High-precision finishing method for narrow-groove channel-cut crystal x-ray monochromator using plasma chemical vaporization machining with wire electrode

Shotaro Matsumura, Iori Ogasahara, Taito Osaka, Makina Yabashi, Kazuto Yamauchi, Yasuhisa Sano

Review of Scientific Instruments　Vol. 95　No. 1　2024/01/01　Research paper (scientific journal)

High-pressure plasma etching up to 9 atm toward uniform processing inside narrow grooves of high-precision X-ray crystal optics

Shotaro Matsumura, Iori Ogasahara, Masafumi Miyake, Taito Osaka, Daisetsu Toh, Jumpei Yamada, Makina YABASHI, Kazuto Yamauchi, Yasuhisa Sano

Applied Physics Express　Vol. 17　No. 1　2023/12/02　Research paper (scientific journal)

Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching

Daisetsu Toh, Kiyoto Kayao, Kazuto Yamauchi, Yasuhisa Sano

CIRP Journal of Manufacturing Science and Technology　Vol. 47　p. 1-6　2023/12　Research paper (scientific journal)

Catalyst enhancement approach for improving the removal rate and stability of silica glass polishing via catalyzed chemical etching in pure water

Daisetsu Toh, Kiyoto Kayao, Pho Van Bui, Kouji Inagaki, Yoshitada Morikawa, Kazuto Yamauchi, Yasuhisa Sano

Precision Engineering　Vol. 84　p. 21-27　2023/11　Research paper (scientific journal)

Ultimate condensation of hard X-ray free-electron laser reaching single-nanometre focus size and 1022 W/cm2 intensity

Jumpei Yamada, Satoshi Matsuyama, Ichiro Inoue, Taito Osaka, Takato Inoue, Nami Nakamura, Yuto Tanaka, Yuichi Inubushi, Toshinori Yabuuchi, Kensuke Tono, Kenji Tamasaku, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Kazuto Yamauchi

2023/10/26

Femtosecond Reduction of Atomic Scattering Factors Triggered by Intense X-Ray Pulse

Ichiro Inoue, Jumpei Yamada, Konrad J. Kapcia, Michal Stransky, Victor Tkachenko, Zoltan Jurek, Takato Inoue, Taito Osaka, Yuichi Inubushi, Atsuki Ito, Yuto Tanaka, Satoshi Matsuyama, Kazuto Yamauchi, Makina Yabashi, Beata Ziaja

Physical Review Letters　Vol. 131　No. 16　2023/10/17　Research paper (scientific journal)

Bias-assisted photoelectrochemical planarization of GaN (0001) with impurity concentration distribution

D. Toh, K. Kayao, R. Ohnishi, A. I. Osaka, K. Yamauchi, Y. Sano

AIP Advances　Vol. 13　No. 9　2023/09/01　Research paper (scientific journal)

Propagation-based phase-contrast imaging method for full-field X-ray microscopy using advanced Kirkpatrick–Baez mirrors

Yuto Tanaka, Jumpei Yamada, Takato Inoue, Takashi Kimura, Mari Shimura, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi, Satoshi Matsuyama

Optics Express　Vol. 31　No. 16　p. 26135-26135　2023/07/21　Research paper (scientific journal)

Role of Photoelectrochemical Oxidation in Enabling High-Efficiency Polishing of Gallium Nitride

Kiyoto Kayao, Daisetsu Toh, Kazuto Yamauchi, Yasuhisa Sano

ECS Journal of Solid State Science and Technology　Vol. 12　No. 6　p. 063005-063005　2023/06/01　Research paper (scientific journal)

High-Speed Plasma Etching of Gallium Oxide Substrates Using Atmospheric-Pressure Plasma with Hydrogen-Helium Mixed Gas

Yasuhisa Sano, Taiki Sai, Genta Nakaue, Daisetsu Toh, Kazuto Yamauchi

Solid State Phenomena　Vol. 342　p. 69-72　2023/05/25　Research paper (scientific journal)

High-speed etching of gallium nitride substrate using hydrogen-contained atmospheric-pressure plasma

Yasuhisa Sano, Genta Nakaue, Daisetsu Toh, Jumpei Yamada, Kazuto Yamauchi

Applied Physics Express　Vol. 16　No. 4　p. 045504-045504　2023/04/01　Research paper (scientific journal)

Wide field-of-view x-ray imaging optical system using grazing-incidence mirrors

Satoshi Matsuyama, Takato Inoue, Kentaro Hata, Haruhito Iriyama, Kazuto Yamauchi

Applied Optics　Vol. 61　No. 35　p. 10465-10465　2022/12/06　Research paper (scientific journal)

Hard x-ray intensity autocorrelation using direct two-photon absorption

Taito Osaka, Ichiro Inoue, Jumpei Yamada, Yuichi Inubushi, Shotaro Matsumura, Yasuhisa Sano, Kensuke Tono, Kazuto Yamauchi, Kenji Tamasaku, Makina Yabashi

Physical Review Research　Vol. 4　No. 1　p. L012035-L012035　2022/03/18　Research paper (scientific journal)

High-throughput deterministic plasma etching using array-type plasma generator system

Yasuhisa Sano, Ken Nishida, Ryohei Asada, Shinya Okayama, Daisetsu Toh, Satoshi Matsuyama, Kazuto Yamauchi

Review of Scientific Instruments　Vol. 92　No. 12　p. 125107-125107　2021/12/01　Research paper (scientific journal)

Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yoshio Ichii, Yasuhisa Sano, Xianbo Shi, Deming Shu, Max D. Wyman, Ross Harder, Yoshiki Kohmura, Makina Yabashi, Lahsen Assoufid, Tetsuya Ishikawa, Kazuto Yamauchi

Review of Scientific Instruments　Vol. 92　No. 12　p. 123706-123706　2021/12/01　Research paper (scientific journal)

Nondeteriorating Verwey Transition in 50 nm Thick Fe<inf>3</inf>O<inf>4</inf>Films by Virtue of Atomically Flattened MgO Substrates: Implications for Magnetoresistive Devices

Ai I. Osaka, Daisetsu Toh, Kazuto Yamauchi, Ken Hattori, Xiaoqian Shi, Fangzhun Guo, Hidekazu Tanaka, Azusa N. Hattori

ACS Applied Nano Materials　Vol. 4　No. 11　p. 12091-12097　2021/11/26　Research paper (scientific journal)

Fabrication of atomically smooth polycrystalline surface without grain boundary steps by using catalyst referred etching method

Toh Daisetsu, Bui Van Pho, Matsuyama Satoshi, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2021A　p. 115-116　2021/09/08

Hard X-ray nanoprobe scanner

Jumpei Yamada, Ichiro Inoue, Taito Osaka, Takato Inoue, Satoshi Matsuyama, Kazuto Yamauchi, Makina Yabashi

IUCrJ　Vol. 8　No. 5　p. 713-718　2021/09/01　Research paper (scientific journal)

X-ray adaptive zoom condenser utilizing an intermediate virtual focus

Satoshi Matsuyama, Hiroyuki Yamaguchi, Takato Inoue, Yuka Nishioka, Jumpei Yamada, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Optics Express　Vol. 29　No. 10　p. 15604-15604　2021/05/10　Research paper (scientific journal)

Photoelectrochemical Oxidation Assisted Catalyst-Referred Etching for SiC (0001) Surface

Daisetsu Toh, Pho Van Bui, Kazuto Yamauchi, Yasuhisa Sano

International Journal of Automation Technology　Vol. 15　No. 1　p. 74-79　2021/01/05　Research paper (scientific journal)

High-Speed Etching of Silicon Carbide Wafer Using High-Pressure SF6 Plasma

Yasuhisa Sano, Koki Tajiri, Yuki Inoue, Risa Mukai, Yuma Nakanishi, Satoshi Matsuyama, Kazuto Yamauchi

ECS Journal of Solid State Science and Technology　Vol. 10　No. 1　p. 014005-014005　2021/01/01　Research paper (scientific journal)

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

Jumpei Yamada, Takato Inoue, Nami Nakamura, Takashi Kameshima, Kazuto Yamauchi, Satoshi Matsuyama, Makina Yabashi

Sensors　Vol. 20　No. 24　p. 7356-7356　2020/12/21　Research paper (scientific journal)

Development of precision Wolter mirrors towards PhoENiX mission for the Sun

Taro Sakao, Satoshi Matsuyama, Jumpei Yamada, Takato Inoue, Kentaro Hata, Hiroyuki Yamaguchi, Taku Hagiwara, Nami Nakamura, Kazuto Yamauchi, Yoshiki Kohmura, Yoshinori Suematsu, Noriyuki Narukage

Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray　2020/12/13　Research paper (international conference proceedings)

High surface laser-induced damage threshold of SrB4O7 single crystals under 266-nm (DUV) laser irradiation

Yasunori Tanaka, Ryota Murai, Yoshinori Takahashi, Tsuyoshi Sugita, Daisetsu Toh, Kazuto Yamauchi, Sora Aikawa, Haruki Marui, Yuji Umeda, Yusuke Funamoto, Tomosumi Kamimura, Melvin John F. Empizo, Masayuki Imanishi, Yusuke Mori, Masashi Yoshimura

Optics Express　Vol. 28　No. 20　p. 29239-29239　2020/09/28　Research paper (scientific journal)

Focus characterization of an X-ray free-electron laser by intensity correlation measurement of X-ray fluorescence

Nami Nakamura, Satoshi Matsuyama, Takato Inoue, Ichiro Inoue, Jumpei Yamada, Taito Osaka, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Journal of Synchrotron Radiation　Vol. 27　No. 5　p. 1366-1371　2020/09/01　Research paper (scientific journal)

High-resolution micro channel-cut crystal monochromator processed by plasma chemical vaporization machining for a reflection self-seeded X-ray free-electron laser

Shotaro Matsumura, Taito Osaka, Ichiro Inoue, Satoshi Matsuyama, Makina Yabashi, Kazuto Yamauchi, Yasuhisa Sano

Optics Express　Vol. 28　No. 18　p. 25706-25706　2020/08/31　Research paper (scientific journal)

Improvement of Metal-Insulator Phase Transition in Ultra-thin Fe3O4 Film Grown on MgO Substrate Flattened by Catalyst-referred Etching

Osaka Ai, Toh Daisetsu, Yamauchi Kazuto, Sano Yasuhisa, Tanaka Hidekazu, Hattori Azusa

Proceedings of JSPE Semestrial Meeting　Vol. 2020A　p. 187-188　2020/08/20

Generation of an X-ray nanobeam of a free-electron laser using reflective optics with speckle interferometry

Takato Inoue, Satoshi Matsuyama, Jumpei Yamada, Nami Nakamura, Taito Osaka, Ichiro Inoue, Yuichi Inubushi, Kensuke Tono, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Journal of Synchrotron Radiation　Vol. 27　No. 4　p. 883-889　2020/07/01　Research paper (scientific journal)

Compact full-field hard x-ray microscope based on advanced Kirkpatrick–Baez mirrors

Jumpei Yamada, Satoshi Matsuyama, Raita Hirose, Yoshihiro Takeda, Yoshiki Kohmura, Makina Yabashi, Kazuhiko Omote, Tetsuya Ishikawa, Kazuto Yamauchi

Optica　Vol. 7　No. 4　p. 367-367　2020/04/20　Research paper (scientific journal)

An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating

Daisetsu Toh, Pho Van Bui, Ai Isohashi, Satoshi Matsuyama, Kazuto Yamauchi, Yasuhisa Sano

Review of Scientific Instruments　Vol. 91　No. 4　p. 045108-045108　2020/04/01　Research paper (scientific journal)

Elastic Emission Machining

Kazuto Yamauchi

Mechanical Engineering　Vol. 68　No. 4　p. 24-27　2020/04

Ultra-thin Film Grown of High Quality Fe3O4 on MgO Substrate Flattened by Catalyst-referred Etching

Osaka Ai, Toh Daisetsu, Yamauchi Kazuto, Sano Yasuhisa, Tanaka Hidekazu, Hattori Azusa

Proceedings of JSPE Semestrial Meeting　Vol. 2020S　p. 662-663　2020/03/01

Development of an Experimental Platform for Combinative Use of an XFEL and a High-Power Nanosecond Laser

Y. Inubushi, T. Yabuuchi, T. Togashi, K. Sueda, K. Miyanishi, Y. Tange, N. Ozaki, T. Matsuoka, R. Kodama, T. Osaka, S. Matsuyama, K. Yamauchi, H. Yumoto, T. Koyama, H. Ohashi, K. Tono, M. Yabashi

Applied Science　Vol. 10　No. 7　2020/03　Research paper (scientific journal)

Prototype design and experimental tests of a zoom mirror system for the APS upgrade

Xianbo Shi, Zhi Qiao, Sheikh Mashrafi, Ross Harder, Deming Shu, Max Wyman, Jayson Anton, Steven Kearney, Luca Rebuffi, Tim Mooney, Jun Qian, Bing Shi, Satoshi Matsuyama, Kazuto Yamauchi, Lahsen Assoufid

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 11491　2020　Research paper (international conference proceedings)

Focusing mirror for coherent hard X-rays

Kazuto Yamauchi, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yukio Takahashi, Kenji Tamasaku, Tetsuya Ishikawa

Synchrotron Light Sources and Free-Electron Lasers: Accelerator Physics, Instrumentation and Science Applications　p. 1093-1122　2020/01/01　Part of collection (book)

Metal-insulator phase transition in ultra-thin Fe₃O₄ film grown on MgO substrate flattened by catalyst-referred etching

Osaka Ai I., Hattori Azusa N., Tanaka Hidekazu, Toh Daisetsu, Yamauchi Kazuto, Sano Yasuhisa

Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science　Vol. 2020　2020

Atomically smooth Si surface planarized using a thin film catalyst in pure water

Pho van Bui, Daisetsu Toh, Shinsaku Shiroma, Taku Hagiwara, Ai Isohashi Osaka, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020　p. 43-44　2020　Research paper (international conference proceedings)

Cause of etch pits during the high speed plasma etching of silicon carbide and an approach to reduce their size

Y. Nakanishi, R. Mukai, S. Matsuyama, K. Yamauchi, Y. Sano

Materials Science Forum　Vol. 1004 MSF　p. 161-166　2020　Research paper (international conference proceedings)

X-ray Optics and Ultraprecision Machining in Heisei: A Review -Development of Diffraction-Limited X-ray Condenser Mirror as a Cutting-Edge Application of Ultraprecision Machining Methods-

Kazuto Yamauchi

Journal of the Japan Society for Precision Engineering　Vol. 86　No. 1　p. 32-38　2020/01

A micro channel-cut crystal X-ray monochromator for a self-seeded hard X-ray free-electron laser

T. Osaka, I. Inoue, R. Kinjo, T. Hirano, Y. Morioka, Y. Sano, K. Yamauchi, M. Yabashi

Journal of Synchrotron Radiation　Vol. 26　No. 5　p. 1496-1502　2019/09　Research paper (scientific journal)

触媒表面電位制御を取り入れた光電気化学触媒表面基準エッチング法によるSiC基板の高能率平坦化加工

大西 諒典, 木田 英香, 藤 大雪, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2019A　p. 28-29　2019/08/20

Full-field X-ray fluorescence microscope based on total-reflection advanced Kirkpatrick-Baez mirror optics

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yambashi, T. Ishikawa, K. Yamauchi

Optics Express　Vol. 27　No. 13　p. 18318-18328　2019/06　Research paper (scientific journal)

Catalyzed chemical polishing of SiO2 glasses in pure water

D. Toh, P. V. Bui, A. Isohashi, N. Kidani, S. Matsuyama, Y. Sano, Y. Morikawa, K. Yamauchi

Review of Scientific Instruments　Vol. 90　No. 4　2019/04　Research paper (scientific journal)

Surface Finishing Method using Plasma Chemical Vaporization Machining for Narrow Channel Walls of X-ray Crystal Monochromators

T. Hirano, Y. Morioka, S. Matsumura, Y. Sano, T. Osaka, S. Matsuyama, M. Yabashi, K. Yamauchi

Int. J. Automation Technol.　Vol. 13　No. 2　p. 246-253　2019/03　Research paper (scientific journal)

Development of a glue-free bimorph mirror for use in vacuum chambers

Y. Ichii, H. Okada, H. Nakamori, A. Ueda, H. Yamaguchi, S. Matsuyama, K. Yamauchi

Review of Scientific Instruments　Vol. 90　No. 2　2019/02　Research paper (scientific journal)

Compact reflective imaging optics in hard X-ray region based on concave and convex mirrors

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Optics Express　Vol. 27　No. 3　p. 3429-3438　2019/02　Research paper (scientific journal)

Numerically controlled plasma chemical vaporization machining using array-type electrode toward high-throughput deterministic machining

Ken Nishida, Shinya Okayama, Satoshi Matsuyama, Kazuto Yamauchi, Yasuhisa Sano

Proceedings - 34th ASPE Annual Meeting　p. 466-469　2019　Research paper (international conference proceedings)

High-efficiency SiC polishing using a thin film catalyst in pure water

Pho Van Bui, Daisetsu Toh, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019　p. 50-51　2019　Research paper (international conference proceedings)

Development of an abrasive-free polishing method for optical material using pure water and Ni catalyst

Daisetsu Toh, Ryosuke Ohnishi, Pho V. Bui, Ai Isohsahi, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Proceedings - 34th ASPE Annual Meeting　p. 474-477　2019　Research paper (international conference proceedings)

High-efficiency planarization of SIC wafers by water-CARE (Catalyst-referred etching) employing photoelectrochemical oxidation

H. Kida, D. Toh, P. V. Bui, A. Isohashi, R. Ohnishi, S. Matsuyama, K. Yamauchi, Y. Sano

Materials Science Forum　Vol. 963 MSF　p. 525-529　2019　Research paper (international conference proceedings)

High-efficiency planarization of GaN wafer by catalyst-referred etching with positive-biased photo-electrochemical oxidation

Ryosuke Ohnishi, Daisetsu Toh, Satoshi Matsuyama, Ai Isohashi, Yasuhisa Sano, Kazuto Yamauchi

Proceedings - 34th ASPE Annual Meeting　p. 79-83　2019　Research paper (international conference proceedings)

物質の超高速変形と破壊：XFELを用いた観測のアプローチから

尾崎典雅, 松岡健之, ALBERTAZZI Bruno, 宮西宏併, 片桐健登, 梅田悠平, HARTLEY Nicholas, PIKUZ Tatiana, 山内和人, 兒玉了祐, 松岡岳洋, 奥地拓生, 瀬戸雄介, 丹下慶範, 佐藤友子, 関根利守, 坂田 修身, 犬伏雄一, 富樫 格, 籔内俊穀, 矢橋牧名, VINCI Tommaso, KOENIG Michel

高圧討論会講演要旨集　Vol. 59th　2018/11

Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors

S. Matsuyama, T. Inoue, J. Yamada, J. Kim, H. Yumoto, Y. Inubushi, T. Osaka, I. Inoue, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

Scientific Reports　Vol. 8　2018/11　Research paper (scientific journal)

Reflective Imaging Optics Using Concave and Convex Mirrors for a Compact and Achromatic Full-field X-ray Microscope

J. Yamada, S. Matsuyama, K. Hata, R. Hirose, Y. Takeda, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, K. Yamauchi

Microscopy and Microanalysis　Vol. 24　No. S2　p. 274-275　2018/08　Research paper (scientific journal)

High-Resolution Full-Field X-ray Microscope for 20-keV X-rays with Multilayer Imaging Mirrors

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Microscopy and Microanalysis　Vol. 24　No. S2　p. 284-285　2018/08　Research paper (scientific journal)

Hard-x-ray imaging mirror optics using concave and convex mirrors

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on Synchrotron Radiation Instrumentation (SRI 2018)　2018/06

Development of hybrid X-ray adaptive optical system based on piezo-driven deformable mirror and a mechanical mirror bender

H. Yamaguchi, T. Goto, H. Hayashi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on Synchrotron Radiation Instrumentation (SRI 2018)　2018/06

Development of a multilayer Kirkpatrick-Baez mirror optics for X-ray free electron laser

T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, T. Osaka, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on Synchrotron Radiation Instrumentation (SRI 2018)　2018/06

Development of adaptive Kirkpatrick-Baez mirrors based on bimorph and mechanical bending

H. Nakamori, T. Goto, S. Matsuyama, H. Hayashi, H. Yamaguchi, J. Sonoyama, K. Akiyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, H. Okada, K. Yamauchi

International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)　2018/06

Development of reflective imaging optics using concave and convex mirrors

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)　2018/06

Fabrication of ultraprecise multilayer focusing mirrors using an X-ray grating interferometer and differential deposition technique

T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, T. Osaka, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)　2018/06

Nearly diffraction-limited hard X-ray line focusing with hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation

T. Goto, S. Matsuyama, H. Hayashi, H. Yamaguchi, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Optics Express　Vol. 26　No. 13　p. 17477-17486　2018/06　Research paper (scientific journal)

Development of high-resolution X-ray imaging optical system using multilayer imaging mirrors

K. Hata, J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on X-ray Optics and Applications 2018 (XOPT2018)　2018/04

Development of nanofocusing system for X-ray free electron Laser (Study of nanobeam characterization)

T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, T. Osaka, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on X-ray Optics and Applications 2018 (XOPT2018)　2018/04

Compact and large-magnification full-field X-ray microscope using concave-convex imaging mirrors

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on X-ray Optics and Applications 2018 (XOPT2018)　2018/04

Systematic-error-free wavefront measurement using an X-ray single-grating interferometer

T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Osaka, I. Inoue, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

Review of Scientific Instruments　Vol. 89　No. 4　p. 043106-1-043106-7　2018/04　Research paper (scientific journal)

Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study

Pho Van Bui, Daisetsu Toh, Ai Isohashi, Satoshi Matsuyama, Kouji Inagaki, Yasuhisa Sano, Kazuto Yamauchi, Yoshitada Morikawa

Japanese Journal of Applied Physics　Vol. 57　No. 5　p. 055703-1-055703-5　2018/04　Research paper (scientific journal)

Characteristics and Mechanism of Catalyst-Referred Etching Method: Application to 4H-SiC

Pho Van Bui, Yasuhisa Sano, Yoshitada Morikawa, Kazuto Yamauchi

International Journal of Automation Technology　Vol. 12　No. 2　p. 154-159　2018/03　Research paper (scientific journal)

High-efficiency planarization of GaN by catalyst-referred etching using photo-electrochemical oxidation

KIDA Hideka, TOH Daisetsu, OHNISHI Ryosuke, Matsuyama Tomohisa, Sano Yasuhisa, Yamauchi Kazuto

The Proceedings of Mechanical Engineering Congress, Japan　Vol. 2018　2018

High-efficiency planarization of SiC in pure water using a thin film catalyst

Pho Van Bui, Yuta Nakahira, Daisetsu Toh, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018　p. 433-434　2018　Research paper (international conference proceedings)

Development of high efficiency polishing method using pure water and Ni catalyst

Daisetsu Toh, Pho Van Bui, Nakahira Yuta, Hideka Kida, Takahisa Ohgushi, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018　p. 435-436　2018　Research paper (international conference proceedings)

Development of new diagnostics based on LiF detector for pump-probe experiments

T.A. Pikuz, A.Ya.Faenov, N. Ozaki, T. Matsuoka, B. Albertazzi, N. Hartley, K. Miyanishi, K. Katagiri, S. Matsuyama, K. Yamauchi, H. Habara, Y. Inubushi, T. Togashi, H. Yumoto, H. Ohashi, Y. Tange, T. Yabuuchi, M. Yabashi, A. Grum-Grzhimailo, A. Casner, I. Skobelev, S. Makarov, S. Pikuz, G. Rigon, M. Koenig, K.A. Tanaka, T. Ishikawa, R. Kodama

Matter and Radiation at Extremes　Vol. 3　No. 4　p. 197-206　2018/01　Research paper (scientific journal)

Performance of a hard X-ray split-and-delay optical system with a wavefront division

Takashi Hirano, Taito Osaka, Yuki Morioka, Yasuhisa Sano, Yuichi Inubushi, Tadashi Togashi, Ichiro Inoue, Satoshi Matsuyama, Kensuke Tono, Aymeric Robert, Jerome B. Hastings, Kazuto Yamauchi, Makina Yabashi

Journal of Synchrotron Radiation　Vol. 25　No. 1　p. 20-25　2018/01　Research paper (scientific journal)

衝撃圧縮された多結晶コランダムの時分割XFELその場観察

丹下 慶範, 尾崎 典雅, 瀬戸 雄介, 佐藤 友子, 奥地 拓生, 松岡 健之, 高橋 謙次郎, 宮西 宏併, ALBERTAZZI Bruno・HARTLEY Nicholas, 梅田 悠平, 西川 豊人, 松山 智至, 山内 和人, 関根 利守, 田中 和夫, 兒玉 了祐, 籔内 俊毅, 矢橋 牧名

2017/11

Ellipsoidal mirror for two-dimensional 100-nm focusing in hard X-ray region

H. Yumoto, T. Koyama, S. Matsuyama, Y. Kohmura, K. Yamauchi, T. Ishikawa, H. Ohashi

Scientific Reports　Vol. 7　2017/11　Research paper (scientific journal)

Characterization of temporal coherence of hard x-ray free-electron laser pulses with single-shot interferograms

T. Osaka, T. Hirano, Y. Morioka, Y. Sano, Y. Inubushi, I. Inoue, K. Tono, A. Robert, J. B. Hastings, K. Yamauchi, M. Yabashi

IUCrJ　Vol. 4　No. 6　p. 728-733　2017/11　Research paper (scientific journal)

Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope

Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi, Yasuhisa Sano

Proc. of SPIE, Advances in X-Ray/EUV Optics and Components XII　Vol. 103860　p. 103860C-1-103860C-6　2017/09/06　Research paper (international conference proceedings)

Dynamic compression of Tantalum up to 120 GPa and associated spallation process using an XFEL probe

B. Albertazzi, N. Ozaki, V. Zhakhovsky, A. Faenov, H. Habara, M. Harmand, N. J. Hartley, D. K. Ilnitsky, N. Inogamov, Y. Inubushi, T. Ishikawa, T. Katayama, H. Koyama, M. Koenig, A. Krygier, T. Matsuoka, S. Matsuyama, E. McBride, K. Migdal, G. Morard, H. Ohashi, T. Okuchi, T. Pikuz, N. Purevjav, O. Sakata, Y. Sano, T. Sato, T. Sekine, T. Seto, K. Takahashi, K. A. Tanaka, Y. Tange, T. Togashi, K. Tono, Y. Umeda, T. Vinci, M. Yabashi, T. Yabuuchi, K. Yamauchi, H. Yumoto, R. Kodama

2017/09

Development of an X-ray imaging optical system consisting of concave and convex mirrors

J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

The 24th Congress of the International Comission for Optics, X-ray and High-energy Optics　2017/08

Development of crystal-based split-and-delay optics with wavefront splitting at SACLA

T. Hirano, T. Osaka, Y. Sano, Y. Inubushi, T. Togashi, I. Inoue, S. Matsuyama, K. Tono, K. Yamauchi, M. Yabashi

SPIE Optics+Photonics2017　p. 187-187　2017/08

Development of measurement system for ellipsoidal mirrors

H. Nakamori, Y. Ichii, H. Okada, A. Ueda, T. Tsumura, S. Matsuyama, K. Yamauchi

SPIE Optics+Photonics2017　p. 185-185　2017/08

Development of Precise Wavefront Measurement Method for X-Ray Free Electron Laser Focusing System

T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, H. Ohashi, T. Katayama, S. Goto, T. Ishikawa, M. Yabashi, K. Yamauchi

The 24th Congress of the International Comission for Optics, X-ray and High-energy Optics　2017/08

Full-field X-ray fluorescence imaging based on total-reflection imaging mirrors

S. Matsuyama, S. Yasuda, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

The 24th Congress of the International Comission for Optics, X-ray and High-energy Optics　2017/08

Development of hybrid adaptive x-ray focusing system based on piezoelectric bimorph mirror and mirror bender

T. Goto, S. Matsuyama, H. Hayashi, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, K. Yamauchi

SPIE Optics+Photonics2017　p. 187-187　2017/08

Development of full-field x-ray fluorescence microscope using total-reflection mirrors

S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

SPIE Optics+Photonics2017　p. 193-193　2017/08

Shock response to solid germanium

Kohei Miyanishi, Norimasa Ozaki, Takeshi Matsuoka, Satoshi Matsuyama, Kenjiro Takahashi, Hideaki Habara, Tatiana Pikuz, Anatoly Faenov, Kazuto Yamauchi, Ryosuke Kodama, Kazuo Tanaka, Yusuke Seto, Yoshinobu Tange, Toshinori Yabuuchi, Yuichi Inubushi, Tadashi Togashi, Makina Yabashi, Tetsuya Ishikawa, Michel Koenig, Tommaso Vinci, Takuo Okuchi, Nicholas Hartley, Osami Sakata, Toshimori Sekine, Emma McBride

2017/07

Development of new diagnostics in the interests of pumpprobe experiments

T. Pikuz, A. Faenov, N. Ozaki, T. Matsuoka, B. Albertazzi, N.Hartely, S. Matsuyama, K. Yamauchi, H. Habara, Y. Inubushi, T. Togashi, H. Yumoto, H. Ohashi, Y. Tange, T. Yabuuchi, M. Yabashi, A. Grum-Grzhimailo, A. Casner, G. Rigon, M. Koenig, K. A. Tanaka, T. Ishikawa, R. Kodama

