by dynamic ion beam mixing method

Young Whoan, Masayoshi Tarutani, Kyung-Youl Min, Masato Kiuchi, Ryuichi Shimizu

Japanese Journal of Applied Physics　Vol. 33　No. 4R　p. 2025-2030　1994　Research paper (scientific journal)

Formation of Buried SiC by High-Dose MeV Ion Implantation at High Temperature

CHAYAHARA Akiyosi, KIUCHI Masato, KINOMURA Atsushi, MOKUNO Yoshiaki, HORINO Yuji, FUJII Kanenaga

Shinku　Vol. 36　No. 11　p. 856-861　1993/11/20

Reflection High Energy Electron Diffraction Observation of Dynamic Ion Beam Mixing Process in Titanium Nitride Crystal Growth

Beag Young Whoan, Min Kyung-youl, Inoue Masahiko, Kiuchi Masato, Fujii Kanenaga, Shimizu Ryuichi

Jpn J Appl Phys　Vol. 32　No. 10　p. 4714-4717　1993/10/20

FORMATION OF CRYSTALLINE SIC BURIED LAYER BY HIGH-DOSE IMPLANTATION OF MEV CARBON-IONS AT HIGH-TEMPERATURE

A CHAYAHARA, M KIUCHI, A KINOMURA, Y MOKUNO, Y HORINO, K FUJII

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS　Vol. 32　No. 9A　p. L1286-L1288　1993/09　Research paper (scientific journal)

ION MONITORING OF ION-BEAM DYNAMIC MIXING PROCESS

A CHAYAHARA, M KIUCHI, Y MOKUNO, Y HORINO, K FUJII, M SATOU

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 80-1　p. 124-127　1993/06　Research paper (scientific journal)

THE PROPERTIES OF TITANIUM NITRIDE PREPARED BY DYNAMIC ION MIXING

H NAGASAKA, N TSUCHIYA, M KIUCHI, A CHAYAHARA, K FUJII, M SATOU

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 80-1　p. 1380-1383　1993/06　Research paper (scientific journal)

A HEAVY-ION MICROPROBE AND ITS APPLICATION TO MULTIDIMENSIONAL PROCESSING AND ANALYSIS

Y HORINO, Y MOKUNO, A KINOMURA, A CHAYAHARA, M KIUCHI, K FUJII

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 79　No. 1-4　p. 424-427　1993/06　Research paper (scientific journal)

MASKLESS FABRICATION OF CONTACT VIAS BY FOCUSED MEV HEAVY-ION BEAM

Y MOKUNO, Y HORINO, A KINOMURA, A CHAYAHARA, M KIUCHI, S TAMURA, K FUJII, M TAKAI

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 80-1　p. 1292-1295　1993/06　Research paper (scientific journal)

APPLICATION OF MEV HEAVY-ION MICROPROBES FOR PIXE MEASUREMENTS

Y MOKUNO, Y HORINO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOU, M TAKAI

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 77　No. 1-4　p. 128-131　1993/05　Research paper (scientific journal)

HEAVY-ION MICROPROBES AND THEIR APPLICATIONS

M TAKAI, Y HORINO, Y MOKUNO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOU

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 77　No. 1-4　p. 8-16　1993/05　Research paper (scientific journal)

INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES

Y MOKUNO, Y HORINO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOU, M TAKAI

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 77　No. 1-4　p. 373-377　1993/05　Research paper (scientific journal)

Simulator for dynamic ion beam mixing

A. Seidl, K. Fujii, M. Kiuchi, M. Satou, M. Takai

Materials Research Society Symposium Proceedings　Vol. 279　p. 29-34　1993　Research paper (international conference proceedings)

CONTROL OF PREFERENTIALLY ORIENTED CRYSTAL-GROWTH OF TITANIUM NITRIDE - EFFECTS OF NITROGEN ADSORPTION AND ION-BEAM IRRADIATION IN DYNAMIC MIXING PROCESS

M KIUCHI, A CHAYAHARA, Y HORINO, K FUJII, M SATOU, W ENSINGER

APPLIED SURFACE SCIENCE　Vol. 60-1　p. 760-764　1992/08　Research paper (scientific journal)

PHASE-COMPOSITION OF CHROMIUM FILMS DEPOSITED UNDER NITROGEN ION-BOMBARDMENT AND THEIR CORROSION PROTECTION POTENTIAL

W ENSINGER, A SCHROER, M KIUCHI, Y HORINO, A CHAYAHARA, K FUJII, M SATOU, R LEUTENECKER, C KLATT

SURFACE & COATINGS TECHNOLOGY　Vol. 51　No. 1-3　p. 466-470　1992/04　Research paper (scientific journal)

Nitriding of Vanadium Films by Ion Implantation

KIUCHI Masato, CHAYAHARA Akiyoshi, HORINO Yuji, MOKUNO Yoshiaki, FUJII Kanenaga, SATOU Mamoru

Shinku　Vol. 35　No. 3　p. 364-367　1992/03/20

MICROANALYSIS OF MASKLESSLY MEV-ION-IMPLANTED AREA BY MEV HEAVY-ION MICROPROBE

Y HORINO, Y MOKUNO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOU, M TAKAI

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 64　No. 1-4　p. 358-361　1992/02　Research paper (scientific journal)

