Relationship between the kernel size of a convolutional layer and the optical point spread function in ghost imaging using deep learning for identifying defect locations

Shoma Kataoka, Yasuhiro Mizutani, Tsutomu Uenohara, Yasuhiro Takaya, Osamu Matoba

Applied Optics　Vol. 61　No. 23　p. 6714-6714　2022/08/10　Research paper (scientific journal)

Functional Optics and Systems for Smart-Measurement and Sensing

TAKAYA Yasuhiro, MIZUTANI Yasuhiro

Journal of the Japan Society for Precision Engineering　Vol. 88　No. 5　p. 363-369　2022/05/05

Structure estimation of deep neural network for triangulation displacement sensors

Y. Mizutani, S. Kataoka, Y. Nagai, T. Uenohara, Y. Takaya

CIRP Annals　2022/05　Research paper (scientific journal)

Detection of shock wave in laser ablation using a photonic nanojet

Tsutomu Uenohara, Makoto Yasuda, Yasuhiro Mizutani, Yasuhiro Takaya

Measurement: Sensors　Vol. 18　p. 100217-100217　2021/12　Research paper (scientific journal)

Shape control using hologram-assisted talbot lithography

Naoki Ura, Yasuhiro Mizutani, Ryu Ezaki, Tsutomu Uenohara, Yoshihiko Makiura, Yasuhiro Takaya

Optical Technology and Measurement for Industrial Applications Conference 2021　p. 7-7　2021/10/27　Research paper (international conference proceedings)

Ghost imaging with probability estimation using convolutional neural network: improving estimation accuracy using parallel convolutional neural network

Shoma Kataoka, Yasuhiro Mizutani, Tsutomu Uenohara, Yasuhiro Takaya

Optical Technology and Measurement for Industrial Applications Conference 2021　Vol. 78　p. 2-2　2021/10/27　Research paper (international conference proceedings)

広帯域光周波数コム散乱分光による表面トポグラフィ計測に関する基礎的研究（第4報）—VIPA分光法を用いた回折像分光における光ファイバの空間モード分散の影響

板倉 聡史, 上野原 努, 水谷 康弘, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2021A　p. 590-591　2021/09/08

フォトニックナノジェットを利用した微細加工に関する研究（第9報）—入射光の振幅分布と位相分布による強度分布の制御

上野原 努, 高田 泰成, 水谷 康弘, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2021A　p. 616-617　2021/09/08

In-Process Height Displacement Measurement Using Crossed Line Beams for Process Control of Laser Wire Deposition

Takushima Shigeru, Shinohara Nobuhiro, Morita Daiji, Kawano Hiroyuki, Mizutani Yasuhiro, Takaya Yasuhiro

International Journal of Automation Technology　Vol. 15　No. 5　p. 715-727　2021/09/05

First Step Toward Laser Micromachining Realization by Photonic Nanojet in Water Medium

Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

International Journal of Automation Technology　Vol. 15　No. 4　p. 492-502　2021/07/05　Research paper (scientific journal)

広帯域光周波数コム散乱分光による表面トポグラフィ計測に関する基礎的研究（第3報）—光周波数コムを光源とした回折像のVIPA分光

板倉 聡史, 上野原 努, 水谷 康弘, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2021S　p. 633-634　2021/03/03

Development of Ellipsometry Based on Spin Hall Effect of Light (5^th report): 2D distribution of SHEL shift for evaluation of sub-nanometer surface topography

Li Zhehan, Mizutani Yasuhiro, Uenohara Tsutomu, Tadokoro Toshiyasu, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2021S　p. 641-642　2021/03/03

タルボット効果を用いた広範囲3次元リソグラフィ（第6報）—ディープラーニングを用いた露光光波の振幅位相制御

浦 直樹, 水谷 康弘, 江崎 隆, 上野原 努, 牧浦 良彦, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2021S　p. 647-648　2021/03/03

タルボット効果を用いた広範囲3次元リソグラフィ（第5報）—斜め入射光を利用した多重露光によるナノピラー構造の作製

江崎 隆, 水谷 康弘, 浦 直樹, 上野原 努, 牧浦 良彦, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2021S　p. 583-584　2021/03/03

Ghost Imaging with Deep Learning for Position Mapping of Weakly Scattered Light Source

Yasuhiro Mizutani, Shoma Kataoka, Tsutomu Uenohara, Yasuhiro Takaya

Nanomanufacturing and Metrology　Vol. 4　No. 1　p. 37-45　2021/03　Research paper (scientific journal)

Laser micro machining using a photonic nanojet in water medium

Tsutomu Uenohara, Reza Aulia Rahman, Yasuhiro Mizutani, Yasuhiro Takaya

Proceedings of the ASME 2021 16th International Manufacturing Science and Engineering Conference, MSEC 2021　Vol. 1　2021　Research paper (international conference proceedings)

Simultaneous Measurement of Surface Shape and Film Thickness Using Polarization Entangled Photon Source: (Generation of quantum entangled photons)

IENAKA Kanta, UENOHARA Tsutomu, MIZUTANI Yasuhiro, TAKAYA Yasuhiro

The Proceedings of Mechanical Engineering Congress, Japan　Vol. 2021　2021

3D Lithography Using Talbot Effect- Controlling the Periodicity of Structures by Deep Learning -

Ura Naoki, Mizutani Yasuhiro, Uenohara Tsutomu, Makiura Yoshihiko, Takaya Yasuhiro

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　Vol. 2021.10　2021

Ghost imaging for weak light imaging by using arrival time of photon and deep learning

Yasuhiro Mizutani, Shoma Kataoka, Tsutomu Uenohara, Yasuhiro Takaya

Biomedical Imaging and Sensing Conference 2020　2020/06/15　Research paper (international conference proceedings)

In-liquid laser nanomachining by photonic nanojet in laser trapping system

Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020　2020　Research paper (international conference proceedings)

Sub-micrometer scale laser machining using position controlled photonic nanojet

Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020　2020　Research paper (international conference proceedings)

フォトニックナノジェットを用いたレーザ微細加工に関する研究 (第1報) フォトニックナノジェットの基本的加工特性

上野原努, 水谷康弘, 高谷裕浩

精密工学会誌　Vol. 86　No. 1　p. 113-119　2020/01　Research paper (scientific journal)

Comparison of intensity distribution of photonic nanojet according to Gaussian beam and radially polarization beam incidence

Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

Precision Engineering　Vol. 60　p. 274-279　2019/11　Research paper (scientific journal)

Optical in-process height monitoring measurement system for in-process control of laser metal-wire deposition

Shigeru Takushima, Daiji Morita, Nobuhiro Shinohara, Hiroyuki Kawano, Yasuhiro Mizutani, Yasuhiro Takaya

Precision Engineering　Vol. 62　p. 23-29　2019/11　Research paper (scientific journal)

(invited) High-speed ghost imaging with deep learning

Yasuhiro Mizuatni, Hiroki Taguchi, Yasuhiro Takaya

2019/11　Research paper (international conference proceedings)

3D surface measurement for tens-nanometers-scale groove using entanglement photons

Congxiang Zhang, Yasuhiro Mizutani, Yasuhiro Takaya

2019/11　Research paper (international conference proceedings)

Fabrication of Three Dimensional High Aspect Ratio Structure by Talbot Lithography

Ryu Ezaki, Yasuhiro Mizutani, Yasuhiro Takaya

2019/11　Research paper (international conference proceedings)

Laser micro machining using a photonic nanojet controlled by intensity distribution of incident laser

Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

2019/09　Research paper (international conference proceedings)

Fabrication of 3D Nano-Periodic Structure Using Multiple Exposure Lithography by Talbot Effect

Hiroki NAKANISHI, Mitsuru SHINOZAKI, Yasuhiro MIZUTANI, Yasuhiro TAKAYA

Journal of the Japan Society for Precision Engineering　Vol. 85　No. 8　p. 710-716　2019/08/05　Research paper (scientific journal)

タルボット効果による多重露光リソグラフィを用いた3 次元ナノ周期構造の作製

中西弘樹, 篠崎充, 水谷康弘, 高谷裕浩

精密工学会誌　Vol. 85　No. 8　p. 710-716　2019/08　Research paper (scientific journal)

(invited) Single Pixel imaging and its application

Yasuhiro Mizutani, Hiroki Taguchi, Otoki Yagi, Yasuhiro Takaya

2019/08　Research paper (international conference proceedings)

In-Liquid Laser Nanomachining by Photonic Nanojet in Optical Tweezers Configuration

Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

2019/06　Research paper (international conference proceedings)

Comparison of intensity distribution of photonic nanojet according to Gaussian beam and radially polarization beam incidence

Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

Precision Engineering　Vol. 60　p. 274-279　2019/04　Research paper (scientific journal)

(invited) High-speed ghost imaging with deep learning

Yasuhiro Mizutani, Otoki Yagi, Yasuhiro Takaya

2019/04　Research paper (international conference proceedings)

Fabrication of three dimensional nano-periodic structure by the Talbot lithography using multiple exposure

Hiroki Nakanishi, Yasuhiro Mizutani, Yasuhiro Takaya

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 11142　2019　Research paper (international conference proceedings)

On-machine measurement of tool edge shape by using fluorescence of cutting fluid (Examination of applicability to water-soluble cutting fluid)

Kohei MATSUMOTO, Yasuhiro MIZUTANI, Yasuhiro TAKAYA

Transactions of the JSME (in Japanese)　Vol. 85　No. 880　p. 19-00238　2019　Research paper (scientific journal)

Surface roughness detection by spin Hall effect of light with sub-nanometer resolution

Yasuhiro Mizutani, Hiroyuki Fujita, Yasuhiro Takaya

Journal of Physics: Conference Series　Vol. 1065　No. 14　2018/11/13　Research paper (international conference proceedings)

First photon ghost imaging by single photon counting

Yasuhiro Mizutani, Hiroki Taguchi, Yasuhiro Takaya

2018/11　Research paper (international conference proceedings)

Fundamental study on entangled photon probe for quantum optical metrology

Fumitake Yano, Yasuhiro Mizutani, Yasuhiro Takaya

2018/11　Research paper (international conference proceedings)

On-machine high-precision deflection measurement by multi-directional laser displacement sensor using scanning exposure method

Shigeru Takushima, Koichiro Chikahisa, Hiroyuki Kawano, Toshiaki Kurokawa, Ken Inukai, Yasuhiro Mizutani, Yasuhiro Takaya

Proceedings of 2018 ISFA - 2018 International Symposium on Flexible Automation　2018　Research paper (international conference proceedings)

Application of photonic nanojet to precise surface fabrication

Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya

Toraibarojisuto/Journal of Japanese Society of Tribologists　Vol. 63　No. 10　p. 684-689　2018　Research paper (scientific journal)

Laser micro machining using a photonic nanojet controlled by incident wavelength

Tsutomu Uenohara, Yasuhiro Takaya, Yasuhiro Mizutani

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018　p. 101-102　2018　Research paper (international conference proceedings)

Surface imaging technique by an optically trapped microsphere in air condition

Masaki Michihata, Jonggang Kim, Satoru Takahashi, Kiyoshi Takamasu, Yasuhiro Mizutani, Yasuhiro Takaya

Nanomanufacturing and metrology　Vol. 1　No. 1　p. 32-38　2018/01　Research paper (scientific journal)