2017/06

Measurement of the X-ray Spectrum of a Free Electron Laser with a Wide-Range High-Resolution Single-Shot Spectrometer

Y. Inubushi, I. Inoue, J. Kim, A. Nishihara, S. Matsuyama, H. Yumoto, T. Koyama, K. Tono, H. Ohashi, K. Yamauchi, M. Yabashi

Applied Sciences　Vol. 7　No. 6　p. 584-1-584-5　2017/06　Research paper (scientific journal)

Dynamic fracture of tantalum under extreme tensile stress

B. Albertazzi, N. Ozaki, V. Zhakhovsky, A. Faenov, H. Habara, M. Harmand, N. Hartley, D. Ilnitsky, N. Inogamov, Y. Inubushi, T. Ishikawa, T. Katayama, T. Koyama, M. Koenig, A. Krygier, T. Matsuoka, S. Matsuyama, E. McBride, K. P. Migdal, G. Morard, H. Ohashim T. Okuchi, T. Pikuz, N. Purejav, O. Sakata, Y. Sano, T. Sato, T. Sekine, Y. Seto, K. Takahashi, K. Tanaka, Y. Tange, T. Togashi, K. Tono, Y. Umeda, T. Vinci, M. Yabashi, T. Yabuuchi, K. Yamauchi, H. Yumoto, R. Kodama

Science Advances　Vol. 3　No. 6　2017/06　Research paper (scientific journal)

Chemical etching of silicon carbide in pure water by using platinum catalyst

A. Isohashi, P. V. Pho, S. Matsuyama, Y. Sano, K. Inagaki, Y. Morikawa, K. Yamauchi

Applied Phsyics Letters　Vol. 110　No. 20　2017/05　Research paper (scientific journal)

Hard X-ray Split-and-Delay Optics with wavefront Division at SACLA

T. Hirano, T. Osaka, Y. Sano, Y. Inubushi, T. Togashi, I. Inoue, S. Matsuyama, K. Tono, K. Yamauchi, M. Yabashi

International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017　p. 34-34　2017/04

High-magnification X-ray imaging mirror system consisting of elliptical concave and hyperbolic convex mirrors

J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017　p. 66-66　2017/04

Development of a multilayer KB mirror sysem for sub-10nm XFEL focusing

S. Kawai, S. Matsuyama, T. Inoue, H. Yumoto, Y. Inubushi, T. Osaka, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017　p. 61-62　2017/04

Development of calibration method for X-ray single-grating interferometry

T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, H. Ohashi, T. Katayama, S. Goto, T. Ishikawa, M. Yabashi, K. Yamauchi

International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017　p. 59-60　2017/04

Achromatic and High-Resolution Full-Field X-ray Microscope and its Applicaiton

S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, H. Okadam, Y. Sano, M. Yabashi, T. Ishikawa, K. Yamauchi

International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017　p. 10-11　2017/04

50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M Yabashi, T. Ishikawa, K. Yamauchi

Scientific Reports　Vol. 7　2017/04　Research paper (scientific journal)

全反射ミラーを用いた高分解能かつ色収差のない結像型X線顕微鏡の開発ー様々な観察法への応用ー

松山智至, 安田周平, 山田純平, 佐野泰久, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

2017年度精密工学会春季大会学術講演会　2017/03

Ultrafast observation of lattice dynamics in laser-irradiated gold foils

N. J. Hartley, N. Ozaki, T. Matsuoka, B. Albertazzi, A. Faenov, Y. Fujimoto, H. Habara, M. Harmand, Y. Inubushi, T. Katayama, M. Koenig, A. Krygier, P. Mabey, Y. Matsumura, S. Matsuyama, E. E. McBride, K. Miyanishi, G. Morard, T. Okuchi, T. Pikuz, O. Sakata, Y. Sano, T. Sato, T. Sekine, Y. Seto, K. Takahashi, K. A. Tanaka, Y. Tange, T. Togashi, Y. Umeda, T. Vinci, M. Yabashi, T. Yabuuchi, K. Yamauchi, R. Kodama

Applied Physics Letters　Vol. 110　No. 7　p. 071905-071905　2017/02　Research paper (scientific journal)

Simulation of concave-convex imaging mirror system for development of a compact and achromatic full-field x-ray microscope

J. Yamada, S. Matsuyama, Y. Sano, K. Yamauchi

Applied Optics　Vol. 56　No. 4　p. 967-974　2017/02　Research paper (scientific journal)

光電気化学酸化を援用した触媒表面基準エッチング法による窒化ガリウムの高能率平坦化

木田 英香, 藤 大雪, 中平 雄太, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2017A　p. 19-20　2017

Platinum-assisted chemical etching of SiC: A density functional theory study

Bui Pho Van, Toh Daisetsu, Inagaki Kouji, Sano Yasuhisa, Yamauchi Kazuto, Morikawa Yoshitada

Proceedings of JSPE Semestrial Meeting　Vol. 2017A　p. 251-252　2017

Stabilization of removal rate of silica glass on catalyst-referred etching by cleaning catalyst surface

Yuta Nakahira, Ai Isohashi, Tatsuaki Inada, Daisetsu Toh, Hideka Kida, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

ICPT 2017 - International Conference on Planarization/CMP Technology　p. 110-114　2017　Research paper (international conference proceedings)

Stabilization method of transition metal catalyst for high efficiency catalyst-referred etching (CARE) of silicon carbide

Daisetsu Toh, Ai Isohashi, Tatuaki Inada, Yuta Nakahira, Hideka Kida, Satoshi Matuyama, Yasuhisa Sano, Kazuto Yamauchi

ICPT 2017 - International Conference on Planarization/CMP Technology　p. 106-109　2017　Research paper (international conference proceedings)

Forefront of Development of Ultraprecise X-ray Mirrors for Synchrotron Radiation X-rays

MATSUYAMA Satoshi, YAMAUCHI Kazuto

Journal of the Japan Society for Precision Engineering　Vol. 83　No. 4　p. 300-304　2017

The development of the dry planarization method with a reference plane by the transportation of active species

Ryokume Reiji, Miyazaki Toshinobu, Sano Yasuhisa, Matsuyama Satoshi, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2017　p. 541-542　2017

高濃度SF₆ガスを用いたサブ大気圧プラズマエッチングによるSiC基板の高能率薄化加工

井上 裕貴, 田尻 光毅, 向井 莉紗, 佐野 泰久, 松山 智至, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2017　p. 975-976　2017

多層膜KBミラーを用いたX線自由電子レーザーナノ集光システムの開発

川合 蕉吾, 松山 智至, 井上 陽登, 湯本 博勝, 犬伏 雄一, 小山 貴久, 登野 健介, 大橋 治彦, 大坂 泰斗, 矢橋 牧名, 石川 哲也, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2017　p. 959-960　2017

全反射ミラーを用いた高分解能かつ色収差のない結像型X線顕微鏡の開発

松山 智至, 安田 周平, 山田 純平, 佐野 泰久, 香村 芳樹, 矢橋 牧名, 石川 哲也, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2017　p. 957-958　2017

Planarization of SiC and oxide surfaces by using Catalyst-Referred Etching with water

Pho Van Bui, Ai Isohashi, Daisetsu Toh, Satoshi Matsuyama, Kouji Inagaki, Yasuhisa Sano, Kazuto Yamauchi

Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017　p. 157-158　2017　Research paper (international conference proceedings)

ニッケル触媒を利用した純水ベースの触媒表面基準エッチング法の開発

藤 大雪, 礒橋 藍, 稻田 辰昭, 中平 雄太, 木田 英香, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2017　No. 0　p. 35-36　2017

触媒表面基準エッチング法における水素水を用いた被毒除去法の提案

中平 雄太, 礒橋 藍, Bui Pho, 稻田 辰昭, 藤 大雪, 木田 英香, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2017　No. 0　p. 1-2　2017

Visualization of intracellular elements using scanning X-ray fluorescence microscopy

Mari Shimura, Lukasz Szyrwiel, Satoshi Matsuyama, Kazuto Yamauchi

Metallomics: Recent Analytical Techniques and Applications　p. 63-92　2017/01/01　Part of collection (book)

Change in surface morphology of Si (100) wafer after oxidation with atmospheric-pressure plasma

Hiroyasu Takei, Satoshi Kurio, Satoshi Matsuyama, Kazuto Yamauchi, Yasuhisa Sano

Key Engineering Materials　Vol. 723　p. 242-246　2017　Research paper (international conference proceedings)

Generation of apodized X-ray illumination and its application to scanning and diffraction microscopy

K. P. Khakurel, T. Kimura, H. Nakamori, T. Goto, S. Matsuyama, T. Sasaki, M. Takei, Y. Kohmura, T. Ishikawa, K. Yamauchi, Y. Nishino

Journal of Synchrotron Radiation　Vol. 24　No. 1　p. 142-149　2017/01　Research paper (scientific journal)

Imaging of intracellular fatty acids by scanning X-ray fluorescence microscopy

Mari Shimura, Hideo Shindou, Lukasz Szyrwiel, Suzumi M. Tokuoka, Fumie Hamano, Satoshi Matsuyama, Mayumi Okamoto, Akihiro Matsunaga, Yoshihiro Kita, Yukihito Ishizaka, Kazuto Yamauchi, Yoshiki Kohmura, Ryszard Lobinski, Isao Shimizu, Takao Shimizu

FASEB JOURNAL　Vol. 30　No. 12　p. 4149-4158　2016/12　Research paper (scientific journal)

Pit Formation, Patterning and Flattening of Ge Surfaces in O2-Containing Water by Metal-Assisted Chemical Etching

T. Kawase, A. Mura, Y. Saito, T. Okamoto, K. Kawai, Y. Sano, K. Yamauchi, M. Morita, K. Arima

Meeting Program of PRiME 2016　p. 124-124　2016/10

Development of array-type atmospheric-pressure RF plasma generator with electric on-off control for high-throughput numerically controlled processes

H. Takei, S. Kurio, S. Matsuyama, K. Yamauchi, Y. Sano

Review of Scientific Instruments　Vol. 87　No. 10　2016/10　Research paper (scientific journal)

Development of an x-ray imaging optical system based on a combination of concave and convex mirrors

Satoshi Matsuyama, Jumpei Yamada, Yasuhisa Sano, Kazuto Yamauchi

SPIE Optics+Photonics　2016/09

Imaging of intracellular fatty acids by scanning X-ray fluorescence microscopy

M. Shimura, H. Shindou, L. Szyrwiel, S. M. Tokuoka, F. Hamano, S. Matsuyama, M. Okamoto, A. Matsunaga, Y. Kita, Y. Ishizaka, K. Yamauchi, Y. Kohmura, R. Lobinski, I. Shimizu, T. Shimizu

The FASEB Journal　Vol. 30　No. 12　p. 001-010　2016/09　Research paper (scientific journal)

Progress in precision Wolter mirrors for soft x-ray observations of the sun

Taro Sakao, Satoshi Matsuyama, Takumi Goto, Kazuto Yamauchi, Yoshiki Kohmura, Yoshinori Suematsu, Noriyuki Narukage

SPIE Optics+Photonics　2016/08

Achromatic full-field X-ray microscope with 50 nm resolution and its applications

S. Matsuyama, S. Yasuda, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

13th International Conference on X-ray Microscopy (XRM2016)　2016/08

A Two-stage Adaptive X-ray Focusing System using Four Piezoelectric Deformable Mirrors

T. Goto, H. Nakamori, S. Matsuyama, H. Hayashi, T. Kimura, K. P. Khakurel, Y. Sano, Y. Kohmura, M. Yabashi, Y. Nishino, T. Ishikawa, K. Yamauchi

13th International Conference on X-ray Microscopy (XRM2016)　2016/08

Novel shape measurement method for imaging mirrors using an x-ray grating interferometer

Satoshi Matsuyama, Ayumi Kime, Taro Sakao, Yoshinori Suematsu, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

SPIE Optics+Photonics　2016/08

Simulation and Experimental Study of Wavefront Measurement Accuracy of the Pencil-Beam Method

T. Goto, S. Matsuyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Synchrotron Radiation News　Vol. 29　No. 4　p. 32-36　2016/08　Research paper (scientific journal)

Advancement of Hard X-ray Nano-focusing Ellipsoidal Mirror at SPring-8

H. Yumoto, T. Koyama, S. Matsuyama, Y. Kohmura, K. Yamauchi, T. Ishikawa, H. Ohashi

Synchrotron Radiation News　Vol. 29　No. 4　p. 27-31　2016/08　Research paper (scientific journal)

Indirect monitoring shot-to-shot shock waves strength reproducibility during pump-probe experiments

T. A. Pikuz, A. Ya. Faenov, N. Ozaki, N. J. Hartley, B. Albertazzi, T. Matsuoka, K. Takahashi, H. Habara, Y. Tange, S. Matsuyama, K. Yamauchi, R. Ochante, K. Sueda, O. Sakata, T. Sekine, T. Sato, Y. Umeda, Y. Inubushi, T. Yabuuchi, T. Togashi, T. Katayama, M. Yabashi, M. Harmand, G. Morard, M. Koenig, V. Zhakhovsky, N. Inogamov, A. S. Safronova, A. Stafford, I. Yu. Skobelev, S. A. Pikuz, T. Okuchi, Y. Seto, K. A. Tanaka, T. Ishikawa, R. Kodama

Journal of Applied Physics　Vol. 120　No. 3　2016/07　Research paper (scientific journal)

Development of speckle-free channel-cut crystal optics using plasma chemical vaporization machining for coherent x-ray applications

Takashi Hirano, Taito Osaka, Yasuhisa Sano, Yuichi Inubushi, Satoshi Matsuyama, Kensuke Tono, Tetsuya Ishikawa, Makina Yabashi, Kazuto Yamauchi

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 87　No. 6　2016/06　Research paper (scientific journal)

Fabrication of Strain-Free Crystal Optics for a Hard X-ray Split-and-Delay Optical System

T. Hirano, T. Osaka, Y. Sano, Y. Inubushi, S. Matsuyama, K. Tono, T. Ishikawa, M. Yabashi, K. Yamauchi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

High-resolution imaging XAFS using advanced Kirkpatrick-Baez mirror optics

S. Yasuda, S. Matsuyama, H. Okada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

Size-controllable X-ray beam collimation using a two-stage adaptive Kirkpatrick-Baez mirror system based on piezoelectric deformable mirrors

T. Goto, H. Nakamori, S. Matsuyama, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

A variable-numerical-aperture x-ray focusing system using a two-stage adaptive Kirkpatrick-Baez mirrors based on piezo electric deformable mirrors

H. Hayashi, T. Goto, H. Nakamori, S. Matsuyama, T. Kimura, K. P. Khakurel, Y. Sano, Y. Kohmura, M. Yabashi, Y. Nishino, T. Ishikawa, K. Yamauchi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

Wavefront measurement of sub-10-nm XFEL nanobeam produced by multilayer focusing mirrors

S. Kawai, S. Matsuyama, A. Nishihara, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, H. Ohashi, T. Katayama, S. Goto, T. Ishikawa, M. Yabashi, K. Yamauchi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

Wavelength-tunable hard X-ray split-and-delay optics at SACLA

T. Osaka, T. Hirano, Y. Sano, Y. Inubushi, S. Matsuyama, K. Tono, T. Ishikawa, K. Yamauchi, M. Yabashi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

Development of a compact x-ray imaging optical system using two pairs of concave and convex mirrors

J. Yamada, S. Matsuyama, K. Yamauchi

International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)　2016/05

Damage threshold of coating materials on x-ray mirror for x-ray free electron laser

T. Koyama, H. Yumoto, T. Miura, K. Tono, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, M. Yabashi, K. Yamauchi, H. Ohashi

Review of Scientific Instruments　Vol. 87　No. 5　2016/05　Research paper (scientific journal)

Damage threshold of coating materials on x-ray mirror for x-ray free electron laser

Takahisa Koyama, Hirokatsu Yumoto, Takanori Miura, Kensuke Tono, Tadashi Togashi, Yuichi Inubushi, Tetsuo Katayama, Jangwoo Kim, Satoshi Matsuyama, Makina Yabashi, Kazuto Yamauchi, Haruhiko Ohashi

Review of Scientific Instruments　Vol. 87　No. 5　2016/05　Research paper (scientific journal)

Stitching interferometry for ellipsoidal x-ray mirrors

H. Yumoto, T. Koyama, S. Matsuyama, K. Yamauchi, H. Ohashi

Review of Scientific Instruments　Vol. 87　No. 5　2016/05　Research paper (scientific journal)

Nanofocusing of X-ray free electron laser and its application to explore X-ray nonlinear optics

Vol. 68　No. 2　p. 46-51　2016/04

Nearly diffraction-limited X-ray focusing with variable-numerical aperture focusing optical system based on four deformable mirrors

Satoshi Matsuyama, Hiroki Nakamori, Takumi Goto, Takashi Kimura, Krishna P. Khakurel, Yoshiki Kohmura, Yasuhisa Sano, Makina Yabashi, Tetsuya Ishikawa, Yoshinori Nishino, Kazuto Yamauchi

SCIENTIFIC REPORTS　Vol. 6　2016/04　Research paper (scientific journal)

Chromatin folding and DNA replication inhibition mediated by a highly antitumor-active tetrazolato-bridged dinuclear platinum(II) complex

Ryosuke Imai, Seiji Komeda, Mari Shimura, Sachiko Tamura, Satoshi Matsuyama, Kohei Nishimura, Ryan Rogge, Akihiro Matsunaga, Ichiro Hiratani, Hideaki Takata, Masako Uemura, Yutaka Iida, Yuko Yoshikawa, Jeffrey C. Hansen, Kazuto Yamauchi, Masato T. Kanemaki, Kazuhiro Maeshima

SCIENTIFIC REPORTS　Vol. 6　2016/04　Research paper (scientific journal)

Nearly diffraction-limited X-ray focusing with variable-numerical-aperture focusing optical system based on four deformable mirrors

S. Matsuyama, H. Nakamori, T. Goto, T. Kimura, K. P. Khakurel, Y. Kohmura, Y. Sano, M. Yabashi, T. Ishikawa, Y. Nishino, K. Yamauchi

Scientific Reports　Vol. 6　2016/04　Research paper (scientific journal)

Chromatin folding and DNA replication inhibition mediated by a highly antitumor-active tetrazolato-bridged dinuclear platinum(II) complex

Ryosuke Imai, Seiji Komeda, Mari Shimura, Sachiko Tamura, Satoshi Matsuyama, Kohei Nishimura, Ryan Rogge, Akihiro Matsunaga, Ichiro Hiratani, Hideaki Takata, Masako Uemura, Yutaka Iida, Yuko Yoshikawa, Jeffrey C. Hansen, Kazuto Yamauchi, Masato T. Kanemaki, Kazuhiro Maeshima

SCIENTIFIC REPORTS　Vol. 6　2016/04　Research paper (scientific journal)

Wavelength-tunable split-and-delay optical system for hard X-ray free-electron lasers

T. Osaka, T. Hirano, Y. Sano, Y. Inubushi, S. Matsuyama, K. Tono, T. Ishikawa, K. Yamauchi, M. Yabashi

Optics Express　Vol. 24　No. 9　p. 9187-9201　2016/04　Research paper (scientific journal)

X線自由電子レーザーのナノ集光とX線非線形光学の探索

山内和人

生産と技術　Vol. 68　No. 2　p. 46-51　2016/04

Dry planarization method using transport of reactive species

Reiji Ryokume, Toshinobu Miyazaki, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Proceedings - 32nd ASPE Annual Meeting　p. 597-601　2016　Research paper (international conference proceedings)

Fabrication of X-ray imaging mirrors for an achromatic and high-resolution full-field X-ray microscope

Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yasuhisa Sano, Kazuto Yamauchi

Proceedings - 32nd ASPE Annual Meeting　p. 143-146　2016　Research paper (international conference proceedings)

プラズマエッチングによる基板の基準面加工法の開発

宮崎 俊亘, 佐野 泰久, 松山 智至, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2016　p. 365-366　2016

革新的CMP/P-CVM融合装置の設計・試作（第10報）

佐野 泰久, 土肥 俊郎, 黒河 周平, 會田 英雄, 大山 幸希, 宮下 忠一, 住澤 春男, 宮崎 俊亘, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2016　p. 377-378　2016

High-efficiency planarization of SiC by catalyst-referred etching using photo-electrochemical oxidation

Inada Tatsuaki, Isohashi Ai, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2016　p. 363-364　2016

サブ大気圧プラズマを用いたプラズマエッチングによる2インチSiC基板の高能率加工

田尻 光毅, 井上 裕貴, 佐野 泰久, 松山 智至, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2016　p. 929-930　2016

小型かつ高拡大倍率が実現可能なX線結像光学系の開発

山田 純平, 松山 智至, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2016　p. 913-914　2016

二段アダプティブKBミラー光学系を用いた硬X線平行ビームの形成

後藤 拓実, 中森 紘基, 松山 智至, 佐野 泰久, 香村 芳樹, 矢橋 牧名, 石川 哲也, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2016　p. 911-912　2016

硬X線用部分回転楕円面集光ミラーの作製と集光評価

湯本 博勝, 小山 貴久, 松山 智至, 香村 芳樹, 山内 和人, 石川 哲也, 大橋 治彦

精密工学会学術講演会講演論文集　Vol. 2016　p. 909-910　2016

Investigation of catalytic metals for a catalyst referred etching in pure water

Ai Isohashi, Tatsuaki Inada, Daisetsu Toh, Yuta Nakahira, Takahito Sugiura, Naotaka Kidani, Koji Inagaki, Yasihisa Sano, Satoshi Matsuyama, Kazuto Yamauchi

Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016　2016　Research paper (international conference proceedings)

Improvement of removal rate in catalyst-referred etching of GaN substrates

INADA Tatsuaki, ISOHASHI Ai, TOH Daisetsu, NAKAHIRA Yuta, MATSUYAMA Satoshi, SANO Yasuhisa, YAMAUCHI Kazuto

The Proceedings of Mechanical Engineering Congress, Japan　Vol. 2016　No. 0　2016

触媒表面基準エッチング法における被毒物除去による加工速度安定化手法の開発

中平 雄太, 礒橋 藍, Bui Pho, 稻田 辰昭, 藤 大雪, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2016　No. 0　p. 211-212　2016

Etching Properties of Ge Surfaces in Contact with Oxygen Reduction Catalyst in Water and Its Application to Surface Flattening

Kazuki Nakade, Daichi Mori, Tatsuya Kawase, Kentaro Kawai, Yasuhisa Sano, Kazuto Yamauchi, Mizuho Morita, Kenta Arima

Extended Abstracts of the 21st Workshop on Symposium on Electron Device Interface Technology　p. 9-12　2016/01

Focusing mirror for coherent hard X-rays

Kazuto Yamauchi, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yukio Takahashi, Kenji Tamasaku, Tetsuya Ishikawa

Synchrotron Light Sources and Free-Electron Lasers: Accelerator Physics, Instrumentation and Science Applications　p. 927-956　2016/01/01　Part of collection (book)

X-ray microfocusing with off-axis ellipsoidal mirror

Hirokatsu Yumoto, Takahisa Koyama, Satoshi Matsuyama, Yoshiki Kohmura, Kazuto Yamauchi, Tetsuya Ishikawa, Haruhiko Ohashi

PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI2015)　Vol. 1741　2016　Research paper (international conference proceedings)

Wave-optical assessment of alignment tolerances in nano-focusing with ellipsoidal mirror

Hirokatsu Yumoto, Takahisa Koyama, Satoshi Matsuyama, Kazuto Yamauchi, Haruhiko Ohashi

XRM 2014: PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY　Vol. 1696　2016　Research paper (international conference proceedings)

Size-changeable X-ray beam collimation using an adaptive X-ray optical system based on four deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

ADAPTIVE X-RAY OPTICS IV　Vol. 9965　2016　Research paper (international conference proceedings)

High-efficiency planarization method combining mechanical polishing andatmospheric-pressure plasma etching for hard-to-machine semiconductorsubstrates

Y. Sano, K. Shiozawa, T. Doi, H. Aida, T. Miyashita, K. Yamauchi

Mechanical Engineering Journal,　Vol. 3　No. 1　2016/01　Research paper (scientific journal)

3D visualization of XFEL beam focusing properties using LiF crystal X-ray detector

T. Pikuz, A. Faenov, T. Matsumoto, S. Matsuyama, K. Yamauchi, N. Ozaki, B. Albertazzi, Y. Inubushi, M. Yabashi, K. Tono, Y. Sato, H. Yumoto, H. Ohashi, S. Pikuz, A. N. Grum-Grzhimailo, M. Nishikino, T. Ishikawa, R. Kodama

Scientific Reports　Vol. 5　p. 17713-1-17713-10　2015/12　Research paper (scientific journal)

XFEL を用いた衝撃圧縮下の炭素凝集過程の超高速観察

小川剛史, 尾崎典雅, 高橋謙次郎, 羽原英明, 松岡健之, 田中和夫, 池谷正太郎, Ochante. M, Ricardo A, 喜田美佳, 久保田善大, 佐藤友哉, 西川豊人, 野間澄人, 藤本陽平, 松村祐介, 吉田有佑, 松山智至, 佐野泰久, 山内和人, Albertazzi Bruno, Hartley Nicholas, Pikuz Tatiana, Faenov Anatory, 犬伏雄一, 丹下慶範, 富樫格, 片山哲夫, 矢橋牧名, 薮内俊毅, 梅田悠平, 佐藤友子, 関根利守, 奥地拓生, 瀬戸雄介, 坂田修身, 兒玉了祐

2015/11　Research paper (other academic)

XFEL を用いたハイパワーレーザーショック下における鉄の相転移観察

松村祐介, 尾崎典雅, Albertazzi Bruno, Hartley Nicholas, 高橋謙次郎, 羽原英明, 松岡健之, 田中和夫, 池谷正太郎, 小川 剛史, Ochante Muray Ricardo Arturo, 喜田 美佳, 久保田善大, 佐藤友哉, 西川豊人, 野間澄人, 藤本 陽平, 吉田有佑, 松山智至, 佐野泰久, 山内和人, Pikuz Tatiana, Faenov Anatoly, 犬伏雄一, 丹下慶範, 富樫格, 薮内 俊毅, 片山 哲夫, 矢橋牧名, 梅田悠平, 佐藤友子, 関根利守, 奥地拓生, 瀬戸雄介, 坂田修身, 兒玉了祐

2015/11　Research paper (other academic)

SACLA における高強度レーザーを用いた衝撃圧縮 XFEL その 場観察実験ステーション

丹下慶範, 尾崎典雅, 松岡健之, 小川剛史, Albertazzi Bruno, 羽原英明, 高橋健次郎, 松山智至, 山内和人, 田中和夫, 兒玉了祐, 佐藤友子, 関根利守, 瀬 戸雄介, 奥地拓生, 籔内俊毅, 犬伏雄一, 矢橋牧名

2015/11　Research paper (other academic)

ハイパワーレーザー及び XFEL を用いた超高圧研究

尾崎典雅, Albertazzi Bruno, Benuzzi-Mounaix Alessandra, Denoeud Adrien, Gregori Gianluca, 羽原英明, Hartley Nicholas, 犬伏雄一, Koenig Michel, 近藤良彦, 松岡健之, 松 山智至, 奥地拓生, 佐藤友子, 佐藤友哉, 佐野 孝好, 坂田 修 身, 瀬戸雄介, 関根利守, 田中和夫, 高橋 謙次郎, 丹下慶範, 土屋卓久, 富樫格, 矢橋牧名, 薮内俊毅, 山内和人, 兒玉了祐

高圧討論会講演要旨集　Vol. 56th　2015/11　Research paper (other academic)

Study on the mechanism of platinum-assisted hydrofluoric acid etching of SiC using density functional theory calculations

P. V. Bui, A. Isohashi, H. Kizaki, Y. Sano, K. Yamauchi, Y. Morikawa, K. inagaki

Applied Physics Letters　Vol. 107　No. 20　p. 201601-1-201601-4　2015/11　Research paper (scientific journal)

Damage threshold of platinum/carbon multilayers under hard X-ray free-electron laser irradiation

Jangwoo Kim, Ayaka Nagahira, Takahisa Koyama, Satoshi Matsuyama, Yasuhisa Sano, Makina Yabashi, Haruhiko Ohashi, Tetsuya Ishikawa, Kazuto Yamauchi

OPTICS EXPRESS　Vol. 23　No. 22　p. 29032-29037　2015/11　Research paper (scientific journal)

Catalyst-Assisted Electroless Flattening of Ge Surfaces in Dissolved-O2-Containing Water

T. Kawase, Y. Saito, A. Mura, T. Okamoto, K. Kawai, Y. Sano, M. Morita, K. Yamauchi, K. Arima

ChemElectroChem　Vol. 2　No. 11　p. 1656-1659　2015/11　Research paper (scientific journal)

Damage threshold of platinum/carbon multilayers under hard X-ray free-electron laser irradiation

J. Kim, A. Nagahira, T. Koyama, S. Matsuyama, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawa, K. Yamauchi

Optics Express　Vol. 23　No. 22　p. 29032-29037　2015/11　Research paper (scientific journal)

Current status and future prospects of X-ray nanofocusing

Kazuto Yamauchi

Ionizing Radiation　Vol. 41　No. 1　p. 15-20　2015/10　Research paper (other academic)

Current status and future prospects of X-ray nanofocusing

Kazuto Yamauchi

Ionizing Radiation　Vol. 41　No. 1　p. 15-20　2015/10　Research paper (other academic)

Coherent diffraction imaging of non-isolated object with apodized illumination

K. P Khakurel, T. Kimura, Y. Joti, S. Matsuyama, K. Yamauchi, Y. Nishino

Optics Express　Vol. 23　No. 22　p. 28182-28190　2015/10　Research paper (scientific journal)