Effect of high energy ion implantation on sapphire

T. Miyano, T. Matsumae, H. Yoko-o, Y. Andoh, M. Kiuchi, M. Satou

Nuclear Inst. and Methods in Physics Research, B　Vol. 59-60　No. 2　p. 1167-1172　1991/07/01　Research paper (scientific journal)

A FOCUSED MEV HEAVY-ION BEAM LINE FOR MATERIALS MODIFICATION AND MICROANALYSIS

Y HORINO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOU, M TAKAI

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 59　p. 139-144　1991/07　Research paper (scientific journal)

THE INFLUENCE OF THERMODYNAMIC PHASE STABILITIES ON THE FORMATION OF NITRIDE PHASES OF CHROMIUM AND TITANIUM BY DYNAMIC ION-BEAM MIXING

W ENSINGER, M KIUCHI, Y HORINO, A CHAYAHARA, K FUJII, M SATOU

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 59　p. 259-263　1991/07　Research paper (scientific journal)

Surface modification by MeV ion implantation

CHAYAHARA Akiyoshi, KIUCHI Masato, HORINO Yuji, FUJII Kanenaga, SATOU Mamoru

OYOBUTURI　Vol. 60　No. 7　p. 674-681　1991

MICROBEAM LINE OF MEV HEAVY-IONS FOR MATERIALS MODIFICATION AND INSITU ANALYSIS

Y HORINO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOH, M TAKAI

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　Vol. 29　No. 11　p. 2680-2683　1990/11　Research paper (scientific journal)

FOCUSED HIGH-ENERGY HEAVY-ION BEAMS

Y HORINO, A CHAYAHARA, M KIUCHI, K FUJII, M SATOU, F FUJIMOTO

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　Vol. 29　No. 6　p. 1230-1233　1990/06　Research paper (scientific journal)

Preferentially oriented crystal growth in dynamic mixing process–an approach by monte carlo simulation–

Masato Kiuchi, Akiyoshi Chayahara, Yuji Horino, Kanenaga Fujii, Mamoru Satou, Hee Jae Kang, Young Whoan Beag, Yoshihide Kimura, Ryuichi Shimizu

Japanese Journal of Applied Physics　Vol. 29　No. 10　p. 2059-2065　1990　Research paper (scientific journal)

Variation of crystallization with arrival ratio in titanium nitride films formed by dynamic mixing method

M. Satou, K. Fujii, M. Kiuchi, F. Fujimoto

Nuclear Inst. and Methods in Physics Research, B　Vol. 39　No. 1-4　p. 166-169　1989/03/02　Research paper (scientific journal)

RBS ANALYSIS OF BEAM-PROCESSED MICROAREA BY FOCUSED MEV ION-BEAM

A KINOMURA, M TAKAI, T MATSUO, S UJIIE, S NAMBA, M SATOU, M KIUCHI, K FUJII, T SHIOKAWA

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 39　No. 1-4　p. 40-42　1989/03　Research paper (scientific journal)

Film formation of dititanium nitride by the dynamic mixing method

Masato Kiuchi, Kanenaga Fujii, Hiroshi Miyamura, Kohei Kadono, Mamoru Satou, Fuminori Fujimoto

Nuclear Inst. and Methods in Physics Research, B　Vol. 37-38　No. C　p. 701-703　1989/02/02　Research paper (scientific journal)

INFLUENCE OF EXCITATION-CURRENT DEVIATION OF A QUADRUPOLE MAGNET ON BEAM SPOT SIZE FOR MEV MICROBEAMS

M TAKAI, A KINOMURA, T MATSUO, S NAMBA, M SATOU, M KIUCHI, K FUJII

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS　Vol. 37-8　p. 244-247　1989/02　Research paper (scientific journal)

OPTIMIZATION IN SPOT SIZES OF FOCUSED MEV ION-BEAM BY PRECISE ADJUSTMENT OF LENS-CURRENT EXCITATIONS

A KINOMURA, M TAKAI, T MATSUO, M KIUCHI, K FUJII, M SATOU, S NAMBA

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS　Vol. 27　No. 7　p. L1346-L1348　1988/07　Research paper (scientific journal)

Microstructure of titanium nitride films produced by the dynamic mixing method

Kiuchi Masato, Fujii Kanenaga, Tanaka Toshimitsu, Satou Mamoru, Fuminori Fujimoto

Nuclear Inst. and Methods in Physics Research, B　Vol. 33　No. 1-4　p. 649-652　1988/06/02　Research paper (scientific journal)

Formation of TiN film on high carbon-high chromium steel by ion beam implanted vapor deposition(IVD) and its wear resistance.

SHIMOMURA Junichi, KIMURA Tatsumi, UEDA Syuzo, SATOU Mamoru, FUJII Kanenaga, KIUCHI Masato

Genba Panfuretto　Vol. 39　No. 10　p. 630-635　1988

Surface Modification by Ion Beam Mixing

Kanenaga Fujii, Masato Kiuchi, Akiyoshi Chayahara, Mamoru Satou

Journal of the Society of Materials Science, Japan　Vol. 37　No. 421　p. 1131-1138　1988　Research paper (scientific journal)

Titanium nitride crystal growth with preferred orientation by dynamic mixing method

Masato Kiuchi, Masato Tomita, Kanenaga Fujii, Mamoru Satou, Ryuichi Shimizu

Japanese Journal of Applied Physics　Vol. 26　No. 6A　p. 938-940　1987　Research paper (scientific journal)