(invited) Ghost imaging for single photon counting

Yasuhiro Mizutani, Hiroki Taguchi, Yasuhiro Takaya

2017/12　Research paper (international conference proceedings)

Fabrication of layered nanostructure in large area by 3D lithography using Talbot effect

Yasuhiro Mizutani, Mitsuru Shinozaki, Yasuhiro Takaya

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13　Research paper (international conference proceedings)

Precise diameter measurement of a microsphere based on polarization analysis of whispering gallery mode resonance

Masaki Michihata, Akifumi Kawasaki, Yasuhiro Takaya

Applied Mechanics and Materials　Vol. 870　p. 108-113　2017/09　Research paper (scientific journal)

Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale

Masaki Michihata, Shin-Ichi Ueda, Satoru Takahashi, Kiyoshi Takamasu, Yasuhiro Takaya

Optical Engineering　Vol. 56　No. 6　2017/06/01　Research paper (scientific journal)

Tool condition monitoring technique for deep-hole drilling of large components based on chatter identification in time-frequency domain

Masahiro Uekita, Yasuhiro Takaya

MEASUREMENT　Vol. 103　p. 199-207　2017/06　Research paper (scientific journal)

Tool condition monitoring for form milling of large parts by combining spindle motor current and acoustic emission signals

Masahiro Uekita, Yasuhiro Takaya

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY　Vol. 89　No. 1-4　p. 65-75　2017/06　Research paper (scientific journal)

Ellipsometry using the spin Hall effect of light for surface roughness detection

Hiroyuki Fujita, Yasuhiro Mizutani, Yasuhiro Takaya

ISAAT 2017 - Proceedings of the 20th International Symposium on Advances in Abrasive Technology　p. 1136-1141　2017　Research paper (international conference proceedings)

First photon detection Ghost imaging

Hiroki Taguchi, Yasuhiro Mizutani, Yasuhiro Takaya

Optics InfoBase Conference Papers　Vol. 2017　2017　Research paper (international conference proceedings)

微弱励起光による光相関を用いた蛍光イメージングに関する研究（第2報）

田口 寛樹, 水谷 康弘, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2017　p. 491-492　2017

Laser micro machining using a photonic nanojet (3rd report)

Uenohara Tsutomu, Mizutani Yasuhiro, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2017　p. 515-516　2017

Large-area nanofabrication by three-dimensional lithography using Talbot effect

Shinozaki Mitsuru, Mizutani Yasuhiro, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2017　p. 511-512　2017

Study on measurement of surface texture with optically trappedmicro-sphere (5th report)

Yamaguchi Yuki, Michihata Masaki, Mizutani Yasuhiro, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2017　p. 271-272　2017

光スピンホール効果エリプソメトリの開発（第一報）基本原理の検証

藤田 寛之, 水谷 康弘, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2017　p. 279-280　2017

Time-resolved oblique incident interferometry for vibration analysis of an ultrasonic motor

Yasuhiro Mizutani, Takayuki Higuchi, Tetsuo Iwata, Yasuhiro Takaya

International Journal of Automation Technology　Vol. 11　No. 5　p. 800-805　2017　Research paper (scientific journal)

Laser micro machining beyond the diffraction limit using a photonic nanojet

Tsutomu Uenohara, Yasuhiro Takaya, Yasuhiro Mizutani

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 66　No. 1　p. 491-494　2017　Research paper (scientific journal)

Fabrication of Morpho like structure using Talbot effect

Mitsuru Shinozaki, Yasuhiro Mizutani, Yasuhiro Takaya

2016/11　Research paper (international conference proceedings)

Laser micro processing by position control of a photonic nanojet

Tsutomu Uenohara, Yasuhiro Takaya, Yasuhiro Mizutani

2016/11　Research paper (international conference proceedings)

【invited】Ghost imaging ellipsometry

Yasuhiro Mizutani, Yasuhiro Takaya, Yukitoshi Otani

2016/11　Research paper (international conference proceedings)

Hybrid probing technique for coordinate measurement with optically trapped micro sphere

Yuki Yamaguchi, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IV　Vol. 10023　2016/10　Research paper (international conference proceedings)

Spin Hall effect of light applied in optical linear scale

Yasuhiro Mizutani, Kazunori Ueda, Yasuhiro Takaya

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IV　Vol. 10023　p. 8-22　2016/10　Research paper (international conference proceedings)

Hybrid SERS analysis of reactive nanoparticles for chemical interaction in copper CMP

Yasuhiro Takaya, Masafumi Asahi, Yasuhiro Mizutani

p. 374-377　2016/08　Research paper (international conference proceedings)

Confocal fluorescence microscopic measurement of tool wear profile with cutting fluid layer

Yasuhiro Takaya, Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani

CIRP Annals-Manufacturing Technology　Vol. 65　No. 1　p. 467-470　2016/07　Research paper (scientific journal)

Fabricating of metallic three-dimensional nanostructure using Talbot effect (1st report)

Shinozaki Mitsuru, Mizutani Yasuhiro, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 1005-1006　2016

Laser micro machining using a photonic nanojet(2nd report)

Uenohara Tsutomu, Takaya Yasuhiro, Mizutani Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 1011-1012　2016

WGM共振を利用した微小球の直径計測（第5報）

川嵜 彬史, 道畑 正岐, 高谷 裕浩, 水谷 康弘

精密工学会学術講演会講演論文集　Vol. 2016　p. 33-34　2016

Analysis of chemical polishing action in Cu-CMP with reactive nanoparticles using Raman spectroscopy enhanced by surface plasmon

Asahi Masafumi, Takaya Yasuhiro, Mizutani Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 3-4　2016

Study on measurement of surface texture with optically trapped micro-sphere (3rd report)

Yamaguchi Yuki, Michihata Masaki, Mizutani Yasuhiro, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 37-38　2016

On-machine measurement of cutting tool edge profile by confocal fluorescence detection(2nd report)

Maruno Kenji, Michihata Masaki, Mizutani Yasuhiro, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 19-20　2016

Optical probe with sub-nm resolution by the Optical Spin Hall Effect

Mizutani Yasuhiro, Ueda Kazunori, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 981-982　2016

Study on measurement of surface texture with optically trapped micro-sphere (2nd report)

Kim Jongkang, Michihata Masaki, Takaya Yasuhiro, Mizutani Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 59-60　2016

On-machine dimensional measurement of large parts by compensating for volumetric errors of machine tools

Masahiro Uekita, Yasuhiro Takaya

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY　Vol. 43　p. 200-210　2016/01　Research paper (scientific journal)

Fundamental study on novel on-machine measurement method of a cutting tool edge profile with a fluorescent confocal microscopy

Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya

International Journal of Automation Technology　Vol. 10　No. 1　p. 106-113　2016　Research paper (scientific journal)

Measurement of a tool wear profile using confocal fluorescence microscopy of the cutting fluid layer

Yasuhiro Takaya, Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 65　No. 1　p. 467-470　2016　Research paper (scientific journal)

Fluorescence microscope by using computational ghost imaging

Yasuhiro Mizutani, Kyuki Shibuya, Tetsuo Iwata, Yasuhiro Takaya

MATEC Web of Conferences　Vol. 32　2015/12/02　Research paper (international conference proceedings)

Fluorescence microscope by using computational ghost imaging

Yasuhiro Mizutani, Kyuki Shibuya, Yoshihiko Makiura, Hiroki Maruoka, Tetsuo Iwata, Yasuhiro Takaya

p. 03001-1-03001-5　2015/11　Research paper (international conference proceedings)

On-Machine Measurement of Cutting Tool Edge Profile by Detecting Fluorescence from Cutting Fluid

Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya

INTERNATIONAL SYMPOSIUM OF OPTOMECHATRONICS TECHNOLOGY (ISOT 2015)　Vol. 32　p. 03003-1-03003-5　2015/11　Research paper (international conference proceedings)

Study on nanoparticle sizing using fluorescent polarization method with DNA fluorescent probe

Terutake Hayashi, Yuki Ishizaki, Masaki Michihata, Yasuhiro Takaya, Shin-Ichi Tanaka

International Journal of Automation Technology　Vol. 9　No. 5　p. 534-540　2015/09/01　Research paper (scientific journal)

Wide-Range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere Near Surface Using Chromatic Confocal Sensor

Shin-Ichi Ueda, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

International Journal of Optomechatronics　Vol. 9　No. 2　p. 131-140　2015/04/03　Research paper (scientific journal)

Optically trapped microprobe for nano-profile measurement based on interpolation method of standing wave scale usign chromatic confocal system

Yasuhiro Takaya, Masaki Michihata, Shinichi Ueda

XXI IMEKO World Congress "Measurement in Research and Industry"　2015　Research paper (international conference proceedings)

Measurement of micro-sphere diameter based on whispering gallery mode

Masaki Michihata, Akifumi Kawasaki, Atsushi Adachi, Yasuhiro Takaya

XXI IMEKO World Congress "Measurement in Research and Industry"　2015　Research paper (international conference proceedings)

Intelligent Nano-measurement as a Driving Force of Metrology and Innovation

TAKAYA Yasuhiro

Journal of the Japan Society for Precision Engineering　Vol. 81　No. 10　p. 911-914　2015

Laser micro machining using a photonic nanojet (1st report)

Uenohara Tsutomu, Takaya Yasuhiro, Mizutani Yasuhiro, Michihata Masaki

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 395-396　2015

WGM共振を利用した微小球の直径計測（第4報）

足立 篤, 道畑 正岐, 川嵜 彬史, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2015　p. 127-128　2015

光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定（第５報）

上田 真一, 道畑 正岐, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2015　p. 121-122　2015

DNAの相補性を用いたマイクロ部品自律的組み立てに関する研究（第3報）

田代 裕之, 林 照剛, 道畑 正岐, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2015　p. 133-134　2015

WGM共振を利用した微小球の直径計測（第3報）

川嵜 彬史, 道畑 正岐, 足立 篤, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2015　p. 125-126　2015

Development of laser processing system using femtosecond pulse train with coherent phonon excitation

Ogiku Takahiro, Hayashi Terutake, Michihata Masaki, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 129-130　2015

Study on chemical interaction analysis of reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy

Ryota Murai, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata

Key Engineering Materials　Vol. 625　p. 332-338　2015　Research paper (international conference proceedings)

Nanoparticle sizing method based on fluorescence anisotropy analysis

Terutake Hayashi, Yuki Ishizaki, Masaki Michihata, Yasuhiro Takaya, Shin-Ichi Tanaka

Measurement: Journal of the International Measurement Confederation　Vol. 59　p. 382-388　2015　Research paper (scientific journal)

Measurement of axial position of a microsphere using chromatic confocal system for probe system based on the laser trapping with the standing wave scale

Shin-ichi Ueda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

PROCEEDINGS OF 2014 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)　p. 223-227　2014/11　Research paper (international conference proceedings)

Fundamental study for measuring microflow with Michelson interferometer enhanced by external random signal

Masaki Michihata, Phong Tran Dang, Terutake Hayashi, Yasuhiro Takaya

JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING　Vol. 8　No. 4　p. 1-11　2014/10　Research paper (scientific journal)

Study on measurement of nanoparticles size based on fluorescence polarization (2nd report) -A novel nanoparicle sizing method based on rotational diffusion coefficient for fluorescent DNA probe-

Terutake HAYASHI, Yuki ISHIZAKI, Masaki MICHIHATA, Yasuhiro TAKAYA, Shinichi TANAKA