Development of precision Wolter mirrors for future solar x-ray observations

T. Sakao, S. Matsuyama, A. Kime, T. Goto, A. Nishihara, H. Nakamori, K. Yamauchi, Y. Kohmura, A. Miyake, H. Hashizume, T. Maezawa, Y. Suematsu, N. Narukage

Proceedings of SPIE　Vol. 9603　p. 96030U-1-96030U-9　2015/09　Research paper (international conference proceedings)

Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors

S. Matsuyama, H. Kino, S. Yasuda, Y, Kohmura, H. Ohashi, T. Ishikawa, K. Yamauchi

Proceedings of SPIE　Vol. 9592　p. 959208-1-959208-5　2015/09　Research paper (international conference proceedings)

Development of ion beam figuring system with electrostatic deflection for ultraprecise X-ray reflective optics

J. Yamada, S. Matsuyama, Y. Sano, K. Yamauchi

J. Yamada , S. Matsuyama, Y. Sano , K. Yamauchi　Vol. 86　No. 9　2015/08　Research paper (scientific journal)

Atomic inner-shell laser at 1.5-ångström wavelength pumped by an X-ray free-electron laser

H. Yoneda, Y. Inubushi, K. Nagamine, Y. Michine, H. Ohashi, H. Yumoto, K. Yamauchi, H. Mimura, H. Kitamura, T. Katayama, T. Ishikawa, M. Yabashi

Nature　Vol. 524　No. 7566　p. 446-449　2015/08　Research paper (scientific journal)

Atomic inner-shell laser at 1.5-angstrom wavelength pumped by an X-ray free-electron laser

Hitoki Yoneda, Yuichi Inubushi, Kazunori Nagamine, Yurina Michine, Haruhiko Ohashi, Hirokatsu Yumoto, Kazuto Yamauchi, Hidekazu Mimura, Hikaru Kitamura, Tetsuo Katayama, Tetsuya Ishikawa, Makina Yabashi

NATURE　Vol. 524　No. 7566　p. 446-+　2015/08　Research paper (scientific journal)

In situ characterization of the XFEL probe beam intensity distribution by a high spatial resolution hard X-ray LiF crystal detector

T. Pikuz, A. Faenov, A. Mitrofanov, B. Albertazzi, N. Ozaki, T. Matsuoka, O. M, R. Arturo, T. Yabuuchi, H. Habara, K. A. Tanaka, S. Matsuyama, K. Yamauchi, Y. Inubushi, T. Togashi, H. Yumoto, Y. Tange, K. Tono, M. Yabashi, M. Nishikino, T. Kawachi, M. R. Lopez, D. Bleiner, T. Ishikawa, R. Kodama

2015/06

Damage to inorganic materials illuminated by focused beam of x-ray free-electron laser radiation

Takahisa Koyama, Hirokatsu Yumoto, Kensuke Tono, Tadashi Togashi, Yuichi Inubushi, Tetsuo Katayama, Jangwoo Kim, Satoshi Matsuyama, Makina Yabashi, Kazuto Yamauchi, Haruhiko Ohashi

SPIE Proceedings　Vol. 9511　p. 951107-1-951107-7　2015/05/12　Research paper (international conference proceedings)

Nanofocusing of X-ray free-electron lasers by grazing-incidence reflective optics

K. Yamauchi, M. Yabashi, H. Ohashi, T. Koyama, T. Ishikawa

Journal of Synchrotron Radiation　Vol. 22　No. 3　p. 592-598　2015/05　Research paper (scientific journal)

Metal-Assisted Etching of Ge Surfaces in Water: From Pit Formation to Flattening

Kenta Arima, Tatsuya Kawase, Atsushi Mura, Kentaro Kawai, Yasuhisa Sano, Kazuto Yamauchi, Mizuho Morita

Program of 2015 MRS Spring Meeting & Exhibit　p. 329-329　2015/04

Characterization of XFEL Beam Quality by LiF Crystal Imaging Technique

T. Pikuz, A. Faenov, T. Matsuoka, S. Matsuyama, K. Yamauchi, N. Ozaki, Y. Inubashi, M. Yabashi, Y. Sato, H. Yumoto, H. Ohashi, A. Grum-Grzhimailo, M. Nishikino, T. Kawachi, T. Ishikawa, R. Kodama

2015/04

A novel branched TAT 47-57 peptide for selective Ni 2+ introduction into the human fibrosarcoma cell nucleus

L. Szyrwiel, M. Shimura, J. Shirataki, S. Matsuyama, A. Matsunaga, B. Setner, Szczukowski, Z. Szewczuk, K. Yamauchi, W. Malinka, L. Chavatte, R. Lobinski

Metallomics　Vol. 7　No. 7　p. 1155-1162　2015/04　Research paper (scientific journal)

Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

Takumi Goto, Hiroki Nakamori, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi, Satoshi Matsuyama

Review of Scientific Instruments　Vol. 86　No. 4　2015/04　Research paper (scientific journal)

Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors

Satoshi Matsuyama, Yoji Emi, Hidetoshi Kino, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Optics Express　Vol. 23　No. 8　p. 9746-9752　2015/04　Research paper (scientific journal)

Ion Beam Figuringを用いた高精度X線ミラーの作製（第7報）―静電偏向制御による非球面形状の作製と評価―

山田純平, 松山智至, 佐野泰久, 山内和人

アブストラクト集　Vol. 2015　p. 1061-1062　2015/03

Development of coordinate measuring machine with posture correction mechanism for X-ray focusing mirrors

Kim Jangwoo, Matsuyama Satoshi, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 1057-1058　2015/03

2回反射型X線ミラーのためのX線スローププロファイラの開発

松山智至, 木目歩美, 後藤拓実, 西原明彦, 香村芳樹, 石川哲也, 坂尾太郎, 山内和人

アブストラクト集　Vol. 2015　p. 1055-1056　2015/03

モノリシックな一次元Wolter mirrorを用いた結像型硬X線顕微鏡の開発

安田周平, 松山智至, 木野英俊, 岡田浩巳, 青野真也, 佐野泰久, 香村芳樹, 石川哲也, 山内和人

アブストラクト集　Vol. 2015　p. 1049-1050　2015/03

Local atomic configuration of graphene, buffer layer, and precursor layer on SiC(0001) by photoelectron diffraction

H. Matsui, F. Matsui, N. Maejima, T. Matsushita, T. Okamoto, A. N. Hattori, Y. Sano, K. Yamauchi, H. Daimon

Surface Science　Vol. 632　p. 98-102　2015/02　Research paper (scientific journal)

Surface flattening of Ge using oxygen reduction reaction enhanced by catalysts in water

Nakade Kazuki, Mori Daichi, Saitou Yusuke, Kawai Kentarou, Sano Yasuhisa, Yamauchi Kazuto, Morita Mizuho, Arima Kenta

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 297-298　2015

触媒表面基準エッチング法における触媒機能活性化手法の開発

藤 大雪, 礒橋 藍, 稻田 辰昭, 中平 雄太, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2015　p. 447-448　2015

Development of the innovative CMP/P-CVM combined apparatus (8th report)

Sano Yasuhisa, Shiozawa Kousuke, Doi Toshiro, Kurokawa Syuhei, Aida Hideo, Oyama Koki, Miyashita Tadakazu, Sumizawa Haruo, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 463-464　2015

第一原理計算による触媒表面基準エッチング法の加工メカニズムに対する解析

木谷 直隆, 礒橋 藍, Bui Van Pho, 杉浦 崇仁, 稲垣 耕司, 木崎 栄年, 佐野 泰久, 森川 良忠, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2015　p. 531-532　2015

電気化学反応を援用した4H-SiC基板に対する触媒表面基準エッチング法の開発

礒橋 藍, 山口 航, 杉浦 崇仁, 稻田 辰昭, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2015　p. 529-530　2015

革新的"plasma fusion CMP装置"の設計・試作（第6報）

塩澤 昂祐, 平岡 佑太, 佐野 泰久, 土肥 俊郎, 黒河 周平, 會田 英雄, 大山 幸希, 宮下 忠一, 住澤 春男, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2015　p. 525-526　2015

Development of Split-Delay Optics for Hard X-ray Free-Electron Lasers

Hirano Takashi, Osaka Taito, Sano Yasuhisa, Inubushi Yuichi, Matsuyama Satoshi, Tono Kensuke, Ishikawa Tetsuya, Yamauchi Kazuto, Yabashi Makina

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 699-700　2015

数値制御大気圧プラズマ犠牲酸化法における酸化膜厚制御の精度向上

栗生 賢, 武居 弘泰, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2015　p. 719-720　2015

The Oxidation Characteristic in Numerically Controlled Atmospheric-Pressure Plasma Sacrificial Oxidation

Takei Hiroyasu, Kurio Satoshi, Matsuyama Satoshi, Yamauchi Kazuto, Sano Yasuhisa

Proceedings of JSPE Semestrial Meeting　Vol. 2015　p. 717-718　2015

Flattening of Ge surfaces in water by catalytic activity of metals enhancing oxygen reduction reaction

Arima Kenta, Kawase Tatsuya, Saito Yusuke, Kawai Kentaro, Sano Yasuhisa, Morita MIzuho, Yamauchi Kazuto

Abstract of annual meeting of the Surface Science of Japan　Vol. 35　p. 58-58　2015

結晶光学素子に基づくX線分割・遅延光学系の開発

大坂 泰斗, 平野 嵩, 犬伏 雄一, 矢橋 牧名, 佐野 泰久, 松山 智至, 登野 健介, 佐藤 尭洋, 小川 奏, 石川 哲也, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2015　p. 1045-1046　2015

21aAE-7 First-principles study on hydrolysis of SiO_2 at Pt/SiO_2 interface

Kidani N., Bui P. V., Isohashi A., Inagaki K., Kizaki H., Yamauchi K., Morikawa Y.

Meeting Abstracts of the Physical Society of Japan　Vol. 70　p. 2511-2511　2015

A new mirror-like finish method for oxide materials by catalytically induced chemical etching in pure water

Ai Isohashi, Shun Sadakuni, Takahito Sugiura, Naotaka Kidani, Tatsuaki Inada, Wataru Yamaguchi, Koji Inagaki, Yasuhisa Sano, Kazuto Yamauchi

Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015　p. 345-346　2015　Research paper (international conference proceedings)

2回反射型結像ミラーのためのX線スローププロファイラの開発

木目歩美, 松山智至, 山内和人

予稿集　2015/01

1次元Wolterミラー（Monolithic型）を用いた色収差のない結像型X線顕微鏡の開発

木野英俊, 松山智至, 岡田浩巳, 佐野泰久, 香村芳樹, 玉作賢治, 矢橋牧名, 津村尚史, 石川哲也, 山内和人

予稿集　2015/01

形状可変ミラーによる二段集光光学系の開発

後藤拓実, 中森紘基, 松山智至, 木村隆志, 佐野泰久, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

予稿集　2015/01

X線ミラー作製のためのビーム偏向制御を用いた数値制御イオンビーム加工装置の開発

山田純平, 松山智至, 佐野泰久, 山内和人

予稿集　2015/01

Sub-10 nm集光用X線ミラーのための高精度形状計測装置の開発

金章雨, 長平良綾香, 西原明彦, 松山智至, 佐野泰久, 山内和人

予稿集　2015/01

位相回折格子を用いたX線自由電子レーザーナノビームの集光波面計測

西原明彦, 松山智至, 金章雨, 長平良綾香, 湯本博勝, 三村秀和, 小山貴久, 登野健介, 犬伏雄一, 片山拓也, 富樫格, 矢代航, 大橋治彦, 百生敦, 後藤俊治, 矢橋牧名, 石川哲也, 山内和人

予稿集　Vol. 28th　2015/01

XFEL用集光ミラー用Pt/C多層膜の性能評価

長平良綾香, 金章雨, 小山貴久, 松山智至, 西原明彦, 湯本博勝, 佐野泰久, 大橋治彦, 後藤俊治, 矢橋牧名, 石川哲也, 山内和人

予稿集　Vol. 28th　2015/01

Formation of Pit-free Graphene Assisted by Plasma Oxidation on Flattened SiC Surface

Kenta Arima, Naoki Saito, Daichi Mori, Kentaro Kawai, Yasuhisa Sano, Kazuto Yamauchi, Morita Mizuho

Extended Abstracts of the 20th Workshop on Gate Stack Technology and Physics　p. 93-96　2015/01

Planarization of 6-inch 4H-SiC wafer using catalyst-referred etching

A. Isohashi, Y. Sano, T. Kato, K. Yamauchi

Materials Science Forum　Vol. 821-823　p. 537-540　2015　Research paper (international conference proceedings)

Basic study on etching selectivity of plasma chemical vaporization machining by introducing crystallographic damage into work surface

Yasuhisa Sano, Toshiro Doi, Syuhei Kurokawa, Hideo Aida, Osamu Ohnishi, Michio Uneda, Yuu Okada, Hiroaki Nishikawa, Kazuto Yamauchi

Key Engineering Materials　Vol. 625　p. 550-553　2015　Research paper (international conference proceedings)

Optimization of Machining Conditions of Basic-Type CMP/P-CVM Fusion Processing Using SiC Substrate

Yasuhisa Sano, Kousuke Shiozawa, Toshiro Doi, Syuhei Kurokawa, Hideo Aida, Koki Oyama, Tadakazu Miyashita, Haruo Sumizawa, Kazuto Yamauchi

2015 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)　2015　Research paper (international conference proceedings)

Development of an achromatic full-field hard X-ray microscope using two monolithic imaging mirrors

S. Matsuyama, H. Kino, S. Yasuda, Y. Kohmura, H. Okada, M. Yabashi, T. Ishikawa, K. Yamauchi

X-RAY NANOIMAGING: INSTRUMENTS AND METHODS II　Vol. 9592　p. 959208-1-959208-5　2015　Research paper (international conference proceedings)

Development of precision Wolter mirrors for future solar x-ray observations

Taro Sakao, Satoshi Matsuyama, Ayumi Kime, Takumi Goto, Akihiko Nishihara, Hiroki Nakamori, Kazuto Yamauchi, Yoshiki Kohmura, Akira Miyake, Hirokazu Hashizume, Tadakazu Maezawa, Yoshinori Suematsu, Noriyuki Narukage

OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY VII　Vol. 9603　p. 96030U-1-96030U-9　2015　Research paper (international conference proceedings)

Numerically controlled atmospheric-pressure plasma sacrificial oxidation using electrode arrays for improving silicon-on-insulator layer uniformity

H. Takei, K. Yoshinaga, S. Matsuyama, K. Yamauchi, Y. Sano

Japanese Journal of Applied Physics　Vol. 54　No. 1S　2015/01　Research paper (scientific journal)

Using LiF crystals for 3D visualization of~SACLA XFEL beam focusing properties

T.A. Pikuz, A.Ya. Faenov, T. Matsuoka, N. Ozaki, Y. Inubashi, M. Yabashi, Y. Sato, H.Yumoto, H. Ohashi, S. Matsuyama, K. Yamauchi, T. Ishikawa, A. Grum-Grzhimailo, S.A. Pikuz, R. Kodama

2014/12

XFEL-SACLA を用いた超高圧下の格子ダイナミクス観察

尾崎典雅, 松岡健之, 佐野智一, 犬伏雄一, 富樫格, 籔内俊毅, 羽原英明, ALBERTAZZI Bruno, 松山智至, 山内和人, 田中和夫, 廣瀬明夫, 近藤良彦, 佐藤友哉, 松田朋己, 浦西浩幸, 中塚和樹, 林圭輔, 喜田美佳, 小川剛史, 池谷正太郎, 山下真直, 白石亮平, 中口真之介, 松山法央, 丹下慶範, 土屋卓久, 佐藤友子, 関根利守, 梅田悠平, 奥地拓生, PUREVJAV Narangoo, 瀬戸雄介, 坂田修身, 佐野雄二, 末田敬一, 小川奏, 佐藤尭洋, HARMAND Marion, MORARD Guillaume, KOENIG Michel, 矢橋牧名, 兒玉了佑

高圧討論会講演要旨集　Vol. 55th　2014/11　Research paper (other academic)

Development of a one-dimensional two-stage focusing system with two deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings of SPIE　Vol. 9208　2014/10　Research paper (international conference proceedings)

Saturable absorption of intense hard X-rays in iron

H. Yoneda, Y. Inubushi, M. Yabashi, T. Katayama, T. Ishikawa, H. Ohashi, H. Yumoto, K. Yamauchi, H. Mimura, H. Kitamura

Nature Communications　Vol. 5　p. 5080-5080　2014/10　Research paper (scientific journal)

Development of hard X-Ray split-delay optics based on Si(220) crystals

Taito Osaka, Takashi Hirano, Yuichi Inubushi, Makina Yabashi, Yasuhisa Sano, Satoshi Matsuyama, Kensuke Tono, Takahiro Sato, Kanade Ogawa, Tetsuya Ishikawa, Kazuto Yamauchi

JSAP-OSA Joint Symposia, JSAP 2014　2014/09/01　Research paper (international conference proceedings)

位相回折格子を用いたX線レーザーナノビームの高精度波面計測

西原明彦, 松山智至, 金章雨, 長平良綾香, 湯本博勝, 三村秀和, 小山貴久, 登野健介, 犬伏雄一, 佐藤尭洋, 片山拓也, 富樫格, 矢代航, 佐野泰久, 大橋治彦, 百生敦, 後藤俊治, 矢橋牧名, 石川哲也, 山内和人

アブストラクト集　Vol. 2014　p. 281-282　2014/09

Ion Beam Figuringを用いた高精度X線ミラーの作製（第6報）～静電偏向制御による数値制御加工～

山田純平, 松山智至, 佐野泰久, 山内和人

アブストラクト集　p. 283-284　2014/09

色収差のない結像型X線顕微鏡の開発とイメージングXAFSへの応用

松山智至, 木野英俊, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

講演要旨集　p. 79-80　2014/09

Optics for coherent X-ray applications

M. Yabashi, K. Tono, H. Mimura, S. Matsuyama, K. Yamauchi, T. Tanaka, H. Tanaka, K. Tamasaku, H. Ohashi, S. Goto, T. Ishikawa

Journal of Synchrotron Radiation　Vol. 21　p. 976-985　2014/09　Research paper (scientific journal)

Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectroscopy

S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings of SPIE　Vol. 9207　2014/09　Research paper (international conference proceedings)

Development of high-precision figure measurement system for x-ray optics using laser focus microscope

J. Kim, S. Matsuyama, Y. Sano, K. Yamauchi

Technical program　p. 188-188　2014/08　Research paper (international conference proceedings)

Development of a two-stage x-ray focusing system with ultraprecise deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Technical program　p. 193-193　2014/08　Research paper (international conference proceedings)

Development of achromatic full-field hard x-ray microscopy with ultraprecise total reflection mirrors

S. Masuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, T. Ishikawa, K. Yamauchi

Technical program　p. 192-192　2014/08　Research paper (international conference proceedings)

Development of split-delay x-ray optics using Si(220) crystals at SACLA

T. Osaka, T. Hirano, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, K. Ogawa, S. Matsuyama, T. Ishikawa, K. Yamauchi

Technical program　Vol. 9210　p. 198-198　2014/08　Research paper (international conference proceedings)

Removal Rate of Plasma Chemical Vaporization Machining of Intentionally Damaged Surface by Mechanical Action

K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, O. Ohnishi, M. Uneda, Y. Okada, K. Yamauchi

15th International Conference on Precision Engineering (ICPE2014), Abstracts, pp. 53, P22　p. 53-53　2014/07　Research paper (international conference proceedings)

Removal Mechanism in Catalyst-Referred Etching Process for SiC Planarization

P. V. Bui, K. Inagaki, Y. Sano, K. Yamauchi, Y. Morikawa

15th International Conference on Precision Engineering (ICPE2014), Abstracts, pp. 50, P05　p. 50-50　2014/07　Research paper (international conference proceedings)

Improving the Accuracy of Numerically Controlled Sacrificial Plasma Oxidation Using an Array of Electrodes to Produce Ultra-uniform SOI

H. Takei, S. Kurio, Y. Sano, S. Matsuyama, K. Yamauchi

15th International Conference on Precision Engineering (ICPE2014), Abstracts, pp. 32, B15　p. 32-32　2014/07　Research paper (international conference proceedings)

A novel abrasive-free chemical planarization of oxide materials using pure water and Pt catalyst

T. Sugiura, A. Isohashi, W. Yamaguchi, S. Matsuyama, Y. Sano, K. Yamauchi

Extended Abstracts of European society for precision engineering & nanotechnology 2014　Vol. 2　p. 351-354　2014/06　Research paper (international conference proceedings)

Dependence of GaN Removal Rate of Plasma Chemical Vaporization Machining on Mechanically Introduced Damage

Y. Sano, T. K. Doi, S. Kurokawa, H. Aida, O. Ohnishi, M. Ueda, K. Shiozawa, Y. Okada, K. Yamauchi

Sensors and Materials　Vol. 26　No. 6　p. 429-434　2014/06　Research paper (scientific journal)

X線光学

山内和人

光学　Vol. 43　No. 4　p. 147-148　2014/04

Status of Experimental Platform for Matter under Dynamical Compression Driven by 40 TW Laser Pulse in XFEL Facility (SACLA)

Takeshi Matsuoka, Norimasa Ozaki, Yuichi Inubushi, Tadashi Togashi, Toshinori Yabuuchi, Kanade Ogawa, Tomokazu Sano, Keiichi Sueda, Satoshi Matsuyama, Kazuto Yamauchi, Hideaki Habara, Hiromitsu Tomizawa, Hirokatsu Yumoto, Haruhiko Ohashi, Takahiro Sato, Tomoki Matsuda, Yoshihiko Kondo, Keisuke Hayashi, Yuya Sato, Mika Kita, Tsuyoshi Ogawa, Masanao Yamashita, Ryohei Shiraishi, Yoshinori Tange, Tomoko Sato, Toshimori Sekine, Takuo Okuchi, Yusuke Seto, Norihiro Matsuyama, Osami Sakata, Yuji Sano, Keiichi Hirota, Toshiyuki Fujita, Kiyotaka Masaki, Kazuo A. Tanaka, Makina Yabashi, Ryosuke Kodama

2014/04

Generation of 1020 W/cm2 Hard X-ray Laser Pulses with Two-Stage Reflective Focusing System

H. Mimura, H. Yumoto, S. Matsuyama, T. Koyama, K. Tono, Y. Inubushi, T. Togashi, T. Sato, J. Kim, R. Fukui, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawa, K. Yamauchi

Nature Communications　Vol. 5　No. 3539　2014/04　Research paper (scientific journal)

SACLA X 線自由電子レーザー同期 40 TW レーザーシステムの整備と応用

松岡健之, 尾崎典雅, 犬伏雄一, 富樫格, 籔内俊毅, 佐野智一, 末田敬一, 松山智至, 山内和人, 羽原英明, 冨澤宏光, 佐藤尭洋, 松田朋己, 近藤良彦, 林圭輔, 佐藤友哉, 喜田美佳, 小川剛史, 山下真直, 丹下慶範, 佐藤友子, 関根利守, 奥地拓生, 瀬戸雄介, 松山法央, 坂田修身, 佐野雄二, 廣田圭一, 藤田敏之, 久保達也, 政木清孝, 田中和夫, 矢橋牧名, 兒玉了祐

2014/03

Dicing of SiC wafer by atmospheric-pressure plasma etching process with slit mask for plasma confinement

Y. Sano, H. Nishikawa, Y. Okada, K. Yamamura, S. Matsuyama, K. Yamauchi

Materials Science Forum　Vol. 778-780　p. 759-762　2014/02　Research paper (scientific journal)

Thinning of a two-inch silicon carbide wafer by plasma chemical vaporization machining using a slit electrode

Y. Okada, H. Nishikawa, Y. Sano, K. Yamamura, K. Yamauchi

Materials Science Forum　Vol. 778-780　p. 750-753　2014/02　Research paper (scientific journal)

4H-SiC planarization using catalyst-referred etching with pure water

A. Isohashi, Y. Sano, S. Sadakuni, K. Yamauchi

Materials Science Forum　Vol. 778-780　p. 722-725　2014/02　Research paper (scientific journal)

Investigation of the Barrier Heights for Dissociative Adsorption of HF on SiC Surfaces in the Catalyst-Referred Etching Process

P. V. Bui, K. Inagaki, Y. Sano, K. Yamauchi, Y. Morikawa

Materials Science Forum　Vol. 778-780　p. 726-729　2014/02　Research paper (scientific journal)

X-ray two-photon absorption competing against single and sequential multiphoton processes

K. Tamasaku, E. Shigemasa, Y. Inubushi, T. Katayama, K. Sawada, H. Yumoto, H. Ohashi, H. Mimura, M. Yabashi, K. Yamauchi, T. Ishikawa

Nature Photonics　Vol. 8　No. 4　p. 313-316　2014/02　Research paper (scientific journal)

Planarization of the gallium nitride substrate grown by the Na flux method applying catalyst-referred etching

W. Yamaguchi, S. Sadakuni, A. Isohashi, H. Asano, Y. Sano, M. Imade, M. Maruyama, M. Yoshimura, Y. Mori, K. Yamauchi

Materials Science Forum　Vol. 778-780　p. 1193-1196　2014/02　Research paper (scientific journal)

High-resolution Multi-slice X-ray Ptychography of Extended Thick Objects

A. Suzuki, S. Furutaku, K. Shimomura, K. Yamauchi, Y. Kohmura, T. Ishikawa, Y. Takahashi

Physical Review Letters　Vol. 112　No. 5　2014/02　Research paper (scientific journal)

High-efficiency planarization of GaN and SiC by catalyst-referred etching applying ultra violet

Yamaguchi Wataru, Ishohashi Ai, Sugiura Takahito, Inada Tatsuaki, Matsuyama Satoshi, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2014　No. 0　p. 23-24　2014

Investigation of alternative catalyst metals to platinum in the catalyst-referred etching

Isohashi Ai, Inada Tatsuaki, Yamaguchi Wataru, Sugiura Takahito, Matsuyama Satoshi, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2014　No. 0　p. 25-26　2014

触媒表面基準エッチング法による金属酸化物材料の高能率平坦化加工

杉浦 崇仁, 礒橋 藍, 山口 航, 稻田 辰昭, 松山 智至, 佐野 泰久, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2014　No. 0　p. 269-270　2014

Atomically Controlled Surfacing of Single Crystalline SiC and GaN by Catalyst-Referred Etching

Kazuto Yamauchi, Ai Isohashi, Kenta Arima

2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)　p. 139-141　2014　Research paper (international conference proceedings)

Development of Basic-Type CMP/P-CVM Fusion Processing System (Type A) and Its Fundamental Characteristics

Kousuke Shiozawa, Yasuhisa Sano, Toshiro Doi, Syuhei Kurokawa, Hideo Aida, Koki Oyama, Tadakazu Miyashita, Haruo Sumizawa, Kazuto Yamauchi

2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)　p. 275-278　2014　Research paper (international conference proceedings)

Atomic scale flattening of gallium nitride substrate grown by Na flux method applying catalyst-referred etching

Wataru Yamaguchi, Shun Sadakuni, Ai Isohashi, Hiroya Asano, Yasuhisa Sano, Mamoru Imade, Mihoko Maruyama, Masashi Yoshimura, Yusuke Mori, Kazuto Yamauchi

2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)　p. 337-339　2014　Research paper (international conference proceedings)

Planarization of 4H-SiC(0001) by Catalyst-Referred Etching Using Pure Water Etchant

Ai Isohashi, Yasuhisa Sano, Kazuto Yamauchi

2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)　p. 273-274　2014　Research paper (international conference proceedings)

Ultra-high-precision surface processing techniques for nanofocusing ellipsoidal mirrors in hard x-ray region

Hirokatsu Yumoto, Takahisa Koyama, Satoshi Matsuyama, Kazuto Yamauchi, Haruhiko Ohashi

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS V　Vol. 9206　2014　Research paper (international conference proceedings)

Enhancement of photoluminescence efficiency from GaN(0001) by surface treatments

A. N. Hattori, K. Hattori, Y. Morikawa, A. Yamamoto, S. Sadakuni, J. Murata, K. Arima, Y. Sano, K. Yamauchi, H. Daimon, K. Endo

Japanese Journal of Applied Physics　Vol. 53　No. 2　2014/01　Research paper (scientific journal)

Two-dimensional X-ray nanofocusing using piezoelectric deformable mirrors

H. Nakamori, S. Matsuyama, T. Goto, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

The 12th symposium on X-ray Imaging Optics, Abstract　p. 99-100　2013/11

Single-shot wavefront measurement of XFEL nanobeam

R. Fukui, J. Kim, S. Matsuyama, H. Yumoto, Y. Inubushi, K. Tono, T. Koyama, T. Kimura, H. Mimura, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

The 12th symposium on X-ray Imaging Optics, Abstract　p. 97-98　2013/11

Development of one-dimensional Wolter Mirror figured on a single substrate for full-field X-ray microscopy

H. Kino, S. Matsuyama, Y. Emi, H. Okada, Y. Sano, K. Yamauchi

The 12th symposium on X-ray Imaging Optics, Abstract　p. 93-94　2013/11

Development of a High-resolution Full-field Hard X-ray Imaging Microscope with Compact AKB Mirror Optics

Y. Emi, S. Matsuyama, H. Kino, Y. Kohmura, T. Ishikawa, K. Yamauchi

The 12th symposium on X-ray Imaging Optics, Abstract　p. 67-68　2013/11

Damage study of optical substrates using 1-µm-focusing beam of hard X-ray free-electron laser