Journal of the Japan society for precision engineering　Vol. 80　No. 10　p. 956-960　2014/10　Research paper (scientific journal)

Feasibility study for optical micro-coordinate measurement based on fluorescence signal

Masaki Michihata, Ayano Fukui, Kenji Maruno, Terutake Hayashi, Yasuhiro Takaya

2014/09　Research paper (international conference proceedings)

Study on laser processing by using pulse train beam with oscillation of coherent phonon (1st Report) -Development of the system for generating pulse train and time resolved evaluation of the pulse train beam-

Terutake HAYASHI, Yusuke FUKUTA, Masaki MICHIHATA, Yasuhiro TAKAYA

Journal of the Japan society for precision engineering　Vol. 80　No. 9　p. 214-219　2014/09　Research paper (scientific journal)

Study on Laser Processing by Using Pulse Train Beam with Oscillation of Coherent Phonon (1st Report)

HAYASHI Terutake, FUKUTA Yusuke, MICHIHATA Masaki, TAKAYA Yasuhiro

Journal of the Japan Society for Precision Engineering　Vol. 80　No. 9　p. 867-872　2014/09　Research paper (scientific journal)

Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes

Masaki Michihata, Terutake Hayashi, Atsushi Adachi, Yasuhiro Takaya

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 63　No. 1　p. 469-472　2014/08　Research paper (scientific journal)

Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe

Masaki Michihata, Kosuke Takami, Terutake Hayashi, Yasuhiro Takaya

Advanced Optical Technologies　Vol. 3　No. 4　p. 417-423　2014/08/01　Research paper (scientific journal)

Study on surface processing using femto pulse train beam -Processing by using double pulse train beam-

Terutake Hayashi, Yusuke Fukuta, Masaki Michihata, Yasuhiro Takaya

2014/06　Research paper (international conference proceedings)

Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system

M. Michihata, A. Fukui, T. Hayashi, Y. Takaya

MEASUREMENT SCIENCE AND TECHNOLOGY　Vol. 25　No. 6　2014/06　Research paper (scientific journal)

Laser trapping technique in-air by using periodic structured surface substrate

Masaki MICHIHATA, Terutake HAYASHI, Yasuhiro TAKAYA

Journal of the Japan society for precision engineering　Vol. 80　No. 4　p. 382-387　2014/04　Research paper (scientific journal)

Study on measurement of nanoparticles size based on fluorescence polarization (1st report) -Development of rotational diffusion coefficient measurement system using fluorescent DNA probe-

Yuki ISHIZAKI, Terutake HAYASHI, Masaki MICHIHATA, Yasuhiro TAKAYA

Journal of the Japan society for precision engineering　Vol. 80　No. 2　p. 214-219　2014/02　Research paper (scientific journal)

Copper surface planarization process using polyglycerol-functionalized diamond nanoparticles

Ryota MURAI, Yasuhiro TAKAYA, Terutake HAYASHI, Masaki MICHIHATA, Naoki KOMATSU

J. Jpn. Abras. Technol.　Vol. 58　No. 2　p. 97-102　2014/02　Research paper (scientific journal)

Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

PROCEEDINGS OF 2014 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)　p. 200-204　2014　Research paper (international conference proceedings)

B008 Enhancement of sensing resolution for minute refractive index change of micro flow by light interferometer using stochastic resonance

TRAN P.D., MICHIHATA M., HAYASHI T., TANAKA Y.

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　Vol. 2013　No. 7　p. 187-191　2013/11

Study on material removal mechanism by reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectrometry

Ryota Murai, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo

2013/11　Research paper (other academic)

Study on surface processing process by using femto-second pulse train beam with excitation of coherent phonon

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, Yusuke Fukuta

2013/10

Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance

Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

Lecture Notes in Electrical Engineering　Vol. 306　p. 63-72　2013/10　Research paper (international conference proceedings)

Fundamental investigation for Stochastic metrology with multi-sensors for micro-system technology: In case of optical path length

Masaki Michihata, Tran Dang Phong, Terutake Hayashi, Yasuhiro Takaya

2013/09

Development of nanoparticles sizing method based on fluorescence polarization

Yuki Ishizaki, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

2013/09

Coordinate measurement of a microstructure using an optically trapped microprobe with two types of probing mode

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

2013/09

Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance

Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya

2013/07

Surface detection of vertical sidewall by measuring fluorescent signal for three dimensional shape measurement of microstructures

Ayano Fukui, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

2013/07

Fundamental study on chemical mechanical polishing of copper wafer surface using water-soluble fullerenol as a functional molecule

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

2013/06

Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013)　Vol. 8769　2013/04　Research paper (international conference proceedings)

Study on surface processing process by using femtosecond pulse train beam with excitation of coherent phonon

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, Yusuke Fukuta

Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013　p. 540-544　2013　Research paper (international conference proceedings)

Self-assembly of Micro components using complementary DNA sequence (Second report):Discussion on simultaneous positioning of multiple micro components

Tashiro Hiroyuki, Hayashi Terutake, Michihata Masaki, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 513-514　2013

Study on laser trapping with diffracted beam for manipulating micro-parts (1st report):Experimental investigation for fundamental trapping properties

Michihata Masaki, Hayashi Terutake, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 397-398　2013

Three-dimensional Shape Measurement of Micro-trench by Fluorescence Detection:Property of Fluorescence Signal detected from Vertical Sidewall

Fukui Ayano, Michihata Masaki, Hayashi Terutake, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 359-360　2013

Development of laser processing system using femtosecond pulse train with coherent phonon excitation(1st Report):Time-resolved measurement of femtosecond dynamics of coherent lattice oscillations

Ohgiku Takahiro, Hayashi Terutake, Michihata Masaki, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 273-274　2013

Scanning measurement of 3-dimentional surface based on the laser trapping based probe with the standing wave scale (3rd report):Investigation of errors in scale interpolation

Ueda Shinichi, Michihata Masaki, Hayashi Terutake, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 355-356　2013

Diameter measurement of a microsphere using WGM resonances(1st report):Influence of coupling conditions to resonance peaks

Adachi Atsushi, Michihata Masaki, Hayashi Terutake, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 67-68　2013

Visualization for Minute Refractive Index Change of Micro Flow by Light Interferometer based on Stochastic Resonance (1st report):- Verification of Measuring Principle -

Tran Phong Dang, Michihata Masaki, Hayashi Terutake, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 73-74　2013

デジタルホログラフィを用いたリアルタイム3次元計測（キーノートスピーチ）

林 照剛, 道畑 正岐, 高谷 裕浩

精密工学会学術講演会講演論文集　Vol. 2013　p. 621-622　2013

Surface analysis of the chemical polishing process using a fullerenol slurry by Raman spectroscopy under surface plasmon excitation

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Ryota Murai, Kazumasa Kano

CIRP Annals - Manufacturing Technology　Vol. 62　No. 1　p. 571-574　2013　Research paper (scientific journal)

New Technique for Single-Beam Gradient-Force Laser Trapping in Air

Masaki Michihata, Tada-aki Yoshikane, Terutake Hayashi, Yasuhiro Takaya

International Journal of Optomechatronics　Vol. 7　No. 1　p. 46-59　2013　Research paper (scientific journal)

Development of a novel surface processing system using femtosecond pulse train

Yusuke Fukuta, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

Key Engineering Materials　Vol. 523-524　p. 220-225　2012/11　Research paper (scientific journal)

A novel batch fabrication of micro parts using DNA pattern recognition

Masafumi Yasuda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

Key Engineering Materials　Vol. 523-524　p. 598-603　2012/11　Research paper (scientific journal)

Development of an optical heterogeneity evaluation system using phase-shift digital holography

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

Key Engineering Materials　Vol. 523-524　p. 865-870　2012/11　Research paper (scientific journal)

Mode selective probing method of micro trench structure using optically trapped probe

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani

2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)　2012/10　Research paper (international conference proceedings)

Improvement of laser trapping based microprobe for measuring vertical surface

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Journal of Advanced Mechanical Design, Systems, and Manufacturing　2012/09　Research paper (scientific journal)

Improvement of laser trapping based microprobe in laser shaded condition

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Journal of Advanced Mechanical Design, Systems and Manufacturing　Vol. 6　No. 6　p. 764-770　2012/09

Dimensional measurement of microform with high aspect ratio using an optically controlled particle with sensing standing wave scale

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani

CIRP Annals -Manufacturing Technology-　Vol. 61　No. 1　p. 479-482　2012/08　Research paper (scientific journal)

Scanning measurement of step height and freeform surface by using optically trapped microsphere

Masaki Michihata, Yasuhiro Takaya, Taisuke Washitani, Terutake Hayashi

Proc. the 12th euspen international conference　2012/06

Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarisation

Terutake Hayashi, Yasuhiro Takaya, Masaki Michihata

International Journal of Nanomanufacturing　Vol. 8　No. 5/6　p. 54-66　2012/02　Research paper (scientific journal)

Development of nano particle sizing system using fluorescence polarization

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, Kok Foong Lee

20th IMEKO World Congress 2012　Vol. 3　p. 2137-2141　2012　Research paper (international conference proceedings)

Selective trapping of the stylus of laser trapping based probe on microscopic surface structure(1st report):Adhesion force reduction and optical force enhancement by using microscopic structure

Yoshikane Tadaaki, Michihata Masaki, Hayashi Terutake, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2012　p. 491-492　2012

Scanning measurement of 3-dimensional surface based on the laser trapping based probe with the standing wave scale (1st report):Simplified model for probe sphere motion

Michihata Masaki, Takaya Yasuhiro, Hayashi Terutake

Proceedings of JSPE Semestrial Meeting　Vol. 2012　p. 971-972　2012

Micro assembly using DNA pattern recognition

Yasuda Masafumi, Hayashi Terutake, Michihata Masaki, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2012　p. 865-866　2012

New technique of single-beam gradient-force laser trapping in air condition

Masaki Michihata, Tadaaki Yoshikane, Terutake Hayashi, Yasuhiro Takaya

2012 International Symposium on Optomechatronic Technologies, ISOT 2012　2012　Research paper (international conference proceedings)

Evaluation of optical heterogeneity using phase-shift digital holography

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

International Journal of Nanomanufacturing　Vol. 8　No. 5-6　p. 508-521　2012　Research paper (scientific journal)

Total angle-resolved scattering: characterization of microlens mold surface

Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

Procedia Engineering　Vol. 19　2011/12　Research paper (scientific journal)

Optically controlled surface sensing probe enhanced by radially polarized laser beam

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Proc. The 6th LEM21　Vol. 2011　No. 6　p. "3231-1"-"3231-4"　2011/11　Research paper (international conference proceedings)

In-situ Raman analysis of chemical reaction for copper-CMP using water-soluble fullerenol

Kazumasa Kano, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo

Proc. The 4th ASPEN　2011/11　Research paper (international conference proceedings)

Damping nature of vibrated surface-sensing probe controlled by optical radiation pressure

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Proc. LMPMI2011　Vol. 2156　p. 65-71　2011/09　Research paper (international conference proceedings)

Profile measurement using standing wave trapping

Taisuke Washitani, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

Proc. SPIE　Vol. 8097　2011/08　Research paper (international conference proceedings)

Development of in-situ evaluation system for monitoring the size of nanoparticles based on fluorescence polarization