T. Koyama, H. Yumoto, Y. Senba, K. Tono, T. Sato, T. Togashi, Y. Inubushi, J. Kim, T. Kimura, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi, T. Ishikawa

Journal of Physics: Conference Series　Vol. 463　2013/11　Research paper (scientific journal)

Fabrication of Thin Si Crystal for X-Ray Beam Splitter

T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, S. Matsuyama, T. Ishikawa, K. Yamauchi

28th The American Society for Precision Engineering Annual Meeting, Extended Abstracts　2013/10　Research paper (international conference proceedings)

Wet Chemical Planarization of Single-Crystalline SiC Using Catalyst-Referred Etching

A. Isohashi, Y. Sano, T. Okamoto, S. Sadakuni, P. V. Bui, K. Yagi, K. Yamauchi

28th The American Society for Precision Engineering Annual Meeting, Extended Abstracts　p. 153-156　2013/10　Research paper (international conference proceedings)

Development of high-accuracy X-ray ptychography apparatus

A. Suzuki, Y. Senba, H. Ohashi, Y. Kohmura, K. Yamauchi, T. Ishikawa, Y. Takahashi

Journal of Physics: Conference Series　Vol. 463　No. 1　2013/10　Research paper (scientific journal)

Thin crystal development and applications for hard x-ray free-electron lasers

T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, K. Ogawa, S. Matsuyama, T. Ishikawa, K. Yamauchi

Proceedings of SPIE　Vol. 8848　2013/09　Research paper (international conference proceedings)

A Precision Grazing-incidence Angle Error Measurement of a Hard X-ray Condenser Mirror Using Single-grating Interferometry

R. Fukui, J. Kim, S. Matsuyama, H. Yumoto, Y. Inubushi, K. Tono, T. Koyama, T. Kimura, H. Mimura, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

Synchrotron Radiation News　Vol. 26　No. 5　p. 13-16　2013/09　Research paper (scientific journal)

Damage threshold investigation using grazing incidence irradiation by hard x-ray free electron laser

T. Koyama, H. Yumoto, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi

Proc. SPIE　Vol. 8848　2013/09　Research paper (scientific journal)

Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proc. SPIE　Vol. 8851　2013/09　Research paper (scientific journal)

Damage characteristics of platinum/carbon multilayers under x-ray free-electron laser irradiation

J. Kim, T. Koyama, H. Yumoto, A. Nagahira, S. Matsuyama, Y. Sano, M. Yabashi, H. Ohashi, T. Ishikawa, K. Yamauchi

Proc. SPIE　Vol. 8848　2013/09　Research paper (scientific journal)

Planarization of GaN Wafer Using Novel Polishing Technique Utilizing Catalyst Surface Reaction

Y. Sano, K. Arima, K. Yamauchi

ECS Journal of Solid State Science and Technology　Vol. 2　No. 8　p. N3028-N3035　2013/09　Research paper (scientific journal)

Development of ultra-precise piezoelectric deformable mirrors for x-ray nanofocusing

H. Nakamori, S. Matsuyama, S. Imai, T. Goto, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

SPIE Optics+Photonics, Technical Program　Vol. 8503　2013/08　Research paper (international conference proceedings)

Development of full-field hard x-ray microscopy with four aspherical mirrors

S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

SPIE Optics+Photonics, Technical Program　2013/08　Research paper (international conference proceedings)

Investigation of ablation thresholds of optical materials using 1-µm-focusing beam at hard X-ray free electron laser

Takahisa Koyama, Hirokatsu Yumoto, Yasunori Senba, Kensuke Tono, Takahiro Sato, Tadashi Togashi, Yuichi Inubushi, Tetsuo Katayama, Jangwoo Kim, Satoshi Matsuyama, Hidekazu Mimura, Makina Yabashi, Kazuto Yamauchi, Haruhiko Ohashi, Tetsuya Ishikawa

Optics Express　Vol. 21　No. 13　p. 15382-15388　2013/06　Research paper (scientific journal)

First-principles theoretical study of hydrolysis of stepped and kinked Ga-terminated GaN surfaces

M. Oue, K. Inagaki, K. Yamauchi, Y. Morikawa

Nanoscale Research Letters　Vol. 8　2013/05　Research paper (scientific journal)

Nanofocusing and single shot wavefront diagnosis of SACLA

K. Yamauchi, M. Yabashi, H. Mimura, H. Yumoto, T. Koyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Katayama, S. Matsuyama, J. Kim, R. Fukui, Y. Sano, W. Yashiro, T. Ohmori, S. Goto, H. Ohashi, A. Momose, T. Ishikawa

SPIE Optics+Optelectronics, Technical Abstracts　2013/04　Research paper (international conference proceedings)

Absolute calibration of optical flats using the three-flat test by considering the relative humidity change

Hirokatsu Yumoto, Satoshi Matsuyama, Hidekazu Mimura, Kazuto Yamauchi, Haruhiko Ohashi

Nuclear Instruments and Methods in Physics Research A　Vol. 710　p. 2-6　2013/04　Research paper (scientific journal)

X-ray nanofocusing using a piezoelectric deformable mirror and at-wavelength metrology methods

H. Nakamori, S. Matsuyama, S. Imai, T. Kimura, Y. Sano, Y. Kohmura, T. Kenji, M. Yabashi, T. Ishikawa, K. Yamauchi

Nuclear Inst. and Methods in Physics Research, A　Vol. 710　p. 93-97　2013/04　Research paper (scientific journal)

Coherent x-ray zoom condenser lens for diffractive and scanning microscopy

T. Kimura, S. Matsuyama, K. Yamauchi, Y. Nishino

Optics Express　Vol. 21　No. 8　p. 9267-9276　2013/04　Research paper (scientific journal)

Bragg x-ray ptychography of a silicon crystal: Visualization of the dislocation strain field and the production of a vortex beam

Yukio Takahashi, Akihiro Suzuki, Shin Furutaku, Kazuto Yamauchi, Yoshiki Kohmura, Tetsuya Ishikawa

Physical Review B - Condensed Matter and Materials Physics　Vol. 87　No. 12　2013/03/07　Research paper (scientific journal)

Ion Beam Figuring を用いた高精度Ｘ線ミラーの作製 第 5 報 －X線集光ミラーの作製 －

松山智至, 北村真一, 佐野泰久, 山内和人

2013年度精密工学会春季大会プログラム＆アブストラクト集　2013/03

大変形可能な硬X線集光用形状可変ミラーの開発 －シミュレーションによる設計指針の検討－

後藤 拓実, 中森 紘基, 松山 智至, 今井 将太, 木村 隆志, 佐野 泰久, 香村 芳樹, 石川 哲也, 山内 和人

2013年度精密工学会春季大会プログラム＆アブストラクト集　2013/03

Bias-Assisted Photochemical Planarization of GaN(0001) Substrate with Damage Layer

S. Sadakuni, J. Murata, Y. Sano, K. Yagi, S. Matsuyama, K. Yamauchi

Japanese Journal of Applied Physics　Vol. 52　No. 3　p. 036504-1-4　2013/03　Research paper (scientific journal)

Bragg x-ray ptychography of a silicon crystal: Visualization of the dislocation strain field and the production of a vortex beam

Y. Takahashi, A. Suzuki, S. Furutaku, K. Yamauchi, Y. Kohmura, T. Ishikawa

Physical Review B　Vol. 87　No. 12　p. 121201-121201　2013/03　Research paper (scientific journal)

A Bragg beam splitter for hard x-ray free-electron lasers

T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, S. Matsuyama, T. Ishikawa, K. Yamauchi

Optics Express　Vol. 21　No. 3　p. 2823-2831　2013/02　Research paper (scientific journal)

大気圧プラズマによるチャネルカット単結晶シリコンの内壁エッチングの検討

大坂 泰斗, 平野 嵩, 矢橋 牧名, 佐野 泰久, 登野 健介, 犬伏 雄一, 佐藤 尭洋, 小川 奏, 松山 智至, 石川 哲也, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2013　p. 653-654　2013

硬X線用部分回転楕円面集光ミラーの開発:高精度形状修正加工法と高精度スティッチング表面形状計測法を利用したミラー作製

湯本 博勝, 小山 貴久, 松山 智至, 山内 和人, 大橋 治彦

精密工学会学術講演会講演論文集　Vol. 2013　p. 661-662　2013

Development of hard X-ray focusing system with deformable mirror:In-situ figure correction of deformable mirror by using Pencil-beam method

Goto Takumi, Nakamori Hiroki, Matsuyama Satoshi, Sano Yasuhisa, Kohmura Yoshiki, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 651-652　2013

X線望遠鏡用WolterミラーのためのX線スローププロファイラの開発:幾何光学と波動光学シミュレーションによる検討

木目 歩美, 松山 智至, 福井 亮介, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2013　p. 663-664　2013

Single shot wavefront measurement of x-ray free electron laser nanobeam using x-ray diffraction grating

Fukui Ryousuke, Matsuyama Satoshi, Kim Jangwoo, Yumoto Hirokatsu, Mimura Hidekazu, Koyama Takahisa, Momose Atsushi, Ohashi Haruhiko, Yabashi Makina, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 659-660　2013

Study of Reflectivity improvement of Pt/C Multilayers for hard X-ray focusing

Nagahira Ayaka, Kim Jangwoo, Matsuyama Satoshi, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 655-656　2013

硬Ｘ線集光用形状可変ミラーの開発:変形最適化手法の検討

中森 紘基, 後藤 拓実, 松山 智至, 佐野 泰久, 香村 芳樹, 石川 哲也, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2013　p. 649-650　2013

Performance evaluation of platinum/carbon multilayers for hard X-ray focusing using X-ray free-electron laser

Kim Jangwoo, Nagahira Ayaka, Koyama Takahisa, Yumoto Hirokatsu, Matsuyama Satoshi, Sano Yasuhisa, Yabashi Makina, Ohashi Haruhiko, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 657-658　2013

Planarization for functional materials by catalyst-referred etching

Yamaguchi Wataru, Sadakuni Shun, Isohashi Ai, Asano Hiroya, Sano Yasuhisa, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 679-680　2013

Development of a Full-field Hard X-ray Imaging Microscope Based on Advanced Kirkpatrick-Baez Mirror Optics

Emi Yoji, Matsuyama Satoshi, Kino Hidetoshi, Sano Yasuhisa, Kohmura Yoshiki, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2013　p. 647-648　2013

純水を用いた化学エッチングによる4H-SiC基板の平坦化加工

礒橋 藍, 佐野 泰久, 定國 峻, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2013　p. 941-942　2013

先端的難加工基板の高効率精密加工法の研究（第4報）:加工変質層の断面TEMによる評価とそのPCVM加工特性

塩澤 昂祐, 佐野 泰久, 土肥 俊郎, 黒河 周平, 曾田 英雄, 大西 修, 畝田 道雄, 岡田 悠, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2013　p. 937-938　2013

コヒーレントＸ線による走査透過Ｘ線顕微鏡システムの構築と分析科学への応用

山内 和人

2013/01

1枚の基板上に作製された1次元Wolterミラーの開発

松山智至, 岡田浩巳, 恵美陽治, 香村芳樹, 玉作賢治, 矢橋牧名, 津村尚史, 石川哲也, 山内和人

2013/01

X線自由電子レーザー集光用Pt/C多層膜の性能評価

金章雨, 福井亮介, 松山智至, 小山貴久, 湯本博勝, 佐野泰久, 大橋治彦, 後藤俊治, 矢橋牧名, 石川哲也, 山内和人

日本放射光学会年会・放射光科学合同シンポジウム予稿集　Vol. 26th　2013/01

X線回折格子を用いたXFELナノビームのワンショット波面計測

福井亮介, 松山智至, 金章雨, 湯本博勝, 三村秀和, 小山貴久, 登野健介, 犬伏雄一, 佐藤尭洋, 片山哲夫, 富樫格, 矢代航, 佐野泰久, 大橋治彦, 百生敦, 後藤俊治, 矢橋牧名, 石川哲也, 山内和人

日本放射光学会年会・放射光科学合同シンポジウム予稿集　Vol. 26th　2013/01

Nonlinear Optical Phenomena in Ultra-Intense X-ray Interaction with Matter

Hitoki Yoneda, Yuichi Inubushi, Makina Yabashi, Tetsuo Katayama, Tetsuya Ishikawa, Haruhiko Ohashi, Hirokatsu Yumoto, Kazuto Yamauchi, Hidekazu Mimura, Hikaru Kitamura

2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)　2013　Research paper (international conference proceedings)

Micro-focusing of hard x-ray free electron laser radiation using Kirkpatrick-Baez mirror system

H. Yumoto, H. Mimura, S. Matsuyama, T. Koyama, Y. Hachisu, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, K. Yamauchi

11TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI 2012)　Vol. 425　2013　Research paper (international conference proceedings)

High-resolution and high-sensitivity phase-contrast imaging by focused hard x-ray ptychography with a spatial filter

Y. Takahashi, A. Suzuki, S. Furutaku, K. Yamauchi, Y. Kohmura, T. Ishikawa

Applied Physics Letters　Vol. 102　No. 9　p. 094102-094102　2013/01　Research paper (scientific journal)

First-principles Analysis of the Initial Stage of the Chemical Etching Process of GaN

Mari Oue, Kouji Inagaki, Kazuto Yamauchi, Yoshitada Morikawa

2012/12

Adsorption of hydrogen fluoride on SiC surfaces: A density functional theory study

Pho Van Bui, K. Inagaki, Y. Sano, K. Yamauchi, Y. Morikawa

Current Appl. Phys.　Vol. 12　p. S42-S46　2012/12　Research paper (scientific journal)

Epitaxial Graphene Growth on Atomically Flattened SiC Assisted by Plasma Oxidation at 1000°C

Naoki Saito, Hiroaki Nishikawa, Yasuhisa Sano, Kentaro Kawai, Junichi Uchikoshi, Kazuto Yamauchi, Mizuho Morita, Kenta Arima

Program and Abstracts of 8th Handai Nanoscience and Nanotechnology International Symposium　2012/12

Focusing of X-ray free-electron laser pulses with reflective optics

Hirokatsu Yumoto, Hidekazu Mimura, Takahisa Koyama, Satoshi Matsuyama, Kensuke Tono, Tadashi Togashi, Yuichi Inubushi, Takahiro Sato, Takashi Tanaka, Takashi Kimura, Hikaru Yokoyama, Jangwoo Kim, Yasuhisa Sano, Yousuke Hachisu, Makina Yabashi, Haruhiko Ohashi, Hitoshi Ohmori, Tetsuya Ishikawa, Kazuto Yamauchi

Nature Photonics　Vol. 7　No. 1　p. 43-47　2012/12　Research paper (scientific journal)

First-Principles Study of Reaction Process of SiC and HF Molecules in Catalyst-Referred Etching

Pho Van Bui, Kouji Inagaki, Yasuhisa Sano, Kazuto Yamauchi, Yoshitada Morikawa

EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV　Vol. 523-524　p. 173-177　2012/11　Research paper (international conference proceedings)

Improvement of interface roughness in platinum/carbon multilayers for X-ray mirrors

J. Kim, S. Matsuyama, Y. Sano, K. Yamauchi

Key Engineering Materials　Vol. 523-524　p. 1076-1079　2012/11　Research paper (scientific journal)

Development of an ultraprecise piezoelectric deformable mirror for adaptive X-ray optics

H. Nakamori, S. Matsuyama, S. Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

14th International Conference on Precision Engineering　Vol. 523-524　p. 50-53　2012/11　Research paper (scientific journal)

Development of ultraprecise piezoelectric deformable mirror for adaptive X-ray focusing

Hiroki Nakamori, Satoshi Matsuyama, Shota Imai, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

First-Principles Analysis of CARE Process of GaN -Initial Stage of Etching Process-

M. Oue, K. Inagaki, K. Yamauchi, Y. Morikawa

2012/10

First-Principles Simulations of Catalyst Assisted Wet-etching Processes at Semiconductor Surfaces

K. Inagaki, M. Oue, B.V. Pho, D. Hirose, K. Yamauchi, Y. Morikawa

2012/10

Fabrication of ultraprecise X-ray mirrors by ion beam figuring system: Fabrication and evaluation of aspheric shape on silicon surface

Shinichi Kitamura, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

Development of a High-resolution Full-field Hard X-ray Imaging Microscope Based On Four Aspherical Mirrors

Yoji Emi, Satoshi Matsuyama, Yoshiki Kohmura, Tetsuya Ishikawa, Kazuto Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

Development of one-dimensional Wolter mirror figured on a single substrate for full-field X-ray microscopy

Satoshi Matsuyama, Yoji Emi, Yasuhisa Sano, Kazuto Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

Study of Pt/C multilayers for X-ray mirrors improvement of reflectivity

J. Kim, A. Nagahira, S. Matsuyama, Y. Sano, K. Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry based on a phase grating and Fourier transform method

Ryosuke Fukui, Hikaru Yokoyama, Satoshi Matsuyama, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Wataru Yashiro, Atsushi Momose, Tetsuya Ishikawa, Kazuto Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

Analysis of Enhanced Oxygen Reduction Reaction on Ge(100) Surface in Water Toward Metal-free Machining Process

Atsushi Mura, Yoshie Kawai, Tatsuya Kawase, Kentaro Kawai, Yasuhisa Sano, Junichi Uchikoshi, Kazuto Yamauchi, Mizuho Morita, Kenta Arima

Extended Abstracts of Fifth International Symposium on Atomically Controlled Fabrication Technology　2012/10

Low Temparature Growth of Graphene on Atomically Flat SiC Assited by Plasma Oxidation

Kenta Arima, Naoki Saito, Hiroaki Nishikawa, Yasuhisa Sano, Kentaro Kawai, Junichi Uchikoshi, Kazuto Yamauchi, Mizuho Morita

Extended Abstracts of Fifth International Symposium on Atomically Controlled Fabrication Technology　2012/10

First-Principles Study of Platinum Catalyst-Assisted Hydrogen Fluoride Adsorption on SiC Surfaces

B.V. Pho, K. Inagaki, Y. Sano, K. Yamauchi, Y. Morikawa

2012/10

Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry

Satoshi Matsuyama, Hikaru Yokoyama, Ryosuke Fukui, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Wataru Yashiro, Atsushi Momose, Tetsuya Ishikawa, Kazuto Yamauchi

Optics Express　Vol. 20　No. 22　p. 24977-24986　2012/10　Research paper (scientific journal)

Development of an adaptive hard X-ray focusing system with deformable mirrors

Shota Imai, Hiroki Nakamori, Satoshi Matsuyama, Takashi Kimura, Yoshiki Kohmura, Tetsuya Ishikawa, Kazuto Yamauchi

Extended Abstracts of 5th International Symposium on Atomically Controlled Fabrication Technology　2012/10　Research paper (international conference proceedings)

Development of high-resolution hard X-ray microscopy based on Advanced Kirkpatrick-Baez optics

Matsuyama Satoshi, Emi Yoji, Sano Yasuhisa, Kohmura Yoshiki, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2012　p. 399-400　2012/09

第一原理計算によるGaN表面エッチング現象初期過程の解明

大上まり, 稲垣耕司, 山内和人, 森川良忠

2012/09

形状可変ミラーを用いた硬X線アダプティブ集光光学系の開発

今井 将太, 中森 紘基, 松山 智至, 木村 隆志, 香村 芳樹, 石川 哲也, 山内 和人

2012/09

Ion Beam Figuring を用いた高精度Ｘ線ミラーの作製 第 4 報 ―シリコン表面に対する非球面形状の作製と評価―

北村真一, 松山智至, 佐野泰久, 山内和人

精密工学会学術講演会講演論文集　Vol. 2012　p. 411-412　2012/09

硬Ｘ線集光用形状可変ミラーの開発－形状可変ミラー変形性能の評価－

中森紘基, 松山智至, 今井将太, 木村隆志, 佐野泰久, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

精密工学会学術講演会講演論文集　Vol. 2012　p. 401-402　2012/09

A Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized using Hydrofluoric Acid

P. V. Bui, S. Sadakuni, T. Okamoto, K. Arima, Y. Sano, K. Yamauchi

2012/09　Research paper (international conference proceedings)

Low temperature growth of graphene on 4H-SiC(0001) flattened by catalyst-assisted etching in HF solution

K. Arima, K. Nishitani, N. Saito, K. Kawai, J. Uchikoshi, K. Yamauchi, Y. Sano, M. Morita

Abstract book of 24th General Conference of the Condensed Matter Division of the European Physical Society held jointly with 29th European Conference on Surface Science　2012/09

Basic Experiment on atmospheric-pressure plasma etching with slit aperture for high-efficiency dicing of SiC wafer

Y. Sano, H. Nishikawa, K. Aida, C. Tanpatjaroen, K. Yamamura, S. Matsuyama, K. Yamauchi

Materials Science Forum　Vol. 740-742　p. 813-816　2012/09　Research paper (international conference proceedings)

Development of Achromatic Full-Field Hard X-ray Microscopy Using Four Total-Reflection Mirrors

Satoshi Matsuyama, Youji Emi, Naotaka Kidani, Yoshiki Kohmura, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Conference information and abstracts　Vol. 463　2012/08　Research paper (international conference proceedings)

Atomically Controlled SiC, GaN and ZnO Surfaces by Catalyst Referredetching

K. Yamauchi

2012/07　Research paper (international conference proceedings)

Improved reflectivity of platinum/carbon multilayers for X-ray mirrors by carbon doping into platinum layer

J. Kim, H. Yokoyama, S. Matsuyama, Y. Sano, K. Yamauchi

Current Applied Physics　Vol. 12　p. S20-S23　2012/07　Research paper (scientific journal)

Fabrication of a Bragg beam splitter for hard X-ray free-electron laser

OSAKA Taito, YABASHI Makina, SANO Yasuhisa, TONO Kensuke, INUBUSHI Yuichi, SATO Takahiro, MATSUYAMA Satoshi, ISHIKAWA Tetsuya, YAMAUCHI Kazuto

Journal of Physics: Conference Series　Vol. 425　No. 5　2012/07　Research paper (scientific journal)

Back-side thinning of silicon carbide wafer by plasma etching using atmospheric-pressure plasma

Y. Sano, K. Aida, H. Nishikawa, K. Yamamura, S. Matsuyama, K. Yamauchi

Key Engineering Materials　Vol. 516　p. 108-+　2012/07　Research paper (scientific journal)

Structural and chemical characteristics of atomically smooth GaN surfaces prepared by abrasive-free polishing with Pt catalyst

Junji Murata, Shun Sadakuni, Takeshi Okamoto, Azusa N. Hattori, Keita Yagi, Yasuhisa Sano, Kenta Arima, Kazuto Yamauchi

Journal of Crystal Growth　Vol. 349　No. 1　p. 83-88　2012/06/15　Research paper (scientific journal)

Progress of Mirror-based Focusing Optics for X-ray Free Electron Laser

K. Yamauchi

2012/06　Research paper (international conference proceedings)

Nanofocusing and wavefront analysis of SACLA

K. Yamauchi

2012/06　Research paper (international conference proceedings)

Surface processing of Crystal

K. Yamauchi

2012/05　Research paper (international conference proceedings)

Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

Hiroki Nakamori, Satoshi Matsuyama, Shota Imai, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Review of Scientific Instruments　Vol. 83　No. 5　2012/05　Research paper (scientific journal)

Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution

Satoshi Matsuyama, Naotaka Kidani, Hidekazu Mimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Optics Express　Vol. 20　No. 9　2012/04　Research paper (scientific journal)

Improvement of Removal Rate in Abrasive-Free Planarization of 4H-SiC Substrates Using Catalytic Platinum and Hydrofluoric Acid

Takeshi Okamoto, Yasuhisa Sano, Kazuma Tachibana, Bui Van Pho, Kenta Arima, Kouji Inagaki, Keita Yagi, Junji Murata, Shun Sadakuni, Hiroya Asano, Ai Isohashi, Kazuto Yamauchi

Japanese Journal of Applied Physics　Vol. 51　No. 4　2012/04　Research paper (scientific journal)

Atomically Smooth Gallium Nitride Surfaces Prepared by Chemical Etching with Platinum Catalyst in Water

Junji Murata, Takeshi Okamoto, Shun Sadakuni, Azusa N. Hattori, Keita Yagi, Yasuhisa Sano, Kenta Arima, Kazuto Yamauchi

Journal of Electrochemical Society　Vol. 159　No. 4　p. H417-H420　2012/04　Research paper (scientific journal)

Pt触媒を用いた水分子によるGaN表面エッチング現象初期過程の第一原理計算による解明

大上まり, 稲垣耕司, 山内和人, 森川良忠

2012/03

Current status of mirror-based optics for coherent x-ray science

K. Yamauchi

2012/03　Research paper (international conference proceedings)

Atomically controlled chemical polishing of GaN using platinum and hydrofluoric acid

S. Sadakuni, J. Murata, Y. Sano, K. Yagi, T. Okamoto, K. Tachibana, H. Asano, K. Yamauchi

Physica Status Solidi C　Vol. 9　No. 3-4　p. 433-435　2012/03　Research paper (scientific journal)

PtC/C多層膜を用いた硬X線集光用ミラーの反射率改善

金章雨, 横山光, 松山智至, 佐野泰久, 山内和人

2012年度精密工学会春季大会 プログラム＆アブストラクト集　2012/03　Research paper (other academic)

硬X線集光用形状可変ミラーの開発 －SPring-8での集光特性－

松山智至, 中森紘基, 今井将太, 横山光, 木村隆志, 佐野泰久, 香村芳樹, 石川哲也, 山内和人

2012年度精密工学会春季大会 プログラム＆アブストラクト集　2012/03　Research paper (other academic)

Ion Beam Figuringを用いた高精度X線ミラーの作製 第3報 －シリコン表面に対する楕円形状の作製と評価－

北村真一, 松山智至, 佐野泰久, 山内和人

2012年度精密工学会春季大会 プログラム＆アブストラクト集　2012/03　Research paper (other academic)

10KeV mirror project

K. Yamauchi

2012/02　Research paper (international conference proceedings)

Efficiency-enhanced elastic emission machining on the basis of processing mechanism

Masahiko Kanaoka, Kazushi Nomura, Kazuto Yamauchi, Yuzo Mori

Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012　Vol. 2　p. 193-196　2012　Research paper (international conference proceedings)

Increase of luminescent intensity from GaN(0001) induced by surface cleaning treatments

Hattori Azusa, Endo Katsuyoshi, Hattori Ken, Moriwaki Yuta, Yamamoto Aishi, Arima Kenta, Sano Yasuhisa, Yamauchi Kazuto, Daimon Hiroshi

Abstract of annual meeting of the Surface Science of Japan　Vol. 32　p. 72-72　2012

Fabrication of Bragg beam splitter with atmospheric-pressure plasma etching

Osaka Taito, Yabashi Makina, Sano Yasuhisa, Tono Kensuke, Inubushi Yuichi, Sato Takahiro, Matsuyama Satoshi, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2012　p. 415-416　2012

ステップフロー型研磨法によるGaN基板の平坦化加工と除去速度増加の検討

浅野 博弥, 定國 峻, 佐野 泰久, 八木 圭太, 松山 智至, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2012　p. 427-428　2012

純水を用いた触媒表面基準エッチング法における加工原理の検討

礒橋 藍, 佐野 泰久, 大上 まり, 八木 圭太, 定國 峻, 森川 良忠, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2012　p. 429-430　2012

プラズマ発生領域制限マスクを用いたPCVM(Plasma Chemical Vaporization Machining) によるSiC基板の切断加工の検討

西川 央明, 佐野 泰久, 会田 浩平, 岡田 悠, 山村 和也, 松山 智至, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2012　p. 425-426　2012

三面合わせ法を用いた平面基板の絶対形状校正

湯本 博勝, 松山 智至, 三村 秀和, 山内 和人, 大橋 治彦

精密工学会学術講演会講演論文集　Vol. 2012　p. 405-406　2012

加工メカニズムに基づくelastic emission machiningの加工能率向上化

金岡 政彦, 野村 和司, 山内 和人, 森 勇藏

精密工学会学術講演会講演論文集　Vol. 2012　p. 419-420　2012

ウェットエッチングによるSiC、GaN表面の原子スケール平滑化

山内 和人

2012/01

Development of Focusing System for X-ray Free Electron Laser

Hidekazu Mimura, Hitoshi Ohmori, Kazuto Yamauchi

PROCEEDINGS OF PRECISION ENGINEERING AND NANOTECHNOLOGY (ASPEN2011)　Vol. 516　p. 251-+　2012　Research paper (international conference proceedings)

First-principles Analysis of Dissociative Absorption of HF Molecule at SiC Surface Step Edge

Kouji Inagaki, Bui Van Pho, Kazuto Yamauchi, Yoshitada Morikawa

SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2　Vol. 717-720　p. 581-584　2012　Research paper (international conference proceedings)

Rapid planarization method by ultraviolet light irradiation for gallium nitride using platinum catalyst

Hiroya Asano, Shun Sadakuni, K. Yagi, Y. Sano, S. Matsuyama, T. Okamoto, K. Tachibana, K. Yamauchi

EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV　Vol. 523-524　p. 46-+　2012　Research paper (international conference proceedings)

Fabrication of ultrathin Bragg beam splitter by plasma chemical vaporization machining

T. Osaka, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, S. Matsuyama, T. Ishikawa, K. Yamauchi

EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV　Vol. 523-524　p. 40-+　2012　Research paper (international conference proceedings)

Improving the Accuracy of Numerically Controlled Sacrificial Plasma Oxidation Using Array of Electrodes to Improve the Thickness Uniformity of SOI

H. Takei, K. Yoshinaga, Y. Sano, S. Matsuyama, K. Yamauchi

IEEE INTERNATIONAL SOI CONFERENCE　2012　Research paper (international conference proceedings)

開口シフトを用いた位相回復計算による硬X線集光光学素子の波面収差算出法の開発

横山光, 三村秀和, 木村隆志, 今井将太, 松山智至, 佐野泰久, 香村秀樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第25回日本放射光学会年会・放射光科学合同シンポジウム　2012/01　Research paper (other academic)

回折限界下で集光径可変なミラー集光光学系の開発

松山智至, 木村隆志, 中森紘基, 今井将太, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 西野吉則, 山内和人

第25回日本放射光学会年会・放射光科学合同シンポジウム　2012/01　Research paper (other academic)

PtC/C多層膜を用いたX線集光用ミラーの反射率改善

金章雨, 横山光, 松山智至, 佐野泰久, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第25回日本放射光学会年会・放射光科学合同シンポジウム　2012/01　Research paper (other academic)

Back-side Thinning of Silicon Carbide Wafer by Plasma Etching using Atmospheric-pressure Plasma

Yasuhisa Sano, Kohei Aida, Hiroaki Nishikawa, Kazuya Yamamura, Satoshi Matsuyama, Kazuto Yamauchi

PROCEEDINGS OF PRECISION ENGINEERING AND NANOTECHNOLOGY (ASPEN2011)　Vol. 516　p. 108-+　2012　Research paper (international conference proceedings)

グリーンデバイスの将来展望―超精密加工技術の開発の立場から―

山内 和人

2011/12

Surface Observation of 4H-SiC (0001) Planarized by Catalyst-Referred Etching

Shun Sadakuni, Bui Van Pho, Ngo Xuan Dai, Yasuhisa Sano, Keita Yagi, Junji Murata, Takeshi Okamoto, Kazuma Tachibana, Kazuto Yamauchi

PROCEEDINGS OF PRECISION ENGINEERING AND NANOTECHNOLOGY (ASPEN2011)　Vol. 516　p. 452-+　2011/11　Research paper (international conference proceedings)

KBミラー光学系を用いた硬X線二次元Sub-10nm集光システムの開発

横山光, 三村秀和, 木村隆志, 今井将太, 松山智至, 佐野泰久, 香村秀樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

プログラム予稿集 第11回X線結像光学シンポジウム　2011/11　Research paper (other academic)

4枚の高精度形状可変ミラーを用いたアダプティブ集光光学系の開発

松山智至, 木村隆志, 中森紘基, 今井将太, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 西野吉則, 山内和人

プログラム予稿集 第11回X線結像光学シンポジウム　Vol. 2012　p. 403-404　2011/11　Research paper (other academic)

Determination of Had X-ray Focusing Mirror Aberration using Phase Retrieval with Transverse Translation Diversity

H. Yokoyama, T. Kimura, H. Mimura, S. Imai, S. Matsuyama, Y. Kohmura, T. Ishikawa, K. Yamauchi

Extended Abstracts of 4th International Symposium on Atomically Controlled Fabrication Technology　2011/11

Development of Hard X-ray Imaging Optics for Achromatic Full-Field X-ray Microscopy

Satoshi Matsuyama, Naotaka Kidani, Yoji Emi, Yasuhisa Sano, Yoshiki Kohmura, Tetsuya Ishikawa, Kazuto Yamauchi

Extended Abstracts of 4th International Symposium on Atomically Controlled Fabrication Technology　2011/11

Development of an ultra-precise deformable mirror for hard X-ray nanofocusing

Hiroki Nakamori, Satoshi Matsuyama, Takashi Kimura, Shouta Imai, Yoshiki Kohmura, Tetsuya Ishikawa, Yoshinori Nishino, Kazuto Yamauchi

Program of 7th Handai Nanoscience and Nanotechnology International Symposium　2011/11　Research paper (international conference proceedings)

Development of an Adaptive X-Ray Focusing Mirror with Large NA -Evaluation of Reproducibility of Deformable Mirror-

H. Nakamori, S. Matsuyama, S. Imai, H. Yokoyama, T. Kimura, H. Mimura, Y. Sano, Y. Kohmura, T. Ishikawa, K. Yamauchi

Extended Abstracts of 4th International Symposium on Atomically Controlled Fabrication Technology　2011/11

Reflectivity improvement using PtC/C multilayers for X-ray mirrors

Jangwoo Kim, Hikaru Yokoyama, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Extended Abstracts of 4th International Symposium on Atomically Controlled Fabrication Technology　2011/11

Plasma Chemical Vaporization Machining of Silicon Carbide Wafer Using Flat-bar Electrode with Multiple Gas Nozzles

Y. Sano, K. Aida, H. Nishikawa, K. Yamamura, S. Matsuyama, K. Yamauchi

Proceeding of the 8th CHINA-JAPAN International Conference on Ultra-Precision Machining, 31.　Vol. 497　p. 160-+　2011/11　Research paper (scientific journal)

Back-side thinning of silicon carbide wafer by plasma etching using atmospheric-pressure plasma

Y. Sano, K. Aida, H. Nishikawa, K. Yamamura, S. Matsuyama, K. Yamauchi

Abstracts of 4th International Conference of Asian Society for Precision Engineering and Nanotechnology, 72　Vol. 516　p. 108-+　2011/11　Research paper (international conference proceedings)

Cutting of SiC substrates by atmospheric-pressure plasma etching with slit mask for plasma confinement

H. Nishikawa, Y. Sano, K. Aida, T. Chaiyapat, K. Yamamura, S. Matsuyama, K. Yamauchi

Abstracts of The 33rd International Symposium on Dry Process, 35-36.　2011/11　Research paper (international conference proceedings)

X-ray nanofocusing by mirror optical systems

K. Yamauchi

2011/10　Research paper (international conference proceedings)

Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors

Kazuto Yamauchi, Hidekazu Mimura, Takashi Kimura, Hirokatsu Yumoto, Soichiro Handa, Satoshi Matsuyama, Kenta Arima, Yasuhisa Sano, Kazuya Yamamura, Koji Inagaki, Hiroki Nakamori, Jangwoo Kim, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa

JOURNAL OF PHYSICS: CONDENSED MATTER　Vol. 23　No. 39　p. 394206 1-394206 2　2011/10　Research paper (scientific journal)

Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors

Kazuto Yamauchi, Hidekazu Mimura, Takashi Kimura, Hirokatsu Yumoto, Soichiro Handa, Satoshi Matsuyama, Kenta Arima, Yasuhisa Sano, Kazuya Yamamura, Koji Inagaki, Hiroki Nakamori, Jangwoo Kim, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa

JOURNAL OF PHYSICS-CONDENSED MATTER　Vol. 23　No. 39　p. 394206 1-394206 2　2011/10　Research paper (scientific journal)

Cutting of SiC substrates by atmospheric-pressure plasma etching with slit mask for plasma confinement

H. Nishikawa, Y. Sano, K. Aida, T. Chaiyapat, K. Yamamura, S. Matsuyama, K. Yamauchi

Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology, 172-173.　2011/10　Research paper (international conference proceedings)

First-Principles Molecular-Dynamics Analysis of Reaction Process Between SiC Surface and HF Molecule

Kouji Inagaki, Bui Van Pho, Kazuto Yamauchi, Yoshitada Morikawa

2011/09

Mirror‐based optical systems for nanofocusing and nanoimaging of hard x‐rays

K. Yamauchi

2011/09　Research paper (international conference proceedings)

Mechanism of atomic-scale passivation and flattening of semiconductor surfaces by wet-chemical preparations

Kenta Arima, Katsuyoshi Endo, Kazuto Yamauchi, Kikuji Hirose, Tomoya Ono, Yasuhisa Sano

Journal of Physics: Condensed Matter　Vol. 23　No. 39　p. 394202 1-394202 14　2011/09　Research paper (scientific journal)

Development of Coherent X-ray Diffraction Apparatus with Kirkpatrick-Baez Mirror Optics

Y. Takahashi, R. Tsutsumi, H. Kubo, Y. Nishino, H. Mimura, S. Matsuyama, T. Ishikawa, K. Yamauchi

AIP Conference Proceedings (The 10th International Conference on x-ray microscopy)　Vol. 1365　p. 231-234　2011/09　Research paper (scientific journal)

Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, K. Yamauchi, T. Ishikawa

Applied Physics Letters　Vol. 99　No. 13　2011/09　Research paper (scientific journal)

Development of hard X-ray imaging optics with four aspherical mirrors

Matsuyama Satoshi, Kidani Naotaka, Emi Youji, Sano Yasuhisa, Koumura Yoshiki, Ishikawa Tetsuya, Kazuto Yamauchi

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 469-470　2011/09　Research paper (other academic)

硬X線集光用形状可変ミラーの開発 －変形再現性の評価―

中森紘基, 松山智至, 今井将太, 横山光, 木村隆志, 三村秀和, 佐野泰久, 香村芳樹, 石川哲也, 山内和人

2011年度精密工学会 秋季大会学術講演会 アブストラクト集　2011/09　Research paper (other academic)

Development of multilayer mirror for hard X-ray focusing

Kim Jangwoo, Yokoyama Hikaru, Matsuyama Satoshi, Mimura Hidekazu, Sano Yasuhisa, Komura Yoshiki, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 473-474　2011/09　Research paper (other academic)

IBF(Ion Beam Figuring)を用いた高精度X線ミラーの作製 ―シリコン表面の加工特性とビームの安定性の評価―

北村真一, 松山智至, 佐野泰久, 山内和人

2011年度精密工学会 秋季大会学術講演会 アブストラクト集　Vol. 2011　p. 475-476　2011/09　Research paper (other academic)

Trace element mapping of a single cell using a hard X-ray nanobeam focused by a Kirkpatrick-Baez mirror system

Satoshi Matsuyama, Kazuto Yamauchi

SPring-8 Research Frontiers 2010　2011/09　Research paper (bulletin of university, research institution)

Numerically controlled sacrificial plasma oxidation using array-type electrode toward high-throughput deterministic machining

Yasuhisa Sano, Keinosuke Yoshinaga, Shohei Kamisaka, Hidekazu Mimura, Satoshi Matsuyama, Kazuto Yamauchi

International Journal of Nanomanufacturing　Vol. 7　No. 3-4　p. 289-297　2011/09　Research paper (scientific journal)

HRTEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching

Bui Van Pho, Shun Sadakuni, Takesi Okamoto, Kenta Arima, Yasuhira Sano, Kazuto Yamauchi

Materials Science Forum　Vol. 717-720　p. 873-+　2011/09　Research paper (international conference proceedings)

Cutting of SiC Wafer by Atmospheric-Pressure Plasma Etching With Wire Electrode

Yasuhisa Sano, Kohei Aida, Takehiro Kato, Kazuya Yamamura, Hidekazu Mimura, Satoshi Matsuyama, Kazuto Yamauchi

Materials Science Forum　Vol. 717-720　p. 865-+　2011/09　Research paper (international conference proceedings)

第一原理計算によるGaN表面エッチング現象の解明-表面終端構造とエッチング初期過程の解析

大上まり, 稲垣耕司, 山内和人, 森川良忠

2011/08

Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proc. SPIE　Vol. 8139　2011/08　Research paper (international conference proceedings)

Influence of gallium additives on surface roughness for photoelectrochemical planarization of GaN

S. Sadakuni, J. Murata, K. Yagi, Y. Sano, K. Arima, T. Okamoto, K. Tachibana, K. Yamauchi

Physica Status Solidi C　Vol. 8　No. 7-8　p. 2223-2225　2011/07　Research paper (scientific journal)

Deterministic fabrication process for precision X-ray mirrors

K. Yamauchi

2011/05　Research paper (international conference proceedings)

Current status of precision mirror development for coherent X-rays

K. Yamauchi

2011/04　Research paper (international conference proceedings)

Single-nanometer focusing of hard x-rays using novel adaptive optical system

Kazuto Yamauchi

2011/04　Research paper (international conference proceedings)

Ⅹ線ナノ集光技術の展望

山内 和人

2011/04

Electroforming for Replicating Nanometer-Level Smooth Surface

Hidekazu Mimura, Hiroyuki Ishikura, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi

Journal of Nanoscience and Nanotechnology　Vol. 11　No. 4　p. 2886-2889　2011/04　Research paper (scientific journal)

Efficient Wet Etching of GaN (0001) Substrate with Subsurface Damage Layer

Shun Sadakuni, Junji Murata, Keita Yagi, Yasuhisa Sano, Takeshi Okamoto, Arima Kenta, Azusa N. Hattori, Kazuto Yamauchi

Journal of Nanoscience and Nanotechnology　Vol. 11　No. 4　p. 2979-2982　2011/04　Research paper (scientific journal)

Improved Optical and Electrical Characteristics of Free-Standing GaN Substrates by Chemical Polishing Utilizing Photo-Electrochemical Method

Junji Murata, Yuki Shirasawa, Yasuhisa Sano, Shun Sadakuni, Keita Yagi, Takeshi Okamoto, Azusa N. Hattori, Kenta Arima, Kazuto Yamauchi

Journal of Nanoscience and Nanotechnology　Vol. 11　No. 4　p. 2882-2885　2011/04　Research paper (scientific journal)

Structure and Magnetic Properties of Mono- and Bi-Layer Graphene Films on Ultraprecision Figured 4H-SiC(0001) Surfaces

Azusa N. Hattori, Takeshi Okamoto, Shun Sadakuni, Junji Murata, Hideo Oi, Kenta Arima, Yasuhisa Sano, Ken Hattori, Hiroshi Daimon, Katsuyoshi Endo, Kazuto Yamauchi

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY　Vol. 11　No. 4　p. 2897-2902　2011/04　Research paper (scientific journal)

Simulation Study of Adaptive Mirror for Hard X-ray Focusing

Hiroki Nakamori, Satoshi Matsuyama, Takashi Kimura, Shouta Imai, Hidekazu Mimura, Yasuhisa Sano, Kazuto Yamauchi

Programme of ACTOP11　2011/04

Dependence of Process Characteristics on Atomic-Step Density in Catalyst-Referred Etching of 4H-SiC(0001) Surface

Takeshi Okamoto, Yasuhisa Sano, Kazuma Tachibana, Kenta Arima, Azusa N. Hattori, Keita Yagi, Junji Murata, Shun Sadakuni, Kazuto Yamauchi

Journal of Nanoscience and Nanotechnology　Vol. 11　No. 4　p. 2928-2930　2011/04　Research paper (scientific journal)

Evaluation of Schottky Barrier Diodes Fabricated Directly on Processed 4H-SiC(0001) Surfaces

Yasuhisa Sano, Yuki Shirasawa, Takeshi Okamoto, Kazuto Yamauchi

Journal of Nanoscience and Nanotechnology　Vol. 11　No. 4　p. 2809-2813　2011/04　Research paper (scientific journal)

Thinning of 2-inch SiC wafer by plasma chemical vaporization machining using cylindrical rotary electrode

Yasuhisa Sano, Takehiro Kato, Kohei Aida, Kazuya Yamamura, Hidekazu Mimura, Satoshi Matsuyama, Kazuto Yamauchi

Materials Science Forum　Vol. 679-680　p. 481-+　2011/04　Research paper (scientific journal)

One-dimensional sub-10-nm hard X-ray focusing using laterally graded multilayer mirror

Hidekazu Mimura, Takashi Kimura, Hirokatsu Yumoto, Hikaru Yokoyama, Hiroki Nakamori, Satoshi Matsuyama, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Nuclear Instruments and Methods in Physics Reserch A　Vol. 635　p. S16-S18　2011/04　Research paper (scientific journal)

Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

T. Okamoto, Y. Sano, K. Tachibana, K. Arima, A. N. Hattori, K. Yagi, J. Murata, S. Sadakuni, K. Yamauchi

Materials Science Forum　Vol. 679-680　p. 493-495　2011/03　Research paper (scientific journal)

TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

S. Sadakuni, N. X. Dai, Y. Sano, K. Arima, K. Yagi, J. Murata, T. Okamoto, K. Tachibana, K. Yamauchi

Materials Science Forum　Vol. 679-680　p. 489-492　2011/03　Research paper (scientific journal)

Element-specific High-resolution Diffraction Microscopy using Focused Hard X-ray Beam

Y. Takahashi, Y. Nishino, R. Tsutsumi, H. Kubo, N. Zettsu, K. Yamauchi, T. Ishikawa, E. Matsubara

Diamond Light Source Proceedings (SRMS-7 2011)　Vol. 1　No. e136　p. 1-3　2011/03　Research paper (scientific journal)

Formation of wide and atomically flat graphene layers on ultraprecision-figured 4H-Si(0001) surfaces

A. N. Hattori, T. Okamoto, S. Sadakuni, J. Murata, K. Arima, Y. Sano, K. Hattori, H. Daimon, K. Endo, K. Yamauchi

Surface Science　Vol. 605　No. 5-6　p. 597-605　2011/03　Research paper (scientific journal)

高能率高精度Ｘ線ミラー加工のためのIBF(Ion Beam Figuring)システムの開発

北村 真一, 松山 智至, 三村 秀和, 佐野 泰久, 山内 和人

2011年度精密工学会春季大会学術講演会 講演論文集　2011/03　Research paper (other academic)

硬X 線集光用ナノ精度形状可変ミラーの開発（第２報）

今井 将太, 木村 隆志, 三村 秀和, 横山 光, 松山 智至, 佐野 泰久, 山内 和人

2011年度精密工学会春季大会学術講演会 講演論文集　2011/03　Research paper (other academic)

シミュレーションを用いた硬X線用形状可変ミラー設計に関する研究

中森 紘基, 松山 智至, 今井 将太, 木村 隆志, 三村 秀和, 佐野 泰久, 山内 和人

2011年度精密工学会春季大会学術講演会 講演論文集　2011/03　Research paper (other academic)

高密度X線ナノビーム形成のための並列型Kirkpatrick-Baezミラー光学系の開発

松山 智至, 脇岡 敏之, 木谷 直隆, 横山 光, 三村 秀和, 佐野 泰久, 山内 和人

2011年度精密工学会春季大会学術講演会 講演論文集　2011/03　Research paper (other academic)

High-efficiency planarization of GaN wafers using photo-electro chemical reaction with applying bias

Asano Hiroya, Sadakuni Shun, Sano Yasuhisa, Yagi Keita, Murata Junji, Okamoto Takeshi, Tachibana Kazuma, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 181-182　2011

Multistep chemical planarization for efficient fabrication of smooth GaN surfaces

Sadakuni Shun, Murata Junji, Sano Yasuhisa, Yagi Keita, Okamoto Takeshi, Tachibana Kazuma, Asano Hiroya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 179-180　2011

Formation of high quality graphene on atomically flattened 4H-SiC(0001) surfaces

Nishitani Keisuke, Sakane Hiroki, Yamaguchi Takamitsu, Okamoto Takeshi, Kawai Kentaro, Uchikoshi Junichi, Yamauchi Kazuto, Morita Miizuho, Arima Kenta

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 996-997　2011

Development of an auto-correlater for X-ray free-electron laser:Fabrication of a beam splitter for hard X-ray

Osaka Taito, Yabashi Makina, Sano Yasuhisa, Tono Kensuke, Inubushi Yuichi, Sato Takahiro, Matsuyama Satoshi, Ishikawa Tetsuya, Yamauchi Kazuto

Proceedings of JSPE Semestrial Meeting　Vol. 2011　p. 453-454　2011

触媒基準エッチング法による4H-SiCの平坦化における加工速度の検討

橘 一真, 佐野 泰久, 岡本 武志, 礒橋 藍, 有馬 健太, 稲垣 耕司, 八木 圭太, 定國 峻, 森川 良忠, 山内 和人

精密工学会学術講演会講演論文集　Vol. 2011　p. 457-458　2011

Development of an Adaptive Optical System for Sub-10-nm Focusing of Synchrotron Radiation Hard X-rays

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY　Vol. 1365　p. 13-17　2011　Research paper (international conference proceedings)

TEM observation of 8 deg off-axis 4H-SiC (0001) surfaces planarized by catalyst-referred etching

Shun Sadakuni, Ngo Xuan Dai, Yasuhisa Sano, Kenta Arima, Keita Yagi, Junji Murata, Takeshi Okamoto, Kazuma Tachibana, Kazuto Yamauchi

SILICON CARBIDE AND RELATED MATERIALS 2010　Vol. 679-680　p. 489-+　2011　Research paper (international conference proceedings)

Towards High-Resolution Ptychographic X-ray Diffraction Microscopy

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, T. Ishikawa

Physical Review B　Vol. 83　No. 21　p. 214109-214109　2011/01　Research paper (scientific journal)

色収差のない結像型硬X線顕微鏡構築のためのAdvanced Kirkpatrick-Baez ミラー光学系の開発

木谷直隆, 松山智至, 脇岡敏之, 中森紘基, 三村秀和, 木村隆志, 佐野泰久, 西野吉則, 玉作賢治, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

第24回日本放射光学会年会・放射光科学合同シンポジウム　2011/01　Research paper (other academic)

波動光学シミュレーションを用いたAdvanced Kirkpatrick-Baez ミラー光学系の検討

中森紘基, 松山智至, 脇岡敏之, 木谷直隆, 三村秀和, 佐野泰久, 西野吉則, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第24回日本放射光学会年会・放射光科学合同シンポジウム　2011/01　Research paper (other academic)

高密度X線ナノビーム形成のための並列型Kirkpatrick-Baezミラー光学系の開発

脇岡敏之, 松山智至, 木谷直隆, 三村秀和, 佐野泰久, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第24回日本放射光学会年会・放射光科学合同シンポジウム　2011/01　Research paper (other academic)

High-Resolution Projection Image Reconstruction of Thick Objects by Hard X-ray Diffraction Microscopy

Y. Takahashi, Y. Nishino, R. Tsutsumi, N. Zettsu, E. Matsubara, K. Yamauchi, T. Ishikawa

Physical Review B　Vol. 82　No. 21　p. 214102-214102　2010/12　Research paper (scientific journal)

Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm

Takashi Kimura, Hidekazu Mimura, Soichiro Handa, Hirokatsu Yumoto, Hikaru Yokoyama, Shota Imai, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshiki Komura, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Review of Science Instruments　Vol. 81　No. 12　2010/12　Research paper (scientific journal)

One-dimensional Wolter optics with a sub-50-nm spatial resolution

S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Optics Letters　Vol. 35　No. 21　p. 3583-3585　2010/11　Research paper (scientific journal)

Development of Side-By-Side Kirkpatrick-Baez mirror for high-density X-ray nanobeam

T. Wakioka, S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, K. Yamauchi

Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology　2010/11

Development of Advanced Kirkpatrick-Baez mirror for achromatic hard X-ray microscopy

N. Kidani, S. Matsuyama, T. Wakioka, S. Kitamura, H. Mimura, K. Yamauchi

Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology　2010/11

One-Dimensional Wolter Mirror for Achromatic Hard X-ray Microscopy

S. Matsuyama, N. Kidani, T. Wakioka, H. Mimura, K. Yamauchi

Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology　2010/11

Development of Chemical Processing Methods for Silicon Carbide Wafering and Device Processing

Y. Sano, K. Yamamura, K. Arima, K. Yamauchi

Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology, 6.2, 54-55.　2010/11

Optimized Logarithmic Roller Crowning Design of Cylindrical Roller Bearings and Its Experimental Demonstration

H. Fujiwara, T. Kawase, T. Kobayashi, K. Yamauchi

Tribology Transactions　Vol. 53　No. 6　p. 909-916　2010/10　Research paper (scientific journal)

Numerically Controlled Sacrificial Plasma Oxidation Using Array-Type Electrode toward High-Throughput Deterministic Machining

Yasuhisa Sano, Keinosuke Yoshinaga, Shohei Kamisaka, Hidekazu Mimura, Satoshi Matsuyama, Kazuto Yamauchi

Proceedings of the 2nd International Conference on Nanomanufacturing　Vol. 7　No. 3-4　p. 289-297　2010/09　Research paper (international conference proceedings)

Development of Nanometer Level Accurate Computer-Controlled Figuring with High Spatial Resolution and its Application to Hard X-ray Focusing Mirror

H. Mimura, K. Yumoto, S. Matsuyama, Y. Sano, K. Yamauchi

Journal of the Japan Society for Precision Engineering　Vol. 76　No. 3　p. 338-342　2010/09　Research paper (scientific journal)

4枚の非球面ミラーを用いた結像型硬X線顕微鏡の開発

松山智至, 脇岡敏之, 木谷直隆, 三村秀和, 山内和人

2010年度精密工学会 秋季大会学術講演会 アブストラクト集　2010/09　Research paper (other academic)

Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proc. SPIE　Vol. 7802　2010/09　Research paper (scientific journal)

高密度X線ナノビーム形成のための並列型Kirkpatrick-Baezミラー光学系の開発

脇岡敏之, 松山智至, 木谷直隆, 三村秀和, 山内和人

2010年度精密工学会 秋季大会学術講演会 アブストラクト集　2010/09　Research paper (other academic)

"Adaptive optical system for sub-10nm hard X-ray focusing Adaptive optical system for sub-10nm hard X-ray focusing

K. Yamauchi

2010/08　Research paper (international conference proceedings)

Hard X-ray Imaging Optics with Elliptical mirrors and Hyperbolic Mirrors

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

SPIE Optics+Photonics, Technical Program　2010/08　Research paper (international conference proceedings)

Dicing of SiC wafer by atmospheric-pressure plasma etching process with wire electrode

Yasuhisa Sano, Kohei Aida, Kazuya Yamamura, Hidekazu Mimura, Satoshi Matsuyama, Kazuto Yamauchi

SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2　Vol. 717-720　p. 865-+　2010/08　Research paper (international conference proceedings)

Abrasive-free planarization of 3-inch 4H-SiC substrate by catalyst-referred etching

T. Okamoto, Y. Sano, K. Tachibana, K. Arima, A. N. Hattori, K. Yagi, J. Murata, S. Sadakuni, K. Yamauchi

Abstract Booklet of the 8th European Conference on Silicon Carbide and Related Materials　Vol. 679-680　p. 493-+　2010/08　Research paper (international conference proceedings)

Thinning of 2-inch SiC wafer by plasma chemical vaporization machining

Y. Sano, T. Kato, K. Yamamura, H. Mimura, S. Matsuyama, K. Yamauchi

Abstract Booklet of the 8th European Conference on Silicon Carbide and Related Materials　2010/08　Research paper (international conference proceedings)

Improvement of Thickness Uniformity of Silicon on Insulator Layer by Numerically Controlled Sacrificial Oxidation Using Atmospheric-Pressure Plasma with Electrode Array System

Shohei Kamisaka, Keinosuke Yoshinaga, Yasuhisa Sano, Hidekazu Mimura, Satoshi Matsuyama, Kazuto Yamauchi

Japanese Journal of Applied Physics　Vol. 49　No. 8　2010/08　Research paper (scientific journal)

Tolerance Design of Logarithmic Roller Profiles in Cylindrical Roller Bearings

Hiroki FUJIWARA, Kazuto YAMAUCHI

Journal of Advanced Mechanical Design, Systems and Manufacturing　Vol. 4　No. 4　p. 728-738　2010/07　Research paper (scientific journal)

Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors

S. Matsuyama, M. Fujii, T. Wakioka, H. Mimura, S. Handa, T. Kimura, Y. Nishino, K. Tamasaku, Y. Makina, T. Ishikawa, K. Yamauchi

AIP Conf. Proc.　Vol. 1234　p. 267-+　2010/06　Research paper (scientific journal)

Chemical machining processes using atmospheric pressure plasma

Yasuhisa Sano, Kazuya Yamamura, Kazuto Yamauchi

Optical and Electro-optical Engineering Contact　p. 313-330　2010/06　Part of collection (book)

First-Principles study of electron transfer from 4H-SiC(0001) to Pt

Shintaro Iseki, Kouji Inagaki, Kazuto Yamauchi, Yoshitada Morikawa

2010/05

Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers

Toshiaki Matsuura, Kazuaki Udaka, Yasushi Oshikane, Haruyuki Inoue, Motohiro Nakano, Kazuto Yamauchi, Toshihiko Kataoka

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT　Vol. 616　No. 2-3　p. 233-236　2010/05　Research paper (scientific journal)

Two-dimensional measurement of focused x-ray beam profile using coherent x-ray diffraction of isolated nanoparticle

Y. Takahashi, H. Kubo, R. Tsutsumi, S. Sakaki, N. Zettsu, Y. Nishino, T. Ishikawa, K. Yamauchi

Nuclear Instruments and Methods in Physics Research Section A　Vol. 616　No. 2-3　p. 266-269　2010/05　Research paper (scientific journal)

One-dimensional surface profile retrieval from grazing incidence images under coherent X-ray illumination

A. Suvorov, H. Ohashi, S. Goto, K. Yamauchi, T. Ishikawa

Nuclear Instruments and Methods in Physics Research A　Vol. 616　No. 2-3　p. 277-280　2010/05　Research paper (scientific journal)

New X-ray microprobe system for trace heavy element analysis using ultraprecise X-ray mirror optics of long working distance

Y. Terada, H. Yumoto, A. Takeuchi, Y. Suzuki, K. Yamauchi, T. Uruga

Nuclear Instruments and Methods in Physics Research A　Vol. 616　No. 2-3　p. 270-272　2010/05　Research paper (scientific journal)

Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature

Hirokatsu Yumoto, Hidekazu Mimura, Soichiro Handa, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Haruhiko Ohashi, Kazuto Yamauchi, Tetsuya Ishikawa

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment　Vol. 616　No. 2-3　p. 203-206　2010/04　Research paper (scientific journal)

A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition

Takashi Kimura, Haruhiko Ohashi, Hidekazu Mimura, Daisuke Yamakawa, Hirokatsu Yumoto, Satoshi Matsuyama, Takashi Tsumura, Hiromi Okada, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Tetsuya Ishikawa, Kazuto Yamauchi

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment　Vol. 616　No. 2-3　p. 229-232　2010/04　Research paper (scientific journal)

Ray-tracing analysis in aberration of a laterally- graded multilayer mirror

Hidekazu Mimura, Soichiro Handa, Christian Morawe, Hikaru Yokoyama, Takashi Kimura, Satoshi Matsuyama, Kazuto Yamauchi

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment　Vol. 616　No. 2-3　p. 251-254　2010/04　Research paper (scientific journal)

Extended knife-edge method for characterizing sub-10-nm X-ray beams

Soichiro Handa, Takashi Kimura, Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment　Vol. 616　No. 2-3　p. 246-250　2010/04　Research paper (scientific journal)

Three-dimensional electron density mapping of shape-controlled nanoparticle by focused hard x-ray diffraction microscopy

Y. Takahashi, N. Zettsu, Y. Nishino, R. Tsutsumi, E. Matsubara, T. Ishikawa, K. Yamauchi

Nano Letters　Vol. 10　No. 5　p. 1922-1926　2010/04　Research paper (scientific journal)

Elemental mapping of frozen hydrated cells with cryo-scanning X-ray fluorescence microscopy

S. Matsuyama, M. Shimura, M. Fujii, K. Maeshima, H. Yumoto, H. Mimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, Y. Ishizaka, T. Ishikawa, K. Yamauchi

X-Ray Spectrometry　Vol. 39　No. 4　p. 260-266　2010/03　Research paper (scientific journal)

An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

Y. Takahashi, H. Kubo, Y. Nishino, H. Furukawa, R. Tsutsumi, K. Yamauchi, T. Ishikawa, E. Matsubara

Review of Scientific Instruments　Vol. 81　No. 3　p. 033707-033707　2010/03　Research paper (scientific journal)

4枚の非球面ミラーを用いた硬X線結像光学系の開発

木谷直隆, 松山智至, 藤井正輝, 脇岡敏之, 三村秀和, 山内和人

第57回応用物理学関係連合講演会 予稿集　2010/03　Research paper (other academic)

Influence of the UV Light Intensity on the Photoelectrochemical Planarization Technique for Gallium Nitride

Shun Sadakuni, Junji Murata, Keita Yagi, Yasuhisa Sano, Kenta Arima, Azusa Hattori, Takeshi Okamoto, Kazuto Yamauchi

Materials Science Forum　Vol. 645-648　p. 795-+　2010/03　Research paper (scientific journal)

Reduction of surface roughness of 4H-SiC by catalyst-referred etching

T. Okamoto, Y. Sano, H. Hara, T. Hatayama, K. Arima, K. Yagi, J. Murata, S. Sadakuni, K. Tachibana, Y. Shirasawa, H. Mimura, T. Fuyuki, K. Yamauchi

Materials Science Forum　Vol. 645-648　p. 775-+　2010/03　Research paper (scientific journal)

Breaking the 10 nm barrier in hard-X-ray focusing

Hidekazu Mimura, Soichiro Handa, Takashi Kimura, Hirokatsu Yumoto, Daisuke Yamakawa, Hikaru Yokoyama, Satoshi Matsuyama, Kouji Inagaki, Kazuya Yamamura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

NATURE PHYSICS　Vol. 6　No. 2　p. 122-125　2010/02　Research paper (scientific journal)

Smoothing effect for curved surfaces using elastic emission machining

Masahiko Kanaoka, Kentaro Kurita, Hideo Takino, Kazushi Nomura, Hidekazu Mimura, Kazuto Yamauchi, Yuzo Mori

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010　Vol. 2　p. 14-17　2010　Research paper (international conference proceedings)

X-ray photon correlation spectroscopy study in valence fluctuation compound Eu3S4

H. Nakao, K. Ohwada, S. Shimomura, A. Ochiai, K. Namikawa, J. Mizuki, H. Mimura, K. Yamauchi, Y. Murakami

AIP Conference Proceedings　Vol. 1234　p. 935-938　2010　Research paper (international conference proceedings)

An Adaptive Optical System for Sub-10nm Hard X-ray Focusing

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

ADAPTIVE X-RAY OPTICS　Vol. 7803　2010　Research paper (international conference proceedings)

OPTIMIZED LOGARITHMIC ROLLER CROWNING DESIGN OF CYLINDRICAL ROLLER BEARINGS AND ITS EXPERIMENTAL DEMONSTRATION

Hiroki Fujiwara, Tatsuo Kawase, Takuji Kobayashi, Kazuto Yamauchi

PROCEEDINGS OF THE ASME/STLE INTERNATIONAL JOINT TRIBOLOGY CONFERENCE - 2009　p. 217-219　2010　Research paper (international conference proceedings)

Numerically Controlled Sacrificial Plasma Oxidation Using Array of Electrodes for Improving Thickness Uniformity of SOI

Y. Sano, S. Kamisaka, K. Yoshinaga, H. Mimura, S. Matsuyama, K. Yamauchi

2010 IEEE INTERNATIONAL SOI CONFERENCE　2010　Research paper (international conference proceedings)

高密度X線ナノビーム形成のための並列型Kirkpatrick-Baezミラー光学系の開発

脇岡敏之, 松山智至, 藤井正輝, 木谷直隆, 三村秀和, 佐野泰久, 西野吉則, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第23回日本放射光学会年会・放射光科学合同シンポジウム　2010/01　Research paper (other academic)

Thinning of SiC wafer by plasma chemical vaporization machining

Yasuhisa Sano, Takehiro Kato, Tsutomu Hori, Kazuya Yamamura, Hidekazu Mimura, Yoshiaki Katsuyama, Kazuto Yamauchi

SILICON CARBIDE AND RELATED MATERIALS 2009, PTS 1 AND 2　Vol. 645-648　p. 857-+　2010　Research paper (international conference proceedings)

Thinning of SiC wafer by plasma chemical vaporization machining

Yasuhisa Sano, Takehiro Kato, Tsutomu Hori, Kazuya Yamamura, Hidekazu Mimura, Yoshiaki Katsuyama, Kazuto Yamauchi

Material Science Forum, 645-648 (2010) 857-860.　Vol. 645-648　p. 857-+　2010/01　Research paper (scientific journal)

Advanced Kirkpatrick-Baezミラー光学系の開発

藤井正輝, 松山智至, 三村秀和, 脇岡敏之, 半田宗一郎, 木村隆志, 佐野泰久, 西野吉則, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第23回日本放射光学会年会・放射光科学合同シンポジウム　2010/01　Research paper (other academic)

Planarization of GaN(0001) Surface by Photo-Electrochemical Method with Solid Acidic or Basic Catalyst

J. Murata, S. Sadakuni, K. Yagi, Y. Sano, T. Okamoto, K. Arima, A. N. Hattori, H. Mimura, K. Yamauchi

Japanese Journal of Applied Physics　Vol. 48　No. 12　2009/12　Research paper (scientific journal)

Development of Achromatic X-ray Imaging System with 4 Aspherical Mirrors

S. Matsuyama, M. Fujii, T. Wakioka, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Extended Abstracts of Second International Symposium on Atomically Controlled Fabrication Technology　2009/11

Development of a Mirror Manipulator for Advanced Kirkpatrick-Baez Optics

M. Fujii, S. Matsuyama, T. Wakioka, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Extended Abstracts of Second International Symposium on Atomically Controlled Fabrication Technology　2009/11

Dicing of SiC Wafer by Plasma Chemical Vaporization Machining with Wire Electrode

K. Aida, Y. Sano, K. Yamamura, H. Mimura, S. Matsuyama, K. Yamauchi

Second International Symposium on Atomically Controlled Fabrication Technology　2009/11

X-ray intensity fluctuation spectroscopy using nanofocused hard X-rays: Its application to study of relaxor ferroelectrics

Kenji Ohwada, Kazumichi Namikawa, Susumu Shimomura, Hironori Nakao, Hidekazu Mimura, Kazuto Yamauchi, Mitsuyoshi Matsushita, Jun'ichiro Mizuki

Japanese Journal of Applied Physics　Vol. 49　No. 2　2009/10　Research paper (scientific journal)

Planarization of GaN using photoelectrochemical process and solid catalyst

S. Sadakuni, J. Murata, K. Yagi, Y. Sano, T. Okamoto, K. Arima, H. Mimura, K. Yamauchi

Technical Digest of International Conference on Silicon Carbide and Related Materials 2009　2009/10　Research paper (international conference proceedings)

Reduction of surface roughness by catalyst-referred etching

T. Okamoto, Y. Sano, H. Hara, T. Hatayama, K. Arima, K. Yagi, J. Murata, H. Mimura, T. Fuyuki, K. Yamauchi

Technical Digest of International Conference on Silicon Carbide and Related Materials 2009　Vol. 645-648　p. 775-+　2009/10　Research paper (international conference proceedings)

Thinning of SiC wafer by plasma chemical vaporization machining

Y. Sano, T. Kato, T. Hori, K. Yamamura, H. Mimura, Y. Katsuyama, K. Yamauchi

Technical Digest of International Conference on Silicon Carbide and Related Materials 2009　Vol. 645-648　p. 857-+　2009/10　Research paper (international conference proceedings)

Simulation study of four-mirror alignment of advanced Kirkpatrick-Baez optics

S. Matsuyama, M. Fujii, K. Yamauchi

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment　Vol. 616　No. 2-3　p. 241-245　2009/10　Research paper (scientific journal)

Development of hard X-ray imaging optics with 4 aspherical mirrors

M. Fujii, S. Matsuyama, T. Wakioka, H. Mimura, Y. Sano, K. Yamauchi

2009/09

高密度X線ナノビーム形成のための並列型Kirkpatrick-Baezミラー光学系の開発

脇岡敏之, 松山智至, 藤井正輝, 三村秀和, 佐野泰久, 山内和人

精密工学会秋季大会 プログラム＆アブストラクト集　2009/09　Research paper (other academic)

Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors

S. Matsuyama, M. Fujii, T. Wakioka, H. Mimura, S. Handa, T. Kimura, Y. Nishino, K. Tamasaku, Y. Makina, T. Ishikawa, K. Yamauchi

The 10th International Conference on Synchrotron Radiation Instrumentation 2009 (SRI09)　Vol. 1234　p. 267-+　2009/09　Research paper (international conference proceedings)

Development of incident x-ray flux monitor for coherent x-ray diffraction microscopy

Y. Takahashi, H. Kubo, H. Furukawa, K. Yamauchi, E. Matsubara, T. Ishikawa, Y. Nishino

Journal of Physics: Conference Series　Vol. 186　No. 1　p. 12060-12060　2009/09　Research paper (scientific journal)

Improvement of Thickness Uniformity of SOI Layer by Numerically Controlled Sacrificial Oxidation using Atmospheric-Pressure Plasma with Electrode Array System

S. Kamisaka, Y. Sano, H. Mimura, S. Matsuyama, K. Yamauchi

Proceedings of 31st International Symposium on Dry Process　2009/09　Research paper (international conference proceedings)

Novel Scheme of Figure-Error Correction for X-ray Nanofocusing Mirror

Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Kazuya Yamamura, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Japanese Journal of Applied Physics, 48 (2009) 096507-1_4.　Vol. 48　No. 9　2009/09　Research paper (scientific journal)

High-resolution diffraction microscopy using the plane-wave field of a nearly diffraction limited focused x-ray beam

Y Takahashi, Y Nishino, R Tsutsumi, H Kubo, H Furukawa, H Mimura, S Matsuyama, N Zettsu, E Matsubara, T Ishikawa, K Yamauchi

PHYSICAL REVIEW B　Vol. 80　No. 5　p. 54103-54103　2009/08　Research paper (scientific journal)

High-resolution diffraction microscopy using the plane-wave field of a nearly diffraction limited focused x-ray beam

Yukio Takahashi, Yoshinori Nishino, Ryosuke Tsutsumi, Hideto Kubo, Hayato Furukawa, Hidekazu Mimura, Satoshi Matsuyama, Nobuyuki Zettsu, Eiichiro Matsubara, Tetsuya Ishikawa, Kazuto Yamauchi

Physical Review B - Condensed Matter and Materials Physics　Vol. 80　No. 5　2009/08　Research paper (scientific journal)

Wavefront control system for phase compensation in hard X-ray optics

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Kouji Inagaki, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Japanese Journal of Applied Physics　Vol. 48　No. 7　2009/07　Research paper (scientific journal)

Observation of electromigration voids in a Cu thin line by in situ coherent x-ray diffraction microscopy

Y. Takahashi, Y. Nishino, H. Furukawa, H. Kubo, K. Yamauchi, T. Ishikawa, E. Matsubara

Journal of Applied Physics　Vol. 105　No. 12　2009/06　Research paper (scientific journal)

Feasibility study of high-resolution coherent diffraction microscopy using synchrotron x rays focused by Kirkpatrick–Baez mirrors

Yukio Takahashi, Yoshinori Nishino, Hidekazu Mimura, Ryosuke Tsutsumi, Hideto Kubo, Tetsuya Ishikawa, Kazuto Yamauchi

Journal of Applied Physics　Vol. 105　No. 8　p. 083106-083106　2009/04/15　Research paper (scientific journal)

Termination dependence of surface stacking at 4H-SiC(0001)-1×1: Density functional theory calculations

Hideyuki Hara, Yoshitada Morikawa, Yasuhisa Sano, Kazuto Yamauchi

PHYSICAL REVIEW B　Vol. 79　No. 15　2009/04　Research paper (scientific journal)

Trace element mapping of a single cell using a hard x-ray nanobeam focused by a Kirkpatrick-Baez mirror system

S. Matsuyama, M. Shimura, H. Mimura, M. Fujii, H. Yumoto, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi

X-ray Spectrometry　Vol. 38　No. 2　p. 89-94　2009/03　Research paper (scientific journal)

Development of Advanced Kirkpatrick -Baez System for X- ray Nano- Imaging

M. Fujii, S. Matsuyama, T. Wakioka, H. Mimura, Y. Sano, K. Yamauchi

Extended Abstracts of First International Symposium on Atomically Controlled Fabrication Technology -Surface and Thin Film Processing　2009/02　Research paper (international conference proceedings)

A Study on a Surface Preparation Method for Single-Crystal SiC Using an Fe Catalyst

Akihisa Kubota, Keita Yagi, Junji Murata, Heiji Yasui, Shiro Miyamoto, Hideyuki Hara, Yasuhisa Sano, Kazuto Yamauchi

JOURNAL OF ELECTRONIC MATERIALS　Vol. 38　No. 1　p. 159-163　2009/02　Research paper (scientific journal)

New chemical planarization of SiC and GaN using an Fe plate in H2O2 solution

J. Murata, A. Kubota, K. Yagi, Y. Sano, H. Hara, K. Aeima, T. Okamoto, H. Mimura, K. Yamauchi

Materials Science Forum　Vol. 600-603　p. 815-+　2009/02　Research paper (scientific journal)

Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide

Yasuhisa Sano, Masayo Watanabe, Takehiro Kato, Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi

Materials Science Forum　Vol. 600-603　p. 847-+　2009/02　Research paper (scientific journal)

Damage-free Planarization of 2-inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Takeshi Okamoto, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Keita Yagi, Junji Murata, Hedekazu Mimura, Kazuto Yamauchi

Materials Science Forum　Vol. 600-603　p. 835-+　2009/02　Research paper (scientific journal)

Beveling of Silison Carbide Wafer by Plasma Chemical Vaporization Machining

Takehiro Kato, Yasuhisa Sano, Hideyuki Hara, Hidekazu Mimura, Kazuya Yamamura, Kazuto Yamauchi

Materials Science Forum　2009/02　Research paper (scientific journal)

Spatial wavelength range of surface roughness improved using elastic emission machining

Masahiko Kanaoka, Hideo Takino, Kazushi Nomura, Hidekazu Mimura, Kazuto Yamauchi, Yuzo Mori

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009　Vol. 2　p. 385-388　2009　Research paper (international conference proceedings)

Requirements on Hard X-ray Grazing Incidence Optics for European XFEL: Analysis and Simulation of Wavefront Transformations

Liubov Samoylova, Harald Sinn, Frank Siewert, Hidekazu Mimura, Kazuto Yamauchi, Thomas Tschentscher

EUV AND X-RAY OPTICS: SYNERGY BETWEEN LABORATORY AND SPACE　Vol. 7360　2009　Research paper (international conference proceedings)

Stitching interferometric measurement system for hard X-ray nanofocusing mirrors

Hirokatsu Yumoto, Hidekazu Mimura, Soichiro Handa, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Journal of Physics: Conference Series　Vol. 186　2009　Research paper (international conference proceedings)

Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining

Takehiro Kato, Yasuhisa Sano, Hideyuki Hara, Hidekazu Mimura, Kazuya Yamamura, Kazuto Yamauchi

SILICON CARBIDE AND RELATED MATERIALS 2007, PTS 1 AND 2　Vol. 600-603　p. 843-846　2009　Research paper (international conference proceedings)

109. Tolerance Design of Logarithmic Roller Profiles in Cylindrical Roller Bearing

Hiroki FUJIWARA, Kazuto YAMAUCHI

Transaction of the Japan Society of Mechanical Engineering C　Vol. 75　No. 749　p. 1-7　2009/01　Research paper (scientific journal)

Plasma Chemical Vaporization Machining and Elastic Emission Machining

Yasuhisa Sano, Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi, Yuzo Mori

Crystal Growth Technology: From Fundamentals and Simulation to Large-scale Production　p. 475-495　2008/11/25　Part of collection (book)

Improvement of Thickness Uniformity of SOI by Numerically Controlled Sacrificial Oxidation Using Atmospheric-Pressure Plasma

Y. Sano, T. Masuda, S. Kamisaka, H. Mimura, S. Matsuyama, K. Yamauchi

2008 IEEE International SOI Conference Proceedings　p. 165-166　2008/10　Research paper (international conference proceedings)

Element-specific hard-x-ray diffraction microscopy

Y. Takahashi, H. Kubo, H. Furukawa, K. Yamauchi, E. Matsubara, T. Ishikawa, Y. Nishino

Physical Review B　Vol. 78　No. 9　2008/09　Research paper (scientific journal)

Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm

H. Mimura, S. Morita, T. Kimura, D. Yamakawa, W. Lin, Y. Uehara, S. Matsuyama, H. Yumoto, H. Ohashi, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, H. Ohmori, K. Yamauchi

Proceeding of SPIE　Vol. 7077　2008/08　Research paper (international conference proceedings)

H. Mimura, S. Morita, T. Kimura, D. Yamakawa, W. Lin, Y. Uehara, S. Matsuyama, H. Yumoto, H. Ohashi, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, H. Ohmori, and K. Yamauchi

H. Mimura, S. Morita, T. Kimura, D. Yamakawa, W. Lin, Y. Uehara, S. Matsuyama, H. Yumoto, H. Ohashi, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, H. Ohmori, K. Yamauchi

Review of Scientific Instruments　Vol. 79　No. 8　2008/08　Research paper (scientific journal)

Nanotstructure analysis of metallic materials by coherent x-ray diffraction microscopy

Y. Takahashi, H. Furukawa, H. Kubo, K. Yamauchi, Y. Nishino, T. Ishikawa, E. Matsubara

Book of abstracts of 57th Denver x-ray conference　Vol. 186　p. 1-3　2008/08　Research paper (international conference proceedings)

Catalyst-referred etching of 4H-SiC substrate utilizing hydroxyl radicals generated from hydrogen peroxide molecules

Keita Yagi, Junji Murata, Akihisa Kubota, Yasuhisa Sano, Hideyuki Hara, Takeshi Okamoto, Kenta Arima, Hidekazu Mimura, Kazuto Yamauchi

Surface and Interface Analysis　Vol. 40　No. 6-7　p. 998-1001　2008/06　Research paper (international conference proceedings)

Crystal machining using atmospheric pressure plasma

Y. Sano, K. Yamamura, K. Yamauchi, Y. Mori

Book of Lecture Notes, 4th International Workshop on Crystal Growth Technology　2008/05　Research paper (international conference proceedings)

Catalyst-referred etching

K. Yamauchi, Y. Sano, K. Arima, H. Hara

Book of Lecture Notes, 4th International Workshop on Crystal Growth Technology　2008/05　Research paper (international conference proceedings)

Experimental Comparison Between Partially Crowned and Logarithmic Roller Profiles in Cylindrical Roller Bearings

Hiroki FUJIWARA, Kazuto YAMAUCHI

Transactions of the Japan Society of Mechanical Engineers Series C　Vol. 74　No. 745　p. 2308-2314　2008/04　Research paper (scientific journal)

Chemical planarization of GaN using hydroxyl radicals generated on a catalyst plate in H2O2 solution

J. Murata, A. Kubota, K. Yagi, Y. Sano, H. Hara, K. Arima, T. Okamoto, H. Mimura, K. Yamauchi

Journal of Crstal Growth　Vol. 310　No. 7-9　p. 1637-1641　2008/04　Research paper (scientific journal)

Ultraprecision finishing technique by numerically controlled sacrificial oxidation

Yasuhisa Sano, Takaya Masuda, Hidekazu Mimura, Kazuto Yamauchi

Journal of Crystal Growth　Vol. 310　No. 7-9　p. 2173-2177　2008/04　Research paper (scientific journal)

Processing efficiency of elastic emission machining for low-thermal-expansion material

M.Kanaoka, C.Liu, K.Nomura, M.Ando, H.Takino, Y.Fukuda, Y.Mori, H.Mimura, K.Yamauchi

Surface and Interface Analysis　Vol. 40　No. 6-7　p. 1002-1006　2008/03　Research paper (scientific journal)

Stitching interferometric metrology for steeply curved x-ray mirrors

H.Yumoto, H.Mimura, T.Kimura, S.Handa, S.Matsuyama, Y.Sano, K.Yamauchi

Surface and Interface Analysis　Vol. 40　No. 6-7　p. 1023-1027　2008/03　Research paper (scientific journal)

Highly accurate differential deposition for X-ray reflective optics

S.Handa, H.Mimura, H.Yumoto, T.Kimura, S.Matsuyama, Y.Sano, Kazuto Yamauchi

Surface and Interface Analysis　Vol. 40　No. 6-7　p. 1019-1022　2008/03　Research paper (scientific journal)

Trace element mapping using a high-resolution scanning X-ray fluorescence microscope equipped with a Kirkpatrick-Baez mirror system

S. Matsuyama, H. Mimura, K. Katagishi, H. Yumoto, S. Handa, M. Fujii, Y. Sano, M. Shimura, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawad, K. Yamauchi

Surface and interface analysis　Vol. 40　No. 6-7　p. 1042-1045　2008/03　Research paper (scientific journal)

Direct Determination of the Wave Field of an X-ray Nanobeam

H.Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi

Physical Review A　Vol. 77　No. 1　2008/02　Research paper (scientific journal)

Catalyst-referred etching

Hideyuki Hara, Yasuhisa Sano, Kenta Arima, Kazuto Yamauchi

OYOBUTURI　Vol. 53　No. 8　p. 20-24　2008/02

Defect-free planarization of 4H-SiC(0001) substrate using reference plate

Keita Yagi, Junji Murata, Akihisa Kubota, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura, Kazuto Yamauchi

Japanese Journal of Applied Physics　Vol. 47　No. 1　p. 104-107　2008/01/18　Research paper (scientific journal)

Factors affecting changes in removal rate of elastic emission machining

Masahiko Kanaoka, Hideo Takino, Kazushi Nomura, Hidekazu Mimura, Kazuto Yamauchi, Yuzo Mori

Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE　2008　Research paper (international conference proceedings)

Aberrations in curved x-ray multilayers

Ch Morawe, J. P. Guigay, V. Mocella, C. Ferrero, H. Mimura, S. Handa, K. Yamauchi

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 7077　2008　Research paper (international conference proceedings)

Development of adaptive mirror for wavefront correction of hard X-ray nanobeam

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS III　Vol. 7077　2008　Research paper (international conference proceedings)

Coherent x-ray diffraction measurements of Cu thin lines

Y. Takahashi, H. Furukawa, H. Kubo, K. Yamauchi, Y. Nishino, T. Ishikawa, E. Matsubara

Surface and Interface Analysis　Vol. 40　No. 6-7　p. 1046-1049　2008/01　Research paper (scientific journal)

Development of coherent x-ray diffraction microscopy for nano structure analysis of metallic materials

Y. Takahashi, H. Furukawa, H. Kubo, Y. Nishino, K. Yamauchi, T. Ishikawa, E. Matsubara

The 18th Symposium ofThe Materials Research Sosiety ofJapan, Program and Abstracts　2007/12　Research paper (international conference proceedings)

走査型蛍光X線顕微鏡による細胞内元素分布の測定

藤井正輝, 松山智至, 志村まり, 三村秀和, 前島一博, 片岸恵子, 湯本博勝, 半田宗一郎, 木村隆志, 佐野泰久, 西野吉則, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第9回Ｘ線結像光学シンポジウム 要旨集　2007/11

Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

M. Kanaoka, C, Liu, K. Nomura, M. Ando, H. Takino, Y. Fukuda, Y. Mori, H. Mimura, K. Yamauchi

J. Vac. Sci. Technol. B　Vol. 25　No. 6　p. 2110-2113　2007/11　Research paper (scientific journal)

Experimental determination of the wave field of X-ray nanobeam

Hidekazu Mimura, Hirokatsu Yumoto, Soichiro Handa, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Yoshinori Nishino, Kenji Tamasaku, Yabashi Makina, Tetsuya Ishikawa, Kazuto Yamauchi

2007/10

Three-dimensional observation of internal structures in metallic materials by coherent x-ray diffraction microscopy

Y. Takahashi, H. Furukawa, H. Kubo, Y. Nishino, K. Yamauchi, T. Ishikawa, E. Matsubara

Extended Abstracts of International 21st Century COE Symposium on Atomic Fabrication Technology 2007　2007/10

Development of Cryo Scanning X-ray Fluorescent Microscopy to Observe Frozen Hydrated Cells and Tissues

Masaki Fujii, Satoshi Matsuyama, Mari Shimura, Keiko Katagishi, Hidekazu Mimura, Hirokatsu Yumoto, Soichiro Handa, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishin, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

2007/10　Research paper (international conference proceedings)

High-resolution and Highly Sensitive Scanning X-ray Fluorescence Microscopy Using Kirkpatrick-Baez Mirror Optics

Satoshi Matsuyama, Hidekazu Mimura, Keiko Katagishi, Mari Shimura, Masaki Fujii, Hirokatsu Yumoto, Soichiro Handa, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

2007/10　Research paper (international conference proceedings)

Atomically Resolved STM Study of 4H-SiC(0001) Surfaces Flattened by Chemical Etching in HF solutions with Pt Catalyst

Kenta Arima, Ryosuke Suga, Hideyuki Hara, Junji Murata, Keita Yagi, Hidekazu Mimura, Yasuhisa Sano, Kazuto Yamauchi

Technical Digest of International Conference on Silicon Carbide and Related Materials 2007, Ohtsu, pp. We 28-29　2007/10　Research paper (international conference proceedings)

Damage-free Planarization of 2-inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

T. Okamoto, Y. Sano, H. Hara, K. Arima, K. Yagi, J. Murata, H. Mimura, K. Yamauchi

International Conference on Silicon Carbide and Related Materials 2007 Technical Digest　Vol. 600-603　p. 835-+　2007/10　Research paper (international conference proceedings)

Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide

Y. Sano, M. Watanabe, T. Kato, K. Yamamura, H. Mimura, K. Yamauchi

International Conference on Silicon Carbide and Related Materials 2007 Technical Digest　Vol. 600-603　p. 847-+　2007/10　Research paper (international conference proceedings)

New Chemical Planarization of SiC and GaN Using Fe Plate in H2O2 solution

Junji Murata, Akihisa Kubota, Keita Yagi, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura, Kazuto Yamauchi

International Conference on Silicon Carbide and Related Materials 2007 Technical Digest　Vol. 600-603　p. 815-+　2007/10　Research paper (international conference proceedings)

Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long X-ray mirror

Haruhiko Ohashi, Takashi Tsumura, Hiromi Okada, Hidekazu Mimura, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS II　Vol. 6704　No. 1　p. 670405-1-670405-8　2007/10　Research paper (scientific journal)

Ultraprecision Finishing Technique by Numerically Controlled Sacrificial Oxidation

Yasuhisa Sano, Takaya Masuda, Hidekazu Mimura, Kazuto Yamauchi

Proceedings of 15th International Conference on Crystal Growth　2007/08　Research paper (international conference proceedings)

Damage-free planarization of GaN using a catalyst plate

Junji Murata, Akihisa Kubota, Keita Yagi, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura, Kazuto Yamauchi

Proceedings of 15th International Conference on Crystal Growth　2007/08　Research paper (international conference proceedings)

New Crystal Planarization Technique using a catalyst plate

Hideyuki Hara, Yasuhisa Sano, Kenta Arima, Keita Yagi, Junji Murata, Takeshi Okamoto, Hidekazu Mimura, Kazuto Yamauchi

Proceedings of 15th International Conference on Crystal Growth　2007/08　Research paper (international conference proceedings)