Kok Foong Lee, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya

Proc. ISMTII2011　2011/07　Research paper (international conference proceedings)

DNA autonomous joint for micro self-assembly

Terutake Hayashi, Masaki Michihata, Masafumi Yasuda, Yasuhiro Takaya

Proceedings of the 11th euspen International Conference　2011/05　Research paper (international conference proceedings)

Scanning type microprobe for displacement measurement based on standing wave detection using an optically trapped particle

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

International Journal of Automation Technology　Vol. 5　No. 3　p. 395-402　2011/05　Research paper (scientific journal)

Measurement of micro figure using microprobe for coordinate metrology controlled by optical radiation

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

ICOMM2011　2011/03　Research paper (international conference proceedings)

The high precision measurement of the minute shape by the UA3P series

Yokaichiya Motoo, Funabashi Takanori, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 878-879　2011

Development of the interatomic bond processing system by femto pulse shaping

Fukuta Yusuke, Hayashi Terutake, Michihata Masaki, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 387-388　2011

Laser trapping based surface sensing probe using Brownian motion for nano-coordinate measurement

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

ICMT　2010/11　Research paper (international conference proceedings)

Measurement of Micro Fine Figure Using Radiation Pressure Controlled Micro-Displacement Sensor

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

CIRP HPC　2010/10　Research paper (international conference proceedings)

Coordinate measurement of micro groove on MEMS device by optically controlled microprobe

Mitsutoshi Kobayashi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

2010 International Symposium on Optomechatronic Technologies, ISOT 2010　2010/10　Research paper (international conference proceedings)

Microprobe for coordinate metrology controlled by optical radiation pressure

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Mitsutoshi Kobayashi

COMS　2010/09　Research paper (international conference proceedings)

Development of In-Process Evaluation for Microlens Mold Using AngleResolved Scattering System

TERUTAKE Hayashi, YUKI Nakatsuka, YASUHIRO Takaya

Key Engineering Materials　Vol. 447-448　p. 595-598　2010/07　Research paper (international conference proceedings)

Surface Inspection of Micro Glass Lens Mold Based on Total Angle Resolved Scattering Characterization

Terutake Hayashi, Yasuhiro Takaya, Naohiro Motoishi, Yuki Nakatsuka

International Journal of Automation Technology　Vol. 4　No. 5　p. 432-432　2010/05　Research paper (scientific journal)

Editorial: Advances in measurement technology and intelligent instruments for manufacturing engineering

Yongsheng Gao, Wei Gao, Yasuhiro Takaya, Michael Krystek

International Journal of Advanced Manufacturing Technology　Vol. 46　No. 9-12　p. 843-844　2010/02　Research paper (scientific journal)

Structuralization of metal nanoparticles by photoinduced aggregation

Kok Foong Lee, Terutake Hayashi, Yasuhiro Takaya

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010　p. 366-369　2010　Research paper (international conference proceedings)

Evaluation technology of micro three-dimensional structure using phase-shifting digital holography

Yoshiaki Kiyama, Terutake Hayashi, Yasuhiro Takaya

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010　p. 547-550　2010　Research paper (international conference proceedings)

Innovative Manufacturing Based on Converging Technology Driven by Intelligent Nano-measurement

TAKAYA Yasuhiro

Journal of the Japan Society for Precision Engineering　Vol. 76　No. 10　p. 1117-1120　2010

Microdisplacement sensor using an optically trapped microprobe based on the interference scale

M. Michihata, T. Hayashi, D.Nakai, Y. Takaya

Review of Scientific Instruments　Vol. 81　No. 1　2010/01　Research paper (scientific journal)

Measurement of axial and transverse trapping stiffness of optical tweezers in air using a radially polarized beam

M. Michihata, T. Hayashi, Y. Takaya

Applied Optics　Vol. 48　No. 32　p. 6143-6151　2009/11　Research paper (scientific journal)

Building an ambient fluid analysis around日本機械学会論文集C編 nm oscillated laser trapping probe

Shimpei TANAKA, Yasuhiro TAKAYA, Terutake HAYASHI

Journal of Japan Society for Mechanical Engineer Series C　Vol. 75　No. 757　p. 2453-2455　2009/10　Research paper (scientific journal)

Dynamic properties of a micro-sphere optically trapped in air by radially polarized laser beam

M.Michihata, Y.Takaya, T.Hayashi

Proceedings of SPIE　Vol. 7400　2009/08　Research paper (international conference proceedings)

Novel contact probing method using single fiber optical trapping probe

Sang In Eom, Yasuhiro Takaya, Terutake Hayashi

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY　Vol. 33　No. 3　p. 235-242　2009/07　Research paper (scientific journal)

3D microfabrication of silver nanoparticle composite having mesoporous structure(To be published)

Terutake HAYASHI, Yasuhiro TAKAYA, Kenji SHIRAI

Proceedings of the European Society for Precision Engineering and Nanotechonology 2009 (EUSPEN)　2009/06　Research paper (international conference proceedings)

Study on the copper-chemical mechanical polishing method using water-soluble fullerenol slurry -Investigation of polishing performance-

Hideyuki TACHIKA, Yasuhiro TAKAYA, Terutake HAYASHI, Hiroki TANADA, Ken KOKUBO, Keisuke SUZUKI

Journal of the Japan Society for Precision Engineering　Vol. 75　No. 4　p. 489-495　2009/04　Research paper (scientific journal)

Probing technique using circular motion of a microsphere controlled by optical pressure for a nanocoordinate measuring machine

Masaki Michihata, Yuto Nagasaka, Terutake Hayashi, Yasuhiro Takaya

Applied Optics　Vol. 48　No. 2　p. 198-205　2009/01/10　Research paper (scientific journal)

Study on the position detection method using the single fiber optical trapping probe

Sang In Eom, Yasuhiro Takaya, Terutake Hayashi

Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009　2009　Research paper (international conference proceedings)

Micro/Nano Three-Dimensional Fabrication Using Fine Particles Aggregation in Elastic Resin

HAYASHI Terutake, TAKAYA Yasuhiro, OKABE Hiromichi, BABA Atsushi

Journal of the Japan Society for Precision Engineering　Vol. 75　No. 10　p. 1227-1232　2009

S1303-1-1 Non-contact evaluation for aspherical microlens mold using light scattering

HAYASHI Terutake, TAKAYA Yasuhiro, MOTOISHI Naohiro

The proceedings of the JSME annual meeting　Vol. 2009　p. 267-268　2009

SPECIAL ISSUE: ADVANCES IN INTELLIGENT NANO-MEASUREMENT TECHNOLOGY

Gao Wei, Takamasu Kiyoshi, Takaya Yasuhiro, Takahashi Satoru

INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING　Vol. 3　No. 3　p. 157-159　2009

Fundamental study on the position detection signal analysis for the fibre optical trapping probe

S. I. Eom, T. Hayashi, Y. Takaya

INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING　Vol. 3　No. 3　p. 208-226　2009　Research paper (scientific journal)

NANO-DIMENSIONAL MEASUREMENT USING OPTICALLY TRAPPED PROBE ENHANCED BY INTERFEROMETRIC SCALE

Masaki Michihata, Daisuke Nakai, Terutake Hayashi, Yasuhiro Takaya

XIX IMEKO WORLD CONGRESS: FUNDAMENTAL AND APPLIED METROLOGY, PROCEEDINGS　p. 1929-1934　2009　Research paper (international conference proceedings)

Performance of water-soluble fullerenol as novel functional molecular abrasive grain for polishing nanosurfaces

Y. Takaya, H. Tachika, T. Hayashi, K. Kokubo, K. Suzuki

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 58　No. 1　p. 495-498　2009　Research paper (scientific journal)

光放射圧プローブを用いたナノCMMの開発

高谷裕浩

計測と制御　Vol. 47　No. 9　p. 744-750　2008/09

Advances in measurement technology and intelligent instruments for production engineering

Wei Gao, Yasuhiro Takaya, Yongsheng Gao, Michael Krystek

Measurement Science and Technology　Vol. 19　No. 8　2008/08/01　Research paper (scientific journal)

Nano position sensing based on laser trapping technique for flat surfaces

M. Michihata, Y. Takaya, T. Hayashi

MEASUREMENT SCIENCE AND TECHNOLOGY　Vol. 19　No. 8　2008/08　Research paper (scientific journal)

In-situ particle sizing system to visualizing the self-assembly process

Satoshi Ota, Terutake Hayashi, Yasuhiro Takaya

Proceedings of SPIE　2008/06　Research paper (international conference proceedings)

Study on the Cogging Torque Reduction Method of the Motors Using a Rotary Lamination Process

AKITA Hiroyuki, NAKAHARA Yuji, FURUSAWA Kimiyasu, YOSHIOKA Takashi, TAKAYA Yasuhiro

Journal of the Japan Society of Precision Engineering　Vol. 74　No. 5　p. 525-529　2008/05/05

A novel CMP process using the size-controllable poly-hydroxylated fullerene cluster

Hideyuki TACHIKA, Yasuhiro TAKAYA, Terutake HAYASHI, Ken KOKUBO, Keisuke SUZUKI, Kenji SHIRAI

2008/05　Research paper (international conference proceedings)

LCD Microstereolithography of Photosensitive Resin with Functional Particles

Terutake HAYASHI, Yasuhiro TAKAYA, Dongkeon Lee

Int. J. of Automation Technology　2008/03　Research paper (scientific journal)

光放射圧を利用したナノCMMマイクロプローブ

高谷裕浩

精密工学会誌　2008/03

3404 Study on ultra-planarization process using water-soluble fullerenol : the 2nd report

TACHIKA Hideyuki, TAKAYA Yasuhiro, HAYASHI Tezutake, KOKUBO Ken

The proceedings of the JSME annual meeting　Vol. 2008　p. 251-252　2008

3403 Study of 3D coordinate measurement by using the micro-probe controlled by the optical radiation pressure

MICHIHATA Masaki, TAKAYA Yasuhiro, HAYASHI Terutake, NAKAI Daisuke

The proceedings of the JSME annual meeting　Vol. 2008　p. 249-250　2008

In-situ evaluation of nanoparticle diameter for visualizing self-assembly process

Satoshi Ota, Terutake Hayashi, Yasuhiro Takaya

NINTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY, PTS 1 AND 2　Vol. 7155　2008　Research paper (international conference proceedings)

光応用マイクロ・ナノ加工計測技術

高谷裕浩

機械の研究　2008/01

計測・測定の現状と今後の動向

高谷裕浩

型技術　2008/01

Development of the nano-probe system based on the laser-trapping technique

M. Michihata, Y. Takaya, T. Hayashi

CIRP Annals - Manufacturing Technology　Vol. 57　No. 1　p. 493-496　2008　Research paper (scientific journal)

Numerical Analysis of Fluid Resistance Exerted on Vibrating Micro-Sphere Controlled by Optical Radiation Pressure

Shimpei Tanaka, Yasuhiro Takaya, Terutake Hayashi

OPTICAL TRAPPING AND OPTICAL MICROMANIPULATION V　Vol. 7038　2008　Research paper (international conference proceedings)

FUNDAMENTAL STUDY FOR DEVELOPING THE NANO-CMM WITH A MICRO PROBE BASED ON OPTICAL FORCE DYNAMICS

Yasuhiro Takaya

2007/11　Research paper (international conference proceedings)