Fabrication of ultrathin and highly uniform silicon on insulator by numerically controlled plasma chemical vaporization machining

Yasuhisa Sano, Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi, Yuzo Mori

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 78　No. 8　2007/08　Research paper (scientific journal)

Polishing characteristics of 4H-SiC Si-face and C-face by plasma chemical vaporization machining

Yasuhisa Sano, Masayo Watanabe, Kazuya Yamamura, Kazuto Yamauchi, Takeshi Ishida, Kenta Arima, Akihisa Kubota, Yuzo Mori

SILICON CARBIDE AND RELATED MATERIALS 2006　Vol. 556-557　p. 757-+　2007/08　Research paper (scientific journal)

Damage-free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata, Kazuto Yamauchi

Materials Science Forum　2007/08　Research paper (scientific journal)

位相回復波面計測法に基づくＸ線ナノ集光ミラーの開発

三村秀和, 湯本博勝, 松山智至, 山内和人

光アライアンス　Vol. 18　No. 6　p. 42-46　2007/06

Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst

Kenta Arima, Hideyuki Hara, Junji Murata, Takeshi Ishida, Ryota Okamoto, Keita Yagi, Yasuhisa Sano, Hidekazu Mimura, Kazuto Yamauchi

Applied Physics Letters　Vol. 90　No. 20　p. 202106 1-202106 3　2007/05　Research paper (scientific journal)

Removal properties of low-thermal-expansion materials with rotating-sphere elastic emission machining

Masahiko Kanaoka, Hideo Takino, Kazushi Nomura, Yuzo Mori, Hidekazu Mimura, Kazuto Yamauchi

SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS　Vol. 8　No. 3　p. 170-172　2007/04　Research paper (scientific journal)

Fabrication of damascene Cu wirings using solid acidic catalyst

K. Yagi, J. Murata, H. Hara, Y. Sano, K. Yamauchi, H. Goto

Science and Technology of Advanced Materials　Vol. 8　No. 3　p. 166-169　2007/04　Research paper (scientific journal)

CAtalyst-Referred Etching of Silicon

H. Hara, Y. Sano, K. Arima, K. Yagi, J. Murata, A. Kubota, H. Mimura, K. Yamauchi

Science and Technology of Advanced Materials　Vol. 8　No. 3　p. 162-165　2007/04　Research paper (scientific journal)

Ultraprecision Machining Method for Ultraprecise Aspherical Mirror

Yasuhisa Sano, Hidekazu Mimura, Kazuya Yamamura, Kazuto Yamauchi, Yuzo Mori

The Review of Laser Engineering　Vol. 35　No. 3　p. 162-167　2007/03

Flattened by SiO2 Particles in Ultrapure Water and Elucidation of Its Surface Formation Mechanism

K. Arima, A. Kubota, H. Mimura, J. Katoh, K. Inagaki, Y. Mori, K. Endo, K. Yamauchi

Extended Abstracts of the 12th Workshop on Gate Stack Technology and Physics, pp. 125-130　2007/02

Investigation of Surface Roughness of Silicon Carbide in Elastic Emission Machining

A. Kubota, Y. Shinbayashi, H. Mimura, Y.Sano, K.Inagaki, Y.Mori, K.Yamauchi

JOURNAL OF ELECTRONIC MATERIALS　Vol. 36　No. 1　p. 92-97　2007/02　Research paper (scientific journal)

Efficient focusing of hard x-rays to 25nm by a total reflection mirror

H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi

Applied Physics Letters　Vol. 90　No. 5　2007/02　Research paper (scientific journal)

走査型蛍光X線顕微鏡を用いた細胞内元素の高感度観察

片岸恵子, 松山智至, 三村秀和, 湯本博勝, 佐野泰久, 西野吉則, 玉作賢治, 矢橋牧名, 石川哲也, 山内和人

第20回日本放射光学会年会・放射光科学合同シンポジウム 要旨集, 133, 2007　2007/01

Global high-accuracy intercomparison of slope measuring instruments

Frank Siewert, Lahsen Assoufid, Daniele Cocco, Olivier Hignette, Steve Irick, Heiner Lammert, Wayne McKinney, Haruhiko Ohashi, Francois Polack, Shinan Qian, Seungyu Rah, Amparo Rommeveaux, Veit Schönherr, Giovani Sostero, Peter Takacs, Muriel Thomasset, Kazuto Yamauchi, Valeriy Yashchuk, Thomas Zeschke

AIP Conference Proceedings　Vol. 879　p. 706-709　2007　Research paper (international conference proceedings)

Reflective optics for sub-10nm hard X-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS II　Vol. 6705　2007　Research paper (international conference proceedings)

Novel abrasive-free planarization of Si and SiC using catalyst

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata, Kazuto Yamauchi

TOWARDS SYNTHESIS OF MICRO - /NANO - SYSTEMS　No. 5　p. 267-+　2007　Research paper (international conference proceedings)

Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors

A. Rommeveaux, L. Assoufid, H. Ohashi, H. Mimura, K. Yamauchi, J. Qian, T. Ishikawa, C. Morawe, A. T. Macrander, A. Khounsary, S. Goto

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS II　Vol. 6704　2007　Research paper (international conference proceedings)

Hard x-ray wavefront measurement and control for hard x-ray nanofocusing

Soichiro Handa, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 6704　2007　Research paper (international conference proceedings)

Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long X-ray mirror

Haruhiko Ohashi, Takashi Tsumura, Hiromi Okada, Hidekazu Mimura, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS II　Vol. 6704　No. 1　p. 670405-1-670405-8　2007　Research paper (international conference proceedings)

Polishing characteristics of 4H-SiC Si-face and C-face by plasma chemical vaporization machining

Yasuhisa Sano, Masayo Watanabe, Kazuya Yamamura, Kazuto Yamauchi, Takeshi Ishida, Kenta Arima, Akihisa Kubota, Yuzo Mori

SILICON CARBIDE AND RELATED MATERIALS 2006　Vol. 556-557　p. 757-+　2007　Research paper (international conference proceedings)

Hard X-ray nano-focusing with ultraprecisely figured mirrors

H. Mimura, K. Yamauchi

2006/11

Formation of Atomically Flat 4H-SiC(0001) Surfaces by Wet-chemical Preparations

Kenta Arima, Kazuto Yamauchi

Abstracts of Handai Nanoscience and Nanotechnology International Symposium 2006, pp.31-32　2006/11　Research paper (international conference proceedings)

Effect of Particle Morphology on Removal Rate and Surface Topography in Elastic Emission Machining

A. Kubota, H. Mimura, K. Inagaki, Y. Mori, K. Yamauchi

Journal of Electrochemical Society　Vol. 153　No. 9　p. G874-G878　2006/10　Research paper (scientific journal)

Development of mirror manipulator for hard x-ray nanofocusing at sub-50nm level

S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, S. Handa, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi

Review of Scientific Instruments　Vol. 77　No. 9　2006/10　Research paper (scientific journal)

Surface Gradient Integrated Profiler for X-ray and EUV Optics

Y. Higashi, Y. Takaie, K. Endo, Y. Mori, K. Yamauchi, T. Kume, K. Enami, K. Yamamura, Y. Sano, K. Ueno

Proceedings of International 21st Century COE Symposium on Atomistic Fabrication Technology　Vol. 8　No. 3　p. 177-180　2006/10　Research paper (international conference proceedings)

Ultraprecision machining utilizing numerically controlled scanning of localized atmospheric pressure plasma

Kazuya Yamamura, Yasuhisa Sano, Masafumi Shibahara, Kazuto Yamauchi, Hidekazu Mimura, Katsuyoshi Endo, Yuzo Mori

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　Vol. 45　No. 10B　p. 8270-8276　2006/10　Research paper (scientific journal)

Polishing characteristics of silicon carbide by plasma chemical vaporization machining

Yasuhisa Sano, Masayo Watanabe, Kazuya Yamamura, Kazuto Yamauchi, Takeshi Ishida, Kenta Arima, Akihisa Kubota, Yuzo Mori

Jpn. J. Appl. Phys. 45 No.10B　Vol. 45　No. 10　p. 8277-8280　2006/10　Research paper (scientific journal)

Scanning X-ray Fluorescence Microscope Using Kirkpatrick-Baez Optics with Spatial Resolution Better than 50nm

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

The 16th International Microscopy Congress (IMC16)　2006/09

Observation of Intracellular Elements by Scanning X-ray Fluorescence Microscopy with Spatial Resolution of 50nm

Keiko Katagishi, Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

2006/09

Development of scanning X-ray fluorescence microscope with spatial resolution of 30nm using K-B mirrors optics

S.Matsuyama, H.Mimura, H.Yumoto, K.Yamamura, Y.Sano, M.Yabashi, Y.Nishino, K.Tamasaku, T. Ishikawa, K.Yamauchi

Review of Scientific Instruments　Vol. 77　No. 10　2006/09　Research paper (scientific journal)

Scanning X-ray Fluorescence Microscope Using Kirkpatrick-Baez Optics with Spatial Resolution Better than 50nm

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhis Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proc. SPIE　2006/08

Waveoptical simulation for designing and evaluating hard X-ray nanofocusing mirror

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi

2006/08

Single-Shot Spectrometry for X-Ray Free-Electron Lasers

M. Yabashi, J B. Hastings, M.S. Zolotorev, H. Mimura, H. Yumoto, S. Matsuyama, K. Yamauchi, T. Ishikawa

PHYSICAL REVIEW LETTERS　Vol. 97　No. 8　2006/08　Research paper (scientific journal)

Highly resolved scanning tunneling microscopy study of Si(001) surfaces flattened in aqueous environment

Kenta Arima, Akihisa Kubota, Hidekazu Mimura, Kouji Inagaki, Katsuyoshi Endo, Yuzo Mori, Kazuto Yamauchi

Surface Science　Vol. 600　No. 15　p. L185-L188　2006/08　Research paper (scientific journal)

Novel Abrasive-Free Planarization of 4H-SiC(0001) Using Catalyst

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata, Kazuto Yamauchi

Journal of Electronic Materials　Vol. 35　No. 8　p. L11-L14　2006/08　Research paper (scientific journal)

Hard X-ray focusing with a beam size less than 30 nm by total reflection mirror

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, Y. Sano, K. Yamamura, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

2006/07

Diffraction-limited X-ray nanobeam with KB mirrors

K. Yamauchi, H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, Y. Sano, K. Yamamura, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa

2006/07

Surface Gradient Integrated Profiler for X-ray and EUV Optics-Calibration of the rotational angle error of the rotary encoders-

Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Ymamura, Yasushi Sano, Kenji Ueno, Yuzo Mori

Ninth International Conference on Synchrotron Radiation Instrumentation　Vol. 879　p. 726-+　2006/06　Research paper (international conference proceedings)

Atomic-Scale Evaluation of Si(111) Surfaces Finished by the Planarization Process Utilizing SiO2 Particles Mixed with Water

Jun Katoh, Kenta Arima, Akihisa Kubota, Hidekazu Mimura, Kouji Inagaki, Yuzo Mori, Kazuto Yamauchi, Katsuyoshi Endo

Journal of The Electrochemical Society　Vol. 153　No. 6　p. G560-G565　2006/06　Research paper (scientific journal)

At-wavelength figure metrology of hard x-ray focusing mirrors

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Review of Scientific Instruments　Vol. 77　No. 6　p. 063712-1-063712-6　2006/06　Research paper (scientific journal)

Development of Surface Measurement Technologies for Hard X-ray Nanofocusing Mirror at Osaka University and SPring-8

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi

The 3rd International Workshop on Metrology for X-ray Optics　2006/05

Development of K-B Mirror Manipulator for Hard X-ray Sub-50nm Focusing

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Soichiro Handa, Keiko Katagishi, Akihiko Shibatani, Kazuya Yamamura, Yasuhisa Sano, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

International Workshop on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation 2006　2006/05

Electrochemical Etching Using Surface-Sulfonated Electrodes in Ultrapure Water

Yoshio Ichii, Yuzo Mori, Kikuji Hirose, Katsuyoshi Endo, Kazuto Yamauchi, Hidekazu Goto

Journal of The Electrochemical Society　Vol. 153　No. 5　p. C344-C348　2006/05　Research paper (scientific journal)

Development of the Cleaning Method Using High-Speed Shear Flow of Ultrapure Water (2nd Report): Study of Cu removal mechanism by cleaning using high-speed shear flow of ultrapure water

Kenichi MORITA, Hidekazu GOTO, Katsuyoshi ENDO, Kazuto YAMAUCHI, Kenichi TSUTSUMI, Yuzo MORI

Journal of the Japanese Society of Precision Engineering　Vol. 72　No. 4　p. 529-533　2006/04　Research paper (scientific journal)

Study of Cleaning Method for Si Substrate Using High-Speed Shear Flow of Ultrapure Water: Cleaning Effect of DOP Contamination on Si Wafer Surface

Kenichi MORITA, Hidekazu GOTO, Kazuto YAMAUCHI, Katsuyoshi ENDO, Yuzo MORI

Journal of the Japanese Society of Precision Engineering　Vol. 72　No. 3　p. 383-392　2006/03　Research paper (scientific journal)

Atomic-level STM analyses of Si(001) surfaces prepared in aqueous environment

Kenta Arima, Kazuto Yamauchi, Hidekazu Mimura, Akihisa Kubota, Kouji Inagaki, Yuzo Mori, Katsuyoshi Endo

Abstract Book of 33rd Conference on the Physics & Chemistry of Semiconductor Interfaces, Cocoa Beach (Florida), Mo1355 (2006).　2006/01

SCSS X-FEL conceptual design report

Makina Yabashi, Jerome B. Hastings, Max S. Zolotorev, Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuto Yamauchi, Tetsuya Ishikawa

Physical Review Letters　Vol. 97　No. 8　2006　Research paper (scientific journal)

High-spatial-resolution scanning X-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhis Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

ADVANCES IN X-RAY/EUV OPTICS, COMPONENTS, AND APPLICATIONS　Vol. 6317　2006　Research paper (international conference proceedings)

Surface gradient integrated profiler for x-ray and EUV optics - 3D mapping of 1m-long flat mirror and off-axis parabolic mirror

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, J. Uchikoshi, K. Ueno, Y. Mori

ADVANCES IN X-RAY/EUV OPTICS, COMPONENTS, AND APPLICATIONS　Vol. 6317　2006　Research paper (international conference proceedings)

Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

ADVANCES IN X-RAY/EUV OPTICS, COMPONENTS, AND APPLICATIONS　Vol. 6317　2006　Research paper (international conference proceedings)

Development of Cleaning Method Using High-Speed Shear Flow of Ultrapure Water: Cleaning Effect of Cu Contamination on Si Wafer Surface

Kenichi MORITA, Hidekazu GOTO, Kazuto YAMAUCHI, Katsuyoshi ENDO, Yuzo MORI

Journal of the Japanese Society of Precision Engineering　Vol. 72　No. 1　p. 89-94　2006/01　Research paper (scientific journal)

Cutting of functional materials by plasma chemical vaporization machining with inner-diameter blade electrode

Y. Sano, K. Yamamura, H. Mimura, K. Yamauchi, A. Kubota, Y. Mori

Proc. ICRP-6/SPP-23　2006/01　Research paper (international conference proceedings)

Ultra precision machining utilizing numerically controlled scanning of localized atmospheric pressure plasma

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, Y. Mori

Proceedings of ICRP6/SPP23　2006/01　Research paper (other academic)

Wave-optical evaluation of interference fringes and wavefront phase in a hard-x-ray beam totally reflected by mirror optics

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Yuzo Mori

Applied Optics　Vol. 44　No. 32　p. 6927-6932　2005/11　Research paper (scientific journal)

A new designed ultra-high precision profiler

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, Y. Sano, K. Ueno, Y. Mori

Proccedings of SPIE 5921　Vol. 5921　p. 1-9　2005/10　Research paper (international conference proceedings)

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

L. Assoufid, A. Rommeveaux, H. Ohashi, K. Yamauchi, H. Mimura, J. Qian, O. Hignette, T. Ishikawa, C. Morawe, A. Macrander, A. Khounsary, S. Goto

Proc. SPIE　Vol. 5921　p. 59210J-12　2005/09　Research paper (international conference proceedings)

Fabrication of Ultraprecisely Figured Elliptical Mirror for Nano-Focusing of Hard X-ray and Evalation of Focusing Properties

YUMOTO Hirokatsu, MIMURA Hidekazu, MATSUYAMA Satoshi, HARA Hideyuki, YAMAMURA Kazuya, SANO Yasuhisa, UENO Kazumasa, ENDO Katsuyoshi, MORI Yuzo, NISHINO Yoshinori, TAMASAKU Kenji, YABASHI Makina, ISHIKAWA Tetsuya, YAMAUCHI Kazuto

Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers　Vol. 71　No. 9　p. 1137-1140　2005/09　Research paper (scientific journal)

Surface figuring and measurement methods with spatial resolution close to 0.1mm for X-ray mirror fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 5921　p. 1-8　2005/08　Research paper (international conference proceedings)

Diffraction-limited two-dimensional hard-X-rays focusing in 100nm level using K-B mirror arrangement

S. Matsuyama, H. Mimura, H. Yumoto, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, K. Yamauchi

Review of Scientific Instruments　Vol. 76　No. 8　p. 1-5　2005/08　Research paper (scientific journal)

Morphological Stability of Si(001) Surface Immersed in Fluid Mixture of Ultrapure Water and Silica Powder Particles in Elastic Emission Machining

Akihisa Kubota, Hidekazu Mimura, Kouji Inagaki, Hirokatsu Yumoto, Yuzo Mori, Kazuto Yamauchi

Japanese Journal of Applied Physics　Vol. 44　No. 8　p. 5893-5897　2005/08　Research paper (scientific journal)

A new Designed High-Precision Profiler - Study on Mandrel measurement-

Y.Higashi, Y.Takaie, K.Endo, T.Kume, K.Enami, K.Yamauchi, K.Yamamura, K.Ueno, Y.Mori

Proc. 8th Cof. X-ray Microscopy IPAP Conf. Series 7　2005/07　Research paper (international conference proceedings)

Scanning hard-X-ray microscope with spatial resolution better than 50nm

S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, K.Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K.Yamauchi

2005/07　Research paper (scientific journal)

Hard X-ray Diffraction-Limited Nanofocusing with unprecidently accurate mirrors

H. Mimura, S. Matsuyama, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, M. Shibahara, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

2005/07　Research paper (scientific journal)

Investigation of machining mechanism in Elastic Emission Machining (EEM) on the atomic scale

J. Katoh, A. Kubota, H. Mimura, K. Yamauchi, K. Arima, K. Inagaki, Y. Mori, K. Endo

Abstracts of 13th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques, pp. 89-89　2005/07

Atomic-Scale Evaluation of Si(001) Surfaces Finished by Novel Global Planarization Process

K. Arima, K. Yamauchi, H. Mimura, A. Kubota, K. Inagaki, Y. Mori, K. Endo

Abstracts of 13th Internatinal Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques, pp. 335-335　2005/07

Element Array by Scanning X-ray Fluorescence Microscopy after Cis-Diamminedichloro-Platinum(II) Treatment

M. Shimura, A. Saito, S. Matsuyama, T. Sakuma, Y. Terui, K. Ueno, H. Yumoto, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, M. Yabashi, K. Tamasaku, K. Nishio, Y. Nishino, K. Endo, K. Hatake, Y. Mori, Y. Ishizaka, T. Ishikawa

Cancer Research　Vol. 65　No. 12　p. 4998-5002　2005/07　Research paper (scientific journal)

The Influence of Particle Morphology on the Si(001)Surface in EEM(Elastic Emission Machining)

A. Kubota, H. Mimura, K. Inagaki, Y. Mori, K. Yamauchi

Journal of the Japanese Society of Precision Engineering　Vol. 71　No. 6　p. 762-766　2005/06　Research paper (scientific journal)

Electrochemical Etching Using Surface Modified Graphite Electrodes in Ultrapure Water

Y.Ichii, Y.Mori, K.Hirose, K.Endo, K.Yamauchi, K.Yagi, H.Goto

Proceedings of The 5th Asian Conference on Electrochemistry 2005　2005/05

Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water

Yoshio Ichii, Yuzo Mori, Kikuji Hirose, Katsuyoshi Endo, Kazuto Yamauchi, Hidekazu Goto

Electrochimica Acta　Vol. 50　No. 27　p. 5379-5383　2005/05　Research paper (scientific journal)

The Influence of EEM(Elastic Emission Machining)Fluid on Si(001)Surface Morphology

A. Kubota, H. Mimura, H. Yumoto, Y. Mori, K. Yamauchi

Journal of the Japanese Society of Precision Engineering　Vol. 71　No. 5　p. 628-632　2005/05　Research paper (scientific journal)

Preparation of Ultrasmooth and defect-free 4H-SiC(0001) Surfaces by Elastic Emission Machining

A. Kubota, H. Mimura, K. Inagaki, K. Arima, Y. Mori, K. Yamauchi

Journal of Electronic Material, 34(4), pp. 439-443 (2005)　Vol. 34　No. 4　p. 439-443　2005/04　Research paper (scientific journal)

Hard X-ray Diffraction-Limited Nanofocusing with Kirkpatrick-Baez Mirrors

H. Mimura, S. Matsuyama, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, M. Shibahara, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Japanese Journal of Applied Physics Part 2　Vol. 44　No. 16-19　p. L539-L542　2005/04　Research paper (scientific journal)

Smoothing 4H-SiC(0001)surface by EEM(Elastic Emission Machining)

A. Kubota, H. Mimura, Y. Sano, K. Yamamura, K. Yamauchi, Y. Mori

Journal of the Japanese Society of Precision Engineering　Vol. 71　No. 4　p. 477-480　2005/04　Research paper (scientific journal)

Development of surface figuring and smoothing technologies for ultraprecise X-ray mirror Fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

2005/02

Fabrication of ultraprecisely figured mirror for nano focusing hard-x-ray

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Souichiro Handa, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Towards Synthesis of Micro-/Nano-systems　No. 5　p. 295-+　2005/02　Research paper (international conference proceedings)

Development of elliptical kirkpatrick-baez mirrors for hard X-ray nanofocusing

K. Yamauchi, H. Mimura, K. Yamamura, Y. Sano, H. Yumoto, S. Matsuyama, K. Endo, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, Y. Mori

Optics InfoBase Conference Papers　2005　Research paper (international conference proceedings)

Focusing hard X-rays to sub-50 nm size by elliptically figured: Mirror

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Optics InfoBase Conference Papers　2005　Research paper (international conference proceedings)

Stitching interferometry for surface figure measurement of X-ray reflective optics

Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Optics InfoBase Conference Papers　2005　Research paper (international conference proceedings)

First-Principles Molecular-Dynamics Simulations of Dissociation Process of Water Molecule by Catalytic Reaction of Ion-Exchange Group

K. Yagi, Y. Ichii, T. Ono, H. Goto, K. Inagaki, K. Yamauchi, K. Endo, Y. Mori, K. Hirose

The 7th Asian Workshop on First-Principles Electronic Structure Calculations, Program & Abstracts, 140-140　2004/11　Research paper (other academic)

First-Principles Molecular-Dynamics Simulations of Electrochemical Etching Process on Al(001) Cathode Surface

Y. Ichii, K. Yagi, T. Ono, H. Goto, K. Inagaki, K. Yamauchi, K. Endo, Y. Mori, K. Hirose

The 7th Asian Workshop on First-Principles Electronic Structure Calculations, Program & Abstracts, 84-84　2004/11　Research paper (other academic)

Development of hard X-ray nanofocusing system using ultraprecisely figured mirrors at SPring-8

H. Mimura, K. Yamauchi

2004/10

Surface Figure Metrology of x-ray mirrors using optical interferometry

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, S. Matsuyama, H. Yumoto, K. Ueno, K. Endo, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, Y. Mori

2004/09

Wave-optical and ray-tracing analysis to establish a two dimensional focusing unit using K-B arrangement

S. Matsuyama, H. Mimura, K. Yamamura, H. Yumoto, Y. Sano, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, K. Yamauchi

Proceedings of SPIE　Vol. 5533　p. 181-191　2004/08　Research paper (international conference proceedings)

Fabrication technology of ultraprecise mirror optics to realize hard X-ray nanobeam, SPIE International Symposium, Optical Science and Technology

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, S. Matsuyama, H. Yumoto, K. Ueno, M. Shibahara, K. Endo, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, Y. Mori

Proceedings of SPIE　Vol. 5533　p. 116-123　2004/08　Research paper (international conference proceedings)

Microstitching Interferometry for hard X-ray nanofocusing mirrors

H. Mimura, H. Yumoto, K. Yamamura, Y. Sano, S. Matsuyama, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, K. Yamauchi

Proceedings of SPIE　Vol. 5533　p. 171-180　2004/08　Research paper (international conference proceedings)

Creation of perfect surfaces

Yuzo Mori, Kazuya Yamamura, Katsuyoshi Endo, Kazuto Yamauchi, Kiyoshi Yasutake, Hidekazu Goto, Hiroaki Kakiuchi, Yasuhisa Sano, Hidekazu Mimura

Abstracts the 14th international conference on crystal growth, pp.211　Vol. 275　No. 1-2　p. 39-50　2004/08　Research paper (scientific journal)

Image quality improvement in hard X-ray projection microscope using total reflection mirror optics

H. Mimura, K. Yamauchi, K. Yamamura, A. Kubota, S. Matsuyama, Y. Sano, K. Ueno, K. Endo, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, Y. Mori

Journal of Synchrotoron Radiation, 11, pp. 343-346.　2004/07　Research paper (scientific journal)

Surface figure metrology of total reflection X-ray mirror using optical interferometry at Osaka Univ. and SPring-8

K. Yamauchi, H. Mimura, K. Yamamura, Y.Sano, K. Ueno, S. Matsuyama, K. Endo, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa

Proceedings of Second International Workshop on Metrology for X-ray Optics　2004/04

Flattening of Si (001) Surface by EEM (Elastic Emission Machining):—Atomic Structure Identification of Processed Surface—

YAMAUCHI Kazuto, MIMURA Hidekazu, KUBOTA Akihisa, ARIMA Kenta, INAGAKI Kouji, ENDO Katsuyoshi, MORI Yuzo

Journal of the Japan Society for Precision Engineering, Contributed Papers　Vol. 70　No. 4　p. 547-551　2004/04　Research paper (scientific journal)

EEM（Elastic Emission Machining)によるSi（001）表面の平坦化（第１報）-超清浄EEM加工システムの開発ー

森勇藏, 山内和人, 三村秀和, 稲垣耕司, 久保田章亀, 遠藤勝義

精密工学会誌論文集,70, 391-396, (2004).　2004/03　Research paper (scientific journal)

Fabrication technology for hard X-ray reflective optics

Y. Mori, K.Yamauchi, K. Yamamura, H. Mimura, Y.Sano, S. Matsuyama, K. Endo, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa

Proceedings of Second International Workshop on Metrology for X-ray Optics　2004/03　Research paper (other academic)

超高精度硬Ｘ線集光ミラーの製作とナノスペクトロスコピーへの応用

山村和也, 山内和人, 佐野泰久, 三村秀和, 遠藤勝義, 森 勇藏

大阪大学低温センターだより，125, 4-10　Vol. 125　p. 4-10　2004/01　Research paper (bulletin of university, research institution)

Ultra-precision machining technology of realizing atomically smooth surface

Yuzo Mori, Kazuya Yamamura, Kazuto Yamauchi, Yasuhisa Sano, Hidekazu Mimura

O plus E, Vol. 26, No.1, pp.36-42　Vol. 26　No. 1　p. 36-42　2004/01

Ultra-precision machining technology of realizing atomically smooth surface

Yuzo Mori, Kazuya Yamamura, Kazuto Yamauchi, Yasuhisa Sano, Hidekazu Mimura

O plus E, Vol. 26, No.1, pp.36-42　2004/01

Two-dimensional Submicron Focusing of Hard X-rays by Two Elliptical Mirrors Fabricated by Plasma Chemical Vaporization Machining and Elastic Emission Machining

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori

Jpn. J. Appl. Phys. Part1　Vol. 42　No. 11　p. 7129-7134　2003/11　Research paper (scientific journal)

Fabrication of elliptical mirror at nanometer-level accuracy for hard x-ray focusing by numerically controlled plasma chemical vaporization machining.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 74　No. 10　p. 4549-4553　2003/10　Research paper (scientific journal)

Fabrication technology of hard X-ray aspherical mirror optics and application to nanospectroscopy

Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K

Proc. SPIE 5193, pp.11-17　Vol. 5193　p. 11-17　2003/08　Research paper (international conference proceedings)

Development of a figure correction method having spatial resolution close to 0.1mm

Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa

Proc. SPIE 5193, pp.105-111　Vol. 5193　p. 105-111　2003/08　Research paper (international conference proceedings)

Wave-optical evaluation of reflected X-ray intensity and wavefront distribution in total reflection hard X-ray by mirror optics

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, A. Kubota, M. Kanaoka, A. Souvorov, K. Tamasaku, M. Yabashi, T. Ishikawa, Y. Yuzo

Journal of the Japanese Society of Precision Engineering　Vol. 69　No. 7　p. 997-1001　2003/07　Research paper (scientific journal)

Wave-optical evaluation of reflected X-ray intensity and wavefront distribution in total reflection hard X-ray mirror optics

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Akihisa Kubota, Masahiko Kanaoka, Alexei Souvorov, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Yuzo Mori

Journal of the Japan Society of Precision Engineering　Vol. 69　No. 7　p. 997-1001　2003/07　Research paper (scientific journal)

Development of the Measurement System with Interferometers for Ultraprecise X-ray Mirror