A Study on a Fluorescence Polarization Measurement Using Grid Irradiation from LCD

Terutake Hayashi, Yasuhiro Takaya, Hiroki Akase

2007/11　Research paper (international conference proceedings)

Measurement of oscillating condition for 3D probing accuracy of microparts using the laser trapping probe for the nano-CMM

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi, Takashi Miyoshi

International Symposium on Measurement Technology and Intelligent Instruments 2007(ISMTII) in Sendai Japan,　2007/10　Research paper (international conference proceedings)

微細加工用マイクロ工具の光応用ナノ計測

高谷裕浩

機械技術　2007/10

Study on Particle Detection for Patterned Wafers by Annular Evanescent Light Illumination (2nd Report) –Scanning Measurement Method Processing SELFPs-

Toshie YOSHIOKA, Takashi MIYOSHI, Yasuhiro TAKAYA

Journal of the Japan Society for Precision Engineering　Vol. 73　No. 6　p. 648-652　2007/06　Research paper (scientific journal)

インプロセス/オンマシン・ナノ計測技術の新展開

高谷裕浩

機械技術　2007/06

Development of On-machine Micro Tool Measurement Device using Laser Diffraction

Khajornrung-ruang Panart, Kimura Keiichi, Miyoshi Takashi, Takaya Yasuhiro, Ueda Masahiro

Proceedings of JSPE Semestrial Meeting　Vol. 2007S　p. 305-306　2007

3513 A Study on LCD Micro Stereolithography using metal filler

OKABE Hiromichi, TAKAYA Yasuhiro, MIYOSHI Takashi, HAYASHI Terutake

The proceedings of the JSME annual meeting　Vol. 2007　p. 243-244　2007

3511 Study on ultra-planarization process using poly-hydroxylated fullerene

TACHIKA Hideyuki, TAKAYA Yasuhiro, MIYOSHI Takashi, HAYASHI Terutake

The proceedings of the JSME annual meeting　Vol. 2007　p. 239-240　2007

Circular motion control of an optically trapped microprobe for nano-position sensing

Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi

OPTICAL TRAPPING AND OPTICAL MICROMANIPULATION IV　Vol. 6644　2007　Research paper (international conference proceedings)

超微細形状・精密加工を支援するオンマシン・ナノ計測技術の開発動向

高谷裕浩

機械技術　Vol. 54　No. 13　p. 24-28　2006/12

Study on LCD Micro Stereolithography using Silver Particles Photosensitive Resin

LEE Dongkeon, MIYOSHI Takashi, HAYASHI Terutake, TAKAYA Yasuhiro, OKABE Hiromichi

Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers　Vol. 72　No. 11　p. 1411-1415　2006/11　Research paper (scientific journal)

Novel CMP Technique for Copper Surface Finishing with Fullerene Nano-Particle

Hiroki Tanada, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi, Keiichi Suzuki

Proceedings of ASPE 21st Annual Meeting(ASPE'06)　2006/10　Research paper (international conference proceedings)

Study on Defect Detection in Thin Film Layer of SOI Wafer by Using Infrared Evanescent Light : Analysis of Evanescent field on SOI Layer

NAKAJIMA Ryusuke, MIYOSHI Takashi, TAKAYA Yasuhiro

Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers　Vol. 72　No. 6　p. 785-790　2006/06/05

小径工具切れ刃プロファイルの光回折オンマシン計測に関する研究の測定実験)

K. パナート, 三好 隆志, 高谷 裕浩, 原田 孝, 砂金 総一郎

日本機械学会論文集(C編)　Vol. 72　No. 718　p. 1730-1737　2006/06　Research paper (scientific journal)

LCD Micro Stereolithography of Conductive Micro Shapes using Silver Particles Photosensitive Resin

Dongkeon Lee, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi

Proceedings of the 7th International Symposium on Laser Precision Microfabrication　2006/05　Research paper (international conference proceedings)

Nano surface texture evaluation of micro lens mold using light scattering pattern

Terutake Hayashi, Takashi Miyoshi, Yasuhiro Takaya, Kenji Shirai

Proceeding of the 6th international conference and 8th annual general meeting of the european society for precision engineering and nanotechnology　2006/05　Research paper (international conference proceedings)

Micro Endmill Cutting–edge Profile Measurement for On–machine Monitoring using Laser Diffraction

Khajornrungruang Panart, Kimura Keiichi, Miyoshi Takashi, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting　Vol. 2006S　p. 1103-1104　2006

Measurement of patterned wafer surface defects using annular evanescent light illumination method

Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya

18th IMEKO World Congress 2006: Metrology for a Sustainable Development　Vol. 2　p. 1473-1477　2006　Research paper (international conference proceedings)

1513 Evaluation for surface texture of micro lens mold using non-contact light scattering method

HAYASHI Terutake, TAKAYA Yasuhiro, MIYOSHI Takashi

The proceedings of the JSME annual meeting　Vol. 2006　p. 79-80　2006

Evaluation of laser trapping probe properties for coordinate measurement

Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi

OPTOMECHATRONIC SENSORS, INSTRUMENTATION, AND COMPUTER-VISION SYSTEMS　Vol. 6375　2006　Research paper (international conference proceedings)

A novel surface finishing technique for microparts using an optically controlled

Y. Takaya, K. Hida, T. Miyoshi, T. Hayashi

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 55　No. 1　p. 613-616　2006　Research paper (scientific journal)

The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping

Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi

OPTICAL TRAPPING AND OPTICAL MICROMANIPULATION III　Vol. 6326　2006　Research paper (international conference proceedings)

3D Surface Measurement Technology of Micropart with Nano-tolerances

TAKAYA Yasuhiro

Journal of the Surface Finishing Society of Japan　Vol. 56　No. 12　p. 780-786　2005/12/01

Study on LCD Micro Stereolithography using Ceramic Nanoparticles Reinforced

Dongkeon LEE, Takashi MIYOSHI, Yasuhiro TAKAYA, Taeho HA, Terutake HAYASHI

Journal of the Japan Society for Precision Engineering　Vol. 71　No. 11　p. 1415-1420　2005/11　Research paper (scientific journal)

New Mass Measurement Method of Aerosol Particle Using Vibrating Probe Particle Controlled by Radiation Pressure

Tatsuo Hariyama, Yasuhiro Takaya, Takashi Miyoshi

SPIE　2005/10　Research paper (scientific journal)

On-Machine Tool Measurement for Cutting-Edge Profile of Micro Endmill using Laser Diffraction

Panart KHAJORNRUNGRUANG, Takashi MIYOSHI, Yasuhiro TAKAYA, Takashi HARADA, Soichiro ISAGO

Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century　Vol. 2005.2　p. 351-356　2005/10　Research paper (international conference proceedings)

Study on the Nano-CMM Probe based on Laser Trapping Technology using an Optical Fiber - Fundamental Analysis of the Optical Fiber Trapping

Sang In EOM, Yasuhiro TAKAYA, Takashi MIYOSHI

Proceedings of The 3nd International Conference on Leading Edge Manufacturing in 21st Century　2005/10　Research paper (other academic)

Nano-finishing Using a Micro-particle Controlled by Optical Radiation Force

Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi

Proceedings of the 20th American Society for Precision Engineering Annual Meeting　2005/10　Research paper (international conference proceedings)

Micro-stereolithography of Dot Shape for Lightguide Using LCD Grayscale Mask

Hideaki Imahori, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi

Proceedings of the 20th American Society for Precision Engineering Annual Meeting　2005/10　Research paper (international conference proceedings)

Particulate Nano-defects Detection for Patterned Wafers using Evanescent Light Illumination Method

Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya, Kenji Shirai

Proceedings of 5th international conference and 7th annual general meeting of the european society for precision engineering and nanotechnology　2005/06　Research paper (other academic)

3D Microfabrication of Ceramic Nanoparticles Photosensitive Resin using LCD Microstereolithography

Dongkeon Lee, Takashi Miyoshi, Yasuhiro Takaya, Taeho Ha

Proceedings of the 6th International Symposium on Laser Precision, Microfabrication　2005/04　Research paper (international conference proceedings)

Laser-assisted CMP for copper wafer

Taeho Ha, Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya

Materials Science Forum　Vol. 502　p. 351-356　2005/03　Research paper (scientific journal)

2624 3D Cutting edge profile measurement of micro endmill by means of laser diffraction gauge method

TAKAYA Yasuhiro, KHAJORNRUNGRUANG Panart, HAYASHI Terutake, MIYOSHI Takashi

The proceedings of the JSME annual meeting　Vol. 2005　p. 85-86　2005

Particle detection for patterned wafers of 100nm design rule by evanescent light illumination - Analysis of evanescent light scattering using Finite-Difference Time-Domain (FDTD) method

Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 6049　2005　Research paper (international conference proceedings)

Novel nano-defect measurement method of SOI wafer using evanescent light

Ryusuke Nakajima, Takashi Miyoshi, Yasuhiro Takaya

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 6013　2005　Research paper (international conference proceedings)

Detection of defects on the surface of a cam shaft using laser scattering method

S. Dejima, T. Miyoshi, Y. Takaya, Y. Maeno

7th International Symposium on Measurement Technology and Intelligent Instruments　Vol. 13　p. 36-39　2005　Research paper (international conference proceedings)

Development of an evanescent light measurement system for si wafer microdefect detection

S Takahashi, R Nakajima, T Miyoshi, Y Takaya, K Takamasu

MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI　Vol. 295-296　p. 15-20　2005　Research paper (scientific journal)

Laser scattering measurement of microdefects on silicon oxide wafer

T Ha, T Miyoshi, Y Takaya, S Takahashi

MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI　Vol. 295-296　p. 3-8　2005　Research paper (scientific journal)

Dynamic properties measurement of vibrating microprobe for nano-position sensing using radiation pressure control

Yasuhiro Takaya, Keijiro Imai, Shuichi Dejima, Takashi Miyoshi

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 5930　p. 1-8　2005　Research paper (international conference proceedings)

Nano-position sensing using optically motion-controlled microprobe with PSD based on laser trapping technique

Y Takaya, K Imai, S Dejima, T Miyoshi

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 54　No. 1　p. 467-470　2005　Research paper (scientific journal)

On-Machine Cutting Edge Profile Measurement for Micro Milling Tool - 1st Report, Laser Diffraction Gauge Method and its Verifications -

Panart KHAJORNRUNGRUANG, Takashi MIYOSHI, Yasuhiro TAKAYA, Takashi HARADA, Soichiro ISAGO

Journal of The Japan Society of Mechanical Engineers (JSME) Series C　Vol. 70　No. 700　p. 3556-3563　2004/11　Research paper (scientific journal)

High-Precision On-Machine 3-D Shape Measurement using Hypersurface Calibration Method

Taeho Ha, Yasuhiro Takaya, Takashi Miyoshi, Shingo Ishizuka

SPIE　Vol. 5603　p. 40-50　2004/10　Research paper (scientific journal)

Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control

Yasuhiro Takaya, K. Imai, Taeho Ha, Takashi Miyoshi

CIRP ANNALS　Vol. 53　No. 1　p. 421-424　2004/08　Research paper (scientific journal)

Fundamental Properties of Chemical Mechanical Polishing for Copper Layer Assisted by Optical Radiation Pressure

Ryosuke TSUJIO, Takashi MIYOSHI, Yasuhiro TAKAYA, Keiichi KIMURA

JSME International Journal　Vol. 47　No. 1　p. 85-92　2004/06　Research paper (scientific journal)

Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

Atsushi Taguchi, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

Precision Engineering　Vol. 28　No. 2　p. 152-163　2004/04　Research paper (scientific journal)

On-Machine Profile Measurement of Micro Diameter Tool cutting Edge by Means of Laser Diffraction (2nd Report) -Error Analysis of Tool Rotation Runout-

Proceedings of JSPE Semestrial Meeting　Vol. 2004S　p. 401-401　2004

Position sensitivity of micro probe with transverse: Vibration using optical trap

Keijiro Imai, Y. Takaya, T. Miyoshi, T. Ha, K. Rimura

VDI Berichte　No. 1844　p. 277-472　2004　Research paper (international conference proceedings)

Microfabrication of overhanging shape using LCD microstereolithography

Gohki Oda, Takashi Miyoshi, Yasuhiro Takaya, H. A. Taeho, Keiichi Kimura

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 5662　p. 649-654　2004　Research paper (international conference proceedings)

測定点群データからの自由曲面生成（共著）

後藤孝行, 高谷裕浩, 三好隆志

型技術　Vol. 19　No. 13　2004

実体モデルの測定点群データへの自由曲面あてはめ処理（共著）

後藤孝行, 高谷裕浩, 三好隆志

型技術　Vol. 18　No. 13　p. 66-67　2003/12

Lazer Diffraction Edge Profile Method of Micro Cutting Tool for On-Machine Measurement

Khajournrungruang, P, Takashi Miyoshi, Yasuhiro Takaya, Takashi Harada, Soichiro Isago

Proceedings of International Conference on Leading Edge Manufacturing in 21st Century　Vol. 2003　p. 113-118　2003/11　Research paper (international conference proceedings)

A Robust Measurement for Tooth Form Ggrinding Works of a Helical Gear

Takashi Harada, Takashi Miyoshi, Yasuhiro Takaya

Proceedings of International Conference on Leading Edge Manufacturing in 21st Century　Vol. 2003　p. 107-112　2003/11　Research paper (international conference proceedings)

Size Determination of Microscratches on Silicon Oxide Wafer Surface Using Scattered Light

Taeho HA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

Journal of the International Societies for Precision Engineering and Nanotechnology　Vol. 27　No. 3　p. 265-272　2003/07　Research paper (scientific journal)

Phase retrieval profilometer for in-process measurement of 3D microstructure surfaces

Taguchi Atsushi, Yamakita H, Takaya Y, Miyoshi T, Takahashi S

Optelectronics, Instrumentation and Data Processing　Vol. 39　No. 5　p. 16-24　2003/04　Research paper (scientific journal)

Measurement and machining in microfabrication based on radiation pressure control

Yasuhiro TAKAYA, Takashi MIYOSHI, Satoru TAKAHASHI

Journal of OPTICS AND PRECISION ENGINEERING　2003/02　Research paper (scientific journal)

On-machine Profile Measurement of Micro Diameter Tool Cutting Edge by Means of Laser Diffraction (1st Report) -Development of Three Dimensional Cutting-edge Profile Measurement System-

Proceedings of JSPE Semestrial Meeting　Vol. 2003S　p. 449-449　2003

Rotational Micromachining Tool Controlled by Optical Radiation Pressure

Yasuhiro Hidaka, Takashi Miyoshi, Yasuhiro Takaya, Tetsuo Sasaki, Kenji Shirai

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 5063　p. 238-241　2003　Research paper (international conference proceedings)

Fundamental Study on CMP Process Controlled with Optical Radiation Pressure, Journal of the Japan Society for Precision Engineering

Keiichi KIMURA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

Journal of the Japan Society for Precision Engineering　Vol. 69　No. 1　p. 89-89　2003/01　Research paper (scientific journal)

Three Dimensional Microforming by Means of Stereolithography using LCD Mask

TAKAYA Yasuhiro

Journal of The Society of Instrument and Control Engineers　Vol. 41　No. 11　p. 803-806　2002/11/10

Si Wafer SurfaceInspection Technique for Next-generation Semiconductor Using Infrared Evanescent Wave

Satoru TAKAHASHI, Takashi MIYOSHI, Yasuhiro TAKAYA, Mitsunori FUJITA, Ryusuke NAKAJIMA

Proceeding of the International Conference on Designing of Interfacial Structures in Advanced Materials and their Joints (DIS'02), (2002), 353-358　2002/11　Research paper (other academic)

New planarization method assisted by aggregated particles created with optical radiation pressure

Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

Proceedings of 19th International VLSI multilevel interconnection conference (VMIC), (2002) 139　2002/11　Research paper (other academic)

New Optical Measurement Technique for Si Wafer Surface Defects Using Annular Illumination with Crossed Nicols

Satoru TAKAHASHI, Takashi MIYOSHI, Yasuhiro TAKAYA, Takahiro ABE

Proceedings of the 17th American Society for Precision Engineering Annual Meeting (ASPE'02), (2002), 41-46　2002/10　Research paper (other academic)

Corrective Planarization Method Using Chemical Mechanical Polishing Assisted by Laser Particle Trapping

Keiichi KIMURA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

2002/10　Research paper (other academic)

The Microprobe for Nano-Positional Detection Using Optically Forced Vibrationi Method

Yasuhiro TAKAYA, Masatoshi NISHIKAWA, Satoru TAKAHASHI, Takashi MIYOSHI

Proceedings of the 17th American Society for Precision Engineering Annual Meeting (ASPE'02), (2002), 367-372　2002/10　Research paper (other academic)

New Chemical Mechanical Polishing Method Assisted by Laser Particle Trapping

Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

Proceedings of 7th International Symposium on Chemical-Mechanical Polishing (2002)　2002/08　Research paper (other academic)

Study on Laser Microstructure Fabrication Using Colloidal Particles Contrlled by Radiation Pressure

Yasuhiro TAKAYA, Keiichi KIMURA, Satoru TAKAHASHI, Takashi MIYOSHI

Proceedings of 2002 Japan-USA Symposium on Flexible Automation, (2002) 759-765　2002/07　Research paper (other academic)

Study on In-Process Measurement of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern (2nd Report) : Fast Defect Measurement Method using LSDP

TAKAHASHI Satoru, MIYOSHI Takashi, TAKAYA Yasuhiro, TATSUNO Yasufumi

Journal of the Japan Society for Precision Engineering　Vol. 68　No. 7　p. 962-966　2002/07　Research paper (scientific journal)

Evaluation of Microdefects on SiO2 Filmed Wafer Surface form the Scattering Light

Taeho HA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

2002/05　Research paper (other academic)

Novel Measurement Method for Nano-Defects of Si Wafer Surface Using Evanescent Wave

Ryusuke NAKAJIMA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI, Mitsunori Fujita

Proceedings of the 3rd International Conference and 4th General Meeting of the european society for precision engineering and nanotechnology (euspen'02), (2002) 485-488　2002/05　Research paper (other academic)

Optical inverse scattering phase method for nano-inprocess measurement of micro surface profile

A. Taguchi, T. Miyoshi, Y. Takaya, S. Takahashi

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 4900　No. 2　p. 739-746　2002　Research paper (international conference proceedings)

Optical inverse scattering phase method for nano-inprocess measurement of micro surface profile

A Taguchi, T Miyoshi, Y Takaya, S Takahashi

SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2　Vol. 4900　p. 739-746　2002　Research paper (international conference proceedings)

Probing technique for microparts using optically trapped particle by annular beam

M Nishikawa, Y Takaya, S Takahashi, M Uekita, T Miyoshi

INTERNATIONAL SYMPOSIUM ON PHOTONICS IN MEASUREMENT　Vol. 1694　p. 103-108　2002　Research paper (international conference proceedings)

Development of Automatic Light Scattering Measurement System for Si Wafer Microdefects

Taeho HA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

Proceedings of the 4th International Symposium on Advances in Abrasive Technology-Intelligent Machining of the Components for Information Technology (ISAAT'01), (2001) 383-386　2001/11　Research paper (other academic)

Laser Assisted Chemical Mechanical Polishing for Planarization

Keiichi KIMURA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

Proceedings of the 16th American Society for Precision Engineering Annual Meeting (ASPE'01), (2001) 537-540　2001/10　Research paper (other academic)

FDTD Simulation of IR Evanescent Light for Nanodefects Inspection in Polished Si Wafer Subsurface

Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI

Proceedings of the 5th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII'01), (2001) 21-25　2001/09　Research paper (other academic)

New Optical Measurement Technique for Si Wafer Surface Defects Using Darkfield Optical System with Annular Laser Beam

Satoru TAKAHASHI, Takashi MIYOSHI, Yasuhiro TAKAYA

Proceedings of 5th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII'01), (2001) 13-19　2001/09　Research paper (other academic)

液晶動画像マスクを用いた非積層マイクロ光造形

高谷裕浩, 林 照剛, 三好隆志, 高橋 哲

型技術　Vol. 16　No. 9　p. 60-65　2001/08　Research paper (scientific journal)

Analysis of Defects on SiO2 filmed wafer -Evaluation of CMP Defect Detection Schemes using Computer simulation (BEM)

Taeho HA, Takashi MIYOSHI, Yasuhiro TAKAYA, Satoru TAKAHASHI

2001/07　Research paper (other academic)

Study on 3-Dimensional Edge Profile Measurement for Free Form Surface (1st Report) - Automatic Edge Detection by means of Optical Ring Images -

LEE Seojoon, MIYOSHI Takashi, TAKAYA Yasuhiro, TAKAHASHI Satoru

Journal of the Japan Society for Precision Engineering　Vol. 67　No. 6　p. 997-1002　2001/06　Research paper (scientific journal)

Nano-Defects Detection of Si Wafer Surface Using Evanescent Light -Computer Simulation by Means of FDTD Method

Satoru TAKAHASHI, Takashi MIYOSHI, Yasuhiro TAKAYA, Ryusuke NAKAJIMA

Proceedings of the 2nd International Conference and 3rd General Meeting of the european society for precision engineering and nanotechnology (euspen'01), (2001) 102-105　2001/05　Research paper (other academic)

液晶マスクを用いた非積層マイクロ光造形法に関する研究（第１報）－濃淡画像による非積層造形－

林 照剛, 三好隆志, 高谷裕浩, 高橋 哲

精密工学会誌，67，6（2001）997-1002　Vol. 67　No. 4　p. 632-632　2001/04　Research paper (scientific journal)

Study on nonlaminate micro stereolithography using LCD mask (1st report) - Nonlaminate fabrication using gray scale image

Terutake Hayashi, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 67　No. 4　p. 628-632　2001/04　Research paper (scientific journal)

Analysis of defects on SIO2 filmed wafer

T Ha, T Miyoshi, Y Takaya, S Takahashi

INITIATIVES OF PRECISION ENGINEERING AT THE BEGINNING OF A MILLENNIUM　p. 684-688　2001　Research paper (international conference proceedings)

High sensitivity optical detection of oriented microdefects on silicon wafer surfaces using annular illumination

T Miyoshi, S Takahashi, Y Takaya, S Shimada

CIRP ANNALS-MANUFACTURING TECHNOLOGY　Vol. 50　No. 1　p. 389-392　2001　Research paper (scientific journal)