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, A. Kubota, M. Kanaoka, A. Souvorov, K. Tamasaku, M. Yabashi, T. Ishikawa, Y. Yuzo

Journal of the Japan Society for Precision Engineering　Vol. 69　No. 6　p. 856-860　2003/06　Research paper (scientific journal)

Development of the Measurement System with Interferometers for Ultraprecise X-ray mirror

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akihisa Kubota, Yasuhiro Sekito, Kazumasa Ueno, Alexei Souvorov, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Yuzo Mori

Journal of the Japan Society of Precision Engineering　Vol. 69　No. 6　p. 856-860　2003/06　Research paper (scientific journal)

Microstitching interferometry for x-ray reflective optics

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 74　No. 5　p. 2894-2898　2003/05　Research paper (scientific journal)

Ultraprecision Machining based on Physics and Chemistry

Yuzo Mori, Kikuji Hirose, Kazuto Yamauchi, Hidekazu Goto, Kazuya Yamamura, Yasuhisa Sano

Sensors and Materials, Vol. 15, No. 1 (2003), pp.1-19.　Vol. 15　No. 1　p. 1-19　2003/01　Research paper (scientific journal)

Ultraprecision Machining based on Physics and Chemistry

Yuzo Mori, Kikuji Hirose, Kazuto Yamauchi, Hidekazu Goto, Kazuya Yamamura, Yasuhisa Sano

Sensors and Materials Sensors and Materials　Vol. 15　No. 1　p. 001-019　2003/01　Research paper (scientific journal)

Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining

Kazuto Yamauchi, Hidekazu Mimura, Kouji Inagaki, Yuzo Mori

Rev. Sci. Instr.　Vol. 73　No. 11　p. 4028-4033　2002/11　Research paper (scientific journal)

Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining

K Yamauchi, H Mimura, K Inagaki, Y Mori

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 73　No. 11　p. 4028-4033　2002/11　Research paper (scientific journal)

Fabrication of Elliptical Mirror for Synchrotron Radiation Hard X-ray by Plasma Chemical Vaporization Machining and Elastic Emission Machining and Evaluation of the focusing Performances

MORI Yuzo, YAMAUCHI Kazuto, YAMAMURA Kazuya, MIMURA Hidekazu, SANO Yasuhisa, SAITO Akira, SOUVOROV Alexei, TAMASAKU Kenji, YABASHI Makina, ISHIKAWA Tetsuya

Journal of the Japanese Society of Precision Engineering　Vol. 68　No. 10　p. 1347-1350　2002/10　Research paper (scientific journal)

Fabrication of the Elliptical Mirror for Synchrotron hard X-ray by Plasma Chemical Vaporization Machining and Elastic Emission Machining and the Evaluation of the Focusing Performances

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Alexei Souvorov, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa

Jouranal of the Japan Society for Precision Engineering, Vol.68, p.1347-1350　Vol. 68　No. 10　p. 1347-1350　2002/10　Research paper (scientific journal)

Measurement of Nanodefects on Si Wafer Surface Using System for Measuring Particle Diameter by Light-Scattering Method

Satoshi SASAKI, Hiroshi AN, Yuzo MORI, Toshihiko KATAOKA, Katsuyoshi ENDO, Kazuto YAMAUCHI, Haruyuki INOUE

Journal of the Japan Society of Precision Engineering　Vol. 68　No. 9　p. 1200-1205　2002/09　Research paper (scientific journal)

コヒーレント照射でのＸ線全反射ミラー

石川哲也, 矢橋牧名, 玉作賢治, スボロフ アレクセイ, 山内和人, 山村和也, 三村秀和, 齋藤 彰, 森 勇藏

放射光, Vol.15, p.296-302　2002/09

Nearly diffraction-limited line focusing of a hard-X-ray beam with an elliptically figured mirror

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori

JOURNAL OF SYNCHROTRON RADIATION　Vol. 9　p. 313-316　2002/09　Research paper (scientific journal)

Deterministic retrieval of surface waviness by means of topography with coherent X-rays

A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori, K. Yamauchi, K. Yamamura, A. Saito

Journal of Synchrotron Radiation　Vol. 9　No. 4　p. 223-228　2002/09　Research paper (scientific journal)

Sub-micron focusing of hard X-ray by reflective optics for scanning x-ray microscopy

Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa

2002/07　Research paper (international conference proceedings)

Wave-optical analysis of sub-micron focusing of hard X-ray by reflective optics

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, M. Kanaoka, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori

X-RAY MIRRORS, CRYSTALS, AND MULTILAYERS II　Vol. 4782　p. 271-276　2002/07　Research paper (international conference proceedings)

Aspheric surface fabrication in nm-level accuracy by numerically controlled plasma CVM and EEM

K. Yamamura, H. Mimura, K. Yamauchi, Y. Sano, A. Saito, T. Kinoshita, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori

2002/07　Research paper (other academic)

Sub-micron focusing by reflective optics for scanning x-ray microscopy

Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa

Proc. SPIE　Vol. 4782　p. 58-64　2002/07　Research paper (international conference proceedings)

Ultra-Precision Machining based on Physics and Chemistry

Y. Mori, K. Hirose, K. Yamauchi, H. Goto, K. Yamamura, Y. Sano

2002/06　Research paper (other academic)

Atomistic Analysis and Electronical Interpretation of Surface Atom Removal Process in Elastic Emission Machining

Kazuto YAMAUCHI, Kouji INAGAKI, Hidekazu MIMURA, Kazuhisa SUGIYAMA, Kikuji HIROSE, Yuzo MORI

Journal of the Japan Society of Precision Engineering　Vol. 68　No. 3　p. 456-460　2002/03　Research paper (scientific journal)

Aspheric surface fabrication in nm-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM)

K Yamamura, H Mimura, K Yamauchi, Y Sano, A Saito, T Kinoshita, K Endo, Y Mori, A Souvorov, M Yabashi, K Tamasaku, D Ishikawa

X-RAY MIRRORS, CRYSTALS, AND MULTILAYERS II　Vol. 4782　p. 265-270　2002　Research paper (international conference proceedings)

Sub-micron focusing of hard X-ray beam by elliptically figured mirrors for scanning X-ray microscopy

Y Mori, K Yamauchi, K Yamamura, H Mimura, Y Sano, A Saito, K Ueno, K Endo, A Souvorov, M Yabashi, K Tamasaku, T Ishikawa

X-RAY MIRRORS, CRYSTALS, AND MULTILAYERS II　Vol. 4782　p. 58-64　2002　Research paper (international conference proceedings)

Sub-micron focusing of hard X-ray beam by elliptically figured mirrors for scanning X-ray microscopy

Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa

Proceedings of SPIE - The International Society for Optical Engineering　Vol. 4782　p. 58-64　2002　Research paper (international conference proceedings)

Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method

Satoshi SASAKI, Hiroshi AN, Yuzo MORI, Toshihiko KATAOKA, Katuyoshi Endo, Kazuto YAMAUCHI, Haruyuki INOUE

Journal of the Japan Society of Precision Engineering　Vol. 67　No. 11　p. 1818-1823　2001/11　Research paper (scientific journal)

First-principles evaluation of machinability dependence on powder materials in elastic emission machining

K. Inagaki, K. Yamauchi, K. Hirose, Y. Mori

Mterial Trans.　Vol. 42　No. 11　p. 2290-2294　2001/08　Research paper (scientific journal)

Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics

Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, A. Saito, H. Kishimoto, Y. Sekito, M. Kanaoka, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa

X-RAY MIRRORS, CRYSTALS AND MULTILAYERS　Vol. 4501　p. 30-42　2001/07　Research paper (international conference proceedings)

Cutting of Functional Material by Plasma CVM : Development of the Cutting Machine with Inner Blade Electrode and Its Cutting Characteristics

Yuzo MORI, Kazuto YAMAUCHI, Kazuya YAMAMURA, Yasuhisa SANO

Journal of the Japanese Society of Precision Engineering　Vol. 67　No. 2　p. 295-299　2001/02　Research paper (scientific journal)

Cutting og Functional Material by Plasma CVM ---Development of the Cutting Machine with Inner Blade Electrode and Its Cutting Characteristics---

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano

Journal of the Japan Society of Precision Engineering　Vol. 67　No. 2　p. 295-299　2001/02　Research paper (scientific journal)

Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics

Y Mori, K Yamauchi, K Yamamura, H Mimura, A Saito, H Kishimoto, Y Sekito, M Kanaoka

X-RAY MIRRORS, CRYSTALS AND MULTILAYERS　Vol. 4501　p. 30-42　2001　Research paper (international conference proceedings)

Development of Plasma Chemical Vaporization Machining

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 71　No. 12　p. 4627-4632　2000/12　Research paper (scientific journal)

Evaluation of Particles on a Si Wafer before and after Cleaning Using a New Laser Particle Counter

Satoshi Sasaki, Hiroshi An, Yuzo Mori, Toshihiko Kataoka, Kaituyoshi Endo, Kazuto Yamauchi, Haruyuki Inoue, Shigenori Mizuhara

ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS　p. 317-320　2000/09　Research paper (international conference proceedings)

Development of Plasma CVM(Chemical Vaporization Machining)

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano

Vol. 66　No. 8　p. 1280-1285　2000/08　Research paper (scientific journal)

Analysis of ultra-precision machining at atomic level by simulation using super-computer

Kouji Inagaki, Kazuto Yamauchi, Kazuhisa Sugiyama, Kikuji Hirose

2000/07

Development of SPV (Surface Photo-voltage) Spectroscopy to Observe Finely-prepared Surfaces by Ultraprecision Machining Processes

Kazuto YAMAUCHI, Kazuhisa SUGIYAMA, Kouji INAGAKI, Kazuya YAMAMURA, Yasuhisa SANO, Yuzo MORI

Journal of the Japan Society for Precision Engineering　Vol. 66　No. 4　p. 630-634　2000/04　Research paper (scientific journal)

Development of SPV(Surface Photo-voltage) Spectroscopy to Observe Finely-prepared Surface by Ultraprecision Machining Process

Kazuto Yamauchi, Kazuhisa Sugiyama, Kouji Inagaki, Kazuya Yamamura, Yasuhisa Sano, Yuzo Mori

Journal of the Japan Society of Precision Engineering　Vol. 66　No. 4　p. 630-634　2000/04　Research paper (scientific journal)

First-Principles Molecular-Dynamics Simulations of Atomic Removal Process and Binding Energy Analysis in EEM(Elastic Emission Machining)

Kazuto Yamauchi, Kouji Inagaki, Mitsuhiro Sugimoto, Kouji Yamamoto, Kazuhisa Sugiyama, Kikuji Hirose, Yuzo Mori

Technology Reports of the Osaka University, Vol.~50, pp.~27-32　2000/04　Research paper (bulletin of university, research institution)

Designing a New Apparatus for Measuring Particle Sizer of Nanometer Order by Light-Scattering (5th Report) --- Evaluation of the Surface by Measuring Particles on a Si Wafer before and after Cleaning ---

Hiroshi An, Osaka Electro-Communication Univ, Satoshi Sasaki, Osaka Electro-Communication Univ, Yuzo Mori, Toshiyuki Kataoka, Katsuyoshi Endo, Haruyuki Inoue, Kazuto Yamauchi, Hiroyuki Taniguchi

Journal of the Japan Society of Precision Engineering　Vol. 65　No. 10　p. 1435-1439　1999/10　Research paper (scientific journal)

Development of Numerically Controlled EEM (Elastic Emission Machining) System for Ultraprecision Figuring and Smoothing of Aspherical Surfaces

Yuzo Mori, Kazuto Yamauchi, Kazuhisa Sugiyama, Kouji Inagaki, Shoichi Shimada, Junichi Uchikoshi, Hidekazu Mimura, Toshiyuki Imai, Kazuhide Kanemura

Precision Science and Technology for Perfect Surfaces, pp.~207-212　Vol. 207　1999/09　Research paper (scientific journal)

Evaluation of Si Wafer Surface Using a New apparatus for Measuring Particle of the Order of Nanometer

Hiroshi An, Satoshi Sasaki, Yuzo Mori, Toshihiko Kataoka, Katsuyoshi Endo, Haruyuki Inoue, Kazuto Yamauchi

Precision Science and Technology for Perfect Surfaces/JSPE Publication Series No.3,372-377　1999/09　Research paper (scientific journal)

First-Principles Molecular-Dynamics Calculation for Evaluating Energy and Force between Powder and Work Surfaces in EEM(Elastic Emission Machining) Process

Kouji Inagaki, Kazuto Yamauchi, Kouji Yamamoto, Mitsuhiro Sugimoto, Hiromichi Toyota, Ehime Uni, Kazuhisa Sugiyama, Kikuji Hirose, Yuzo Mori

Precision Science and Technology for Perfect Surface, pp.~929-934　1999/08　Research paper (scientific journal)

A Simulation of Removal Process in EEM(Elastic Emission Machining) by ab initio Molecular Orbital Method

Ryutaro Hosoi, Kikuji Hirose, Kazuto Yamauchi, Kazuhisa Sugiyama, Kouji Inagaki, Kouji Yamamoto, Yuzo Mori

Transactions of the Materials Research Society of Japan, Vol.~24, No.~2, pp.~229-232　1999/06　Research paper (scientific journal)

First-Principles Simulation of Removal Process in EEM(Elastic Emission Machining)

Kazuto Yamauchi, Kikuji Hirose, Hidekazu Goto, Kazuhisa Sugiyama, Kouji Inagaki, Kazuya Yamamura, Yasuhisa Sano, Yuzo Mori

1999/04　Research paper (scientific journal)

A Simulation of Removal Process in EEM(Elastic Emission Machining) by Ab Initio Molecular Orbital Method

Ryutaro Hosoi, Kikuji Hirose, Kazuto Yamauchi, Kazuhisa Sugiyama, Koji Inagaki, Koji Yamamoto, Yuzo Mori

1998/12　Research paper (other academic)

Development of New Ultra Precision Machining Methods --- Plasma CVM and EEM ---

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano

First International School on Crystal Growth Technology, pp. 218-228　1998/09　Research paper (other academic)

A Study on EEM (Elastic Emission Machining) - Influences of Dissolved Oxygen to Si Wafer Surface -

Kazuto Yamauchi, Toshihiko Kataoka, Katsuyoshi Endo, Kouji Inagaki, Kazuhisa Sugiyama, Syuji Makino, Yuzo Mori

Journal of the Japan Society of Precision Engineering　Vol. 64　No. 6　p. 907-912　1998/06　Research paper (scientific journal)

First-principles Analysis of Chemical Reactions between Metal Oxide Fine Powders and Si(100) Surface in EEM(Elastic Emission Machining)

Kazuto Yamauchi, Kikuji Hirose, Hidekazu Goto, Masao Sakamoto, Kazuya Yamamura, Yasuhisa Sano, Yuzo Mori

1996/12　Research paper (other academic)

First-principles Analysis of Removal Mechanism in EEM(Elastic Emission Machining)

Kazuto Yamauchi, Kikuji Hirose, Hidekazu Goto, Kazuya Yamamura, Yasuhisa Sano, Yuzo Mori

Proceedings of 1996 the Japan-China Bilateral Symposium on Advanced Manufacturing Engineering, pp.60-64　1996/09　Research paper (other academic)

Polishing of Si Wafer by Plasma CVM(Chemical Vaporization Machining)

Yuzo Mori, Kazuya Yamamura, Kazuto Yamauchi, Yasuhisa Sano

1996/09　Research paper (other academic)

Slicing of Silicon by Plasma CVM(Chemical Vaporization Machining)

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano

1996/09　Research paper (other academic)

Designing a New Apparatus for Measuring Particle Sizes of Nanometer Order by Light-scattering (4th Report) : Formation for Output Characteristics of Photomultiplier and Improvement of Dynamic Range

Hiroshi AN, Yuzo MORI, Toshihiko KATAOKA, Katsuyoshi ENDO, Kazuto YAMAUCHl, Kohji INAGAKI, Kazuya YAMAMURA, Haruyuki INOUE, Yasuhisa SANO

Journal of the Japanese Society of Precision Engineering　Vol. 62　No. 8　p. 1198-1202　1996/08　Research paper (scientific journal)

Designing a New Apparatus for Measuring Particle Sizes of Nanometer Order by Light-scattering (4th Report) -- Formation for Output Characteristics of Photomultiplier and Improvement of Dynamic Range --

Hiroshi An, Yuzo Mori, Toshihiko Kataoka, Katsuyoshi Endo, Kazuto Yamauchi, Kohji Inagaki, Kazuya Yamamura, Haruyuki Inoue, Yasuhisa Sano

Journal of the Japan Society of Precision Engineering　Vol. 62　No. 8　p. 1198-1202　1996/08　Research paper (scientific journal)

Frontier Technology at The Atomic and Electric Levels -The Aim of The Technical Committee on Ultra Precision Machining-

Yuzo Mori, Kiyoshi Yasutake, Katsuyoshi Endo, Kazuto Yamauchi

1996/06

A New Apparatus for Measuring Particle Sizes of the Order of Nanometer (2nd Report) -Evaluation of Measuring System by using Standard Partides-

Hiroshi AN, Yuzo MORI, Tosihiko KATAOKA, Katsuyoshi ENDO, Kohji INAGAKI, Kazuya YAMAMURA, Kazuto YAMAUCHI, Takashige FUKUIKE

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　Vol. 28　No. 4　p. 356-361　1994/12　Research paper (scientific journal)

Development of Measuring Systemn for Ultra-precision Machined Surface by Photo-reflectance Spectra

Y.Mori, T.Kataoka, K.Endo, K.Yamauchi, K.Inagaki, K.Yamamura, K.Hirose

Journal of the Japan Society of Precision Engineering　Vol. 60　No. 9　p. 1360-1364　1994/09　Research paper (scientific journal)

水分子と相互作用するシリコン単結晶(001)水素終端化表面の第一原理分子動力学シミュレーション

広瀬喜久治, 後藤英和, 土屋八郎, 森 勇藏, 遠藤勝義, 山内和人

精密工学会誌，第60巻，第8号 (1994) pp.1139-1143.　Vol. 60　No. 8　p. 1139-1143　1994/08　Research paper (scientific journal)

材料表面現象の第一原理分子動力学シミュレーション －シリコン単結晶(001)表面の水素終端化反応－

広瀬喜久治, 後藤英和, 土屋八郎, 森 勇藏, 遠藤勝義, 山内和人

精密工学会誌，第60巻，第3号 (1994) pp.402-406.　Vol. 60　No. 3　p. 402-406　1994/03　Research paper (scientific journal)

Plasma CVM (chemical vaporization machining): an ultra precision machining technique using high-pressure reactive plasma

Y.Mori, K.Yamamura, K.Yamauchi, K.Yoshii, T.Kataoka, K.Endo, K.Inagaki, H.Kakiuchi

Nanotechnology　Vol. 4　No. 4　p. 225-229　1993/10　Research paper (scientific journal)

Plasma CVM (Chemical Vaporization Machining) - An Ultra Precision Machining with High Pressure Reactive Plasma-

Y.Mori, K.Yamamura, K.Yamauchi, K.Yoshii, T.Kataoka, K.Endo, K.Inagaki, H.Kakiuchi

1993/10　Research paper (bulletin of university, research institution)

Designing a New Apparatus for Measuring Particle Sizes of Nanometer Order by light-scattering (3rd Report) -Evaluation of Measuring System by using Standard Particles-

Y.Mori,H.An, T.Kataoka, K.Endo, K.Inagaki, K.Yamauchi, K.Yamamura, T.Fukuike

Journal of the Japan Society of Precision Engineering　Vol. 59　No. 7　p. 1121-1126　1993/07　Research paper (scientific journal)

Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure

H.Kawabe, Y.Mori, K.Yoshii, T.Kataoka, K.Yasutake, K.Endo, K.Yamauchi, K.Yamamura, H.Kakiuchi

1993/05　Research paper (other academic)

Plasma CVM (chemical vaporization machining) -- A Chemical Machining Method With Equal Performances to Conventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutions

Y.Mori, K.Yamamura, K.Yamauchi, K.Yoshii, T.Kataoka, K.Endo, K.Inagaki, H.Kakiuchi

1993/05　Research paper (other academic)

Plasma CVM (chemical vaporization machining) -- A Chemical Machining Method With Equal Performances to Conventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutins

Y.Mori, K.Yamamura, K.Yamauchi, K.Yoshii, T.Kataoka, K.Endo, K.Inagaki, H.Kakiuchi

1993/05

Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure

H.Kawabe, Y.Mori, K.Yoshii, T.Kataoka, K.Yasutake, K.Endo, K.Yamauchi, K.Yamamura, H.Kakiuchi

1993/05

Microtribology in High Precision Machining

MORI Yuzou, YAMAUCHI Kazuto

JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS　Vol. 37　No. 11　p. 913-917　1992/11　Research paper (scientific journal)

Ultra-Smooth Surface Machining by Means of Atomistic Processes‐EEM(Elastic Emission Machining) and CVM(Chemical Vaporization Machining)

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Toshihiko Kataoka, Katsuyoshi Endo

1991/10　Research paper (other academic)

New apparatus for measuring particle sizes of the order of nanometer

Yuzo Mori, Hiroshi An, Katsuyoshi Endo, Kazuto Yamauchi, Takashi Ide

Bulletin of the Japan Society of Precision Engineering　Vol. 25　No. 3　p. 214-219　1991/09　Research paper (scientific journal)

Atomic Force between Diamond and Metal Surfaces

MORI Yuzo, ENDO Katsuyoshi, YAMAUCHI Kazuto, WANG Hui, IDE Takashi, GOTO Hidekazu

Journal of the Japan Society of Precision Engineering　Vol. 57　No. 5　p. 881-886　1991/05　Research paper (scientific journal)

Development of a High Current Ion Modification System Suitable for Ultra-high Vacuum

MORI Yuzo, WANG Hui, ENDO Katsuyoshi, YAMAUCHI Kazuto, IDE Takashi, GOTO Hidekazu

Journal of the Japan Society of Precision Engineering　Vol. 57　No. 4　p. 674-680　1991/04　Research paper (scientific journal)

A New Apparatus for Measuring Particle Sized of Order of Nanometer

YAMAUCHI Kazuto

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　Vol. 25　No. 3　p. 214-219　1991　Research paper (scientific journal)

Atomistic Consideration of Frictional Force (2nd Report)-Measurments of Frictional Force in an Elastic Contact Condition-

YAMAUCHI Kazuto

Vol. 57　p. 1017-1017　1991　Research paper (scientific journal)

Studies on Powder Particle Beam Machining by Electrostatic Acceleration (5th Report)-Adnesive Impact-Deposition of Tungsten Microparticle-

YAMAUCHI Kazuto

Vol. 57　No. 6　p. 999-999　1991　Research paper (scientific journal)

A Film Formation Method Using Hypervelocity Microparticle Impact by Electrostatic Acceleration (2nd Report)-Preparation of Diamond-like Carbon Film-

YAMAUCHI Kazuto

Vol. 57　p. 887-887　1991　Research paper (scientific journal)

Interaction Force between Solid Surfaces (2nd Report)-Interaction Force and Contact Area between Clean Metal Surfaces in Ultra High Vacaum-

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 57　No. 2　p. 310-317　1991　Research paper (scientific journal)

Extreme Precision Machining Technigues

YAMAUCHI Kazuto

1991　Research paper (scientific journal)

加工と量子力学

森 勇藏, 山内和人, 後藤英和, 遠藤勝義

日本機械学会誌，第93巻，第862号 (1990) pp.773-778.　Vol. 93　No. 862　p. 773-778　1990/01

Ultra High Vacuum Compatible Metal Ion Beam Surface Modification System

YAMAUCHI Kazuto

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 61　No. 11　p. 3412-3415　1990　Research paper (scientific journal)

Substrate Surface Modification by Ion Irradiation. I : Formation of A Sn Ultra-Thin Films on the SiO┣D22┫D2 Substrate Modificated by Sn┣D1+┫D1 Irradiation

YAMAUCHI Kazuto

1990　Research paper (bulletin of university, research institution)

Designing a New Apparatus for Measuring Particle Sizes of the Order of Nanometer by Light-Scattering (2nd Report)

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 56　No. 10　p. 1847-1852　1990　Research paper (scientific journal)

Observation of Elastic Emission Machined Surfaces by Scanning Tunneling Microscopy

YAMAUCHI Kazuto

1990　Research paper (bulletin of university, research institution)

Design of a Large Current Liquid Metal Ion Source

YAMAUCHI Kazuto

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 61　No. 7　p. 1874-1879　1990　Research paper (bulletin of university, research institution)

加工と量子論

山内和人

93　1990　Research paper (scientific journal)

Sub-Band-Gap Surface Photovoltage in Finely-Polished Si

YAMAUCHI Kazuto

1990　Research paper (bulletin of university, research institution)

A Design of Large Current Ion Gun Empolying Liquid Metal Ion Source

YAMAUCHI Kazuto

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 61　No. 7　p. 1874-1879　1990　Research paper (scientific journal)

Evaluation of Elastic Emission Machined Surfaces by Scanning Tunneling Microscopy

YAMAUCHI Kazuto

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS　Vol. 8　No. 1　p. 621-624　1990　Research paper (scientific journal)

NEW MACHINING METHOD FOR MAKING PRECISE AND VERY SMOOTH MIRROR SURFACES MADE FROM CU AND AL-ALLOYS FOR SYNCHROTRON RADIATION OPTICS

Y HIGASHI, T MEIKE, J SUZUKI, Y MORI, K YAMAUCHI, K ENDO, H NAMBA

REVIEW OF SCIENTIFIC INSTRUMENTS　Vol. 60　No. 7　p. 2120-2123　1989/07　Research paper (scientific journal)

Elastic Emission Machining

Yuzo Mori, Kazuto Yamauchi, Katsuyoshi Endo

Journal of the Japan Society for Precision Engineering　Vol. 55　No. 3　p. 480-484　1989　Research paper (scientific journal)

Thermo-chemical Etching of Si_3N_4

TSUCHIYA Hachiro, GOTO Hidekazu, MORI Yuzo, ENDO Katsuyoshi, YAMAUCHI Kazuto, MIYAZAKI Makoto, NISHI Masafumi

Journal of the Japan Society of Precision Engineering　Vol. 54　No. 1　p. 96-100　1988/01　Research paper (scientific journal)

Designing a New Apparatus for Measuring Particle Sizes of the Order of Nanometer by Light-Scattering

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 54　No. 11　p. 2132-2137　1988　Research paper (bulletin of university, research institution)

Sintering Mechanism II-Influence Atmospheric Gas on Neck Growth-

YAMAUCHI Kazuto

1988　Research paper (bulletin of university, research institution)

Sintering Mechanism I-A New Sintering Equation.

YAMAUCHI Kazuto

1988　Research paper (bulletin of university, research institution)

Thermo-chemical Etching of Si┣D23┫D2N┣D24┫D2

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 54　No. 1　p. 96-100　1988　Research paper (scientific journal)

Mechanism of Atomic Removal in Elastic Emission Machining

YAMAUCHI Kazuto

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　Vol. 10　No. 1　p. 24-28　1988　Research paper (scientific journal)

Co_2 Laser-induced Surface Oxidation and Etching of Si and Si_3N_4

TSUCHIYA Hachiro, GOTO Hidekazu, MORI Yuzo, HIROSE Kikuji, ENDO Katsuyoshi, YAMAUCHI Kazuto, MIYAZAKI Makoto, NISHI Masafumi

Journal of the Japan Society of Precision Engineering　Vol. 53　No. 11　p. 1765-1771　1987/11　Research paper (scientific journal)

CO┣D22┫D2 Laser-induced Surface Oxidation and Etching of Si and Si┣D23┫D2N┣D24┫D2

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 53　No. 11　p. 1765-1771　1987　Research paper (scientific journal)

Elastic Emission Machining

YAMAUCHI Kazuto

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　Vol. 9　No. 3　p. 123-128　1987　Research paper (scientific journal)

Sintering Mechanism II-Influence of Atmospheric Gas on Neck Growth-

YAMAUCHI Kazuto

Journal of the Japan Society of Powder and Powder Metallurgy　Vol. 33　No. 6　p. 296-301　1986　Research paper (scientific journal)

Sintering Mechanism I-A New Sintering Equation-

YAMAUCHI Kazuto

Journal of the Japan Society of Powder and Powder Metallurgy　Vol. 33　No. 6　p. 291-295　1986　Research paper (scientific journal)

Atomic Order Maching

YAMAUCHI Kazuto

1985　Research paper (scientific journal)

Elastic Emission Machining (2nd Report)-Stress Field and Feasibility of Introduction and Activation of Lattice Defect-

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 51　No. 6　p. 1187-1194　1985　Research paper (scientific journal)

Numerically Controlled Elastic Emission Machining-Consideration of Machining Property by Motion Analysis of Powder Particle in Fluid-

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 51　No. 5　p. 1033-1039　1985　Research paper (scientific journal)

A High-Accuracy Method for Merasuring Surface Profile

YAMAUCHI Kazuto

1985　Research paper (bulletin of university, research institution)

Development of High-Accuracy Profile Measuring System for Focusing Mirror of SOR (Synchrotron Drbital Radiation)

YAMAUCHI Kazuto

Bull. JSPE　Vol. 19　No. 2　p. 108-108　1985

Numerically Controlled Elastic Emission Machining -Motion Analysis of Fluid and Distribution of Film Thickness-

YAMAUCHI Kazuto

Journal of the Japan Society of Precision Engineering　Vol. 49　No. 11　p. 1540-1548　1983　Research paper (scientific journal)