Nano-CMM Laser Trapping Probe for Micromachine parts

Yasuhiro Takaya

2000/12

Generating Free-Form Surface from Dense 3-D Digitized Data

Takayuki Gotoh, Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

2000/11　Research paper (scientific journal)

Study on The 3-D Laser Inverse Scattering Phase Method for Evaluationg Microstructure

Yasuhiro Takaya, Atsushi Taguchi, Satoru Takahashi, Takashi Miyoshi

PROCESS CONTROL AND INSPECTION FOR INDUSTRY　Vol. 4222　p. 44-47　2000/11　Research paper (scientific journal)

Automatic Defects Measurement On Silicon Wafer Surface By Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya

American Society of Mechanical Engineers, Manufacturing Engineering Division, MED　Vol. 11　p. 209-214　2000/11　Research paper (international conference proceedings)

Dynamic Analysis of Laser Trapping on Arbitrary Shaped Particles as Micro-machining Tools

Jian Bai, Yasuhiro Takaya, Takashi Miyoshi, Satoru Takahashi

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 66　No. 11　p. 1729-1734　2000/11　Research paper (scientific journal)

Surface Fitting Based on Optical 3-D Measurement

Takayuki Gotoh, Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi, Satoru Takahashi

2000/09　Research paper (other academic)

Laser Trapping Micro-probe for Nano-CMM

Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

2000/09　Research paper (other academic)

Patterned Wafer Defects Inspection by Laser Scattering Image

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya

2000/09　Research paper (other academic)

Microcrack Evaluation using Laser Backscattering

Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

2000/09　Research paper (other academic)

液晶マスクを用いた非積層光造形法に関する研究

林 照剛, 三好隆志, 高谷裕浩, 高橋 哲

型技術　2000/08　Research paper (scientific journal)

The Laser Trapping Probe for Nano-CMM (1st Report) ---Positional Detection Principle of The Laser Trapping Probe and Its Nature---

Yasuhiro Takaya, Noriaki Sato, Satoru Takahashi, Takashi Miyoshi, Hiroki Shimizu, Manjiro Watanabe

Vol. 66　p. 1081-1081　2000/07　Research paper (scientific journal)

Free-Form Surface Fitting 3-D Digitized Data in Reverse Engineering

Takayuki GOTOH, Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI

The 8th International Conference on Rapid Prototyping　p. 56-61　2000/06　Research paper (international conference proceedings)

Direct 3D Forming Using TFT LCD Mask

Terutake Hayashi, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

2000/06　Research paper (other academic)

Nonlaminate Micro Stereolithography Using TFT LCD

Terutake Hayashi, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

2000/06　Research paper (other academic)

Non-laminate Micro Stereolithography using LCD Mask, Die \& Mold Technology

Terutake Hayashi, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

2000/06　Research paper (scientific journal)

Study on Micro-Machining Using a Small Particle Controled by Optical Radiation Pressure

Hiroki Simizu, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

Vol. 66　No. 6　p. 901-906　2000/06　Research paper (scientific journal)

Non-contact 3-D Edge Profile Measurement for Die and Mold Model Surface

Seojoon Lee, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

2000/03　Research paper (other academic)

Surface Fitting Based on Optical 3-D Measurement

TAKAYA Yasuhiro

2000

Patterned Wafer Defects Inspection by Laser Scattering Image

TAKAYA Yasuhiro

2000

Direct 3D Forming Using TFT LCD Mask

TAKAYA Yasuhiro

Proc of the 8th International Conference on Rapid Prototyping　Vol. 172　2000

Study on Micro-Machining Using a Small Particle Dontroled by Optical Radiation Pressure

TAKAYA Yasuhiro

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 66　No. 6　p. 901-906　2000　Research paper (scientific journal)

Dynamic Analysis of Laser Trapping on Arbitrary Shaped Particles as Micro-machining Tools

TAKAYA Yasuhiro

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 66　No. 11　p. 1729-1734　2000　Research paper (scientific journal)

3D micro-profile measurement using optical inverse scattering phase method

A Taguchi, T Miyoshi, Y Takaya, S Takahashi, K Saito

CIRP ANNALS 2000: MANUFACTURING TECHNOLOGY　p. 423-426　2000　Research paper (international conference proceedings)

The Laser Trapping Probe for Nano-CMM(1st Report)-Positional Detection Principle of The Laser Trapping Probe and Its Nature-

TAKAYA Yasuhiro

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 66　No. 7　p. 1081-1086　2000　Research paper (scientific journal)

Simulation for laser trapping on arbitrary shaped particles

E Bai, Y Takaya, T Miyoshi, S Takahashi

PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　p. 336-339　2000　Research paper (international conference proceedings)

Nano-positional detection using laser trapping probe for microparts

Y Takaya, S Takahashi, T Miyoshi

PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　p. 584-587　2000　Research paper (international conference proceedings)

Study of Edge Profile Measurement for 3-Dimensional Free Form Surface

Seojoon Lee, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

1999/12　Research paper (scientific journal)

Generating Free-Form Surface from Dense 3-D Digitized Data --- Closed B-spline Curve Fitting ---

Takayuki Gotoh, Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

1999/12　Research paper (scientific journal)

Computer Simulation for Laser Trapping on Micro-particles with Arbitrary Shape

Jian Bai, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　Vol. 33　No. 4　p. 363-368　1999/12　Research paper (scientific journal)

Development of Optical Ring Image Sensor for 3D Profile Measurement of Machined Surface --- Light Scattering Simulation of Metal Surface and its Verification ---

Chaoyin Nie, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi, Kazuo Yanada

Vol. 65　p. 1668-1668　1999/11　Research paper (scientific journal)

Optical Measurement of COP Defects on Silicon Wafer Surfac by Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya, Kenji Shirai, Nihon Univeri

PROCEEDINGS OF THE FOURTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　p. 344-347　1999/11　Research paper (international conference proceedings)

Studies on Generating Free-Form Surface from High-Density Measured Point Data (2nd Report) --- Method of Connection for Curve and Surfaces with Pseudo Vertices --

Takayuki Gotoh, Asahikawa National, College of Technology, Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

Vol. 65　p. 1430-1430　1999/10　Research paper (scientific journal)

Studies on In-process Measurement of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern (1st Report) --- The Characteristics of Detecting Fine Contaminations by Laser Scattered Defect Pattern ---

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya, Yasufimi Tatsuno, Fumihiko Hirata, Tamoya Kenmochi

Vol. 65　No. 9　p. 1284-1284　1999/09　Research paper (scientific journal)

Analysis of Laser Scattered Defect Pattern for Optical Measurement of Silicon Wafer Surface Defects

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya

1999/08　Research paper (other academic)

Study on Optical Ring Image Sensor for 3D Profile Measurement of Machined Metal Surface --- Light Scattering Simulation of Metal Surface and its Verification ---

Chaoyin Nie, Takashi Moyoshi, Yasuhiro Takaya, Kazuo Yanada

1999/07　Research paper (scientific journal)

In-Process Error Compensation for Involute Spur Gear Tooth Form Grinding Works

Takashi Harada, Kazuhiro Kotani, Takashi Miyoshi, Yasuhiro Takaya

1999/06　Research paper (other academic)

Fundamental Characteristics of the Laser Trapping Probe for the Nano-CMM Based on Linnik Microscope Interferometer

Yasuhiro Takaya, Noriaki Sato, Hiroki Shimizu, Satoru Takahashi, Takashi Miyoshi

1999/06　Research paper (other academic)

Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer

Yasuhiro Takaya, Hiroki Shimizu, Satoru Takahashi, Takashi Miyoshi

Measurement: Journal of the International Measurement Confederation　Vol. 25　No. 1　p. 9-18　1999　Research paper (scientific journal)

New Technologies in 19th JIMTOF --- Measurement Technique ---

Yasuhiro Takaya

1999/01

Analysis of Laser Scattered Defect Pattern for Optical Measurement of Silicon Wafer Surface Defects

TAKAYA Yasuhiro

1999

Study on micro-machining using optical radiation pressure

H Shimizu, T Miyoshi, Y Takaya, S Takahashi

PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS　p. 199-202　1999　Research paper (international conference proceedings)

Fundamental Characteristics of The Laser Trapping Probe for The Nano-CMM Based on Linnik Microscope Interferometer

TAKAYA Yasuhiro

1999

Studies on In-process Measurement of Silicon Wafer Surface Defects by Laser Scattred Defect Pattern(1sr Report)-The Characteristics of Detecting Fine Contaminations by Laser Scattered Defect Pattern-

TAKAYA Yasuhiro

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 65　No. 9　p. 1284-1289　1999　Research paper (scientific journal)

Development of the nano-CMM probe based on laser trapping technology

Y Takaya, S Takahashi, T Miyoshi, K Saito

CIRP ANNALS 1999 - MANUFACTURING TECHNOLOGY　p. 421-424　1999　Research paper (international conference proceedings)

Fundamental Study on The New Probe Technique for The Nano-CMM based on The Laser Trapping and Mirau Interferometer

TAKAYA Yasuhiro

1999　Research paper (scientific journal)

Study of 3-Dimensional Edge Profile Measurement for Free Form Surface by Optical Ring Image Sensor

Seojoon Lee, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

1998/12　Research paper (scientific journal)

Physical Model Measuring and Composite Patches Fitting on Style Design

Takayuki Gotoh, Asahikawa National, College of Technology, Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

1998/12　Research paper (scientific journal)

Design Model Based In-process Measuring Method of a Three-Dimensional Micro-profile by Employing the Laser Inverse Scattering Phase Reconstruction Method

Yasuhiro Takaya, Kazuhiro Wake, Motoki Izukura, Satoru Takahashi, Takashi Miyoshi

THREE-DIMENSIONAL IMAGING, OPTICAL METROLOGY, AND INSPECTION IV　Vol. 3520　p. 170-179　1998/11　Research paper (scientific journal)

Optical Radiation Pressure Micro-machining Using Diamond Grain

Takashi Miyoshi, Hiroki Simizu, Yasuhiro Takaya

1998/10　Research paper (other academic)

Development of a New Optical Ring Image Sensor for 3D Free Form Metal Surface --- Computer Simulation of Metal Rough Surface Scattering ---

Chaoyin Nie, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

1998/10　Research paper (other academic)

Study on 3-Dimensional Edge Profile Measurement for Free Form Surface by Optical Ring Image Sensor

Seojoon Lee, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi, Kenji Shirai, Nihon University

Proc.int.Conf.Computer-Aided Production Engineering　Vol. 367　1998/09　Research paper (other academic)

Fitting and Connecting Free-Form Surfaces onto Digitized Data in Reverse Engineering

Takayuki Gotoh, Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi

1998/09　Research paper (other academic)

Profile Estimation of Ultra-precision Diamond Turned Surfaces by Laser Diffraction Method

Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

1998/09　Research paper (other academic)

Development of Silicon Wafer Surface Defects Measurement System Based on Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya

1998/09　Research paper (other academic)

Develpment of the Laser Trapping Probe for the Three Dimentional Coordinate Measurement of Micro Parts

Yasuhiro Takaya, Seiji Tsuiji, Hiroki Shimizu, Satoru Takahashi, Takashi Miyoshi

1998/09　Research paper (other academic)

In-prcess Meaurement Method for Detection and Discrimination of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya, Katsumasa Saito, Gumma Polytechnic College

CIRP ANNALS 1998 - MANUFACTURING TECHNOLOGY, VOL 47, NO 1　Vol. 47　p. 459-462　1998/07　Research paper (scientific journal)

Study of 3D-Dimensional Edge Profile Measurement for Free Form Surface by Optical Ring Image Sensor ---Examination of Edge-Line Detection---

Seojoon Lee, Yasuhiro Takaya, Takashi Miyoshi, Satoru Takahashi, Takayuki Gotoh, Asahikawa National, College of Technology

1998/07　Research paper (scientific journal)

Perspective in 21 Century on Measurement and Control --- Expectation for the New Wave in Measurement Technique

Yasuhiro Takaya

1998/04

Discrimination of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern

Fumihiko Hirata, Yasufumi Tatsuno, Satoru Takahashi, Yasuhiro Takaya, Takashi Miyoshi

Journal of Japan Society of Grinding Engineers　Vol. 42　No. 2　p. 85-86　1998/02　Research paper (scientific journal)

Discrimination of Silicon Wafer Surface Defects by Laser Scattered Defect Patterm

Fumihiko HIRATA, Yasufumi TATSUNO, Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI

Journal of Japan Society of Grinding Engineers　Vol. 42　No. 2　p. 85-86　1998/02　Research paper (scientific journal)

Studies on Generating Free-Form Surfaces from High-Density Measured Point Data (1st Report) --- A Proposal of Boundary High-Density Measuring and Character-Area Extracting ---

Takayuki Gotoh(Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi

1998/01　Research paper (scientific journal)

Studies on Generating Free-Form Surfaces from High-Density Measured Point Data(! st Report)- A proposal of Boundary High-Density measuring and Character-Area Extracting-

TAKAYA Yasuhiro

Vol. 64　No. 1　p. 84-84　1998　Research paper (scientific journal)

Overview of Non-contact Measurement Technique for Three Dimensional Free Form Objects in the Reverse Engineering

Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi, Takayuki Gotoh(Asahikawa National College of Technology

1997/12　Research paper (scientific journal)

Fundamental Study on New Micro-Polishing Technique for Fine Die and Mold

Hiroki Simizu, Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi

1997/12　Research paper (scientific journal)

Characteristics of Optical Ring Image Displacement Sensor for Free Form Metal Surface

Chaoyin Nie, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

PROCEEDINGS OF THE 2ND CHINA-JAPAN SYMPOSIUM ON MECHATRONICS　p. 295-300　1997/09　Research paper (international conference proceedings)

Free Form Surface Fitting onto Dense Measured Point Data for Reverse Engineering

Takayuki Gotoh(Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi

1997/08　Research paper (other academic)

B-spline Boundary Courve Interpolation Based on The Phantom Vertices Techniques for Free Form Surface Fitting of Digitized Data

Takayuki Gotoh(Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi

1997/07　Research paper (scientific journal)

3D Profile On-machine Measurement Using Optical Ring Image Sensor

Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi, Seojoon Lee

1997/07　Research paper (other academic)

Inspection and Discrimination of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyohsi, Yasuhiro Takaya

1997/06　Research paper (other academic)

Study on The Laser Trapping Probe for The Nano-CMM

Yasuhiro Takaya, Satoru Takahashi, Takashi Miyoshi, Katsumasa Saito

1997/06　Research paper (other academic)

Free Form Surface Fitting onto Dense Measured Point Data for Reverse Engineering

TAKAYA Yasuhiro

1997

3D Profile On-machine Measurement Using Optical Ring Image Sensor

TAKAYA Yasuhiro

1997

Inspection And Discrimination of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern

TAKAYA Yasuhiro

1997

Fandamental Study on New Micro-Polishing Technique for Fine Die and Mold

TAKAYA Yasuhiro

1997　Research paper (scientific journal)

Study on B-Spline Surface Fitting onto Dence Measured Point Data -- Method of Setting Knot Location and Parameter with Considering Curvature --

Takehiko Edamitsu, Osaka, Gas Engineering Co, Yasuhiro Takaya, Takashi Miyoshi, Takayuki Gotoh, Asahikawa National, College of Technology, Satoru Takahashi

Vol. 62　p. 1426-1426　1996/10　Research paper (scientific journal)

Study on Nano-inprocess Measurement of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern

Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya

Proc, of ISMT'2　p. 243-250　1996/10　Research paper (other academic)

B-Spline Curve Fitting of Non-Contact 3-D Digitizing Data by Taking Curvatures into Consideration

Takayuki Gotoh, Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi

1996/10　Research paper (other academic)

The Laser Inverse Scattering Method for Measuring a Micro-profile in Micromachining Process

Yasuhiro Takaya, Takashi Miyoshi, Satoru Takahashi

4TH INTERNATIONAL IMEKO SYMPOSIUM ON LASER METROLOGY FOR PRECISION MEASUREMENT AND INSPECTION IN INDUSTRY, PROCEEDINGS　p. 45-54　1996/10　Research paper (international conference proceedings)

The state of Standarization of Inspection and Measurement on Factory Automation

Yasuhiro Takaya

Vol. 14　No. 8　p. 18-24　1996/08

Free Form Surface Fitting of Digitized Data Based on B-spline Curve Fitting and Coons Patch Generation

Yasuhiro Takaya, Takayuki Gotoh, Asahikawa National, College of Technology, Takashi Miyoshi

1996/07　Research paper (scientific journal)

Study on Micro-machined Profile Measurement by Means of Optical Inverse Scattering Reconstruction Phase Method -- Phase Retrieval of Periodic Fine Profile --

Takashi Miyoshi, Yasuhiro Takaya, Koichi Kinoshita, Satoru Takahashi, Takayuki Nagata, Matsushita Electric Industrial Co

Vol. 62　No. 7　p. 958-958　1996/07　Research paper (scientific journal)

Micromachined Profile Measurement by Means of Optical Inverse Scattering Phase Method

Takashi Miyoshi, Yasuhiro Takaya, Katsumasa Saito

CIRP Annals - Manufacturing Technology　Vol. 45　No. 1　p. 497-500　1996　Research paper (scientific journal)

Study on B-Spline Surface Fitting onto Dense Measured Point Data -Method of Setting Knot Location and Parameter with Considering Curvature-

TAKAYA Yasuhiro

Journal of the Japan Society for Precision Engineering　Vol. 62　No. 10　p. 1425-1429　1996　Research paper (scientific journal)

Study on Micro-machined Profile Measurement by means of Optical Inverse Scattering Reconstruction Phase Method-Phase Retrieval of Periodic Fine Profile-

TAKAYA Yasuhiro

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　Vol. 62　No. 7　p. 958-963　1996　Research paper (scientific journal)

Study on Automated Inspection of Surface Defects of Injection Mold In Polishing Process -- Optical Image Plane Speckle Measurement --

Yasuhiro Takaya, Takashi Miyoshi

Vol. 10　p. 78-79　1995/12　Research paper (scientific journal)

Free Form Fitting of Measured Point Data for Reverse Engineering

Takayuki Gotoh, Asahikawa National, College of Technology, Yasuhiro Takaya, Takashi Miyoshi, Fumiharu Takahashi, OKADA Co

1995/12　Research paper (scientific journal)

Fundamental Study on In-process Measurement of Micromachined Form Based on The Inverse Scattering Phase Reconstruction

Yasuhiro Takaya, Takashi Miyoshi

1995/11　Research paper (other academic)

Study On Nano-Inprocess Measurement of Defects On The Silicon Wafer Surface

Yasuhiro Takaya

1995/09

Development of Multi-Functional Measuring System using Optical Ring Image 3D Profile Sensor

Yasuhiro Takaya, Noboru akizawa, TT Co, Takashi Miyoshi, Takayuki Gotoh, Asahikawa National, College of Technology

1995/07　Research paper (scientific journal)

The state And Future Of Standardization On Inspection And Measurement

Yasuhiro Takaya

1995/07

Calibration Method of Optical System Roughness Error for the Random Micro-Roughness Measuring Apparatus

Yasuhiro Takaya, Takashi Miyoshi, Masatoshi Arai, TOKYO SEIMITSU Co, Kazushi Hayashi, TOKYO SEIMITSU Co, Masafumi Setaka, TOKYO, SEIMITSU Co

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　Vol. 29　No. 1　p. 86-87　1995/03　Research paper (scientific journal)

Development of Random Micro-Roughness Measuring Apparatus based on Fraunhofer Diffraction -- Subnanometer Measurements by the New Error Calibration Method --

Yasuhiro Takaya, Takashi Miyoshi, Masaroshi Arai, TOKYO SEIMITSU Co, Kazushi Hayashi, TOKYO SEIMITSU Co, Masafumi Setaka, TOKYO, SEIMITSU Co

Journal of the Japan Society of Precision Engineering　Vol. 61　No. 3　p. 377-381　1995/03　Research paper (scientific journal)

Development Of Non-Contact Profile Sensor for 3-D Free Form Surface (3rd Report) -- Optical Ring Image 3-D Profile Sensor --

Takashi Miyoshi, Yasuhiro Takaya, Noboru Takizawa, NTT Co, Ryota Fukuzawa, Shimadzu Co

Journal of the Japan Society of Precision Engineering　Vol. 61　No. 2　p. 258-262　1995/02　Research paper (scientific journal)

Development of Automated Polishing Apparatus for Injection Mold Based on the Knowledge of Expert

TAKAYA Yasuhiro

Vol. 39　No. 1　p. 29-32　1995　Research paper (scientific journal)

Nanometer Measurement of Silicon Wafer Surface Texture Based on Fraunhofer Diffraction Pattern

Takashi Miyoshi, Yasuhiro Takaya, Katsumasa Saito

CIRP Annals - Manufacturing Technology　Vol. 44　No. 1　p. 489-492　1995　Research paper (scientific journal)

Development of Automated Polishing Apparatus for Injection Mold Based on the Knowledge of Expert

TAKAYA Yasuhiro

Vol. 39　No. 1　p. 29-32　1995　Research paper (scientific journal)

Development of Non-contact Profile Sensor for 3-D Free-form Surfaces(3rd Report)-Optical Ring Image 3-D Profile Sensor-

TAKAYA Yasuhiro

Journal of the Japan Society of Precision Engineering　Vol. 61　No. 2　p. 258-262　1995　Research paper (scientific journal)

B-Spline Curve Fitting onto Measured Point Data under Consideration of Curvature

TAKAYA Yasuhiro

Vol. 60　No. 7　p. 964-964　1994　Research paper (scientific journal)

Optical ring-image 3-D profile sensor

Takashi Miyoshi, Yasuhiro Takaya

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 2101　p. 1014-1024　1993/09/22　Research paper (international conference proceedings)

Estimation of the size parameters of fine rectangular grooves based on fraunhofer diffraction

Takashi Miyoshi, Yasuhiro Takaya

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 1720　p. 586-597　1992　Research paper (international conference proceedings)

Fundamental Study for Measurement of the Size Parameters of Fine Grooves based on Fraunhofer Diffraction-Analysis and Measurement of Rectangular Groove-

TAKAYA Yasuhiro

Vol. 57　No. 11　p. 2041-2047　1991　Research paper (scientific journal)

Measurement of Ultra-fine Random Surface Roughness Based on Fraunhofer Diffraction

TAKAYA Yasuhiro

Journal of the Japan Society of Precision Engineering　Vol. 56　No. 2　p. 373-380　1990　Research paper (scientific journal)